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FEM simulation of charging effect during SEM metrology

 Duy Duc Nguyen , Jean-Herve Tortai , Mohamed Abaidi , Patrick Schiavone
34th European Mask and Lithography Conference, Jun 2018, Grenoble, France. ⟨10.1117/12.2326609⟩
Communication dans un congrès hal-01942831v1
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Superior dielectric properties of epoxy-based photoresist thin film nanocomposites with carbon-coated Cu@C nanoparticles

 C Lapeyronie , M Alfonso , B Viala , J-H Tortai
Materials Research Express, 2022, 9 (10), pp.106301. ⟨10.1088/2053-1591/ac9574⟩
Article dans une revue hal-03807858v1

Influence of PEN thermal properties of flexible film patterned by NanoImprint Lithography

 C. Gourgon , Gilles Philippot , S. Labau , J.H. Tortai , M. Benwadih , et al.
Micro- and Nano-Engineering conference- MNE 2010, 2010, gènes, Italy
Communication dans un congrès hal-00621089v1

Deprotection kinetic monitoring of a 193nm resist by ellipsometry

 H. Ridaoui , J.H. Tortai , S. Derrough , C. Sourd , H. Trouve , et al.
MNE, 2007, copenhague, Denmark
Communication dans un congrès hal-00394561v1

Thickness-dependent glass transition temperature of thin resist films for high resolution lithography

 S. Marceau , J.H. Tortai , J. Tillier , N. Vourdas , E. Gogolides , et al.
Microelectronic Engineering, 2006, pp.83, 4-9 1073-1077
Article dans une revue hal-00394493v1

Overcoming pattern collapse of ultra high resolution dense lines obtained with EUV resists

 A. Jouve , J. Simon , J. Foucher , T. David , J.H. Tortai , et al.
Proceeding of SPIE - Advances in Resist Technology and Processing XXII, 2005, pp.XXII, -731, Vol.5753 (2005)720-731
Article dans une revue hal-00462520v1

New Approach to Closely Spaced Disordered Cobalt-Graphene Polymer Nanocomposites for Non-Conductive RF Ferromagnetic Films

 Helene Takacs , Bernard Viala , V. Herman , J. Alarcon Ramos , J. H. Tortai , et al.
IEEE Transactions on Magnetics, 2015, 51, pp.2802304. ⟨10.1109/tmag.2015.2445824⟩
Article dans une revue cea-01745408v1

Use of optical spacers to enhance infrared Mueller ellipsometry sensitivity: application to the characterization of organic thin films

 Gérald Ndong , Angel Lizana , Enric Garcia-Caurel , Valerie Paret , Géraldine Melizzi , et al.
Applied optics, 2016, 55 (12), pp.436 - 439. ⟨10.1364/AO.55.003323⟩
Article dans une revue hal-01882073v1
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Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films

 Joao Resende , David Fuard , Delphine Le Cunff , Jean-Herve Tortai , Bernard Pelissier
Materials Chemistry and Physics, 2020, 259, pp.124000. ⟨10.1016/j.matchemphys.2020.124000⟩
Article dans une revue hal-03017737v1

Quasi in situ advanced characterizations for materials upfront studies and process development in microelectronic The IMPACT Project : Merging academic research and industrial applications

 B. Pelissier , S. Labau , Jh. Tortai , J. Moeyaert , C. Beitia , et al.
NANOSCIENCES 2018, 26 Novembre 2018, Nov 2018, Barcelone, Spain
Communication dans un congrès hal-01960827v1

Non-conductive ferromagnets based on core double-shell nanoparticles for radio-electric applications

 Helene Takacs , Bernard Viala , Vanessa Herman , Jean-Herve Tortai , Florence Duclairoir , et al.
SpringerPlus, 2016, 5, pp.496. ⟨10.1186/s40064-016-2099-3⟩
Article dans une revue cea-01851944v1

Surface characterization of imprinted resist above glass transition temperature

 T. Leveder , S. Landis , L. Davoust , S. Soulan , J.H. Tortai , et al.
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2007, 25 (6), pp.2365 - 2369. ⟨10.1116/1.2799975⟩
Article dans une revue hal-00680951v1

Layout optimization for accurate modeling of E-Beam lithography processes

 T. Figueiro , N. Jedidi , J.H. Tortai , P. Schiavone
MNE 2012, Sep 2012, Toulouse, France
Communication dans un congrès hal-00807421v1

New approach to closely-spaced disordered cobalt-graphene nanocomposites for non-conductive ferromagnetic films: from local structure to radio-electric properties

 H. Takacs , V. Herman , B. Viala , J. Alarcon Ramos , J.-H. Tortai , et al.
IEEE International Magnetics Conference (Intermag), May 2015, Pékin, China. ⟨10.1109/INTMAG.2015.7157080⟩
Communication dans un congrès hal-01878059v1

Non-conductive ferromagnets based on core shell nanocomposites for radio-electric applications

