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Martine LE BERRE

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Identifiants chercheurs

Présentation

**Research summary** Development of electronic nanocomponents Functional oxide integration Micro and nanotechnologies High frequency passive components **Keywords** Micro Nano Electronics, Micro Nano Fabrication, MEMS, RF components, Thin films for microelectronics (BaM, YIG, PZT, PEO), Thin film characterization **Teaching summary** Martine LE BERRE teaches (1) in the field of Microtechnologies and Microelectronics, at the Master level: \- Lecture on the Technologies for Microelectronics, Elec. Eng. Dpt. \- Lecture on MEMS, Materials Sci. Eng. Dpt. \- Practical in Clean Room "Technologies for Microelectronics", Elec. Eng. Dpt. (2) at the Bachelor level, in 2nd Year, courses on Electromagnetism and Waves in English **Biography** She graduated from Institut National des Sciences Appliquées (INSA) Rennes and studied one year as an exchange student in Germany. In 1994, she received a PhD from INSA Lyon for her work on the piezoresistivity of polycrystalline silicon. Since 1995 she has been working as an assistant professor at INL. She has been involved in the development of micromachined structures for Si-based MEMS (pressure sensors, micro-heat pipes arrays), their characterization as well as thin film characterization (PZT, SiC, BaM, YiG). After several studies on to the integration of ferrimagnetic oxides in microwave passive components, her latest projects contribute to the development of micro- and nanocomponents, e.g. components based on Local Anodic Oxidation by AFM or shadow-edge evaporation for nanogap fabrication. She achieved the habilitation in 2006. She is or has been implicated in several national or regional research programs. She has supervised or co-supervised 12 PhD theses, 18 internships (Master level) and participated to 20 PhD thesis boards. Through her research activities she has authored or co-authored 39 articles referenced in ISI Web of Knowledge and participated to 49 international conferences. Her H-factor rates 13. She also acts as referee for journals such as IEEE Trans. Magn., J. Micromech. Microeng., Sensors & Actuators A, J. Appl. Phys.

Publications

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Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition

Etienne Puyoo , Christophe Malhaire , Daniel Thomas , Rémi Rafael , Mohamed R'Mili
Applied Physics Letters, 2017, 110, pp.123103. ⟨10.1063/1.4978778⟩
Article dans une revue hal-01701521v1

A High-Efficiency Compact Planar Antenna for ISM Wireless Systems

Tao Zhou , Yazi Cao , Zhiqun Cheng , Martine Le Berre , Francis Calmon
International Journal of Antennas and Propagation, 2017, 2017, pp.1 - 5. ⟨10.1155/2017/7319275⟩
Article dans une revue hal-01888316v1

Investigation of the in-plane and out-of-plane electrical properties of metallic nanoparticles in dielectric matrix thin films elaborated by atomic layer deposition

Daniel Thomas , Etienne Puyoo , Martine Le Berre , Liviu Militaru , Siddardha Koneti
Nanotechnology, 2017, 28 (45), 455602 (8 p.). ⟨10.1088/1361-6528/aa8b5e⟩
Article dans une revue hal-01644827v1

An efficient and simple compact modeling approach for 3-D interconnects with IC׳s stack global electrical context consideration

Jean-Etienne Lorival , Francis Calmon , Fengyuan Sun , Felipe Frantz , Carole Plossu
Microelectronics Journal, 2015, 46 (2), pp.153-165. ⟨10.1016/j.mejo.2014.12.002⟩
Article dans une revue hal-02060679v1

Study and characterization of the irreversible transformation of electrically stressed planar Ti/TiOx /Ti junctions

N. Guillaume , E. Puyoo , M. Le Berre , D. Albertini , N. Baboux
Journal of Applied Physics, 2015, 118 (14), pp.144502. ⟨10.1063/1.4932646⟩
Article dans une revue hal-02048470v1

