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Co-authors

Researcher identifiers

Number of documents

68

Martine LE BERRE


 

Research summary

Development of electronic nanocomponents
Functional oxide integration
Micro and nanotechnologies
High frequency passive components

Keywords

Micro Nano Electronics, Micro Nano Fabrication, MEMS, RF components, Thin films for microelectronics (BaM, YIG, PZT, PEO), Thin film characterization

 

Teaching summary

Martine LE BERRE teaches

(1) in the field of Microtechnologies and Microelectronics, at the Master level:
- Lecture on the Technologies for Microelectronics, Elec. Eng. Dpt.
- Lecture on MEMS, Materials Sci. Eng. Dpt.
- Practical in Clean Room "Technologies for Microelectronics", Elec. Eng. Dpt.

(2) at the Bachelor level, in 2nd Year, courses on Electromagnetism and Waves in English

 

 

Biography

She graduated from Institut National des Sciences Appliquées (INSA) Rennes and studied one year as an exchange student in Germany. In 1994, she received a PhD from INSA Lyon for her work on the piezoresistivity of polycrystalline silicon. Since 1995 she has been working as an assistant professor at INL. She has been involved in the development of micromachined structures for Si-based MEMS (pressure sensors, micro-heat pipes arrays), their characterization as well as thin film characterization (PZT, SiC, BaM, YiG). After several studies on to the integration of ferrimagnetic oxides in microwave passive components, her latest projects contribute to the development of micro- and nanocomponents, e.g. components based on Local Anodic Oxidation by AFM or shadow-edge evaporation for nanogap fabrication.
She achieved the habilitation in 2006. She is or has been implicated in several national or regional research programs. She has supervised or co-supervised 12 PhD theses, 18 internships (Master level) and participated to 20 PhD thesis boards. Through her research activities she has authored or co-authored 39 articles referenced in ISI Web of Knowledge and participated to 49 international conferences. Her H-factor rates 13. She also acts as referee for journals such as IEEE Trans. Magn., J. Micromech. Microeng., Sensors & Actuators A, J. Appl. Phys.


