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Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures

 Isabelle Dufour , Luis Iglesias Hernandez , Priyadarshini Shanmugam , Jean-François Michaud , Daniel Alquier , et al.
2020 Joint Conference of the IEEE International Frequency Control Symposium and the IEEE International Symposium on Applications of Ferroelectrics, Jul 2020, Keystone (virtual conference), United States. pp.1-3, ⟨10.1109/IFCS-ISAF41089.2020.9234908⟩
Communication dans un congrès hal-02481928v1
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ADIABATIC LOGIC GATES FOR ULTRA-LOW-POWER OPERATION USING CONTACTLESS CAPACITIVE MEMS

 Aleksandra Marković , Hervé Fanet , Gaël Pillonnet , Bernard Legrand , Laurent Mazenq , et al.
22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Jun 2023, Kyoto (Japan), Japan. pp.546-549
Communication dans un congrès hal-04241697v1

Development of an ISFET-based analysis microsystem for nitrogen cycle monitoring in durum wheat crop Introduction

 Mathieu Joly , Sandrine Assié-Souleille , Laurent Mazenq , Maurane Marlet , Pierre Temple-Boyer , et al.
4th CIGR international conference of agriculture engineering, CIGR AgEng 2016, Jun 2016, Aarhus, Denmark. 12p
Communication dans un congrès hal-01871427v1
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Theoretical studies of the spin coating process for the deposition of polymer-based Maxwellian liquids

 Pierre Temple-Boyer , Laurent Mazenq , Jean-Baptiste Doucet , Véronique Conédéra , Benoit Torbiero , et al.
Microelectronic Engineering, 2010, 87 (2), pp.163-166. ⟨10.1016/j.mee.2009.06.030⟩
Article dans une revue hal-01687852v1
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Développement de procédés de lithographie UV de résines photosensibles sur l'équipement Suss Microtec MA6 Gen 4

 Julien Joneau , Adrian Laborde , Laurent Mazenq
[Rapport Technique] Rapport LAAS n° 18698, LAAS-CNRS. 2018
Rapport hal-02902736v1
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Développement d'une platine de déplacements nanométriques pour la réalisation d'un Microscope à Force Atomique (AFM) rapide

 Laurent Mazenq , Lucien Schwab , Nicolas Mauran , Denis Lagrange , Xavier Dollat , et al.
[Rapport Technique] LAAS-CNRS. 2019
Rapport hal-03603368v1

Cpw-fed slot microstrip MEMS-based reconfigurable arrays

 Loïc Le Garrec , Mohamed Himdi , Ronan Sauleau , Laurent Mazenq , Katia Grenier , et al.
IEEE AP-S International Symposium, Jun 2004, Monterey, United States. pp.1835-1838
Communication dans un congrès hal-00549299v1
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H2MEMS Project: Resonant MEMS for detection of hydrogen release in radioactive waste disposal facility

 Isabelle Dufour , Luis Iglesias Hernandez , Priyadarshini Shanmugam , Jean-François Michaud , Laurent Colin , et al.
Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF / IFCS 2022), Apr 2022, Paris, France
Communication dans un congrès hal-03778623v1
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Geometry optimization of uncoated silicon microcantilever-based gas density sensors

 Mohand-Tayeb Boudjiet , Johan Bertrand , Fabrice Mathieu , Liviu Nicu , Laurent Mazenq , et al.
Sensors and Actuators B: Chemical, 2015, 208, pp.600-607. ⟨10.1016/j.snb.2014.11.067⟩
Article dans une revue hal-01082346v1
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Microchannel-connected SU-8 honeycombs by single-step projection photolithography for positioning cells on silicon oxide nanopillar arrays

 Florian Larramendy , Marie-Charline Blatché , Laurent Mazenq , Adrian Laborde , Pierre Temple-Boyer , et al.
Journal of Micromechanics and Microengineering, 2015, 25 (4), pp.045010. ⟨10.1088/0960-1317/25/4/045010⟩
Article dans une revue hal-01225646v1
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Design, realization and characterization of all-arround SiO2/Al2O3gate, suspended silicon nanowire chemical field effect transistors

 Ahmet Lale , Auriane Grappin , David Bourrier , Laurent Mazenq , Aurélie Lecestre , et al.
19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017), Jun 2017, Kaohsiung, Taiwan. 4p., ⟨10.1109/TRANSDUCERS.2017.7994346⟩
Communication dans un congrès hal-01871397v1

VCSELs fabricated using self-aligned processing

 Ludovic Marigo-Lombart , Alexandre Arnoult , Laurent Mazenq , Pascal Dubreuil , Benjamin Reig , et al.
Workshop VCSEL Day 2016, Jun 2016, Darmstadt, Germany. 2p
Communication dans un congrès hal-01857634v1

Développement de briques technologiques pour la fabrication d’un VCSEL avec un modulateur intégré verticalement

 Ludovic Marigo-Lombart , Alexandre Arnoult , Laurent Mazenq , Pascal Dubreuil , Jean-Baptiste Doucet , et al.
15eme Journees Nano, Micro et Optoelectronique (JNMO), May 2016, Les Issambres, France. 2016
Poster de conférence hal-01857638v1
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PEDOT-modified integrated microelectrodes for the detection of ascorbic acid, dopamine and uric acid

 Fadhila Sekli-Belaidi , Aurélie Civélas , Valentina Castagnola , Aliki Tsopela , Laurent Mazenq , et al.
Sensors and Actuators B: Chemical, 2015, 214, pp. 1-9. ⟨10.1016/j.snb.2015.03.005⟩
Article dans une revue hal-01148710v1

Process management in an academic laboratory: recipe library, data access, monitoring, different tools to be implemented