Miniaturized Tunable TeraHertz Antenna Based on Graphene

Tao Zhou , Z. Cheng , H. Zhang , M. Le Berre , Liviu Militaru
Microwave and Optical Technology Letters, 2015, 56 (8), pp. 1792-1794
Article dans une revue hal-01489440v1

Enhanced tunable nonreciprocal effect in CRLH coplanar transmission line on YIG without series capacitive loading

Tao Zhou , Martine Le Berre , Gwenaelle Vest , Calmon F. , Farid Boukchiche
Microwave and Optical Technology Letters, 2013, ⟨10.1002/mop.27979⟩
Article dans une revue hal-03327975v1

Study of a Coplanar Circulator Based on a Barium Hexaferrite Nanocomposite

Taline Boyajian , Didier Vincent , Martine Leberre , Sophie Neveu
Progress in Electromagnetics Research Symposium : [proceedings]. Progress in Electromagnetics Research Symposium, 2011, 7 (3), pp.201-205
Article dans une revue ujm-00798930v1

Magnetic Behavior of Barium Hexaferrite nanoparticles

Taline Boyajian , Didier Vincent , Martine Leberre , Sophie Neveu
Advanced Materials Research, 2011, 324, pp.268-289
Article dans une revue ujm-00795565v1

Coplanar waveguides with or without barium ferrite thin films

T. Zhou , M. Le Berre , Evangéline Bènevent , A.-S. Dehlinger , F. Calmon
Microwave and Optical Technology Letters, 2010, 52 (9), pp.2007-2010. ⟨10.1002/mop.25393⟩
Article dans une revue ujm-00733387v1

YIG Thin Film Used to Miniaturize a Coplanar Junction Circulator

Oussama Zahwe , B. Abdel Samad , B. Sauviac , Jean-Pierre Chatelon , Mf Blanc-Mignon
Journal of Electromagnetic Waves and Applications, 2010, 24 (1), pp.25-32. ⟨10.1163/156939310790322073⟩
Article dans une revue ujm-00788593v1

Microstructural and magnetic properties of thick (≥ 10 mm) magnetron sputtered barium ferrite films

A.-S. Dehlinger , M. Le Berre , B. Canut , D. Albertini , Jean-Pierre Chatelon
Journal of Magnetism and Magnetic Materials, 2010, 322 (21), pp.3293-3297. ⟨10.1016/j.jmmm.2010.06.011⟩
Article dans une revue ujm-00514146v1

Development of millimeter wave integrated circulator based on barium ferrite

Dominique Givord , H. Hassane , Evangéline Bènevent , Anne-Sophie Dehlinger , V. Larrey
Materials Science and Engineering: C, 2008, 28, pp.755-758. ⟨10.1016/j.msec.2007.10.063⟩
Article dans une revue hal-00312721v1

Feasibility of an integrated self biased coplanar isolator with barium ferrite films

S. Capraro , T. Rouiller , M. Le Berre , Jean-Pierre Chatelon , B. Bayard
IEEE Transactions on Components and Packaging Technologies, 2007, 30 (3), pp.411-415. ⟨10.1109/TCAPT.2007.898747⟩
Article dans une revue ujm-00356424v1

Influence of the fluid on the experimental performances of triangular silicon micro heat pipes

G. Pandraud , M. Le Berre , P. Morfouli , M. Lallemand
Journal of Electronic Packaging, 2006, 128 (3), pp.294-296. ⟨10.1115/1.2229233⟩
Article dans une revue hal-00119714v1

Performance of micro heat pipes measured by integrated sensors

M. Le Berre , G. Pandraud , P. Morfouli , M. Lallemand
Journal of Micromechanics and Microengineering, 2006, 16 (5), pp.1047-1050. ⟨10.1088/0960-1317/16/5/023⟩
Article dans une revue hal-00358074v1

Towards the integration of barium ferrite sputtered films for coplanar isolators and circulators in the millimeter wave range

