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System design of a low-power three-axis underdamped MEMS accelerometer with simultaneous electrostatic damping control

Lavinia-Elena Ciotirca
Other. Institut National Polytechnique de Toulouse - INPT, 2017. English. ⟨NNT : 2017INPT0043⟩
Thèse tel-04222810v2
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3-axis high Q MEMS accelerometer with simultaneous damping control

Lavinia Ciotîrcă , Olivier Bernal , Hélène Tap , Jérôme Enjalbert , Thierry Cassagnes
New Circuits and Systems Conference (NEWCAS), 2016 14th IEEE International, Jun 2016, Vancouver, Canada. pp.1 - 4, ⟨10.1109/NEWCAS.2016.7604787⟩
Communication dans un congrès hal-01488286v1
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New stability method of a multirate controller for a three-axis high-Q MEMS accelerometer with simultaneous electrostatic damping

Lavinia Ciotîrcă , Olivier Bernal , Jerome Enjalbert , Thierry Cassagnes , Hélène Tap , et al.
IEEE Sensors Journal, 2018, 18 (15), pp.6106 - 6114. ⟨10.1109/jsen.2018.2844682⟩
Article dans une revue hal-02092959v2