Journal articles45 documents

  • Daniel Thomas, Etienne Puyoo, Martine Le Berre, Liviu Militaru, Siddardha Koneti, et al.. Investigation of the in-plane and out-of-plane electrical properties of metallic nanoparticles in dielectric matrix thin films elaborated by atomic layer deposition. Nanotechnology, Institute of Physics, 2017, 28 (45), 455602 (8 p.). ⟨10.1088/1361-6528/aa8b5e⟩. ⟨hal-01644827⟩
  • Etienne Puyoo, Christophe Malhaire, Daniel Thomas, Rémi Rafael, Mohamed R'Mili, et al.. Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition. Applied Physics Letters, American Institute of Physics, 2017, 110, pp.123103. ⟨10.1063/1.4978778⟩. ⟨hal-01701521⟩
  • Tao Zhou, Yazi Cao, Zhiqun Cheng, Martine Le Berre, Francis Calmon. A High-Efficiency Compact Planar Antenna for ISM Wireless Systems. International Journal of Antennas and Propagation, Hindawi Publishing Corporation, 2017, 2017, pp.1 - 5. ⟨10.1155/2017/7319275⟩. ⟨hal-01888316⟩
  • N. Guillaume, E. Puyoo, M. Le Berre, D. Albertini, N. Baboux, et al.. Study and characterization of the irreversible transformation of electrically stressed planar Ti/TiOx /Ti junctions. Journal of Applied Physics, American Institute of Physics, 2015, 118 (14), pp.144502. ⟨10.1063/1.4932646⟩. ⟨hal-02048470⟩
  • Tao Zhou, Z. Cheng, H. Zhang, M. Le Berre, Liviu Militaru, et al.. Miniaturized Tunable TeraHertz Antenna Based on Graphene. Microwave and Optical Technology Letters, Wiley, 2015, 56 (8), pp. 1792-1794. ⟨hal-01489440⟩
  • Jean-Etienne Lorival, Francis Calmon, Fengyuan Sun, Felipe Frantz, Carole Plossu, et al.. An efficient and simple compact modeling approach for 3-D interconnects with IC׳s stack global electrical context consideration. Microelectronics Journal, Elsevier, 2015, 46 (2), pp.153-165. ⟨10.1016/j.mejo.2014.12.002⟩. ⟨hal-02060679⟩
  • Tao Zhou, Martine Le Berre, Gwenaelle Vest, Calmon F., Farid Boukchiche, et al.. Enhanced tunable nonreciprocal effect in CRLH coplanar transmission line on YIG without series capacitive loading. Microwave and Optical Technology Letters, Wiley, 2013, ⟨10.1002/mop.27979⟩. ⟨hal-03327975⟩
  • Taline Boyajian, Didier Vincent, Martine Leberre, Sophie Neveu. Magnetic Behavior of Barium Hexaferrite nanoparticles. Advanced Materials Research, Trans Tech Publications, 2011, 324, pp.268-289. ⟨ujm-00795565⟩
  • Taline Boyajian, Didier Vincent, Martine Leberre, Sophie Neveu. Study of a Coplanar Circulator Based on a Barium Hexaferrite Nanocomposite. Progress in Electromagnetics Research Symposium : [proceedings]. Progress in Electromagnetics Research Symposium, Piers Enterprises, 2011, 7 (3), pp.201-205. ⟨ujm-00798930⟩
  • T. Zhou, M. Le Berre, Evangéline Bènevent, A.-S. Dehlinger, F. Calmon, et al.. Coplanar waveguides with or without barium ferrite thin films. Microwave and Optical Technology Letters, Wiley, 2010, 52 (9), pp.2007-2010. ⟨10.1002/mop.25393⟩. ⟨ujm-00733387⟩
  • A.-S. Dehlinger, M. Le Berre, B. Canut, D. Albertini, Jean-Pierre Chatelon, et al.. Microstructural and magnetic properties of thick (≥ 10 mm) magnetron sputtered barium ferrite films. Journal of Magnetism and Magnetic Materials, Elsevier, 2010, 322 (21), pp.3293-3297. ⟨10.1016/j.jmmm.2010.06.011⟩. ⟨ujm-00514146⟩
