Magali Brunet
2
Documents
Publications
- 2
- 2
- 2
- 2
- 2
- 1
- 1
- 1
- 1
- 1
|
Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitorsThin Solid Films, 2011, 519 (16), pp.5638-5644. ⟨10.1016/j.tsf.2011.03.006⟩
Article dans une revue
hal-01443083v1
|
|
Characterization of ZrO2 thin films deposited by MOCVD for high-density 3D capacitors. Broad experience on MOCVD techniques and high-k materialsMicroelectronic Engineering, 2009, 86 (10), pp.2034-2037. ⟨10.1016/j.mee.2009.01.034⟩
Article dans une revue
hal-01443057v1
|