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Martine LE BERRE

22
Documents
Identifiants chercheurs

Présentation

**Research summary** Development of electronic nanocomponents Functional oxide integration Micro and nanotechnologies High frequency passive components **Keywords** Micro Nano Electronics, Micro Nano Fabrication, MEMS, RF components, Thin films for microelectronics (BaM, YIG, PZT, PEO), Thin film characterization **Teaching summary** Martine LE BERRE teaches (1) in the field of Microtechnologies and Microelectronics, at the Master level: \- Lecture on the Technologies for Microelectronics, Elec. Eng. Dpt. \- Lecture on MEMS, Materials Sci. Eng. Dpt. \- Practical in Clean Room "Technologies for Microelectronics", Elec. Eng. Dpt. (2) at the Bachelor level, in 2nd Year, courses on Electromagnetism and Waves in English **Biography** She graduated from Institut National des Sciences Appliquées (INSA) Rennes and studied one year as an exchange student in Germany. In 1994, she received a PhD from INSA Lyon for her work on the piezoresistivity of polycrystalline silicon. Since 1995 she has been working as an assistant professor at INL. She has been involved in the development of micromachined structures for Si-based MEMS (pressure sensors, micro-heat pipes arrays), their characterization as well as thin film characterization (PZT, SiC, BaM, YiG). After several studies on to the integration of ferrimagnetic oxides in microwave passive components, her latest projects contribute to the development of micro- and nanocomponents, e.g. components based on Local Anodic Oxidation by AFM or shadow-edge evaporation for nanogap fabrication. She achieved the habilitation in 2006. She is or has been implicated in several national or regional research programs. She has supervised or co-supervised 12 PhD theses, 18 internships (Master level) and participated to 20 PhD thesis boards. Through her research activities she has authored or co-authored 39 articles referenced in ISI Web of Knowledge and participated to 49 international conferences. Her H-factor rates 13. She also acts as referee for journals such as IEEE Trans. Magn., J. Micromech. Microeng., Sensors & Actuators A, J. Appl. Phys.

Publications

francis-calmon

A High-Efficiency Compact Planar Antenna for ISM Wireless Systems

Tao Zhou , Yazi Cao , Zhiqun Cheng , Martine Le Berre , Francis Calmon
International Journal of Antennas and Propagation, 2017, 2017, pp.1 - 5. ⟨10.1155/2017/7319275⟩
Article dans une revue hal-01888316v1

Investigation of the in-plane and out-of-plane electrical properties of metallic nanoparticles in dielectric matrix thin films elaborated by atomic layer deposition

Daniel Thomas , Etienne Puyoo , Martine Le Berre , Liviu Militaru , Siddardha Koneti
Nanotechnology, 2017, 28 (45), 455602 (8 p.). ⟨10.1088/1361-6528/aa8b5e⟩
Article dans une revue hal-01644827v1

Study and characterization of the irreversible transformation of electrically stressed planar Ti/TiOx /Ti junctions

N. Guillaume , E. Puyoo , M. Le Berre , D. Albertini , N. Baboux
Journal of Applied Physics, 2015, 118 (14), pp.144502. ⟨10.1063/1.4932646⟩
Article dans une revue hal-02048470v1

Miniaturized Tunable TeraHertz Antenna Based on Graphene

Tao Zhou , Z. Cheng , H. Zhang , M. Le Berre , Liviu Militaru
Microwave and Optical Technology Letters, 2015, 56 (8), pp. 1792-1794
Article dans une revue hal-01489440v1

An efficient and simple compact modeling approach for 3-D interconnects with IC׳s stack global electrical context consideration

Jean-Etienne Lorival , Francis Calmon , Fengyuan Sun , Felipe Frantz , Carole Plossu
Microelectronics Journal, 2015, 46 (2), pp.153-165. ⟨10.1016/j.mejo.2014.12.002⟩
Article dans une revue hal-02060679v1

Enhanced tunable nonreciprocal effect in CRLH coplanar transmission line on YIG without series capacitive loading

Tao Zhou , Martine Le Berre , Gwenaelle Vest , Calmon F. , Farid Boukchiche
Microwave and Optical Technology Letters, 2013, ⟨10.1002/mop.27979⟩
Article dans une revue hal-03327975v1

Coplanar waveguides with or without barium ferrite thin films

T. Zhou , M. Le Berre , Evangéline Bènevent , A.-S. Dehlinger , F. Calmon
Microwave and Optical Technology Letters, 2010, 52 (9), pp.2007-2010. ⟨10.1002/mop.25393⟩
Article dans une revue ujm-00733387v1

Pt nanoislands embedded in Al2O3 matrix: from ALD-based fabrication to structural to electrical characterization

Daniel Thomas , Etienne Puyoo , Martine Le Berre , Liviu Militaru , S. Koneti
EMRS Spring Meeting, Jan 2017, Strasbourg, France
Communication dans un congrès hal-01701466v1

