Accéder directement au contenu

Jean-Paul Booth

278
Documents

Présentation

**Research interests** Physics and chemistry of electrical discharges in reactive gases and their interaction with surfaces. Development of novel diagnostic techniques for reactive plasmas : optical techniques for measuring reactive species densities and kinetics, electric fields, and electrical plasma measurements. Laser-induced fluorescence, Ion Flux Probes, cavity ring-down spectroscopy, broad-band absorption spectroscopy, microwave resonance techniques for electron density measurements. Development of sensors for in-situ control of industrial plasma processes. Physics of capacitively-coupled radiofrequency plasmas : tailored voltage waveform excitation for control of ion and electron fluxes and energy distributions. Gas breakdown in RF fields. **Brief vitae** *2000-Present* : Directeur de Recherche, CNRS at LPP, except : *2006-2008* : Technical Director, Lam Research Corp, Fremont, CA, USA *1990-2000* : Chargé de Recherche, CNRS, Laboratoire de Spectrométrie Physique, Grenoble *1988-1990* : Post-doctoral researcher, CNRS/CNET, Meylan, France *1985-1988* : D. Phil., Physical Chemistry Laboratory, Oxford University, UK *1980-1984* : BA &amp; MA, Chemistry, Oxford University, UK **Distinctions :** *2010* : Fellow of [AVS](https://www.avs.org/Awards-Recognition/Society-Honors/Fellow-of-the-Society) *1984* : Physical Chemistry Part II Thesis Prize, Oxford University *1980-1983* : Stapeldon Scholarship to Exeter College, Oxford **Editorial responsabilities and Conference organisation** Associate Editor of IoP journal [Plasma Sources, Science and Technology](http://iopscience.iop.org/journal/0963-0252/page/Editorial%20Board) Chair, [International Workshop on Oxygen Plasma Kinetics 2016](http://langmuir.raunvis.hi.is/~tumi/wox.html) Chair, Laser-Aided Plasma Diagnostics [2013](<http://plasma.physics.wisc.edu/conferences/LAPD-2013 />)[&amp; 2015](http://lapd17.qe.eng.hokudai.ac.jp/) Program Commitee, [ICPP 2014](http://www.ipfn.ist.utl.pt/ICPP2014/Welcome_to_ICPP_2014.html) Secretary, [AVS Plasma Science and Technology Division, 2012-13](http://www.avs.org/Divisions/pstd) Chair, International Conference on Phenomena in Ionised Gases, 2009
**Research interests** Physics and chemistry of electrical discharges in reactive gases and their interaction with surfaces. Development of novel diagnostic techniques for reactive plasmas : optical techniques for measuring reactive species densities and kinetics, electric fields, and electrical plasma measurements. Laser-induced fluorescence, Ion Flux Probes, cavity ring-down spectroscopy, broad-band absorption spectroscopy, microwave resonance techniques for electron density measurements. Development of sensors for in-situ control of industrial plasma processes. Physics of capacitively-coupled radiofrequency plasmas : tailored voltage waveform excitation for control of ion and electron fluxes and energy distributions. Gas breakdown in RF fields. **Brief vitae** *2000-Present* : Directeur de Recherche, CNRS at LPP, except : *2006-2008* : Technical Director, Lam Research Corp, Fremont, CA, USA *1990-2000* : Chargé de Recherche, CNRS, Laboratoire de Spectrométrie Physique, Grenoble *1988-1990* : Post-doctoral researcher, CNRS/CNET, Meylan, France *1985-1988* : D. Phil., Physical Chemistry Laboratory, Oxford University, UK *1980-1984* : BA &amp; MA, Chemistry, Oxford University, UK **Distinctions :** *2010* : Fellow of [AVS](https://www.avs.org/Awards-Recognition/Society-Honors/Fellow-of-the-Society) *1984* : Physical Chemistry Part II Thesis Prize, Oxford University *1980-1983* : Stapeldon Scholarship to Exeter College, Oxford **Editorial responsabilities and Conference organisation** Associate Editor of IoP journal [Plasma Sources, Science and Technology](http://iopscience.iop.org/journal/0963-0252/page/Editorial%20Board) Chair, [International Workshop on Oxygen Plasma Kinetics 2016](http://langmuir.raunvis.hi.is/~tumi/wox.html) Chair, Laser-Aided Plasma Diagnostics [2013](<http://plasma.physics.wisc.edu/conferences/LAPD-2013 />)[&amp; 2015](http://lapd17.qe.eng.hokudai.ac.jp/) Program Commitee, [ICPP 2014](http://www.ipfn.ist.utl.pt/ICPP2014/Welcome_to_ICPP_2014.html) Secretary, [AVS Plasma Science and Technology Division, 2012-13](http://www.avs.org/Divisions/pstd) Chair, International Conference on Phenomena in Ionised Gases, 2009

Publications

Image document

Oxygen atom and ozone kinetics in the afterglow of a pulse-modulated DC discharge in pure O2 : an experimental and modelling study of surface mechanisms and ozone vibrational kinetics

Jean-Paul Booth , Olivier Guaitella , Shu Zhang , Dmitry Lopaev , S Zyryanov
Plasma Sources Science and Technology, 2023, 32 (9), pp.095016. ⟨10.1088/1361-6595/acf956⟩
Article dans une revue hal-04217064v1
Image document

Potential stratospheric ozone depletion due to iodine injection from small satellites

Wuhu Feng , John M C Plane , Martyn P. Chipperfield , Alfonso Saiz-Lopez , Jean‐paul Booth
Geophysical Research Letters, 2023, 50 (7), pp.e2022GL102300. ⟨10.1029/2022GL102300⟩
Article dans une revue hal-03976025v1
Image document

Quenching of O2(b1Σg+) by O(3P) atoms. Effect of gas temperature

Jean-Paul Booth , A Chatterjee , O Guaitella , D Lopaev , S Zyryanov
Plasma Sources Science and Technology, 2022, 31 (6), pp.065012. ⟨10.1088/1361-6595/ac7749⟩
Article dans une revue hal-03721576v1
Image document

Foundations of plasma surface functionalization of polymers for industrial and biological applications

Jean-Paul Booth , Miran Mozetič , Anton Nikiforov , Christian Oehr
Plasma Sources Science and Technology, 2022, 31 (10), pp.103001. ⟨10.1088/1361-6595/ac70f9⟩
Article dans une revue hal-03822222v1
Image document

Chemical kinetics and density measurements of OH in an atmospheric pressure He + O2 + H2O radiofrequency plasma

Alexandra Brisset , Andrew Gibson , Sandra Schröter , Kari Niemi , Jean-Paul Booth
Journal of Physics D: Applied Physics, 2021, 54 (28), pp.285201. ⟨10.1088/1361-6463/abefec⟩
Article dans une revue hal-03200547v1
Image document

Fast quenching of metastable O2 (a 1Δg ) and O2 (b 1Σg+ ) molecules by O( 3P) atoms at high temperature

Andrey Vladimirovich Volynets , Dmitry Lopaev , T Rakhimova , O Proshina , Alexander Chukalovsky
Plasma Sources Science and Technology, 2020, ⟨10.1088/1361-6595/abbf92⟩
Article dans une revue hal-02966916v1
Image document

Determination of absolute O(3P) and O2(a1Δg) densities and kinetics in fully modulated O2 dc glow discharges from the O2(X3Σg-) afterglow recovery dynamics

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , Joao Santos Sousa , Dmitry Lopaev
Plasma Sources Science and Technology, 2020, 29, pp.115009. ⟨10.1088/1361-6595/abb5e7⟩
Article dans une revue hal-02933186v1
Image document

Rydberg spectra of singlet metastable states of O2

C. Western , Jean-Paul Booth , A. Chatterjee , N. de Oliveira
Molecular Physics, 2020, pp.e1741714. ⟨10.1080/00268976.2020.1741714⟩
Article dans une revue hal-02544881v1
Image document

Experimental demonstration of multifrequency impedance matching for tailored voltage waveform plasmas

Junkang Wang , Sébastien Diné , Jean-Paul Booth , Erik Johnson
Journal of Vacuum Science & Technology A, 2019, 37 (2), pp.021303. ⟨10.1116/1.5056205⟩
Article dans une revue hal-02081466v1
Image document

Oxygen atom kinetics in CO2 plasmas ignited in a DC glow discharge

A. S Morillo-Candas , Cyril Drag , Jean-Paul Booth , T. C Dias , V. Guerra
Plasma Sources Science and Technology, 2019, 28 (7), pp.075010. ⟨10.1088/1361-6595/ab2b84⟩
Article dans une revue hal-02272107v1
Image document

Oxygen (3P) atom recombination on a Pyrex surface in an O2 plasma

Jean-Paul Booth , Olivier Guaitella , Abhyuday Chatterjee , Cyril Drag , V. Guerra
Plasma Sources Science and Technology, 2019, 28 (5), pp.055005. ⟨10.1088/1361-6595/ab13e8⟩
Article dans une revue hal-02272108v1
Image document

Chemical kinetics in an atmospheric pressure helium plasma containing humidity

Sandra Schröter , Apiwat Wijaikhum , Andrew Gibson , Andrew West , Helen Davies
Physical Chemistry Chemical Physics, 2018, 20 (37), pp.24263-24286. ⟨10.1039/c8cp02473a⟩
Article dans une revue hal-02266591v1

Effect of frequency on the uniformity of symmetrical RF CCP discharges

Yue Liu , Jean-Paul Booth , Pascal Chabert
Plasma Sources Science and Technology, 2018, 27 (5), pp.055012. ⟨10.1088/1361-6595/aabfb4⟩
Article dans une revue hal-01895562v1

Multi frequency matching for voltage waveform tailoring

Frederik Schmidt , J. Schulze , Erik Johnson , Jean-Paul Booth , D. Keil
Plasma Sources Science and Technology, 2018, 27 (9), pp.095012. ⟨10.1088/1361-6595/aad2cd⟩
Article dans une revue hal-02271985v1
Image document

Calculated electron impact dissociation cross sections for molecular chlorine (Cl 2 )

James R. Hamilton , Jonathan Tennyson , Jean-Paul Booth , Timo Gans , Andrew Gibson
Plasma Sources Science and Technology, 2018, 27 (9), pp.095008. ⟨10.1088/1361-6595/aada32⟩
Article dans une revue hal-01890202v1

Kinetics of highly vibrationally excited O2 (X) molecules in inductively-coupled oxygen plasmas

Adriana Annusova , Daniil Marinov , Jean-Paul Booth , Nishant Sirse , Mrio Lino Da Silva
Plasma Sources Science and Technology, 2018, 27 (4), pp.045006. ⟨10.1088/1361-6595/aab47d⟩
Article dans une revue hal-01895558v1

Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases

Z. Donkó , A. Derzsi , Ihor Korolov , P. Hartmann , S. Brandt
Plasma Physics and Controlled Fusion, 2018, 60 (1), pp.014010. ⟨10.1088/1361-6587/aa8378⟩
Article dans une revue hal-01895567v1

Plasma non-uniformity in a symmetric radiofrequency capacitively-coupled reactor with dielectric side-wall: a two dimensional particle-in-cell/Monte Carlo collision simulation

Yue Liu , Jean-Paul Booth , Pascal Chabert
Plasma Sources Science and Technology, 2018, 27 (2), pp.025006. ⟨10.1088/1361-6595/aaa86e⟩
Article dans une revue hal-01895556v1

QDB: a new database of plasma chemistries and reactions

Jonathan Tennyson , Sara Rahimi , Christian Hill , Lisa Tse , Anuradha Vibhakar
Plasma Sources Science and Technology, 2017, 26 (5), pp.055014. ⟨10.1088/1361-6595/aa6669⟩
Article dans une revue hal-01895568v1

Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: vibrational kinetics and negative ions control

P. Diomede , Bastien Bruneau , S. Longo , E.V. Johnson , Jean-Paul Booth
Plasma Sources Science and Technology, 2017, 26 (7), pp.075007. ⟨10.1088/1361-6595/aa752c⟩
Article dans une revue hal-01895582v1

Measurement of the isotope shift of the 2p4 -> 2p33p 3P2 two-photon transition of O I and a revision of the triplet energy levels of atomic oxygen

Daniil Marinov , Jean-Paul Booth , Cyril Drag , Christophe Blondel
Journal of Physics B: Atomic, Molecular and Optical Physics, 2017, 50 (6), pp.065003. ⟨10.1088/1361-6455/aa5a88⟩
Article dans une revue hal-01895572v1

Power coupling mode transitions induced by tailored voltage waveforms in capacitive oxygen discharges

A. Derzsi , Bastien Bruneau , Andrew Gibson , Erik Johnson , D. O'Connell
Plasma Sources Science and Technology, 2017, 26 (3), pp.034002. ⟨10.1088/1361-6595/aa56d6⟩
Article dans une revue hal-01895575v1

Controlled production of atomic oxygen and nitrogen in a pulsed radio-frequency atmospheric-pressure plasma

J. Dedrick , Sandra Schröter , K. Niemi , A. Wijaikhum , E. Wagenaars
Journal of Physics D: Applied Physics, 2017, 50 (45), pp.455204. ⟨10.1088/1361-6463/aa8da2⟩
Article dans une revue hal-01895585v1

The role of thermal energy accommodation and atomic recombination probabilities in low pressure oxygen plasmas

Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans
Plasma Physics and Controlled Fusion, 2017, 59 (2), pp.024004. ⟨10.1088/1361-6587/59/2/024004⟩
Article dans une revue hal-01895577v1

Experimental and simulation study of a capacitively coupled oxygen discharge driven by tailored voltage waveforms

A. Derzsi , Trevor Lafleur , Jean-Paul Booth , Ihor Korolov , Zoltan Donko
Plasma Sources Science and Technology, 2016, 25 (1), pp.015004. ⟨10.1088/0963-0252/25/1/015004⟩
Article dans une revue hal-01549577v1

Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4

S. Brandt , B. Berger , E. Schüngel , Ihor Korolov , A. Derzsi
Plasma Sources Science and Technology, 2016, 25 (4), pp.045015. ⟨10.1088/0963-0252/25/4/045015⟩
Article dans une revue hal-01549325v1

Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas

Bastien Bruneau , Ihor Korolov , Trevor Lafleur , T. Gans , D. O'Connell
Journal of Applied Physics, 2016, 119 (16), pp.163301. ⟨10.1063/1.4947453⟩
Article dans une revue hal-01549329v1

A computational analysis of the vibrational levels of molecular oxygen in low-pressure stationary and transient radio-frequency oxygen plasma

Efe Kemaneci , Jean-Paul Booth , Pascal Chabert , Jan van Dijk , Thomas Mussenbrock
Plasma Sources Science and Technology, 2016, 25 (2), pp.025025. ⟨10.1088/0963-0252/25/2/025025⟩
Article dans une revue hal-01549335v1

Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects

E. Schüngel , Ihor Korolov , Bastien Bruneau , A. Derzsi , E.V. Johnson
Journal of Physics D: Applied Physics, 2016, 49 (26), pp.265203. ⟨10.1088/0022-3727/49/26/265203⟩
Article dans une revue hal-01549338v1
Image document

High sensitivity ultra-broad-band absorption spectroscopy of inductively coupled chlorine plasma

Daniil Marinov , Mickaël Foucher , Ewen Campbell , Mark Brouard , Pascal Chabert
Plasma Sources Science and Technology, 2016, 25 (3), pp.035019 ⟨10.1088/0963-0252/25/3/035019⟩
Article dans une revue hal-01346016v1

Pressure broadening of atomic oxygen two-photon absorption laser induced fluorescence

Daniil Marinov , Cyril Drag , Christophe Blondel , Olivier Guaitella , Judith Golda
Plasma Sources Science and Technology, 2016, 25 (6), pp.06LT03. ⟨10.1088/0963-0252/25/6/06LT03⟩
Article dans une revue hal-01549339v1

Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4

Bastien Bruneau , Trevor Lafleur , T. Gans , D. O'Connell , Arthur Greb
Plasma Sources Science and Technology, 2016, 25 (1), pp.01LT02. ⟨10.1088/0963-0252/25/1/01LT02⟩
Article dans une revue hal-01549332v1

Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms

Bastien Bruneau , Trevor Lafleur , Jean-Paul Booth , Erik Johnson
Plasma Sources Science and Technology, 2016, 25 (2), pp.025006. ⟨10.1088/0963-0252/25/2/025006⟩
Article dans une revue hal-01549334v1

Strong Ionization Asymmetry in a Geometrically Symmetric Radio Frequency Capacitively Coupled Plasma Induced by Sawtooth Voltage Waveforms

Bastien Bruneau , T. Gans , D. O'Connell , Arthur Greb , E.V. Johnson
Physical Review Letters, 2015, 114, pp.125002. ⟨10.1103/PhysRevLett.114.125002⟩
Article dans une revue hal-01549359v1

Gas temperature measurements in oxygen plasmas by high-resolution Two-Photon Absorption Laser-induced Fluorescence

Jean-Paul Booth , Daniil Marinov , Mickaël Foucher , Olivier Guaitella , D. Bresteau
Journal of Instrumentation, 2015, 10 (11), pp.C11003. ⟨10.1088/1748-0221/10/11/C11003⟩
Article dans une revue hal-01549365v1

Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas

Bastien Bruneau , T. Novikova , Trevor Lafleur , Jean-Paul Booth , E.V. Johnson
Plasma Sources Science and Technology, 2015, 24 (1), pp.015021. ⟨10.1088/0963-0252/24/1/015021⟩
Article dans une revue hal-01549355v1

TALIF measurements of oxygen atom density in the afterglow of a capillary nanosecond discharge

A.V. Klochko , J. Lemainque , Jean-Paul Booth , Svetlana Starikovskaia
Plasma Sources Science and Technology, 2015, 24 (2), pp.025010. ⟨10.1088/0963-0252/24/2/025010⟩
Article dans une revue hal-01549360v1

Highly vibrationally excited O2 molecules in low-pressure inductively-coupled plasmas detected by high sensitivity ultra-broad-band optical absorption spectroscopy

Mickaël Foucher , Daniil Marinov , Emile Carbone , Pascal Chabert , Jean-Paul Booth
Plasma Sources Science and Technology, 2015, 24 (4), pp.042001. ⟨10.1088/0963-0252/24/4/042001⟩
Article dans une revue hal-01549357v1

Electron transport parameters in NF3

V. A. Lisovskiy , V. D. Yegorenkov , P. Ogloblina , Jean-Paul Booth , S. Martins
Journal of Physics D: Applied Physics, 2014, 47 (11), pp.115203. ⟨10.1088/0022-3727/47/11/115203⟩
Article dans une revue hal-01549378v1

Radio-frequency capacitively coupled plasmas in hydrogen excited by tailored voltage waveforms: comparison of simulations with experiments

P. Diomede , D. J. Economou , Trevor Lafleur , Jean-Paul Booth , S. Longo
Plasma Sources Science and Technology, 2014, 23 (6), pp.065049. ⟨10.1088/0963-0252/23/6/065049⟩
Article dans une revue hal-01549381v1

Electron heating in capacitively coupled plasmas revisited

Trevor Lafleur , Pascal Chabert , Jean-Paul Booth
Plasma Sources Science and Technology, 2014, 23 (3), pp.035010. ⟨10.1088/0963-0252/23/3/035010⟩
Article dans une revue hal-01549379v1

Ground state bromine atom density measurements by two-photon absorption laser-induced fluorescence

Nishant Sirse , Mickaël Foucher , Pascal Chabert , Jean-Paul Booth
Plasma Sources Science and Technology, 2014, 23 (6), pp.062003. ⟨10.1088/0963-0252/23/6/062003⟩
Article dans une revue hal-01549574v1

Equivalence of the hard-wall and kinetic-fluid models of collisionless electron heating in capacitively coupled discharges

Trevor Lafleur , Pascal Chabert , Miles Turner , Jean-Paul Booth
Plasma Sources Science and Technology, 2014, 23 (1), pp.015016. ⟨10.1088/0963-0252/23/1/015016⟩
Article dans une revue hal-01549398v1

Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms

Bastien Bruneau , T. Novikova , Trevor Lafleur , Jean-Paul Booth , E.V. Johnson
Plasma Sources Science and Technology, 2014, 23 (6), pp.065010. ⟨10.1088/0963-0252/23/6/065010⟩
Article dans une revue hal-01549377v1

Global (volume-averaged) model of inductively coupled chlorine plasma: Influence of Cl wall recombination and external heating on continuous and pulse-modulated plasmas

Efe Kemaneci , Emile Carbone , Jean-Paul Booth , Wouter Graef , Jan van Dijk
Plasma Sources Science and Technology, 2014, 23 (4), pp.045002. ⟨10.1088/0963-0252/23/4/045002⟩
Article dans une revue hal-01549388v1

Theory for the self-bias formation in capacitively coupled plasmas excited by arbitrary waveforms

Trevor Lafleur , Pascal Chabert , M.M. Turner , Jean-Paul Booth
Plasma Sources Science and Technology, 2013, 22 (6), pp.065013. ⟨10.1088/0963-0252/22/6/065013⟩
Article dans une revue hal-01549415v1

Anomalous collisionality in low-pressure plasmas

Trevor Lafleur , Pascal Chabert , M.M. Turner , Jean-Paul Booth
Physics of Plasmas, 2013, 20 (12), pp.124503. ⟨10.1063/1.4859155⟩
Article dans une revue hal-01549421v1