  • Oussama Zahwe, B. Abdel Samad, B. Sauviac, Jean-Pierre Chatelon, Mf Blanc-Mignon, et al.. YIG Thin Film Used to Miniaturize a Coplanar Junction Circulator. Journal of Electromagnetic Waves and Applications, Taylor & Francis, 2010, 24 (1), pp.25-32. ⟨10.1163/156939310790322073⟩. ⟨ujm-00788593⟩
  • Dominique Givord, H. Hassane, Evangéline Bènevent, Anne-Sophie Dehlinger, V. Larrey, et al.. Development of millimeter wave integrated circulator based on barium ferrite. Materials Science and Engineering: C, Elsevier, 2008, 28, pp.755-758. ⟨10.1016/j.msec.2007.10.063⟩. ⟨hal-00312721⟩
  • S. Capraro, T. Rouiller, M. Le Berre, Jean-Pierre Chatelon, B. Bayard, et al.. Feasibility of an integrated self biased coplanar isolator with barium ferrite films. IEEE Transactions on Components and Packaging Technologies, Institute of Electrical and Electronics Engineers, 2007, 30 (3), pp.411-415. ⟨10.1109/TCAPT.2007.898747⟩. ⟨ujm-00356424⟩
  • M. Le Berre, G. Pandraud, P. Morfouli, M. Lallemand. Performance of micro heat pipes measured by integrated sensors. Journal of Micromechanics and Microengineering, IOP Publishing, 2006, 16 (5), pp.1047-1050. ⟨10.1088/0960-1317/16/5/023⟩. ⟨hal-00358074⟩
  • G. Pandraud, M. Le Berre, P. Morfouli, M. Lallemand. Influence of the fluid on the experimental performances of triangular silicon micro heat pipes. Journal of Electronic Packaging, American Society of Mechanical Engineers, 2006, 128 (3), pp.294-296. ⟨10.1115/1.2229233⟩. ⟨hal-00119714⟩
  • Anne-Sophie Dehlinger, Martine Le Berre, Jean-Pierre Chatelon, Evangéline Bènevent, D. Vincent, et al.. Towards the integration of barium ferrite sputtered films for coplanar isolators and circulators in the millimeter wave range. Materials Research Society Symposia Proceedings, 2006, 969, pp.155-160. ⟨10.1557/PROC-0969-W06-06⟩. ⟨hal-00312716⟩
  • T. Boudiar, C. Nader, T. Rouiller, M. Le Berre, Hélène Joisten, et al.. Elaboration de couches minces YIG par pulvérisation cathodique RF pour la réalisation de composants hyperfréquences intégrés. Journal de Physique IV Proceedings, EDP Sciences, 2005, 124, pp.159-163. ⟨ujm-00356635⟩
  • S. Capraro, C. Nader, Jean-Pierre Chatelon, M. Le Berre, T. Rouiller, et al.. Réalisation de couches minces magnétiques d'hexaferrite de baryum en vue de concevoir un isolateur coplanaire passif. Journal de Physique IV Proceedings, EDP Sciences, 2005, 124, pp.165-170. ⟨ujm-00356448⟩
  • T. Boudiar, S. Capraro, T. Rouiller, M.-F. Blanc-Mignon, Béatrice Payet-Gervy, et al.. YIG thin films for magneto-optical and microwave applications. physica status solidi (b), Wiley, 2004, 1 (12), pp.3347-3351. ⟨10.1002/pssc.200405453⟩. ⟨ujm-00356633⟩
  • S. Capraro, Jean-Pierre Chatelon, M. Le Berre, T. Rouiller, B. Bayard, et al.. Thick barium ferrite films use for passive isolators. physica status solidi (c), Wiley, 2004, 1 (12), pp.3373-3376. ⟨10.1002/pssc.200405460⟩. ⟨ujm-00356461⟩
  • S. Capraro, M. Le Berre, Jean-Pierre Chatelon, Hélène Joisten, B. Bayard, et al.. Properties of barium ferrite sputtered films. Sensors and Actuators A: Physical , Elsevier, 2004, 113 (3), pp.382-386. ⟨10.1016/j.sna.2004.01.016⟩. ⟨ujm-00356468⟩
  • S. Capraro, T. Rouiller, M. Le Berre, Jean-Pierre Chatelon, Hélène Joisten, et al.. Passive coplanar isolator with barium ferrite thin films. IEEE International Symposium on Industrial Electronics, 2004, 1 (4-7), pp.19-21. ⟨ujm-00356458⟩
