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UV-Nanoimprint process using home-developed resist and multi-scale molds

 P. Voisin , M. Zelsmann , C. Gourgon , J. Boussey-Said
Ultimate Lithography and Nanofabrication for Electronics and Lifescience, LITHO2006, 2006, marseille, France
Communication dans un congrès hal-00387290v1

Ultrafast Assembly of PS-PDMS Block Copolymers on 300 mm Wafers by Blending with Plasticizers

 Javier Arias-Zapata , Sophie Böhme , Jérôme Garnier , Cécile Girardot , Antoine Legrain , et al.
Advanced Functional Materials, 2016, 26 (31), pp.5690 - 5700. ⟨10.1002/adfm.201601469⟩
Article dans une revue istex hal-01882498v1

Sub-10 nm Silicon Nanopillar Fabrication Using Fast and Brushless Thermal Assembly of PS- b -PDMS Diblock Copolymer

 Jérôme Garnier , Javier Arias-Zapata , Marc Marconot , Sandrine Arnaud , Sophie Böhme , et al.
ACS Applied Materials & Interfaces, 2016, 8 (15), pp.9954 - 9960. ⟨10.1021/acsami.6b01255⟩
Article dans une revue hal-01882490v1

Fabrication of high quality graphene nanoribbons on large surfaces by block copolymer lithography

 J. Arias-Zapata , H-A. Mehedi , D. Ferrah , M. Serege , A. Legrain , et al.
Graphene 2017 , Mar 2016, barcelone, Spain
Communication dans un congrès hal-01825535v1

Impact of the resist properties on the antisticking layer degradation in UV nanoimprint lithography

 A. Francone , C. Iojoiu , C. Poulain , C. Lombard , B. Pépin-Donat , et al.
Journal of Vacuum Science and Technology, 2010, B vol. 28, p. C6M72 (2010)
Article dans une revue hal-00623572v1

Control of the PS-b-PDMS directed self-assembly by silsesquioxane-based graphoepitaxial substrate engineering

 M. Salaun , M. Zelsmann , O. Lorret , B. Dittert , D. Borah , et al.
Electron, Ion, and Photon Beam technology and Nanofabrication conference - EIPBN 2012, 2012, Waikoloa, Hawai,, United States
Communication dans un congrès hal-00809062v1

Surface-directed dewetting of a block copolymer for fabricating highly uniform nanostructured microdroplets and concentric nanorings

 R.A Farrell , N. Kehagias , M.T Shaw , V. Reboud , M. Zelsmann , et al.
ACS Nano, 2011, Vol. 5,, p. 1073
Article dans une revue hal-00634122v1

PSSQ templates fabricated by RUVNIL technique for di-block copolymer graphoepitaxy

 N. Kehagias , R.A Farrell , M. Zelsmann , A. Francone , M. Chouiki , et al.
Nanoimprint and Nanoprint Technology conference - NNT 2010, Oct 2010, Oresund & Copenhagen, Denmark
Communication dans un congrès hal-00623584v1
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Lithographically Defined Cross-Linkable Top Coats for Nanomanufacturing with High-χ Block Copolymers

 Xavier Chevalier , Cindy Gomes Correia , Gwenaelle Pound-Lana , Philippe Bézard , Matthieu Sérégé , et al.
ACS Applied Materials & Interfaces, 2021, 13 (9), pp.11224-11236. ⟨10.1021/acsami.1c00694⟩
Article dans une revue hal-03218670v1

Colloidal Manipulation and Nanodevices

 J. Cordeiro , O. Lecarme , T. Pinedo-Rivera , K. Berton , M. Zelsmann , et al.
BioInspired Methods & Applications France-Japan Seminar LIMMS, Institute of Industrial Science, Feb 2013, tokyo, Japan
Communication dans un congrès hal-00937025v1

Highly organized and dense vertical silicon nanowire arrays grown in porous alumina template on <100> silicon wafers

 T. Gorisse , L. Dupré , P. Gentile , M. Martin , M. Zelsmann , et al.
Nanoscale Reas. Lett., 2013, 8, pp.287
Article dans une revue hal-00860939v1

IgE detection in allergic patient’s serum by absorption analysis of biofunctionalised microparticles

 T. Yescas González , A. Leonard , V. Gaude , A. Delplanque , A. Barre , et al.
44th MNE International conference on Micro&NanoEngineering, Sep 2018, Copenhagen, Denmark
Communication dans un congrès hal-01960695v1
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Materials and processes in UV-assisted nanoimprint lithography

 Marc Zelsmann , Jumana Boussey
Generating Micro- and Nanopatterns on Polymeric Surfaces, A. Del Campo, E. Arzt, pp.3-26, 2011, ⟨10.1002/9783527633449.ch1⟩
Chapitre d'ouvrage hal-00667189v1

Impact of the cycle time on the pattern filling and uniformity in thermal Nanoimprint lithography.