Capacitively coupled radio-frequency plasmas excited by tailored voltage waveforms

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth
Plasma Physics and Controlled Fusion, 2013, 55 (12), pp.124002. ⟨10.1088/0741-3335/55/12/124002⟩
Article dans une revue hal-01549416v1

Normal regime of the weak-current mode of an rf capacitive discharge

V. A. Lisovskiy , V. D. Yegorenkov , E. Artushenko , Jean-Paul Booth , S. Martins
Plasma Sources Science and Technology, 2013, 22 (1), pp.015018. ⟨10.1088/0963-0252/22/1/015018⟩
Article dans une revue hal-01549408v1

Secondary electron induced asymmetry in capacitively coupled plasmas

Trevor Lafleur , Pascal Chabert , Jean-Paul Booth
Journal of Physics D: Applied Physics, 2013, 46, pp.135201. ⟨10.1088/0022-3727/46/13/135201⟩
Article dans une revue hal-01549417v1

Absolute atomic oxygen and nitrogen densities in radio-frequency driven atmospheric pressure cold plasmas: Synchrotron vacuum ultra-violet high-resolution Fourier-transform absorption measurements

K. Niemi , D. O'Connell , N. de Oliveira , D. Joyeux , L. Nahon
Applied Physics Letters, 2013, 103 (3), pp.034102. ⟨10.1063/1.4813817⟩
Article dans une revue hal-01549425v1

Ozone kinetics in low-pressure discharges: vibrationally excited ozone and molecule formation on surfaces

Daniil Marinov , V. Guerra , Olivier Guaitella , Jean-Paul Booth , Antoine Rousseau
Plasma Sources Science and Technology, 2013, 22, pp.055018. ⟨10.1088/0963-0252/22/5/055018⟩
Article dans une revue hal-01549572v1

Chlorine atom densities in the (3p5)2 P01/2 excited spin-orbit state measured by two-photon absorption laser-induced fluorescence in a chlorine inductively coupled plasma

Nishant Sirse , Jean-Paul Booth , Pascal Chabert , A. Surzhykov , P. Indelicato
Journal of Physics D: Applied Physics, 2013, 46 (29), pp.295203. ⟨10.1088/0022-3727/46/29/295203⟩
Article dans une revue hal-01549418v1

Fine-structure-resolved electron collisions from chlorine atoms in the (3p5)2P3/2o and (3p5)2P1/2o states

Yang Wang , Oleg Zatsarinny , Klaus Bartschat , Jean-Paul Booth
Physical Review A : Atomic, molecular, and optical physics [1990-2015], 2013, 87, pp.022703. ⟨10.1103/PhysRevA.87.022703⟩
Article dans une revue hal-01549405v1

Radio-frequency capacitively coupled plasmas excited by tailored voltage waveforms: comparison of experiment and particle-in-cell simulations

Pierre-Alexandre Delattre , Trevor Lafleur , Erik Johnson , Jean-Paul Booth
Journal of Physics D: Applied Physics, 2013, 46, pp.235201. ⟨10.1088/0022-3727/46/23/235201⟩
Article dans une revue hal-01549413v1

Direct observation of ozone formation on SiO2 surfaces in O2 discharges

Daniil Marinov , Olivier Guaitella , Jean-Paul Booth , Antoine Rousseau
Journal of Physics D: Applied Physics, 2013, 46, pp.032001. ⟨10.1088/0022-3727/46/3/032001⟩
Article dans une revue hal-01549402v1

Radio frequency current-voltage probe for impedance and power measurements in multi-frequency unmatched loads

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth , Sébastien Diné
Review of Scientific Instruments, 2013, 84, pp.015001. ⟨10.1063/1.4773540⟩
Article dans une revue hal-01549400v1

Frequency dependence of the electrical asymmetry effect in dual-frequency capacitively coupled discharges

Jean-Paul Booth , Trevor Lafleur
Applied Physics Letters, 2013, 102, pp.154104. ⟨10.1063/1.4802241⟩
Article dans une revue hal-01549406v1

Tailored voltage waveform deposition of Microcrystalline Silicon thin films from hydrogen-diluted silane and silicon tetrafluoride: optoelectronic properties of films

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth
Japanese Journal of Applied Physics, 2012, 51, pp.08HF01. ⟨10.1143/JJAP.51.08HF01⟩
Article dans une revue hal-01549433v1

Hydrogenated microcrystalline silicon thin films deposited by RF-PECVD under low ion bombardment energy using voltage waveform tailoring

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth
Journal of Non-Crystalline Solids, 2012, 358 (17), pp.1974-1977. ⟨10.1016/j.jnoncrysol.2012.01.014⟩
Article dans une revue hal-01549432v1

Control of the ion flux and ion energy in CCP discharges using non-sinusoidal voltage waveforms

Trevor Lafleur , Jean-Paul Booth
Journal of Physics D: Applied Physics, 2012, 45, pp.395203. ⟨10.1088/0022-3727/45/39/395203⟩
Article dans une revue hal-01549449v1

Microcrystalline silicon solar cells deposited using a plasma process excited by tailored voltage waveforms

E.V. Johnson , Pierre-Alexandre Delattre , Jean-Paul Booth
Applied Physics Letters, 2012, 100, pp.133504. ⟨10.1063/1.3699222⟩
Article dans une revue hal-01549437v1

Absolute atomic chlorine densities in a Cl2 ICP determined by Two-Photon Laser Induced Fluorescence with a new calibration method

Jean-Paul Booth , Yasmina Azamoum , Nishant Sirse , Pascal Chabert
Journal of Physics D: Applied Physics, 2012, 45, pp.195201. ⟨10.1088/0022-3727/45/19/195201⟩
Article dans une revue hal-01549434v1

Separate control of the ion flux and ion energy in capacitively coupled rf discharges using voltage waveform tailoring

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth
Applied Physics Letters, 2012, 101, pp.124104. ⟨10.1063/1.4754692⟩
Article dans une revue hal-01549435v1

Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms

Trevor Lafleur , R.W. Boswell , Jean-Paul Booth
Applied Physics Letters, 2012, 100, pp.194101. ⟨10.1063/1.4712128⟩
Article dans une revue hal-01549438v1

A dc-pulsed capacitively coupled planar Langmuir probe for plasma process diagnostics and monitoring

V. Samara , Jean-Paul Booth , J.-F. de Marneffe , A.P. Milenin , M. Brouri
Plasma Sources Science and Technology, 2012, 21, pp.065004. ⟨10.1088/0963-0252/21/6/065004⟩
Article dans une revue hal-01549444v1

Control of Nanocrystalline Silicon Growth Phase and Deposition Rate through Voltage Waveform Tailoring during PECVD

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth
MRS Online Proceedings Library, 2011, 1339, pp.mrss11-1339-s04-5. ⟨10.1557/opl.2011.993⟩
Article dans une revue hal-01549456v1

Surface loss rates of H and Cl atoms in an inductively coupled plasma etcher using time-resolved electron density and optical emission measurements

G. A. Curley , L. Gatilova , S. Guilet , S. Bouchoule , G. S. Gogna
Journal of Vacuum Science & Technology A, 2010, 28 (2), pp.360-372. ⟨10.1116/1.3330766⟩
Article dans une revue hal-01549465v1

Dual-frequency capacitive radiofrequency discharges: effect of low-frequency power on electron density and ion flux

Jean-Paul Booth , G. Curley , D. Marić , Pascal Chabert
Plasma Sources Science and Technology, 2010, 19, pp.015005. ⟨10.1088/0963-0252/19/1/015005⟩
Article dans une revue hal-01549466v1

Plasmas froids

Jean-Paul Booth , Pascal Chabert
FlashX, 2010, 12, pp.3-5
Article dans une revue hal-02570443v1

Electron drift velocity in SF6 in strong electric fields determined from rf breakdown curves

V. Lisovskiy , V. Yegorenkov , Jean-Paul Booth , K. Landry , D. Douai
Journal of Physics D: Applied Physics, 2010, 43, pp.385203. ⟨10.1088/0022-3727/43/38/385203⟩
Article dans une revue hal-01549464v1

Nanocrystalline silicon film growth morphology control through RF waveform tailoring

E.V. Johnson , T. Verbeke , J-C Vanel , Jean-Paul Booth
Journal of Physics D: Applied Physics, 2010, 43, pp.412001. ⟨10.1088/0022-3727/43/41/412001⟩
Article dans une revue hal-01549485v1

Electron transport coefficients in mixtures of CF4 and CF2 radicals

Zd Nikitovic , Vd Stojanovic , Jean-Paul Booth , Zl Petrovic
Plasma Sources Science and Technology, 2009, 18, pp.035008. ⟨10.1088/0963-0252/18/3/035008⟩
Article dans une revue hal-01549497v1

Chlorine dissociation fraction in an inductively coupled plasma measured by ultraviolet absorption spectroscopy

F. Neuilly , J.P Booth , L. Vallier
Journal of Vacuum Science and Technology, 2002, pp.A20(1), 225, (2002)
Article dans une revue hal-00475898v1
Image document

Absolute fluorine atoms concentration in fluorocarbon plasma determined from CF2 loss kinetics

Gilles Cunge , Pascal Chabert , Jean-Paul Booth
Journal of Applied Physics, 2001, 89 (12), pp.7750. ⟨10.1063/1.1371940⟩
Article dans une revue hal-00475790v1

Reactive ion etching of SiC in SF6 gas: detection of CF, CF2 and SiF2 etch products

Pascal Chabert , G. Cunge , Jean-Paul Booth
Applied Physics Letters, 2001, pp.79, 916
Article dans une revue hal-00475792v1

Improving our understanding of plasma-surface interactions through in-situ measurements

Jean-Paul Booth
Dry Process Symposium, Nov 2023, Nagoya, Japan
Communication dans un congrès hal-04397985v1

Probing surface reactivity in plasmas- is it valid to use a constant reaction probability model?