PEALD Platinum Nano-island SET Fabrication and Electrical Characterization

Daniel Thomas , Etienne Puyoo , M. Le Berre , Liviu Militaru , S. Koneti
AVS 17th International Conference on Atomic Layer Deposition, Jan 2017, Denver, United States
Communication dans un congrès hal-01701467v1

On the irreversible transformation of Ti/TiOx/Ti junctions under electrical stress

Etienne Puyoo , Nicolas Guillaume , M. Le Berre , David Albertini , Nicolas Baboux
Energy Materials and Nanotechnology, 2016, Prague, Czech Republic
Communication dans un congrès hal-01489096v1

Shadow Edge Lithography coupled with ALD growth of Alumina and Platinum Nanoislands Towards the Fabrication of Single Electron Transistors

Daniel Thomas , Etienne Puyoo , M. Le Berre , Liviu Militaru , S. Koneti
EMRS Fall Meeting, 2016, Warsaw, Poland
Communication dans un congrès hal-01489069v1

Oxydation locale d’une couche de titane par AFM pour la réalisation de composants mono-électroniques : étude paramétrée de différents modes de types de pointes

Nicolas Guillaume , Etienne Puyoo , Martine Le Berre , David Albertini , Nicolas Baboux
17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, 2014, Lille, France
Communication dans un congrès hal-01489838v1

Nano fabrication of oxide patterns using Atomic Force Microscopy on titanium towards the development of Nano devices

Guillaume Nicolas , Etienne Puyoo , Martine Le Berre , David Albertini , Nicolas Baboux
ICQNM (Seventh International Conference on Quantum, Nano and Micro Technologies), Aug 2013, Barcelone, Spain
Communication dans un congrès hal-02074965v1

Modélisation RLCG de lignes coplanaires sur un substrat Silicium pour applications CMOS

O. Valorge , F. Calmon , M. Le Berre , C. Gontrand , E. Eid
15e Compatibilité Electromagnétique CEM 2010, Apr 2010, Limoges, France
Communication dans un congrès hal-00604508v1

ALD growth of Platinum Nanoislands on Alumina for Single Electron Transistors Applications

Daniel Thomas , Etienne Puyoo , Martine Le Berre , Liviu Militaru , S. Koneti
ALD growth of Platinum Nanoislands on Alumina for Single Electron Transistors Applications, 2016, Paris, France. 2016
Poster de conférence hal-01489072v1

On the behavior of electrically stressed Ti/TiOx/Ti junctions fabricated by local anodic oxidation

Nicolas Guillaume , Etienne Puyoo , M. Le Berre , David Albertini , Nicolas Baboux
On the behavior of electrically stressed Ti/TiOx/Ti junctions fabricated by local anodic oxidation, 2015, Lille, France. 2015
Poster de conférence hal-01489627v1

Shadow Edge Evaporation for Single Electron Transistors

Daniel Thomas , Etienne Puyoo , Martine Le Berre , Liviu Militaru , David Albertini
Shadow Edge Evaporation for Single Electron Transistors, 2015, Lyon, France. 2015
Poster de conférence hal-01489632v1

Oxydation locale d’une couche de titane par AFM pour la réalisation de composants mono-électroniques : étude paramétrée de différents modes de types de pointes

Nicolas Guillaume , Etienne Puyoo , Martine Le Berre , David Albertini , Nicolas Baboux
Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, May 2014, Lille, France
Poster de conférence hal-02075131v1

Comparison of two conductive AFM probes for the local nano-oxidation of Ti thin films

Nicolas Guillaume , Etienne Puyoo , David Albertini , Nicolas Baboux , Martine Le Berre
Journées Nationales sur les Technologies Emergentes en micro-nanofabrication, May 2013, Evian, France
Poster de conférence hal-02075206v1

Use of Atomic Force Microscopy towards the Development of Nano Devices by Fabricating Oxide Patterns on Titanium thin Film

Nicolas Guillaume , Etienne Puyoo , David Albertini , Nicolas Baboux , Martine Le Berre
First French-German Summer School on Noncontact Atomic Force Microscopy, Oct 2013, Porquerolles, France
Poster de conférence hal-02075144v1

Elaboration by AFM lithography of nanostructured Ti/TiOx/Ti tunnel junction

Nicolas Guillaume , Etienne Puyoo , David Albertini , Nicolas Baboux , Martine Le Berre
Euromat 2013 (European Congress & Exhibition on Advanced Materials and Processes), Sep 2013, Seville, Spain
Poster de conférence hal-02075164v1

Oxydation par AFM de fines couches métalliques pour la réalisation de composants mono-électroniques

Nicolas Guillaume , Etienne Puyoo , Martine Le Berre , David Albertini , Nicolas Baboux
Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, Jun 2013, Grenoble, France
Poster de conférence hal-02075185v1