Anne-Sophie Dehlinger , Martine Le Berre , Jean-Pierre Chatelon , Evangéline Bènevent , D. Vincent
Materials Research Society Symposia Proceedings, 2006, 969, pp.155-160. ⟨10.1557/PROC-0969-W06-06⟩
Article dans une revue hal-00312716v1

Réalisation de couches minces magnétiques d'hexaferrite de baryum en vue de concevoir un isolateur coplanaire passif

S. Capraro , C. Nader , Jean-Pierre Chatelon , M. Le Berre , T. Rouiller
Journal de Physique IV Proceedings, 2005, 124, pp.165-170
Article dans une revue ujm-00356448v1

Elaboration de couches minces YIG par pulvérisation cathodique RF pour la réalisation de composants hyperfréquences intégrés

T. Boudiar , C. Nader , T. Rouiller , M. Le Berre , Hélène Joisten
Journal de Physique IV Proceedings, 2005, 124, pp.159-163
Article dans une revue ujm-00356635v1

Exploration of the integration of passive coplanar isolator based on thin magnetic films

S. Capraro , T. Rouiller , M. Le Berre , Jean-Pierre Chatelon , B. Bayard
Microwave and Optical Technology Letters, 2005, 46 (5), pp.435-437. ⟨10.1002/mop.21009⟩
Article dans une revue ujm-00356445v1

Thick barium ferrite films use for passive isolators

S. Capraro , Jean-Pierre Chatelon , M. Le Berre , T. Rouiller , B. Bayard
physica status solidi (c), 2004, 1 (12), pp.3373-3376. ⟨10.1002/pssc.200405460⟩
Article dans une revue ujm-00356461v1

Properties of barium ferrite sputtered films

S. Capraro , M. Le Berre , Jean-Pierre Chatelon , Hélène Joisten , B. Bayard
Sensors and Actuators A: Physical , 2004, 113 (3), pp.382-386. ⟨10.1016/j.sna.2004.01.016⟩
Article dans une revue ujm-00356468v1

YIG thin films for magneto-optical and microwave applications

T. Boudiar , S. Capraro , T. Rouiller , M.-F. Blanc-Mignon , Béatrice Payet-Gervy
physica status solidi (b), 2004, 1 (12), pp.3347-3351. ⟨10.1002/pssc.200405453⟩
Article dans une revue ujm-00356633v1

Magneto-optical properties of Yttrium Iron Garnet (YIG) thin films elaborated by radio-frequency sputtering

T. Boudiar , Béatrice Payet-Gervy , M.-F. Blanc-Mignon , J.-J. Rousseau , M. Le Berre
Journal of Magnetism and Magnetic Materials, 2004, 284, pp.77-85. ⟨10.1016/j.jmmm.2004.06.046⟩
Article dans une revue ujm-00356632v1

Exploration of thin YIG film-based coplanar isolator

S. Capraro , T. Boudiar , T. Rouiller , Jean-Pierre Chatelon , B. Bayard
Microwave and Optical Technology Letters, 2004, 42 (6), pp.470-471. ⟨10.1002/mop.20339⟩
Article dans une revue ujm-00356470v1

Passive coplanar isolator with barium ferrite thin films

S. Capraro , T. Rouiller , M. Le Berre , Jean-Pierre Chatelon , Hélène Joisten
IEEE International Symposium on Industrial Electronics, 2004, 1 (4-7), pp.19-21
Article dans une revue ujm-00356458v1

Microcaloducs en silicium

S. Launay , M. Leberre , V. Sartre , P. Morfouli , J. Boussey-Said
Revue générale du Froid, AAF, 2004, vol. n°1041, pp.17-23, mars 2004
Article dans une revue hal-00387244v1

Barium ferrite thick films for microwave applications

S. Capraro , Jean-Pierre Chatelon , M. Le Berre , Hélène Joisten , T. Rouiller
Journal of Magnetism and Magnetic Materials, 2004, 272-276 (1), pp.1805-1806. ⟨10.1016/j.jmmm.2003.12.871⟩
Article dans une revue ujm-00356471v1