Jean-Paul Booth
GEC Gaseous Electronics Conference, American Physical Society, Oct 2023, Ann Arbor, MI, USA, United States
Communication dans un congrès hal-04398014v1

What We Still Don't Know About Plasmas in Simple Diatomic Gases- or Using a DC Plasma in Pure O2 as an Ideal Test-Bed for Experimental Validation of Simulations

Jean-Paul Booth
AVS Symposium, Nov 2022, Pittsburgh, PA, United States
Communication dans un congrès hal-04398035v1

Laser Cavity Ringdown Spectroscopy of Oxygen Plasmas: Direct Measurement of the Densities of Oxygen Atoms, Ozone and Negative Ions and Gas Temperature

Jean-Paul Booth
Online Low Temperature Plasma Seminar, May 2021, On line, United States
Communication dans un congrès hal-03317442v1

A new look at oxygen plasmas : Quantitative VUV and IR absorption spectroscopy of reactive intermediates

Jean-Paul Booth
JSM -Journees de Spectroscopie Moleculaire, Universite de Rennes/ Societe Francaise de Physique, Jun 2021, Rennes, France
Communication dans un congrès hal-04398064v1

Filling the Gaps in Our Understanding of Plasmas in Simple Diatomic Gases- Combining a DC Plasma in Pure O2 with Multiple Advanced Diagnostics for Experimental Validation of Simulations

Jean-Paul Booth
IS Plasma, University of Nagoya, Mar 2021, Nagoya (on line), Japan
Communication dans un congrès hal-04398109v1
Image document

Filling the Gaps in Our Understanding of Plasmas in Simple Diatomic Gases-Combining a DC Plasma in Pure O2 with Multiple Advanced Diagnostics for Experimental Validation of Simulations

Jean-Paul Booth , A Chatterjee , O Guaitella , D Lopaev , S Zyryanov
IS Plasma 2021, Mar 2021, Nagoya, Japan
Communication dans un congrès hal-03317344v1

Experimental and numerical investigation of an iodine plasma

Florian Marmuse , Benjamin Esteves , Cyril Drag , Jean-Paul Booth , Anne Bourdon
73rd Annual Gaseous Electronics Virtual Conference, Oct 2020, Virtual, United States
Communication dans un congrès hal-03322751v1

A NEW LOOK AT OXYGEN PLASMAS -QUANTITATIVE SPECTROSCOPY FOR RIGOROUS TESTING OF MODELS

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , Dmitry Lopaev , Sergey Zyryanov
International Symposium on the Physics of Ionized Gases, Aug 2020, Sabac, Serbia
Communication dans un congrès hal-03017283v1

Tailoring OH and O production in an atmospheric-pressure plasma in Helium with O2 and H2O admixtures

Erik Wagenaars , Alexandra Brisset , Sandra Schröter , Kari Niemi , Deborah O'Connell
GEC2020 Meeting of The American Physical Society, Oct 2020, San Diego, United States
Communication dans un congrès hal-03017258v1

A new look at Oxygen Plasmas – Quantitative Spectroscopy for rigorous testing of models

Jean-Paul Booth
SPIG - Symposium on Physics of Ionised Gases, Aug 2020, Sabac, Serbia. pp.1
Communication dans un congrès hal-04398151v1

Experimental Demonstration of Multifrequency Matching for Tailored Voltage Waveform Plasma Excitation

Sebastien Dine , Jean-Paul Booth , E.V. Johnson , Junkang Wang
International Conference on Phenomena in Ionised Gases, Jul 2019, Hokkaido, Japan
Communication dans un congrès hal-02341689v1

A Comprehensive Diagnostic Study of a DC Positive Column in O2: a test-bed for models of plasmas in a diatomic gas

Jean-Paul Booth
CESPC-Central European Symposium on Plasma Chemistry, May 2019, Gozd Martuljek, Slovenia
Communication dans un congrès hal-04398185v1

A comprehensive diagnostic study of a DC positive column in O2: a test-bed for models of plasmas in a diatomic gas

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , Cyril Drag , N. de Oliveira
Frontiers in low Temperature plasma simulation, May 2019, Bad Honnef, Germany
Communication dans un congrès hal-02341779v1

Novel diagnostics to unravel fundamental processes in oxygen plasmas

Jean-Paul Booth
ICAPT-7 : 7th International Conference on Advanced Plasma Technologies, Plasmadis, Feb 2019, Hue, Vietnam
Communication dans un congrès hal-04398232v1

XXXIV ICPIG & ICRP-10

Olivier Guaitella , Ana-Sofia Morillo-Candas , Tiago Dias , Edmond Baratte , P. Ogloblina
Influence of surfaces in the kinetic of CO2 plasma, Jul 2019, Sapporo, Hokkaido, Japan
Communication dans un congrès hal-02371063v1

A comprehensive diagnostic study of a DC positive column in O2: a test-bed for models of plasmas in a diatomic gas

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon
7th International Conference on Advanced Plasma Technologies, May 2019, Gozd Martuljek, Slovenia
Communication dans un congrès hal-02341781v1

Novel diagnostics to unravel fundamental processes in oxygen plasmas

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , Cyril Drag , Dmitry Lopaev
7th International Conference on Advanced Plasma Technologies, Feb 2019, Hue, Vietnam
Communication dans un congrès hal-02341778v1
Image document

Optical and electrical diagnostics in an iodine plasma

Florian Marmuse , Romain Lucken , Cyril Drag , Jean-Paul Booth , Anne Bourdon
36th International Electric Propulsion Conference (IEPC 2019), Sep 2019, Vienne, Austria
Communication dans un congrès hal-02341690v1

63rd Course of the International School of Quantum Electronics

Olivier Guaitella , Ana-Sofia Morillo-Candas , Cyril Drag , Jean-Paul Booth , Bart Klarenaar
Diagnostics to study vibrational excitation kinetics of CO2, Sep 2019, Erice, Italy
Communication dans un congrès hal-02371062v1

A Comprehensive Diagnostic Study of a DC Positive Column in O2: a test-bed for models of plasmas in a diatomic gas

Jean-Paul Booth
Frontiers in low Temperature plasma simulation, May 2019, Bad Honnef (Germany), Germany
Communication dans un congrès hal-04398198v1

Vacuum ultraviolet absorption spectroscopy of oxygen discharges

Jean-Paul Booth
3rd European Conference on Plasma Diagnostics, May 2019, Lisbon, Portugal
Communication dans un congrès hal-02341780v1

Effect of high surface-area on CO2 plasma kinetics

Ana-Sofia Morillo-Candas , C. Goncalves , Bart Klarenaar , Jean-Paul Booth , Cyril Drag
ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom
Communication dans un congrès hal-02342226v1

Multi-species experimental validation of plasma chemistry models at atmospheric pressure

Sandra Schröter , A. Wijiakaum , Andrew Gibson , Jérôme Bredin , K. Niemi
Frontiers in Low temperature Plasma Simulation, May 2018, Dublin, Ireland
Communication dans un congrès hal-02342228v1

Vacuum ultraviolet absorption spectroscopy of oxygen discharges

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon
The 8th International Workshop on Plasma Spectroscopy, Sep 2018, Oxford, United Kingdom
Communication dans un congrès hal-02342224v1

High−resolution VUV absorption diagnostics of discharges in oxygen

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon
20th Gaseous Electronics Meeting, Jun 2018, Magnetic Island, Townsville, Queensland, Australia
Communication dans un congrès hal-02341777v1

High-resolution VUV absorption diagnostics of discharges in oxygen

Jean-Paul Booth
GEM XX : 10th Gaseous Electronic Meeting, Jun 2018, Magnetic Island, Townsville, Queensland, Australia
Communication dans un congrès hal-04398249v1

Diagnostics of plasma neutral species in a very high frequency oxygen plasma with high sensitivity broadband absorption spectroscopy

J. Zhao , Peter L G Ventzek , Barton Lane , Toshihiko Iwao , Kiyotaka Ishibashi
AVS Symposium, Oct 2018, Long Beach, California, United States
Communication dans un congrès hal-02342227v1

Oxygen metastable molecule densities in inductively-coupled plasmas in pure O2 measured by VUV absorption

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon
71st Annual Gaseous Electronics Conference, Nov 2018, Portland, Oregon, United States
Communication dans un congrès hal-02342229v1

Comparison of gas temperature measurements with Raman, FTIR and HR-TALIF

Ana-Sofia Morillo-Candas , Bart Klarenaar , Marija Grofulovic , Cyril Drag , Jean-Paul Booth
ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom
Communication dans un congrès hal-02342225v1

Probing mechanisms in low-temperature reactive gas plasmas: towards improved models of industrial plasma etch processes

Jean-Paul Booth
2nd European Conference on Plasma Diagnostics, Apr 2017, Bordeaux, France
Communication dans un congrès hal-02573369v1

Single-mode nanosecond Ti: Sapphire laser for high resolution Two-photon Absorption Laser Induced-Fluorescence (TALIF)

Daniil Marinov , Christophe Blondel , Jean-Paul Booth , Olivier Guaitella , Pierre Lottigier
2017 European Conference on Lasers and Electro-Optics and European Quantum Electronics Conference, Jun 2017, Munich, Germany. Paper# CH_3_3
Communication dans un congrès hal-02588053v1

O atom kinetics in CO2 pulsed glow discharges

Ana-Sofia Morillo-Candas , Bart Klarenaar , Richard Engeln , Abhyuday Chatterjee , Jean-Paul Booth
XXXIII ICPIG- International Conference on Phenomena in Ionised Gases, Jul 2017, Estoril/Lisbon, Portugal
Communication dans un congrès hal-02593709v1

The role of translational and vibrational energy in processing plasmas: novel optical diagnostics of low-pressure Cl2 and O2 inductively-coupled plasmas

Jean-Paul Booth
1st Asia-Pacific Conference on Plasma Physics, Sep 2017, Chengdu, China
Communication dans un congrès hal-02573371v1

New methods to determine density, temperature and thermal accommodation coefficient of oxygen atoms

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , Andrew Gibson , Cyril Drag
International Workshop on Radio-frequency Plasmas, May 2017, Presqu ile de Giens, France
Communication dans un congrès hal-02593706v1

Kinetics of metastable states and atoms in DC discharges in pure O2: An experimental study

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon
23rd International Symposium on Plasma Chemistry, Jul 2017, Montréal, Canada
Communication dans un congrès hal-02593710v1

High resolution Two-photon Absorption Laser-Induced Fluorescence (TALIF) with a single-mode nanosecond Ti:Sapphire laser

Ana-Sofia Morillo-Candas , Pierre Lottigier , Cyril Drag , Christophe Blondel , Jean-Paul Booth
18th, Laser Aided Plasma Diagnostics, Sep 2017, Prague, Czech Republic, Unknown Region
Communication dans un congrès hal-02593711v1

Kinetics of atoms and metastable molecules in oxygen plasmas revisited: an experimental study

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , Ana-Sofia Morillo-Candas , Cyril Drag
10th EU-Japan Joint Symposium on Plasma Processing, Dec 2017, Okinawa, Japan
Communication dans un congrès hal-02573372v1

Vibrational excitation and temperature evolution in a pulsed CO2 discharge

Olivier Guaitella , Ana-Sofia Morillo-Candas , David Yap , Cyril Drag , Jean-Paul Booth
70th Annuel Gaseous Electronics Conference (GEC 2017), 2017, Pittsburgh, Pennsylvania, United States
Communication dans un congrès hal-02592107v1

2 Dimensional PIC/MCC simulations of RF CCPs with dielectric side wall: non-uniformity in electron heating

Yue Liu , Jean-Paul Booth , Pascal Chabert
International Workshop on Radio-Frequency Plasmas, May 2017, Presqu’ile de Giens, France
Communication dans un congrès hal-02593707v1