  • S. Launay, M. Leberre, V. Sartre, P. Morfouli, J. Boussey-Said, et al.. Microcaloducs en silicium. Revue générale du Froid, AAF, 2004, vol. n°1041, pp.17-23, mars 2004. ⟨hal-00387244⟩
  • T. Boudiar, Béatrice Payet-Gervy, M.-F. Blanc-Mignon, J.-J. Rousseau, M. Le Berre, et al.. Magneto-optical properties of Yttrium Iron Garnet (YIG) thin films elaborated by radio-frequency sputtering. Journal of Magnetism and Magnetic Materials, Elsevier, 2004, 284, pp.77-85. ⟨10.1016/j.jmmm.2004.06.046⟩. ⟨ujm-00356632⟩
  • S. Capraro, T. Boudiar, T. Rouiller, Jean-Pierre Chatelon, B. Bayard, et al.. Exploration of thin YIG film-based coplanar isolator. Microwave and Optical Technology Letters, Wiley, 2004, 42 (6), pp.470-471. ⟨10.1002/mop.20339⟩. ⟨ujm-00356470⟩
  • S. Capraro, M. Le Berre, Jean-Pierre Chatelon, B. Bayard, Hélène Joisten, et al.. Crystallographic properties of magnetron sputtered barium ferrite films. Materials Science and Engineering: B, Elsevier, 2004, 112 (1), pp.19-24. ⟨10.1016/j.mseb.2004.05.004⟩. ⟨ujm-00356467⟩
  • S. Capraro, Jean-Pierre Chatelon, M. Le Berre, Hélène Joisten, T. Rouiller, et al.. Barium ferrite thick films for microwave applications. Journal of Magnetism and Magnetic Materials, Elsevier, 2004, 272-276 (1), pp.1805-1806. ⟨10.1016/j.jmmm.2003.12.871⟩. ⟨ujm-00356471⟩
  • Martine Le Berre, Stephane Launay, Sartre Valérie, Monique Lallemand. Fabrication and experimental investigation of silicon micro heat pipes for cooling electronics. Journal of Micromechanics and Microengineering, IOP Publishing, 2003, 13 (3), pp.436-441. ⟨10.1088/0960-1317/13/3/313⟩. ⟨hal-03328280⟩
  • S. Capraro, Jean-Pierre Chatelon, Hélène Joisten, M. Le Berre, B. Bayard, et al.. Magnetic properties of sputtered barium ferrite thick films. Journal of Applied Physics, American Institute of Physics, 2003, 93 (12), pp.9898-9901. ⟨10.1063/1.1576898⟩. ⟨ujm-00356479⟩
  • C. Gourbeyre, T. Chassagne, Martine Le Berre, G. Ferro, E. Gautier, et al.. Correlation between epitaxial growth conditions of 3C–SiC thin films on Si and mechanical behavior of 3C–SiC self-suspended membranes. Sensors and Actuators A: Physical , Elsevier, 2002, 99 (1-2), pp.31-34. ⟨10.1016/S0924-4247(01)00886-X⟩. ⟨hal-03328833⟩
  • B. Bayard, Jean-Pierre Chatelon, M. Le Berre, Hélène Joisten, J.J. Rousseau, et al.. The effect of deposition and annealing conditions on crystallographic properties of sputter barium ferrite thick films. Sensors and Actuators A: Physical , Elsevier, 2002, 99 (1-2), pp.207-212. ⟨10.1016/S0924-4247(01)00888-3⟩. ⟨ujm-00356482⟩
  • Thierry Chassagne, Gabriel Ferro, C. Gourbeyre, Martine Le Berre, Daniel Barbier, et al.. How to Grow Unstrained 3C-SiC Heteroepitaxial Layers on Si (100) Substrates. Materials Science Forum, Trans Tech Publications Inc., 2001, 353-356, pp.155-158. ⟨10.4028/www.scientific.net/MSF.353-356.155⟩. ⟨hal-03328836⟩
  • A Chouaf, Ch Malhaire, Martine Le Berre, M Dupeux, F Pourroy, et al.. Stress analysis at singular points of micromachined silicon membranes. Sensors and Actuators A: Physical , Elsevier, 2000, 84 (1-2), pp.109-115. ⟨10.1016/S0924-4247(99)00350-7⟩. ⟨hal-03328845⟩
