Magali Brunet
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High-Density 3-D Capacitors for Power Systems On-Chip: Evaluation of a Technology Based on Silicon Submicrometer Pore Arrays Formed by Electrochemical EtchingIEEE Transactions on Power Electronics, 2013, 28 (9), pp. 4440-4448. ⟨10.1109/TPEL.2012.2233219⟩
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hal-01443216v1
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