The role of surface interaction probabilities in reactive plasma modelling

Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans
ESCAMPIG, Jul 2016, Bratislava, Slovakia
Communication dans un congrès hal-02593684v1

Vibrational excitation in O2 and Cl2 inductively-coupled plasmas and DC discharges

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Andrew Gibson , Pascal Chabert
ESCAMPIG Workshop on electron processes active in low temperature plasmas, Jul 2016, Bratislava, Slovakia
Communication dans un congrès hal-02573355v1

Plasma-surface interaction: Heterogeneous processes of atmospheric gases

Daniil Marinov , Olivier Guaitella , V. Guerra , Jean-Paul Booth , Antoine Rousseau
ESCAMPIG, Jul 2016, Bratislava, Slovakia
Communication dans un congrès hal-02573354v1

Modelling and experimental validation of capacitively coupled plasmas in hydrogen

D. Diomede , Bastien Bruneau , Trevor Lafleur , D. J. Economou , S. Longo
EPS Plasma, Jul 2016, Leuven, Belgium
Communication dans un congrès hal-02573350v1

Modelling of tailored ion energy distributions for plasma processing applications

P. Diomede , Trevor Lafleur , Jean-Paul Booth , S. Longo , D. J. Economou
ESCAMPIG, Jul 2016, Bratislava, Slovakia
Communication dans un congrès hal-02573353v1

Dynamics of inductive plasmas in Cl2, O2 and Cl2/O2 mixtures: quantitative diagnostics and numerical modelling

Daniil Marinov , Mickaël Foucher , Andrew Gibson , Pascal Chabert , Jean-Paul Booth
IVC (International Vacuum Conference), Aug 2016, Busan, Korea, Unknown Region
Communication dans un congrès hal-02573356v1

Charged Particle Dynamics in Technological Radio Frequency Plasmas Operated in CF4

J. Schulze , B. Berger , S. Brandt , Bastien Bruneau , Y. Liu
AVS Symposium, Nov 2016, Nashville, United States
Communication dans un congrès hal-02573358v1

ELECTRON POWER ABSORPTION DYNAMICS AND ION ENERGY DISTRIBUTIONS IN CAPACITIVE DISCHARGES DRIVEN BY CUSTOMIZED VOLTAGE WAVEFORMS IN ARGON AND CF4

B. Berger , S. Brandt , J. Franek , E. Shuengel , M. Koepke
IEEE-ICOPS, Jun 2016, Banff, Canada
Communication dans un congrès hal-02593683v1

The importance of surface interaction probabilities in low pressure plasma simulations for process design

Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans
PESM (Plasma Etch and Strip for Microelectronics), May 2016, Grenoble, France
Communication dans un congrès hal-02593686v1

Quantitative Diagnostics of Inductively-coupled Radiofrequency Plasmas in Cl2, O2 and mixtures

Jean-Paul Booth , Mickaël Foucher , Andrew Gibson , Daniil Marinov
International Symposium on Gas Kinetics and Related Phenomena, Jul 2016, York, United Kingdom
Communication dans un congrès hal-02593687v1

Translational and Vibrational Energy in Cl2 and O2 Plasmas Probed by Innovative Optical Diagnostics

Jean-Paul Booth , Daniil Marinov , Mickaël Foucher , Olivier Guaitella , Cyril Drag
AVS Symposium, Nov 2016, Nashville, United States
Communication dans un congrès hal-02573357v1

Reactive species in humidity containing atmospheric pressure plasma jets − Numerical and experimental investigations

Sandra Schröter , Jérôme Bredin , A. West , J. Dedrick , K. Niemi
GEC, Oct 2016, Bochum, Germany
Communication dans un congrès hal-02593693v1

Heating dynamics and control of energy distribution functions in capacitive discharges driven by tailored voltage waveforms

J. Schulze , B. Berger , S. Brandt , M. Koepke , T. Mussenbrock
International Conference on Plasma Physics ICPP, Jun 2016, Kaohsiung, Taiwan
Communication dans un congrès hal-02573352v1

Vibrational excitation in O2 and Cl2 inductively-coupled plasmas and DC discharges

V. Guerra , Jean-Paul Booth , Daniil Marinov , Mickaël Foucher , Adriana Annusova
GEC, Oct 2016, Bochum, Germany
Communication dans un congrès hal-02593690v1

Multifrequency impedance matching solutions for plasma excitation by Tailored Voltage Waveforms

Erik Johnson , Sebastien Dine , Jean-Paul Booth
AVS Symposium, Nov 2016, Nashville, United States
Communication dans un congrès hal-02593689v1

Two Dimensional Particle-in-cell/Monte Carlo (PIC/MC) Simulation of Radio Frequency Capacitively Coupled Plasmas with a Dielectric Side Wall Boundary

Yue Liu , Jean-Paul Booth , Pascal Chabert
GEC, Oct 2016, Bochum, Germany
Communication dans un congrès hal-02593691v1

Gas temperature measuements by high-resolution TALIF

Jean-Paul Booth
Workshop on Oxygen Plasma Kinetics, Sep 2016, Reykjavik, Iceland
Communication dans un congrès hal-02593694v1

Charged and neutral particle dynamics in low pressure chlorine and oxygen plasmas: the role of collisional processes

Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans
EPS Plasma, Jul 2016, Leuven, Belgium
Communication dans un congrès hal-02573351v1

Quantitative Diagnostics of Inductive Plasmas in Chlorine, Oxygen and Chlorine-Oxygen Mixtures

Jean-Paul Booth
Radiofrequency Plasma Workshop, Jun 2015, Dublin, Ireland
Communication dans un congrès hal-02573339v1

101 uses of Cold Plasmas: from smartphones to space travel

Jean-Paul Booth
Plas@par International Summer School : Discover Plasmas, Aug 2015, Roscoff, France
Communication dans un congrès hal-02573342v1

Cleaning and doping of CVD graphene using tailored voltage waveform capacitively coupled plasma

Daniil Marinov , Bastien Bruneau , Erik Johnson , Jean-Paul Booth
Plasma Etch and Strip in Microelectronics _PESM, Apr 2015, Louvain, Belgium
Communication dans un congrès hal-02593662v1

Validation of Inductively Coupled Plasmas Sustained in Halogen Chemistries

Ankur Agarwal , Mickaël Foucher , S. Rauf , Jean-Paul Booth , Pascal Chabert
AVS Annual Symposium, Oct 2015, San Jose, California, United States
Communication dans un congrès hal-02593676v1

Inductively-coupled plasmas in Cl2 and O2: Comparing HPEM with advanced diagnostic measurements

Jean-Paul Booth , Mickaël Foucher , Andrew Gibson , Daniil Marinov , Nishant Sirse
Quantumol Workshop -Linking Simulation with Experiment, Sep 2015, London, United Kingdom
Communication dans un congrès hal-02573341v1

Quantitative Diagnostics of Inductive Plasmas in Chlorine, Oxygen and Chlorine-Oxygen Mixtures

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert
MRS-Japan, Dec 2015, Yokohama, Japan
Communication dans un congrès hal-02573344v1

A Comprehensive Quantitative Study of Low Pressure Inductively-Coupled Plasmas in Cl2, O2 and Mixtures

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert , Ankur Agarwal
AVS Symposium, Oct 2015, San Jose, California, United States
Communication dans un congrès hal-02593682v1

Vibrational kinetics in Cl2 and O2 low-pressure inductively-coupled plasmas

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert , Adriana Annusova
Gaseous Electronics Conference, Oct 2015, Honolulu, United States
Communication dans un congrès hal-02593669v1

Density and temperature measurements in ICP's of Cl2/O2 using high sensitivity ultra broad-band absorption spectroscopy

Mickaël Foucher , Daniil Marinov , Emile Carbone , Pascal Chabert , Jean-Paul Booth
International Symposium on Plasma Chemistry, Jul 2015, Anvers, Belgium
Communication dans un congrès hal-02593678v1

Detection of Biomedically Relevant Reactive Oxygen Species in Atmospheric Pressure Plasmas

Sandra Schröter , Jérôme Bredin , K. Niemi , J. Dedrick , Mickaël Foucher
AVS Symposium, Oct 2015, San Jose, California, United States
Communication dans un congrès hal-02593680v1

Reactive species generated in atmospheric-pressure plasmas with water admixtures for biomedical applications: Absolute measurements and numerical simulations

Sandra Schröter , Jérôme Bredin , A. West , K. Niemi , J. Dedrick
Gaseaous Electronics Conference, Oct 2015, Honolulu, United States
Communication dans un congrès hal-02593672v1

Low Pressure Plasma Cleaning and Doping of CVD Graphene

D. Marinov , G. Cunge , D. Ferrah , E.V. Johnson , J.P. Booth
AVS 62nd International Symposium & Exhibition, 2015, San José, United States
Communication dans un congrès hal-01878405v1

Quantitative Diagnostics of Inductive Plasmas in Cl2, O2 AND Cl2/O2 Mixtures

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert
Symposium on Application of Plasma Processes, Jan 2015, Vysoké Tatry, Slovakia
Communication dans un congrès hal-02573337v1

Ultra broad-band high sensitivity absorption spectroscopy of inductively-coupled plasmas in Cl2/O2 mixtures

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert
Frontiers in Low-temperature Plasma Diagnostics FLTPD, May 2015, Porquerolles, France
Communication dans un congrès hal-02593663v1

Capacitively coupled CF4 discharges excited by tailored waveforms: experiments and kinetic simulations

Bastien Bruneau , Erik Johnson , Jean-Paul Booth , Trevor Lafleur , T. Gans
Radiofrequency Plasma Workshop, Jun 2015, Dublin, Ireland
Communication dans un congrès hal-02573343v1

Comparison of the effect of sawtooth-like voltage waveforms on discharge dynamics of Ar, H2, and CF4 plasmas

Bastien Bruneau , Erik Johnson , T. Gans , Arthur Greb , Ihor Korolov
Gaseaous Electronics Conference, Oct 2015, Honolulu, United States
Communication dans un congrès hal-02593667v1

Ion flux asymmetry obtained by sawtooth-like waveforms: A new degree of freedom in capacitively coupled plasmas

Bastien Bruneau , T. Gans , D. O'Connell , Arthur Greb , Trevor Lafleur
Plasma Etch and Strip in Microelectronics (PESM), Apr 2015, Louvain, Belgium
Communication dans un congrès hal-02593661v1

Reactive adsorption of molecules and radicals on surfaces

Daniil Marinov , Olivier Guaitella , Jean-Paul Booth , Antoine Rousseau
22nd International Symposium on Plasma Chemistry, Jul 2015, Antwerp, Belgium
Communication dans un congrès hal-02573340v1

Modelling the influence of neutral gas heating mechanisms on particle densities in inductively coupled chlorine discharges