 C. Gourgon , N. Chaix , S. Landis , M. Zelsmann , J. Boussey , et al.
Nanoprint and Nanoimprint Technology, NNT2006, 2006, san francisco, United States
Communication dans un congrès hal-00387292v1

Light extraction enhancement of nanoimprinted photonic crystals via coupled surface plasmons

 V. Reboud , N. Kehagias , M. Zelsmann , C.M. Sotomayor
Nanoimprint and Nanoprint Technology conference - NNT 2006,, Nov 2006, san francisco, United States
Communication dans un congrès hal-00394524v1

Embedded nano channels fabricated by non-selective reverse contact UV nanoimprint lithography technique

 N. Kehagias , G. Chansin , V. Reboud , M. Zelsmann , C. Schuster , et al.
Microelectronic Engineering, 2007, pp.84, 5-8 (2007) 921-924
Article dans une revue hal-00394496v1

Seventy-fold enhancement of light extraction from a defectless photonic crystal made on silicon-on-insulator

 M. Zelsmann , E. Picard , T. Charvolin , E. Hadji , M. Heitzmann , et al.
Applied Physics Letters, 2003, vol. 83, p. 2542
Article dans une revue hal-00390520v1

Stamp replication for thermal and UV nanoimprint lithography using a UV sensitive silsesquioxane resist

 N. Kehagias , V. Reboud , J. de Girolamo , M. Chouiki , M. Zelsmann , et al.
Micro- and Nano-Engineering conference- MNE 2008, Sep 2008, athènes, Greece
Communication dans un congrès hal-00394564v1

Transmission spectroscopy of photonic crystals in a silicon-on-insulator waveguide structure

 M. Zelsmann , E. Picard , T. Charvolin , E. Hadji , B. Dalzotto , et al.
Applied Physics Letters, 2002, vol. 81, p. 2340
Article dans une revue hal-00390513v1

Realization of two-dimensional optical devices using photonic band gap structures on silicon-on-insulator

 T. Charvolin , E. Hadji , E. Picard , M. Zelsmann , M. Assous , et al.
Microelectronic Engineering, 2002, vol. 61, p. 545
Article dans une revue hal-00390519v1

Electromigration-induced failure in operando characterization of 3D interconnects: microstructure influence

 Simon Gousseau , Stéphane Moreau , David Bouchu , Alexis Farcy , Pierre Montmitonnet , et al.
Microelectronics Reliability, 2015, 55 (8), pp.1205-1213. ⟨10.1016/j.microrel.2015.05.019⟩
Article dans une revue hal-01166314v1

Silicon-on-insulator based quasi 3D photonic crystal structures

 Marc Zelsmann , Emmanuel Picard , Vincent Calvo , Thomas Charvolin , Emmanuel Hadji , et al.
Integrated Optoelectronic Devices 2005, 2005, San Jose, United States. pp.23
Communication dans un congrès cea-01996907v1

Resonant optical microcavity based on crystalline silicon active layer

 M. Zelsmann , E. Picard , T. Charvolin , B. Dal’zotto , M. Nier , et al.
Journal of Applied Physics, 2002, 92 (4), pp.2207-2209
Article dans une revue cea-01996938v1
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In Situ Investigation of the Early-Stage Growth of Nanoporous Alumina

 Thérèse Gorisse , Ludovic Dupré , Marc Zelsmann , Alina Vlad , Alessandro Coati , et al.
Journal of Nanomaterials, 2018, 2018, pp.1-9. ⟨10.1155/2018/6428271⟩
Article dans une revue hal-01954874v1

Materials meeting electronic requirements for Sub-10 nm lithography

 C. Navarro , C. Nicolet , X. Chevalier , K. Xu , M. A. Hockey , et al.
Directed Self-Assembly Symposium – DSA 2017, Oct 2017, Chicago (USA), United States
Communication dans un congrès hal-01930180v1

Microfluidic colloidal technologies: From ICT to health applications

 A. Leonard , M. Tardif , J. Cordeiro , C. Vaillier , C. Pin , et al.
12th International Conference on Nanosciences & Nanotechnologies - NN15, Jul 2015, Thessaloniki, Greece
Communication dans un congrès hal-01877291v1

Nanoimprint-assisted directed self-assembly of low-molecular weight block copolymers: a route for 3D and multilevel nanostructures

 C. Simao , W. Khunsin , N. Kehagias , A. Francone , M. Zelsmann , et al.
SPIE DSS conference, mai 2014, Baltimore (USA) / Proc. SPIE vol. 9083, p. 90832S (2014), May 2014, Baltimore, United States. p. 90832S
Communication dans un congrès hal-01798321v1
Image document

Soft-graphoepitaxy using nanoimprinted polyhedral oligomeric silsesquioxane substrates for the directed self-assembly of PS-b-PDMS

 Dipu Borah , Claudia Simao , Ramsankar Senthamaraikannan , Sozaraj Rasappa , Achille Francone , et al.
European Polymer Journal, 2013, 49 (11), pp.3512. ⟨10.1016/j.eurpolymj.2013.08.011⟩
Article dans une revue hal-00946828v1

Low viscosity UV-NIL material development

 A. Jouve , A. Francone , P. Voisin , M. Zelsmann , C. Gourgon , et al.
Nanoprint and Nanoimprint Technology, NNT2007,, 2007, paris, France
Communication dans un congrès hal-00387421v1

Nanooptics and silicon photonic crystals

 D. Sotta , M. Zelsmann , V. Calvo , T. Charvolin , E. Picard , et al.
La Revue de l'électricité et de l'électronique, 2004, vol. 1,, p. 31
Article dans une revue hal-00390523v1
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