  • Emmanuel Defaÿ, Bachir Semmache, Christiane Dubois, Martine Le Berre, Daniel Barbier. Compositional gradient in and mechanical stability of RF-sputtered and RTA annealed Pb(Zr,Ti)O3 thin films. Sensors and Actuators A: Physical , Elsevier, 1999, 74 (1-3), pp.77-80. ⟨10.1016/S0924-4247(98)00351-3⟩. ⟨hal-03328839⟩
  • C Malhaire, Martine Le Berre, D Febvre, D Barbier, P Pinard. Effect of clamping conditions and built-in stresses on the thermopneumatic deflection of SiO2/Si membranes with various geometries. Sensors and Actuators A: Physical , Elsevier, 1999, 74 (1-3), pp.174-177. ⟨10.1016/S0924-4247(98)00312-4⟩. ⟨hal-03328847⟩
  • Emmanuel Defay, Martine Le Berre, Bachir Semmache, Michel Troccaz, Daniel Barbier. Optimisation of RF magnetron sputtering and RTA-crystallisation of Pb(Zr0.52Ti0.48)O3 thin films by means of the orthogonal array method. Materials Science and Engineering: B, Elsevier, 1998, 55 (1-2), pp.123-129. ⟨10.1016/S0921-5107(98)00172-X⟩. ⟨hal-03328842⟩
  • P. Kleimann, B. Semmache, Martine Le Berre, D. Barbier. Stress-dependent hole effective masses and piezoresistive properties of p -type monocrystalline and polycrystalline silicon. Physical Review B, American Physical Society, 1998, 57 (15), pp.8966-8971. ⟨10.1103/PhysRevB.57.8966⟩. ⟨hal-03328850⟩
  • P. Kleimann, B. Semmache, Martine Le Berre, D. Barbier. Thermal drift of piezoresistive properties of LPCVD polysilicon thin films between room temperature and 200 °C. Materials Science and Engineering: B, Elsevier, 1997, 46 (1-3), pp.43-46. ⟨10.1016/S0921-5107(96)01927-7⟩. ⟨hal-03328862⟩
  • Y. Guyot, C. Malhaire, Martine Le Berre, B. Champagnon, A. Sibai, et al.. Micro-Raman study of thermoelastic stress distribution in oxidized silicon membranes and correlation with finite element modeling. Materials Science and Engineering: B, Elsevier, 1997, 46 (1-3), pp.24-28. ⟨10.1016/S0921-5107(96)01925-3⟩. ⟨hal-03328855⟩
  • Martine Le Berre, P. Kleimann, B. Semmache, D. Barbier, P. Pinard. Electrical and piezoresistive characterization of boron-doped LPCVD polycrystalline silicon under rapid thermal annealing. Sensors and Actuators A: Physical , Elsevier, 1996, 54 (1-3), pp.700-703. ⟨10.1016/S0924-4247(97)80041-6⟩. ⟨hal-03328867⟩
  • Martine Le Berre, M. Lemiti, D. Barbier, P. Pinard, J. Cali, et al.. Piezoresistance of boron-doped PECVD and LPCVD polycrystalline silicon films. Sensors and Actuators A: Physical , Elsevier, 1995, 46 (1-3), pp.166-170. ⟨10.1016/0924-4247(94)00883-J⟩. ⟨hal-03328874⟩
  • B. Semmache, M. Lemiti, P. Kleimann, Martine Le Berre, D. Barbier, et al.. Rapid thermal processing of piezoresistive polycrystalline silicon films: An innovative technology for low cost pressure sensor fabrication. Sensors and Actuators A: Physical , Elsevier, 1995, 46 (1-3), pp.76-81. ⟨10.1016/0924-4247(94)00865-F⟩. ⟨hal-03328884⟩
  • P. Jeanjean, J. Sicart, J. Robert, M. Le Berre, P. Pinard, et al.. Annealing-related electrical and piezoresistive properties of Band As-implanted LPCVD silicon films. Journal de Physique III, EDP Sciences, 1993, 3 (1), pp.47-53. ⟨10.1051/jp3:1993119⟩. ⟨jpa-00248907⟩
  • P. Jeanjean, P. Sellitto, J. Sicart, J.L. Robert, Martine Le Berre, et al.. Rapid thermal annealing of LPCVD-SOI substrates for sensor applications. Sensors and Actuators A: Physical , Elsevier, 1992, 33 (1-2), pp.77-80. ⟨10.1016/0924-4247(92)80230-Z⟩. ⟨hal-03328893⟩