Crystallographic properties of magnetron sputtered barium ferrite films

S. Capraro , M. Le Berre , Jean-Pierre Chatelon , B. Bayard , Hélène Joisten
Materials Science and Engineering: B, 2004, 112 (1), pp.19-24. ⟨10.1016/j.mseb.2004.05.004⟩
Article dans une revue ujm-00356467v1

Magnetic properties of sputtered barium ferrite thick films

S. Capraro , Jean-Pierre Chatelon , Hélène Joisten , M. Le Berre , B. Bayard
Journal of Applied Physics, 2003, 93 (12), pp.9898-9901. ⟨10.1063/1.1576898⟩
Article dans une revue ujm-00356479v1

Fabrication and experimental investigation of silicon micro heat pipes for cooling electronics

Martine Le Berre , Stephane Launay , Sartre Valérie , Monique Lallemand
Journal of Micromechanics and Microengineering, 2003, 13 (3), pp.436-441. ⟨10.1088/0960-1317/13/3/313⟩
Article dans une revue hal-03328280v1

Correlation between epitaxial growth conditions of 3C–SiC thin films on Si and mechanical behavior of 3C–SiC self-suspended membranes

C. Gourbeyre , T. Chassagne , Martine Le Berre , G. Ferro , E. Gautier
Sensors and Actuators A: Physical , 2002, 99 (1-2), pp.31-34. ⟨10.1016/S0924-4247(01)00886-X⟩
Article dans une revue hal-03328833v1

The effect of deposition and annealing conditions on crystallographic properties of sputter barium ferrite thick films

B. Bayard , Jean-Pierre Chatelon , M. Le Berre , Hélène Joisten , J.J. Rousseau
Sensors and Actuators A: Physical , 2002, 99 (1-2), pp.207-212. ⟨10.1016/S0924-4247(01)00888-3⟩
Article dans une revue ujm-00356482v1

How to Grow Unstrained 3C-SiC Heteroepitaxial Layers on Si (100) Substrates

Thierry Chassagne , Gabriel Ferro , C. Gourbeyre , Martine Le Berre , Daniel Barbier
Materials Science Forum, 2001, 353-356, pp.155-158. ⟨10.4028/www.scientific.net/MSF.353-356.155⟩
Article dans une revue hal-03328836v1

Stress analysis at singular points of micromachined silicon membranes

A Chouaf , Ch Malhaire , Martine Le Berre , M Dupeux , F Pourroy
Sensors and Actuators A: Physical , 2000, 84 (1-2), pp.109-115. ⟨10.1016/S0924-4247(99)00350-7⟩
Article dans une revue hal-03328845v1

Compositional gradient in and mechanical stability of RF-sputtered and RTA annealed Pb(Zr,Ti)O3 thin films

Emmanuel Defaÿ , Bachir Semmache , Christiane Dubois , Martine Le Berre , Daniel Barbier
Sensors and Actuators A: Physical , 1999, 74 (1-3), pp.77-80. ⟨10.1016/S0924-4247(98)00351-3⟩
Article dans une revue hal-03328839v1

Effect of clamping conditions and built-in stresses on the thermopneumatic deflection of SiO2/Si membranes with various geometries

C Malhaire , Martine Le Berre , D Febvre , D Barbier , P Pinard
Sensors and Actuators A: Physical , 1999, 74 (1-3), pp.174-177. ⟨10.1016/S0924-4247(98)00312-4⟩
Article dans une revue hal-03328847v1

Optimisation of RF magnetron sputtering and RTA-crystallisation of Pb(Zr0.52Ti0.48)O3 thin films by means of the orthogonal array method