Andrew Gibson , T. Gans , Mickaël Foucher , Daniil Marinov , Pascal Chabert
Gaseous Electronics Conference, Oct 2015, Honolulu, United States
Communication dans un congrès hal-02593670v1

Gas Temperature Measurements in Plasmas by High-Resolution TALIF

Jean-Paul Booth , Olivier Guaitella , Daniil Marinov , Mickaël Foucher , Cyril Drag
Laser AIded Plasma Diagnostics LAPD, Sep 2015, Sapporo, Japan
Communication dans un congrès hal-02593665v1

Control over the ion flux obtained by sawtooth-like waveforms in radiofrequency capacitively coupled plasmas

Bastien Bruneau , T. Novikova , Trevor Lafleur , Jean-Paul Booth , Erik Johnson
AVS Annual Symposium, Nov 2014, Baltimore, Maryland, United States
Communication dans un congrès hal-02593674v1

Inductively-coupled plasmas of Cl2, O2 and mixtures : measurement of atoms, ClxOy and electron densities

Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert
PESM, May 2014, Grenoble, France
Communication dans un congrès hal-02593657v1

Diagnostics of Cl2/O2 Inductively-Coupled Plasmas by Ultra-High sensitivity Broad-Band Absorption Spectroscopy

Mickaël Foucher , Daniil Marinov , Emile Carbone , Jean-Paul Booth , Pascal Chabert
AVS, Nov 2014, Baltimore, Maryland, United States
Communication dans un congrès hal-02593659v1

Inductively-coupled plasmas of Cl2, O2 and mixtures : measurement of atoms, ClxOy and electron densities

Mickaël Foucher , Daniil Marinov , Emile Carbone , Jean-Paul Booth , Pascal Chabert
GEC, Nov 2014, Raleigh, North Carolina, United States
Communication dans un congrès hal-02593658v1

Dynamique des Plasmas à Couplage Inductive dans les gaz HBr, Cl2 et O2 et mixtures: Diagnostiques Laser et Absorption Ultraviolet Large-Bande

Jean-Paul Booth , Mickaël Foucher , Pascal Chabert
Colloque de Plasma-Québec, Jun 2014, Montreal, Canada
Communication dans un congrès hal-02573338v1

A model for capacitive discharges with arbitrary RF waveform excitation including the electrical asymmetry effect and the associated self-bias

Pascal Chabert , Trevor Lafleur , Jean-Paul Booth , Miles Turner
8th International Conference on reactive Plasma, Feb 2014, Fukuoka, Japan
Communication dans un congrès hal-02573360v1

Experimental and numerical study of fast gas heating and O atom production in a capillary nanosecond discharge

A.V. Klochko , A. Salmon , J. Lemainque , N.A. Popov , Jean-Paul Booth
52st AIAA Aerospace Sciences Meeting, Jan 2014, National Harbor, Maine, United States. pp.2014-1030
Communication dans un congrès hal-02588024v1

Diagnostics of Inductively-Coupled Plasmas in Hydrogen Bromide : Bromine Atom and Electron Densities

Jean-Paul Booth , Nishant Sirse , Pascal Chabert , Mickaël Foucher
AVS Symposium, Oct 2013, Long Beach, California, United States
Communication dans un congrès hal-02594800v1

Capacitively coupled plasmas excited by tailored voltage waveforms

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth
EPS Plasma, Jul 2013, Espoo, Finland
Communication dans un congrès hal-02573294v1

Electron heating in capacitively coupled plasmas revisited: single and multi-frequency discharges

Trevor Lafleur , Pascal Chabert , Miles Turner , Jean-Paul Booth
Gaseous Electronics Conference, Oct 2013, Princeton, New Jersey, United States
Communication dans un congrès hal-02573333v1

Study of fast gas heating in a capillary nanosecond discharge in air. TALIF O atoms measurements and kinetic modeling (AIAA 2013-0574)

A.V. Klochko , J. Lemainque , N.A. Popov , Jean-Paul Booth , Svetlana Starikovskaia
51st AIAA Aerospace Sciences Meeting, Jan 2013, Grapevine, Texas, United States
Communication dans un congrès hal-02589147v1

Ground state bromine atom density measurements by two-photon absorption laser-induced fluorescence

Mickaël Foucher , Nishant Sirse , Jean-Paul Booth , Pascal Chabert
Journées d’Echange du Réseau des Technologies des Plasmas Froids, Oct 2013, La Rochelle, France
Communication dans un congrès hal-02594807v1

OZONE KINETICS IN LOW-PRESSURE DISCHARGES

V. Guerra , Daniil Marinov , Jean-Paul Booth , Olivier Guaitella , Antoine Rousseau
SAPP, Jan 2013, Malá Fatra, Slovakia
Communication dans un congrès hal-02573288v1

Determining atom and radical surface recombination coefficients in low-pressure plasmas

Jean-Paul Booth
Gaseous Electronics Conference : workshop on plasma-surface interactions, Sep 2013, Princeton, New Jersey, United, Unknown Region
Communication dans un congrès hal-02573332v1

Diagnostics of inductively-coupled plasmas in HBr : Bromine atom and electron densities

Jean-Paul Booth , Nishant Sirse , Robert Soriano , Mickaël Foucher , Pascal Chabert
Gaseous Electronics Conference, Oct 2013, Princeton, New Jersey, United States
Communication dans un congrès hal-02594803v1

Tailoring plasma properties using pulse-shaping technology,

Jean-Paul Booth , E.V. Johnson , Trevor Lafleur , Pierre-Alexandre Delattre , R.W. Boswell
21st ISPC, Aug 2013, Cairns, Australia
Communication dans un congrès hal-02573330v1

IN-SITU OBSERVATION OF MICROCRYSTALLINE SILICON THIN FILM GROWTH USING TAILORED VOLTAGE WAVEFORMS

E.V. Johnson , Bastien Bruneau , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth
International Vacuum Conference, Sep 2013, Paris, France
Communication dans un congrès hal-02594804v1

Practical Aspects of using Tailored Voltage Waveforms for Thin Film Processing of Photovoltaic Devices

E.V. Johnson , Bastien Bruneau , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth
AVS Symposium, Oct 2013, Long Beach, California, United States
Communication dans un congrès hal-02573331v1

Tailored Voltage Waveform Capacitively-Coupled Plasmas for IEDF and electron density control: Application to Microcrystalline Si Deposition

Jean-Paul Booth , Erik Johnson , Trevor Lafleur , Pierre-Alexandre Delattre
Semicon Korea, Jan 2013, Seoul, Korea, Unknown Region
Communication dans un congrès hal-02573289v1

Dynamics of Cl2 inductively-coupled plasmas: Role of electronic and vibrational excitation

Jean-Paul Booth , Nishant Sirse , Pascal Chabert , P. Indelicato , A. Surzhykov
FLTPD, Apr 2013, Rolduc, Netherlands
Communication dans un congrès hal-02573290v1

Thin Film Deposition with Tailored Voltage Waveforms: Material Questions and Practical Answers

E.V. Johnson , Bastien Bruneau , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth
RF Plasma workshop, May 2013, Presqu île de Giens, France
Communication dans un congrès hal-02573291v1

Diagnostics of inductively-coupled plasmas in hydrogen bromide : Bromine atom and electron densities

Jean-Paul Booth , Nishant Sirse , Pascal Chabert , Mickaël Foucher
UK Technological Plasmas Workshop, Dec 2013, York, United Kingdom
Communication dans un congrès hal-02594799v1

Vibrational kinetics in a Cl2 inductively-coupled plasma

B. Pruvost , Jean-Paul Booth , Mickaël Foucher , Pascal Chabert , V. Guerra
Gaseous Electronics Conference, Oct 2013, Princeton, New Jersey, United States
Communication dans un congrès hal-02594801v1

Inductively-coupled plasmas in pure chlorine: comparison of atom density, electron density and gas temperature measurements with the HPEM hybrid model.

Jean-Paul Booth , Nishant Sirse , Pascal Chabert , B. Pruvost , M.J. Kushner
RF Plasma workshop, May 2013, Presqu ile de Giens, France
Communication dans un congrès hal-02573293v1

Optical diagnostics of low-pressure plasmas in halogen gases

Jean-Paul Booth , Pascal Chabert , Nishant Sirse , P. Indelicato , A. Surzykov
ICPIG, Jul 2013, Granada, Spain
Communication dans un congrès hal-02573296v1

Chlorine atom and molecule dynamics in an inductively coupled plasma in pure Cl2

Jean-Paul Booth , Pascal Chabert , Yasmina Azamoum , Nishant Sirse
Plasma Etch and Strip in Microelectronics (PESM), Mar 2012, Grenoble, France
Communication dans un congrès hal-02594730v1

Cl atom spin-orbit excited densities in a Cl2 ICP determined by TALIF

Jean-Paul Booth , Nishant Sirse , P. Indelicato , A. Surzhykov , Y. Wang
UK TPW, Dec 2012, Milton Keynes, United Kingdom
Communication dans un congrès hal-02594737v1

Mesure de densité électronique dans les plasmas froids par techniques micro-ondes

Jean-Paul Booth
Les Journées du Plasma Froid, Oct 2012, Ecully, France
Communication dans un congrès hal-02573281v1

Seeing Inside Plasma Etch Reactors: from diagnostics to sensors for control

Jean-Paul Booth
Fusion Frontiers and Interfaces Workshop, Mar 2012, York, United Kingdom
Communication dans un congrès hal-02573297v1

Absolute Cl and Cl2 densities in a Cl2 ICP determined by TALIF with a new calibration method

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert
Technological Plasmas Workshop, Jan 2012, Manchester, United Kingdom
Communication dans un congrès hal-02594794v1

Cl atom spin-orbit excited densities in a Cl2 ICP determined by TALIF

Jean-Paul Booth , Nishant Sirse , P. Indelicato , Y. Wang , Oleg Zatsarinny
UK Technological Plasmas Workshop, Dec 2012, Milton Keynes, United Kingdom
Communication dans un congrès hal-02594805v1

Plasma deposition of nanocrystalline silicon for solar cells : RF waveform tailoring to optimize deposition rate and film morphology

Jean-Paul Booth , E.V. Johnson , Pierre-Alexandre Delattre
Gaseous Electronics Meeting, Feb 2012, Murramarang, Australia
Communication dans un congrès hal-02573287v1

Plasma Excitation using Tailored Voltage Waveforms for the Deposition of Thin Film Silicon for Photovoltaics: From Plasma Physics to Devices

E.V. Johnson , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth
5th International Symposium on Atomically Controlled, Oct 2012, Osaka, Japan
Communication dans un congrès hal-02573298v1

Inductively-coupled plasmas in pure chlorine: comparison experiments/HPEM

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert
GEC, Oct 2012, Austin, Texas, United States
Communication dans un congrès hal-02594735v1