 H. Takacs , B. Viala , V. Herman , J.-H. Tortai , F. Duclairoir , et al.
Nanotech – Advanced Materials & Applications, Jun 2015, Washington, United States
Communication dans un congrès hal-01878060v1

FEM Simulation Of Charging Effect During SEM Metrology

 Duy Duc Nguyen , Jean Herve Tortai , Mohamed Abaidi , Patrick Schiavone
EMLC 2018, 2018, Grenoble, France
Communication dans un congrès hal-01942837v1

Diagnostic of the self-healing of metallized polypropylene film by modelling of the broadening emission lines of aluminium emitted by plasma discharge

 Jean-Hervé Tortai , Nelly Bonifaci , André Denat , Christian Trassy
Journal of Applied Physics, 2005, 95 (5), pp 53304-1-9
Article dans une revue hal-00347897v1

Diffused Aerial image Model, an accurate simplifieds resist model

 D. Fuard , P. Schiavone , J.H. Tortai
Faunhofer IISB Lithography Simulation Workshop, 2003, Hersbruck, Germany
Communication dans un congrès hal-00486452v1

Multiwave length interferometry and competing optical methods for the thermal probing of thin polymeric films

 N. Vourdas , G. Karadimos , D. Goustouridis , E. Gogolides , Ag. Boudouvis , et al.
Journal of Applied Polymer Science, 2006, pp.102, 5 (2006) 4764-4774
Article dans une revue hal-00462524v1
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Vérification de l'exactitude des indices optiques des couches minces optimisées : relations de Kramers-Kronig

 Ayse Akbalik , Jean-Hervé Tortai , Patrick Schiavone
ROADEF 2010, Congrès de la Société Française de Recherche Opérationnelle et d'Aide à la Décision, Feb 2010, Toulouse, France
Communication dans un congrès hal-00509747v1

Can we minimize the mold deformation during a NIL process?

 C. Perret , C. Gourgon , F. Lazzarino , J.H. Tortai , G. Micouin , et al.
Micro and Nano Engineering Conference, 2002, Lugano, Japan
Communication dans un congrès hal-00486358v1
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Inverse problem solving and optical index determination of resist films by ellipsometry

 Jean-Hervé Tortai , Ayse Akbalik , Sébastien Soulan , Patrick Schiavone
Microelectronic Engineering, 2010, 87 (5-8), pp.893-898. ⟨10.1016/j.mee.2009.12.023⟩
Article dans une revue hal-00462239v1

Application of cubic spline models in electron-beam lithography

 Nader Jedidi , Jean-Herve Tortai , Thiago Figueiro , Patrick Schiavone
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2015, 33 (4), pp.041602. ⟨10.1116/1.4926631⟩
Article dans une revue hal-02362221v1
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Hybridization of ellipsometry and Xps energy loss: robust band gap and broadband optical constants determination of SiGe, HfON and MoOx thin films

 Théo Levert , Alter Zakhtser , Julien Duval , Chloé Raguenez , Stéphane Verdier , et al.
Microelectronic Engineering, 2023, 283, pp.112117. ⟨10.2139/ssrn.4554544⟩
Article dans une revue hal-04253891v1

Improvement of Electron Beam Lithography modeling for overdose exposures by using Dill transformation

 Mohamed Abaidi , Mohamed Saib , Jean-Hervé Tortai , Patrick Schiavone
SPIE Photomask Technology, 2016, San Jose, United States. ⟨10.1117/12.2240928⟩
Communication dans un congrès hal-01882467v1

Sensitivity analysis for accurate determination of PSFParameters

 J.H. Tortai , T. Figueiro , P. Schiavone
MNE 2011, Sep 2011, BERLIN, Germany
Communication dans un congrès hal-00634178v1

Comparison of PSF for non CAR and CAR resists in E-Beam lithography

 J.H. Tortai , T. Figueiro , L. Martin , P. Schiavone
EIPBN2011, May 2011, Las Vegas, United States
Communication dans un congrès hal-00634176v1

Study and Development of Polymer Destabilization by Capillary NIL: Effect of Charges

 C. Masclaux , C. Gourgon , S. Böhme , J.H. Tortai , S. Labau
Micro- and Nano-Engineering conference- MNE 2011, Sep 2011, Berlin, Germany
Communication dans un congrès hal-00641445v1

UV impact on the optical properties of thin films of positive tone chemically amplified resist.

 J.H. Tortai , H. Trouvé , S. Soulan , Ayse Akbalik
In Proceedings MNE 2008, Micro and Nano Engineering. Athens, Greece., Sep 2008, Greece
Communication dans un congrès hal-00385126v1

Real-time demolding characterization of high throughput imprint

 T. Leveder , S. Landis , L. Davoust , S. Soulan , J.H. Tortai , et al.
Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), May 2007, denver, United States
Communication dans un congrès hal-00394558v1
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