Emmanuel Defay , Martine Le Berre , Bachir Semmache , Michel Troccaz , Daniel Barbier
Materials Science and Engineering: B, 1998, 55 (1-2), pp.123-129. ⟨10.1016/S0921-5107(98)00172-X⟩
Article dans une revue hal-03328842v1

Stress-dependent hole effective masses and piezoresistive properties of p -type monocrystalline and polycrystalline silicon

P. Kleimann , B. Semmache , Martine Le Berre , D. Barbier
Physical Review B, 1998, 57 (15), pp.8966-8971. ⟨10.1103/PhysRevB.57.8966⟩
Article dans une revue hal-03328850v1

Micro-Raman study of thermoelastic stress distribution in oxidized silicon membranes and correlation with finite element modeling

Y. Guyot , C. Malhaire , Martine Le Berre , B. Champagnon , A. Sibai
Materials Science and Engineering: B, 1997, 46 (1-3), pp.24-28. ⟨10.1016/S0921-5107(96)01925-3⟩
Article dans une revue hal-03328855v1

Thermal drift of piezoresistive properties of LPCVD polysilicon thin films between room temperature and 200 °C

P. Kleimann , B. Semmache , Martine Le Berre , D. Barbier
Materials Science and Engineering: B, 1997, 46 (1-3), pp.43-46. ⟨10.1016/S0921-5107(96)01927-7⟩
Article dans une revue hal-03328862v1

Electrical and piezoresistive characterization of boron-doped LPCVD polycrystalline silicon under rapid thermal annealing

Martine Le Berre , P. Kleimann , B. Semmache , D. Barbier , P. Pinard
Sensors and Actuators A: Physical , 1996, 54 (1-3), pp.700-703. ⟨10.1016/S0924-4247(97)80041-6⟩
Article dans une revue hal-03328867v1

Piezoresistance of boron-doped PECVD and LPCVD polycrystalline silicon films

Martine Le Berre , M. Lemiti , D. Barbier , P. Pinard , J. Cali
Sensors and Actuators A: Physical , 1995, 46 (1-3), pp.166-170. ⟨10.1016/0924-4247(94)00883-J⟩
Article dans une revue hal-03328874v1

Rapid thermal processing of piezoresistive polycrystalline silicon films: An innovative technology for low cost pressure sensor fabrication

B. Semmache , M. Lemiti , P. Kleimann , Martine Le Berre , D. Barbier
Sensors and Actuators A: Physical , 1995, 46 (1-3), pp.76-81. ⟨10.1016/0924-4247(94)00865-F⟩
Article dans une revue hal-03328884v1
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Annealing-related electrical and piezoresistive properties of Band As-implanted LPCVD silicon films

P. Jeanjean , J. Sicart , J. Robert , M. Le Berre , P. Pinard
Journal de Physique III, 1993, 3 (1), pp.47-53. ⟨10.1051/jp3:1993119⟩
Article dans une revue jpa-00248907v1

Rapid thermal annealing of LPCVD-SOI substrates for sensor applications

P. Jeanjean , P. Sellitto , J. Sicart , J.L. Robert , Martine Le Berre
Sensors and Actuators A: Physical , 1992, 33 (1-2), pp.77-80. ⟨10.1016/0924-4247(92)80230-Z⟩
Article dans une revue hal-03328893v1

Front-Side Photon Detection improvement of SPAD integrated in FD-SOI CMOS Technology thanks to STI patterning

Duc Tung Vu , Shaochen Gao , Thibauld Cazimajou , Patrick Pittet , Martine Le Berre
ISSW 2024 Te International Spad Sensor Workshop, 4-6 June 2024, Trento, Italy, Jun 2024, Trento, Italy
Communication dans un congrès hal-04493136v1

How ALD deposition analysis can help PVD deposition process!