Gas temperature measurement in Ar and Ar-Cl2 based ICP discharge: Comparison between experiments and simulations

Nishant Sirse , Quentin Délivré , Jean-Paul Booth , Pascal Chabert
IEEE International Conference on Plasma Science (ICOPS), Jul 2012, Edinburgh, United Kingdom
Communication dans un congrès hal-02594795v1

Tailored Voltage Waveform Capacitively-Coupled Plasmas

Jean-Paul Booth , Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson
GEC, Oct 2012, Austin, Texas, United States
Communication dans un congrès hal-02594732v1

Plasma characteristics in non-sinusoidally excited CCP discharges

Trevor Lafleur , Jean-Paul Booth
GEC, Oct 2012, Austin, Texas, United States
Communication dans un congrès hal-02594733v1

Plasma deposition processes excited using Tailored Voltage Waveforms: from microcrystalline silicon thin films to devices

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth
AVS Symposium, Oct 2012, Tampa, Floride, United States
Communication dans un congrès hal-02573299v1

Chlorine atom and molecule dynamics in an inductively coupled plasma in pure Cl2

Jean-Paul Booth , Pascal Chabert , Yasmina Azamoum , Nishant Sirse
International Workshop on Plasma Spectroscopy (IPS), May 2012, Presqu ile de Giens, France
Communication dans un congrès hal-02594731v1

Absolute Cl and Cl2 densities in a Cl2 ICP determined by TALIF with a new calibration method

Nishant Sirse , Yasmina Azamoum , Pascal Chabert , Jean-Paul Booth
UK TPW, Dec 2011, Manchester, United Kingdom
Communication dans un congrès hal-02594750v1

VOLTAGE WAVEFORM TAILORING: A PROMISING NEW METHOD FOR SILICON DEPOSITION

Pierre-Alexandre Delattre , S. Pouliquen , E.V. Johnson , Nishant Sirse , Jean-Paul Booth
CIP (Congres International sur les Plasmas), Jun 2011, Nantes, France
Communication dans un congrès hal-02594747v1

DEPOSITION OF THIN FILM OF SILICON MICROCRISTALLINE BY RADIO FREQUENCY VOLTAGE WAVEFORM TAILORING

S. Pouliquen , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth
AVS, Oct 2011, Nashville, Tennessee, United States
Communication dans un congrès hal-02594748v1

Detection of atomic chlorine in an inductively-coupled plasma by TALIF:Absolute densities and surface recombination coefficients

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert
LAPD, Oct 2011, Jeju, Korea, Unknown Region
Communication dans un congrès hal-02573303v1

INCLINE - Inductively coupled plasma for CMOS-compatible etching of III-V integrated laser sources

S. Bouchoule , L. Gatilova , G. Patriarche , S. Guilet , L. Le Gratiet
Journées Nationales en Nanosciences et Nanotechnologies, 2011, Ecole Polytechnique, Palaiseau, France
Communication dans un congrès hal-02594797v1

Absolute atomic chlorine densities in a Cl2 ICP determined by TALIF with a new calibration method

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert
30th ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom
Communication dans un congrès hal-02594798v1

RF waveform tailoring to control film morphology during nanocrystalline silicon PECVD

Jean-Paul Booth , E.V. Johnson , Pierre-Alexandre Delattre , T. Verbeke , J-C Vanel
International Conference on Plasmas and Nanotechnology (ICPLANTS), Feb 2011, Takayama, Japan
Communication dans un congrès hal-02594739v1

Cl atom recombination coefficients in a Cl2 ICP determined by TALIF

Jean-Paul Booth , Pascal Chabert , F. Boutaiba , Mujahid Zaka-Ul-Islam
Frontiers in Low Temperature Plasma Diagnostics (FLTPD), May 2011, Zinnowitz, Germany
Communication dans un congrès hal-02594745v1

Recombination coefficients of Cl atoms on Al2O3 walls determined by TALIF

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Mujahid Zaka-Ul-Islam , Pascal Chabert
Plasma Etch and Strip for Microelectronics (PESM), May 2011, Mechelen, Belgium
Communication dans un congrès hal-02594744v1

Tailored Voltage Waveforms for the Deposition of Microcrystalline Silicon

E.V. Johnson , Pierre-Alexandre Delattre , Jean-Paul Booth
ICANS, Aug 2011, Nara, Japan
Communication dans un congrès hal-02594746v1

Atomic Chlorine absolute densities and surface recombination coefficients in inductively coupled plasmas in Cl2

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert
AVS, Oct 2011, Nashville, Tennessee, United States
Communication dans un congrès hal-02594749v1

MESURE DE TEMPERATURE DU GAZ DANS UN RÉACTEUR DE GRAVURE DOUBLE FRÉQUENCES CAPACITIF

Jean-Paul Booth , Wladimir Bjelogrlic , Jérôme Bredin
Journees du Reseau Plasmas Froids, May 2011, Toulouse, France
Communication dans un congrès hal-02573301v1

Control of Nanocrystalline Growth Phase and Deposition Rate through Voltage Waveform Tailoring

E.V. Johnson , Pierre-Alexandre Delattre , Jean-Paul Booth
MRS spring meeting, Apr 2011, San Francisco, California, United States
Communication dans un congrès hal-02594741v1

Planar Langmuir probe in pulsing regime

V. Samara , Jean-Paul Booth , J.-F. de Marneffe , W. Boullart
PESM (Plasma Etch and Strip for Microelectronics), May 2011, Mechelen, Belgium
Communication dans un congrès hal-02594742v1

Seeing Inside Plasma Etch Reactors: from diagnostics to sensors for control

Jean-Paul Booth , Pascal Chabert , Rodolphe Sarot , Mujahid Zaka-Ul-Islam
IS-Plasma (International Symposium-Plasma), Feb 2011, Nagoya, Japan
Communication dans un congrès hal-02573300v1

All you ever wanted to know about Fluorocarbon Plasmas but never dared to ask

Jean-Paul Booth
POSMOL (International Symposium on Electron Molecule Collisions and Swarms), Jul 2011, Maynooth, Ireland
Communication dans un congrès hal-02573302v1

Control of Microcrystalline Silicon Deposition by RF Waveform Tailoring

E.V. Johnson , Jean-Paul Booth , J-C Vanel , T. Verbeke
Gaseous Electronics Conference, Oct 2010, Paris, France
Communication dans un congrès hal-02595158v1

RF waveform tailoring to control film morphology during nanocrystalline silicon PECVD

Jean-Paul Booth , E.V. Johnson , T. Verbeke , J-C Vanel
UK-Technological Plasmas Workshop, Dec 2010, Bristol, United Kingdom
Communication dans un congrès hal-02595161v1

Time-resolved electron density and OES measurements for studying the surface loss rates of H and Cl atoms in a Cl2-H2 ICP plasma

G. Curley , L. Gatilova , S. Guilet , S. Bouchoule , G. Gogna
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas, 2010, Paris, France. TF4-005, 763-764, Hori M. and Graha W.G. (Eds), Japan Society of Applied Physics
Communication dans un congrès hal-00800895v1

Nanocrystalline silicon film growth morphology control through RF waveform tailoring

Jean-Paul Booth , E.V. Johnson , T. Verbeke , J-C Vanel
AVS Symposium, Oct 2010, Albuquerque, New Mexico, United States
Communication dans un congrès hal-02595160v1

Effect of low-frequency power on electron density and ion flux in dual-frequency capacitive radiofrequency discharges

Jean-Paul Booth , G. Curley , Pascal Chabert
PESM, Mar 2010, Grenoble, France
Communication dans un congrès hal-02595157v1

GAS BREAKDOWN IN RF AND LONGITUDINAL COMBINED ELECTRIC FIELDS

V. A. Lisovskiy , Jean-Paul Booth , V. D. Yegorenkov , N. D. Kharchenko
RF Breakdown Workshop, Oct 2010, Paris, France
Communication dans un congrès hal-02573304v1

Physique et physicochimie des Plasmas excites par radio-frequence

Jean-Paul Booth
Journees Plasma-Photovoltaique, Nov 2010, St Cyprien, France
Communication dans un congrès hal-02611098v1

Absorption spectroscopy diagnostics of a dual-frequency capacitive dielectric etch tool using Ultraviolet Light-Emitting Diodes

Jérôme Bredin , Jean-Paul Booth
Gaseous Electronics Conference, Oct 2009, Saratoga Springs, New York, United States
Communication dans un congrès hal-02595162v1

Dual-frequency capacitive radiofrequency discharges : Effect of low-frequency power on electron density and flux

Jean-Paul Booth , G. Curley , Pascal Chabert , D. Maric
Gaseous Electronics Conference, Oct 2009, Saratoga Springs, New York, United States
Communication dans un congrès hal-02595163v1

Etch process control with a deposition-tolerant planar electrostatic probe

Jean-Paul Booth , D. Keil , C. Thorgrimsson , M. Nagai , L. Albarede
PESM, Feb 2009, Louvain, Belgium
Communication dans un congrès hal-02573305v1

Absorption spectroscopy diagnostics of a dual-frequency capacitive dielectric etch tool using Ultraviolet Light-Emitting Diodes

Jean-Paul Booth , Jérôme Bredin
AVS International Symposium, Nov 2009, San Jose, California, United States
Communication dans un congrès hal-02595165v1

Etch process control with a deposition-tolerant planar electrostatic probe

Jean-Paul Booth , D. Keil , C. Thorgrimsson , M. Nagai , L. Albarede
Radiofrequency Plasma Workshop, May 2009, Presqu ile de Giens, France
Communication dans un congrès hal-02573306v1

Etch process control with a deposition-tolerant planar electrostatic probe

Jean-Paul Booth , D. Keil , C. Thorgrimsson , M. Nagai , L. Albarede
Irish Plasma and Beam Processing Group Meeting, May 2009, Belfast, Northern Ireland, United Kingdom
Communication dans un congrès hal-02573307v1

CFX kinetics, gas temperature and instabilities in a CF4 inductively coupled discharge

J.P Booth , H. Abada , P. Chabert , G. Cunge
48th National AVS symposium & Topical conferences, 2001, San Francisco, United States
Communication dans un congrès hal-00494528v1

CFx kinetics, gas temperatures and instabilities in a CF4 inductively-coupled discharge

J.P Booth , H. Abada , P. Chabert , G. Cunge
48th AVS Annual Symposium, 2001, San Francisco, United States
Communication dans un congrès hal-00486179v1

High rate silicon carbide etching

P. Chabert , J. Perrin , J.P Booth , G. Cunge
ISPC, 15th International Symposium on Plasma Chemistry, 2001, Orleans, France
Communication dans un congrès hal-00481964v1

Chlorine Inductively- coupled Plasma diagnostics using UV absorption spectroscopy and an ion flux probE