Conference papers15 documents

  • Etienne Puyoo, Daniel Thomas, Martine Le Berre, Liviu Militaru, Christophe Malhaire, et al.. PEALD of Pt nanoparticles: towards the development of single electron transistors and flexible strain sensors. RAFALD (Réseau des Acteurs Français de l’ALD), Nov 2018, Lyon, France. ⟨hal-02075020⟩
  • Etienne Puyoo, Christophe Malhaire, Daniel Thomas, Rémi Rafael, Mohamed R'Mili, et al.. Flexible Platinum Nanoparticle-based Piezoresistive Transducers Elaborated by Atomic Layer Deposition. AVS 17th International Conference on Atomic Layer Deposition, Jan 2017, Denver, United States. ⟨hal-01701470⟩
  • Daniel Thomas, Etienne Puyoo, Martine Le Berre, Liviu Militaru, S. Koneti, et al.. Pt nanoislands embedded in Al2O3 matrix: from ALD-based fabrication to structural to electrical characterization. EMRS Spring Meeting, Jan 2017, Strasbourg, France. ⟨hal-01701466⟩
  • Daniel Thomas, Etienne Puyoo, M. Le Berre, Liviu Militaru, S. Koneti, et al.. PEALD Platinum Nano-island SET Fabrication and Electrical Characterization. AVS 17th International Conference on Atomic Layer Deposition, Jan 2017, Denver, United States. ⟨hal-01701467⟩
  • Etienne Puyoo, Nicolas Guillaume, M. Le Berre, David Albertini, Nicolas Baboux, et al.. On the irreversible transformation of Ti/TiOx/Ti junctions under electrical stress. Energy Materials and Nanotechnology, 2016, Prague, Czech Republic. ⟨hal-01489096⟩
  • Daniel Thomas, Etienne Puyoo, M. Le Berre, Liviu Militaru, S. Koneti, et al.. Shadow Edge Lithography coupled with ALD growth of Alumina and Platinum Nanoislands Towards the Fabrication of Single Electron Transistors. EMRS Fall Meeting, 2016, Warsaw, Poland. ⟨hal-01489069⟩
  • Tao Zhou, J. Zhou, G. Liu, Z. Dong, Z. Cheng, et al.. Non-reciprocal Crib Transmission Line. IEEE 16th International Conference on Communication Technology (ICCT), 2015, Beijing, China. ⟨hal-01489344⟩
  • Nicolas Guillaume, Etienne Puyoo, Martine Le Berre, David Albertini, Nicolas Baboux, et al.. Oxydation locale d’une couche de titane par AFM pour la réalisation de composants mono-électroniques : étude paramétrée de différents modes de types de pointes. 17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, 2014, Lille, France. ⟨hal-01489838⟩
  • Guillaume Nicolas, Etienne Puyoo, Martine Le Berre, David Albertini, Nicolas Baboux, et al.. Nano fabrication of oxide patterns using Atomic Force Microscopy on titanium towards the development of Nano devices. ICQNM (Seventh International Conference on Quantum, Nano and Micro Technologies), Aug 2013, Barcelone, Spain. ⟨hal-02074965⟩
  • O. Valorge, F. Calmon, M. Le Berre, C. Gontrand, E. Eid, et al.. Modélisation RLCG de lignes coplanaires sur un substrat Silicium pour applications CMOS. 15e Compatibilité Electromagnétique CEM 2010, Apr 2010, Limoges, France. ⟨hal-00604508⟩
  • Jean-Pierre Chatelon, D. Jamon, Florence Garrelie, A.-S. Loir, C. Donnet, et al.. Dépôt de couches minces de YIG par ablation laser femtoseconde. 10èmes Journées de Caractérisation Micro-Ondes et Matériaux, Apr 2008, Limoges, France. ⟨ujm-00351422⟩
  • Harouna Hassane, Anne Sophie Dehlinger, Jean-Pierre Chatelon, Damien Jamon, Martine Leberre, et al.. Study of the crystalline orientation and the magnetic properties of thin layers of barium hexaferrite. 6th European Magnetic Sensors & Actuators Conference EMSA'06, Jul 2006, Bilbao, Spain. pp.90. ⟨ujm-00292144⟩
  • M. Le Berre, G. Pandraud, P. Morfouli, M. Lallemand. Temperature sensor integration in all-silicon micro heat pipe arrays. Eurosensors XIX, Sep 2005, Barcelone, Spain. ⟨hal-00361739⟩
  • G. Pandraud, M. Le Berre, M. Lallemand. Silicon micro heat pipes arrays for power electronic component temperature control. International Conference on Energy and Environment - CIEM, Oct 2005, Bucarest, Romania. ⟨hal-00361753⟩
  • S. Launay, V. Sartre, M. Lallemand, M. Leberre, Damien Barbier, et al.. Réalisation de microcaloduc en silicium pour le refroidissement de l'électronique.. 1ères Journées de la Microfluidique de la société Française de Hydraulique, 2002, toulouse, France. ⟨hal-00387278⟩