Bertrand Vilquin , Damien Deleruyelle , Jordan Bouaziz , Martine Le Berre , Céline Chevalier
9ème Workshop RAFALD, GDR RAFALD, Nov 2023, Lille (France), France
Communication dans un congrès hal-04308002v1

PEALD of Pt nanoparticles: towards the development of single electron transistors and flexible strain sensors

Etienne Puyoo , Daniel Thomas , Martine Le Berre , Liviu Militaru , Christophe Malhaire
RAFALD (Réseau des Acteurs Français de l’ALD), Nov 2018, Lyon, France
Communication dans un congrès hal-02075020v1

PEALD Platinum Nano-island SET Fabrication and Electrical Characterization

Daniel Thomas , Etienne Puyoo , M. Le Berre , Liviu Militaru , S. Koneti
AVS 17th International Conference on Atomic Layer Deposition, Jan 2017, Denver, United States
Communication dans un congrès hal-01701467v1

Flexible Platinum Nanoparticle-based Piezoresistive Transducers Elaborated by Atomic Layer Deposition

Etienne Puyoo , Christophe Malhaire , Daniel Thomas , Rémi Rafael , Mohamed R'Mili
AVS 17th International Conference on Atomic Layer Deposition, Jan 2017, Denver, United States
Communication dans un congrès hal-01701470v1

Pt nanoislands embedded in Al2O3 matrix: from ALD-based fabrication to structural to electrical characterization

Daniel Thomas , Etienne Puyoo , Martine Le Berre , Liviu Militaru , S. Koneti
EMRS Spring Meeting, Jan 2017, Strasbourg, France
Communication dans un congrès hal-01701466v1

On the irreversible transformation of Ti/TiOx/Ti junctions under electrical stress

Etienne Puyoo , Nicolas Guillaume , M. Le Berre , David Albertini , Nicolas Baboux
Energy Materials and Nanotechnology, 2016, Prague, Czech Republic
Communication dans un congrès hal-01489096v1

Shadow Edge Lithography coupled with ALD growth of Alumina and Platinum Nanoislands Towards the Fabrication of Single Electron Transistors

Daniel Thomas , Etienne Puyoo , M. Le Berre , Liviu Militaru , S. Koneti
EMRS Fall Meeting, 2016, Warsaw, Poland
Communication dans un congrès hal-01489069v1

Non-reciprocal Crib Transmission Line

Tao Zhou , J. Zhou , G. Liu , Z. Dong , Z. Cheng
IEEE 16th International Conference on Communication Technology (ICCT), 2015, Beijing, China
Communication dans un congrès hal-01489344v1

Oxydation locale d’une couche de titane par AFM pour la réalisation de composants mono-électroniques : étude paramétrée de différents modes de types de pointes

Nicolas Guillaume , Etienne Puyoo , Martine Le Berre , David Albertini , Nicolas Baboux
17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, 2014, Lille, France
Communication dans un congrès hal-01489838v1

Nano fabrication of oxide patterns using Atomic Force Microscopy on titanium towards the development of Nano devices

Guillaume Nicolas , Etienne Puyoo , Martine Le Berre , David Albertini , Nicolas Baboux
ICQNM (Seventh International Conference on Quantum, Nano and Micro Technologies), Aug 2013, Barcelone, Spain
Communication dans un congrès hal-02074965v1

Modélisation RLCG de lignes coplanaires sur un substrat Silicium pour applications CMOS

O. Valorge , F. Calmon , M. Le Berre , C. Gontrand , E. Eid
15e Compatibilité Electromagnétique CEM 2010, Apr 2010, Limoges, France
Communication dans un congrès hal-00604508v1

Dépôt de couches minces de YIG par ablation laser femtoseconde

Jean-Pierre Chatelon , D. Jamon , Florence Garrelie , A.-S. Loir , C. Donnet
10èmes Journées de Caractérisation Micro-Ondes et Matériaux, Apr 2008, Limoges, France
Communication dans un congrès ujm-00351422v1

Study of the crystalline orientation and the magnetic properties of thin layers of barium hexaferrite