 Adrian Laborde , Ayoub Choukri , Laurent Mazenq , Mairame Diallo
ENRIS 2023, May 2023, Palaiseau, France
Communication dans un congrès hal-04102746v1

Fabrication of Doubly-Corrugated Zero-Contrast-Grating for Broadband Pixelated Filtering in the Mid-IR Range

 Léopold Macé , Olivier Gauthier-Lafaye , Antoine Monmayrant , Henri Camon , Pascal Dubreuil , et al.
20th International Conference on Transparent Optical Networks (ICTON 2018), Jul 2018, Bucharest, Romania
Communication dans un congrès hal-01917558v1
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HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS

 Cécile Fuinel , Khadim Daffé , Adrian Laborde , Olivier Thomas , Laurent Mazenq , et al.
The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421850⟩
Communication dans un congrès hal-01279717v1
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Efficient prototyping of large-scale pdms and silicon nanofluidic devices using pdms-based phase-shift lithography

 Yannick Viero , Qihao He , Laurent Mazenq , Hubert Ranchon , Jean-Yves Fourniols , et al.
Microfluidics and Nanofluidics, 2012, 12 (1-4), pp.465 - 473. ⟨10.1007/s10404-011-0888-0⟩
Article dans une revue hal-01682518v1
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Development of pH-based ElecFET biosensors for lactate ion detection

 Abdou Karim Diallo , Lyas Djeghlaf , Laurent Mazenq , Jérôme Launay , William Sant , et al.
Biosensors and Bioelectronics, 2013, 40 (1), pp.291-296. ⟨10.1016/j.bios.2012.07.063⟩
Article dans une revue hal-01508091v1
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High Speed Atomic Force Microscope

 Nicolas Mauran , Denis Lagrange , Xavier Dollat , Laurent Mazenq , Lucien Schwab , et al.
NI-Week 2017, May 2017, Austin, TX, United States. , 2017
Poster de conférence hal-01529673v1
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Electro-Absorption Modulator vertically integrated on a VCSEL: microstrip-based high-speed electrical injection on top of a BCB layer

 Ludovic Marigo-Lombart , Christophe Viallon , Alexandre Rumeau , Alexandre Arnoult , Aurelie Lecestre , et al.
Journal of Lightwave Technology, 2019, 37 (15), pp.3861-3868. ⟨10.1109/jlt.2019.2921806⟩
Article dans une revue hal-03012166v1
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A simple process for the fabrication of parallel-plate electrostatic MEMS resonators by gold thermocompression bonding

 Maria Dolores Manrique-Juarez , Fabrice Mathieu , Guillaume Libaude , Véronique Conédéra , David Bourrier , et al.
The 36th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2023), Jan 2023, Munich, Germany
Communication dans un congrès hal-03951363v1

Biological functionalization of massively parallel arrays of nanocantilevers using microcontact printing

 Christophe Thibault , Samuel Guillon , Sven Salomon , Florent Seichepine , Denis Dezest , et al.
Sensors and Actuators B: Chemical, 2012, 161 (1), pp.1135 - 1138. ⟨10.1016/j.snb.2011.10.084⟩
Article dans une revue istex hal-01767603v1
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Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators

 Denis Dezest , Fabrice Mathieu , Laurent Mazenq , Caroline Soyer , Jean Costecalde , et al.
2013 Nanomechanical Sensing Workshop, May 2013, Stanford, USA, United States. pp.0
Communication dans un congrès hal-03165172v1
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Effect of non-ideal clamping shape on the resonance frequencies of silicon nanocantilevers

 Samuel Guillon , Daisuke Saya , Laurent Mazenq , Sorin Perisanu , Pascal Vincent , et al.
Nanotechnology, 2011, 22 (24), pp.id 245501. ⟨10.1088/0957-4484/22/24/245501⟩
Article dans une revue hal-01343625v1
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PZT Nanofilm-Based Wafer Scale Nanoresonators

 Denis Dezest , Fabrice Mathieu , Laurent Mazenq , Liviu Nicu , Caroline Soyer , et al.
IEEE Frequency Control Symposium, Apr 2015, Denver, United States. 6p
Communication dans un congrès hal-01144194v1
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Moyens de lithographies de la plateforme de Micro et Nanotechnologies du LAAS-CNRS

 Laurent Mazenq , Franck Carcenac , Pierre-François Calmon , Emmanuelle Daran , Adrian Laborde , et al.
Renatech Litho Gravure, Jan 2023, Lille, France. 2023
Poster de conférence hal-03976338v1

SINGLE STEP PATTERNING OF MOLECULARLY IMPRINTED POLYMERS FOR LARGE SCALE FABRICATION OF BIOCHIPS

 Samuel Guillon , Rémi Lemaire , David Bourrier , Laurent Mazenq , Fabien Mesnilgrente , et al.
MIP 2008, 2008, Japan
Communication dans un congrès hal-00406136v1

Temporary adhesives for wafer bonding: deep reactive ion etching application

 David Colin , Djaffar Belharet , Pascal Dubreuil , Laurent Mazenq , Hugues Granier
European Microelectronics and Packaging Conference (EMPC 2009), Jun 2009, Rimini, Italy
Communication dans un congrès hal-03167904v1

Sensitivity optimization of silicon microcantilever-based density sensor for hydrogen detection

 Mohand-Tayeb Boudjiet , Johan Bertrand , Laurent Mazenq , Thierry Leichle , Fabrice Mathieu , et al.
11th Nanomechanical Sensing Workshop NMC 2014, Apr 2014, Madrid, Spain. 2 p
Communication dans un congrès hal-00951760v1
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