Poster communications8 documents

  • Daniel Thomas, Etienne Puyoo, Martine Le Berre, Liviu Militaru, S. Koneti, et al.. ALD growth of Platinum Nanoislands on Alumina for Single Electron Transistors Applications. ALD growth of Platinum Nanoislands on Alumina for Single Electron Transistors Applications, 2016, Paris, France. 2016. ⟨hal-01489072⟩
  • Nicolas Guillaume, Etienne Puyoo, M. Le Berre, David Albertini, Nicolas Baboux, et al.. On the behavior of electrically stressed Ti/TiOx/Ti junctions fabricated by local anodic oxidation. On the behavior of electrically stressed Ti/TiOx/Ti junctions fabricated by local anodic oxidation, 2015, Lille, France. 2015. ⟨hal-01489627⟩
  • Daniel Thomas, Etienne Puyoo, Martine Le Berre, Liviu Militaru, David Albertini, et al.. Shadow Edge Evaporation for Single Electron Transistors. Shadow Edge Evaporation for Single Electron Transistors, 2015, Lyon, France. 2015. ⟨hal-01489632⟩
  • Nicolas Guillaume, Etienne Puyoo, Martine Le Berre, David Albertini, Nicolas Baboux, et al.. Oxydation locale d’une couche de titane par AFM pour la réalisation de composants mono-électroniques : étude paramétrée de différents modes de types de pointes. Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, May 2014, Lille, France. ⟨hal-02075131⟩
  • Nicolas Guillaume, Etienne Puyoo, David Albertini, Nicolas Baboux, Martine Le Berre, et al.. Elaboration by AFM lithography of nanostructured Ti/TiOx/Ti tunnel junction. Euromat 2013 (European Congress & Exhibition on Advanced Materials and Processes), Sep 2013, Seville, Spain. ⟨hal-02075164⟩
  • Nicolas Guillaume, Etienne Puyoo, Martine Le Berre, David Albertini, Nicolas Baboux, et al.. Oxydation par AFM de fines couches métalliques pour la réalisation de composants mono-électroniques. Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, Jun 2013, Grenoble, France. ⟨hal-02075185⟩
  • Nicolas Guillaume, Etienne Puyoo, David Albertini, Nicolas Baboux, Martine Le Berre, et al.. Use of Atomic Force Microscopy towards the Development of Nano Devices by Fabricating Oxide Patterns on Titanium thin Film. First French-German Summer School on Noncontact Atomic Force Microscopy, Oct 2013, Porquerolles, France. ⟨hal-02075144⟩
  • Nicolas Guillaume, Etienne Puyoo, David Albertini, Nicolas Baboux, Martine Le Berre, et al.. Comparison of two conductive AFM probes for the local nano-oxidation of Ti thin films. Journées Nationales sur les Technologies Emergentes en micro-nanofabrication, May 2013, Evian, France. ⟨hal-02075206⟩