Harouna Hassane , Anne Sophie Dehlinger , Jean-Pierre Chatelon , Damien Jamon , Martine Leberre
6th European Magnetic Sensors & Actuators Conference EMSA'06, Jul 2006, Bilbao, Spain. pp.90
Communication dans un congrès ujm-00292144v1

Temperature sensor integration in all-silicon micro heat pipe arrays

M. Le Berre , G. Pandraud , P. Morfouli , M. Lallemand
Eurosensors XIX, Sep 2005, Barcelone, Spain
Communication dans un congrès hal-00361739v1

Silicon micro heat pipes arrays for power electronic component temperature control

G. Pandraud , M. Le Berre , M. Lallemand
International Conference on Energy and Environment - CIEM, Oct 2005, Bucarest, Romania
Communication dans un congrès hal-00361753v1

Réalisation de microcaloduc en silicium pour le refroidissement de l'électronique.

S. Launay , V. Sartre , M. Lallemand , M. Leberre , Damien Barbier
1ères Journées de la Microfluidique de la société Française de Hydraulique, 2002, toulouse, France
Communication dans un congrès hal-00387278v1

ALD growth of Platinum Nanoislands on Alumina for Single Electron Transistors Applications

Daniel Thomas , Etienne Puyoo , Martine Le Berre , Liviu Militaru , S. Koneti
ALD growth of Platinum Nanoislands on Alumina for Single Electron Transistors Applications, 2016, Paris, France. 2016
Poster de conférence hal-01489072v1

Shadow Edge Evaporation for Single Electron Transistors

Daniel Thomas , Etienne Puyoo , Martine Le Berre , Liviu Militaru , David Albertini
Shadow Edge Evaporation for Single Electron Transistors, 2015, Lyon, France. 2015
Poster de conférence hal-01489632v1

On the behavior of electrically stressed Ti/TiOx/Ti junctions fabricated by local anodic oxidation

Nicolas Guillaume , Etienne Puyoo , M. Le Berre , David Albertini , Nicolas Baboux
On the behavior of electrically stressed Ti/TiOx/Ti junctions fabricated by local anodic oxidation, 2015, Lille, France. 2015
Poster de conférence hal-01489627v1

Oxydation locale d’une couche de titane par AFM pour la réalisation de composants mono-électroniques : étude paramétrée de différents modes de types de pointes

Nicolas Guillaume , Etienne Puyoo , Martine Le Berre , David Albertini , Nicolas Baboux
Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, May 2014, Lille, France
Poster de conférence hal-02075131v1

Elaboration by AFM lithography of nanostructured Ti/TiOx/Ti tunnel junction

Nicolas Guillaume , Etienne Puyoo , David Albertini , Nicolas Baboux , Martine Le Berre
Euromat 2013 (European Congress & Exhibition on Advanced Materials and Processes), Sep 2013, Seville, Spain
Poster de conférence hal-02075164v1

Comparison of two conductive AFM probes for the local nano-oxidation of Ti thin films

Nicolas Guillaume , Etienne Puyoo , David Albertini , Nicolas Baboux , Martine Le Berre
Journées Nationales sur les Technologies Emergentes en micro-nanofabrication, May 2013, Evian, France
Poster de conférence hal-02075206v1

Use of Atomic Force Microscopy towards the Development of Nano Devices by Fabricating Oxide Patterns on Titanium thin Film

Nicolas Guillaume , Etienne Puyoo , David Albertini , Nicolas Baboux , Martine Le Berre
First French-German Summer School on Noncontact Atomic Force Microscopy, Oct 2013, Porquerolles, France
Poster de conférence hal-02075144v1

Oxydation par AFM de fines couches métalliques pour la réalisation de composants mono-électroniques

Nicolas Guillaume , Etienne Puyoo , Martine Le Berre , David Albertini , Nicolas Baboux
Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, Jun 2013, Grenoble, France
Poster de conférence hal-02075185v1