J.P Booth , F. Neuilly , J.M Francou , L. Vallier
International Colloquium on Plasma Processes, CIP, 2001, Antibes, France
Communication dans un congrès hal-00486185v1

Kinetics of active species in a DC discharge by synchrotron VUV absorption

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , J. Santos-Sousa , N. de Oliveira
International Symposium on Plasma Chemistry, Jun 2019, Naples, Italy. 2019
Poster de conférence hal-02865808v1

Oxygen 3P atom and O- ion density and atomic temperature in O2 DC discharge obtained by Cavity Ringdown spectroscopy

Abhyuday Chatterjee , Jean-Paul Booth , Olivier Guaitella , Cyril Drag , Katherine Manfred
International Symposium on Plasma Chemistry, Jun 2019, Naples, Italy. 2019
Poster de conférence hal-02861162v1

Vacuum ultraviolet absorption spectroscopy of oxygen discharges

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon
Journées de la Spectroscopie Moléculaire, May 2019, Creteil, France. 2019
Poster de conférence hal-02861164v1

Experimental determination of cross-sections/reaction rates: Methods and difficulties

Jean-Paul Booth
Rencontres scientifiques plasmas froids et lasers, Nov 2019, Toulouse, France. 2019
Poster de conférence hal-02861165v1

Iodine as propellant for electric propulsion: updated global model and comparisons to experiments

Florian Marmuse , Romain Lucken , Cyril Drag , Jean-Paul Booth , Anne Bourdon
International Symposium on Plasma Chemistry, Jun 2019, Naples, Italy. 2019
Poster de conférence hal-02341688v1

Oxygen 3P atom density and temperature determined by Cavity Ringdown spectroscopy of the forbidden 1D2 <-3P2 transition

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , Cyril Drag , Katherine Manfred
Frontiers in Low Temperature Plasma Diagnostics, May 2019, Bad Honnef, Germany. 2019
Poster de conférence hal-02861161v1

Spectroscopic study of an iodine plasma in a low pressure RF-ICP ion source

Florian Marmuse , Theo Courtois , Jean-Paul Booth , Cyril Drag , Ane Aanesland
71st Annual Gaseous Electronics Conference, Nov 2018, Portland, Oregon, United States. 2018
Poster de conférence hal-02864740v1

Density of metastable O2(b 1 Sigma g+) molecules in an O2 DC discharge measured by vacuum ultraviolet absorption and optical emission spectroscopy

Jean-Paul Booth , Olivier Guaitella , Abhyuday Chatterjee , Dmitry Lopaev , Sergey Zyryanov
71st Annual Gaseous Electronics Conference, Nov 2018, Portland, Oregon, United States. 2018
Poster de conférence hal-02864739v1

Temperature and density measurements in an iodine RF-CCP plasma with emission and absorption spectroscopy

Florian Marmuse , Cyril Drag , Jean-Paul Booth , Ane Aanesland
ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom. 2018
Poster de conférence hal-02341678v1

O2 X, a and b densities and kinetics in pure O2 DC discharges: VUV absorption, IR emission and Cavity Ring Down Spectroscopy measurements

Abhyuday Chatterjee , Jean-Paul Booth , Olivier Guaitella , N. de Oliveira , L. Nahon
ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom. 2018
Poster de conférence hal-02864738v1

Oxygen metastable molecule densities in inductively-coupled plasmas in pure O2 measured by VUV absorption

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon
ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom. 2018
Poster de conférence hal-02864750v1

Metastable Molecules in O2 Plasmas probed by High Resolution Fourier Transform Absorption Spectroscopy

Abhyuday Chatterjee , Jean-Paul Booth , Olivier Guaitella , L. Nahon , Nelson d'Oliveira
XXXIII ICPIG- International Conference on Phenomena in Ionised Gases, Jul 2017, Estoril/Lisbon, Portugal. 2017
Poster de conférence hal-02611353v1

Kinetics of metastable states and atoms in DC discharges in pure O2: an experimental study

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , Laurent Nahon
REACPLAS Workshop (reactivity, Plasmas, Astrophysics), Nov 2017, Orsay, France. 2017
Poster de conférence hal-02611361v1

Iodine atom detection in a plasma thruster by infrared diode laser absorption

Jean-Paul Booth , Theo Courtois
18th, Laser Aided Plasma Diagnostics, Sep 2017, Prague, Czech Republic, Unknown Region. 2017
Poster de conférence hal-02611358v1

O2 dissociation in plasmas and problems of the O2 cross section set

Jean-Paul Booth , Olivier Guaitella , Abhyuday Chatterjee , Sergey Zyryanov , Dmitry Lopaev
XXXIII ICPIG- International Conference on Phenomena in Ionised Gases, Jul 2017, Estoril/Lisbon, Portugal. 2017
Poster de conférence hal-02611355v1

Kinetics of Metastable Molecules and O atoms in O2 Plasmas

Abhyuday Chatterjee , Jean-Paul Booth , Olivier Guaitella , Ana-Sofia Morillo-Candas , Cyril Drag
Masterclass "New approaches for plasma/surface interaction studies", Oct 2017, Bad Honnef, Germany. 2017
Poster de conférence hal-02611360v1

Species-dependent thermal energy accommodation in low-pressure plasmas

Andrew Gibson , T. Gans , M.J. Kushner , Jean-Paul Booth
23rd International Symposium on Plasma Chemistry, Jul 2017, Montréal, Canada. 2017
Poster de conférence hal-02611357v1

Experimental Benchmarks and sensitivity analysis of PIC/MC simulations of oxygen CCP's

Z. Donko , Aranka Derszi , Bastien Bruneau , Andrew Gibson , E.V. Johnson
International Workshop on Radio-Frequency Plasmas, May 2017, Presqu'île de Giens, France. 2017
Poster de conférence hal-02611351v1

Control of charged species dynamics in atmospheric pressure plasmas using tailored voltage waveforms

Andrew Gibson , L. Alelyani , S. Doyle , Jérôme Bredin , Jean-Paul Booth
XXXIII ICPIG- International Conference on Phenomena in Ionised Gases, Jul 2017, Estoril/Lisbon, Portugal. 2017
Poster de conférence hal-02611352v1

Experimental and simulation study of capacitively coupled oxygen discharges driven by tailored voltage waveforms

A. Derzsi , Bastien Bruneau , Trevor Lafleur , Jean-Paul Booth , Ihor Korolov
ESCAMPIG, Jul 2016, Bratislava, Slovakia. 2016
Poster de conférence hal-02611337v1

Frequency dependence of the Electrical Asymmetry Effect in electronegative capacitive RF discharges driven by Tailored Voltage Waveforms

J. Schulze , E. Schuengel , Bastien Bruneau , E.V. Johnson , Jean-Paul Booth
GEC, Oct 2016, Bochum, Germany. 2016
Poster de conférence hal-02611341v1

Highly vibrationally excited O2 molecules in low pressure oxygen plasmas: 1. Broad-band absorption spectroscopy

Daniil Marinov , Mickaël Foucher , Olivier Guaitella , Richard Engeln , Pascal Chabert
ESCAMPIG, Jul 2016, Bratislava, Slovakia. 2016
Poster de conférence hal-02611336v1

High-resolution TALIF measurements of atomic oxygen: determination of gas temperature and collisional broadening coefficients

Jean-Paul Booth , Daniil Marinov , Olivier Guaitella , Cyril Drag , Richard Engeln
GEC (Gaseous Electronics Synposium), Oct 2016, Bochum, Germany. 2016
Poster de conférence hal-02611340v1

Atmospheric pressure plasmas as sources of reactive oxygen and hydrogen species for biomedical applications

Sandra Schröter , Andrew Gibson , Jérôme Bredin , A. West , A. Wijiaikum
International Symposium on Gas Kinetics, Jul 2016, York, United Kingdom. 2016
Poster de conférence hal-02611339v1

Highly vibrationally excited O2 molecules in low pressure oxygen plasmas: 2. Self-consistent model

Adriana Annusova , V. Guerra , M. Lino Da Silva , B. Lopez , Mickaël Foucher
ESCAMPIG, Jul 2016, Bratislava, Slovakia. 2016
Poster de conférence hal-02611338v1

Measuring atomic oxygen densities and electron properties in an Inductively Coupled Plasma for thin film deposition

D. Meehan , Andrew Gibson , Jean-Paul Booth , E. Wagenaars
GEC, Oct 2016, Bochum, Germany. 2016
Poster de conférence hal-02611342v1

The role of gas kinetics and surface interaction probabilities in simulations of industrial plasma sources at low pressure

Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans
International Symposium on Gas Kinetics, Jul 2016, York, United Kingdom. 2016
Poster de conférence hal-02611343v1

EXPERIMENTAL AND MODELING STUDIES OF LOW-PRESSURE CAPACITIVE OXYGEN PLASMAS EXCITED BY TAILORED VOLTAGE WAVEFORMS

Aranka Derszi , Trevor Lafleur , Ihor Korolov , Jean-Paul Booth , Zoltan Donko
Symposium on Application of Plasma Processes, Jan 2015, Tatranská Lomnica, Slovakia. 2015
Poster de conférence hal-02611332v1

Capacitively Coupled Radio-Frequency Plasmas Excited by Tailored Voltage Waveforms: Particle-In-Cell/Monte Carlo Simulations in 1 and 2 Dimensions

Yue Liu , Jean-Paul Booth , Pascal Chabert
Radiofrequency Plasma Workshop, Jun 2015, Dublin, Ireland. 2015
Poster de conférence hal-02611334v1

Vibrational kinetics in Cl2 and O2 low-pressure inductively-coupled plasmas

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert , Adriana Annusova
POSMOL, Jul 2015, Lisbon, Portugal. 2015
Poster de conférence hal-02611335v1

A model for inductively coupled plasmas in O2 including vibrational kinetics

Adriana Annusova , V. Guerra , Jean-Paul Booth , Mickaël Foucher , Daniil Marinov
EPS Plasma, Jun 2015, Lisbon, Portugal. 2015
Poster de conférence hal-02611333v1

Ground-state bromine atoms measurements by Two-Photon Absorption Laser-Induced Fluorescence

Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert
PESM, May 2014, Grenoble, France. 2014
Poster de conférence hal-02611326v1

High sensitivity ultra-broad-band absorption spectroscopy applied to etching plasmas

Mickaël Foucher , Daniil Marinov , Emile Carbone , Jean-Paul Booth , Pascal Chabert
GEC, Nov 2014, Raleigh, North Carolina, United States. 2014
Poster de conférence hal-02611330v1

Inductively-coupled plasmas (ICP) of Cl2,O2 and mixtures : measurements of atoms, ClxOy and electron densities

Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert
PESM, May 2014, Grenoble, France. 2014
Poster de conférence hal-02611325v1

Inductively-coupled plasmas in pure Cl2, O2 and mixtures: measurements of atom, ClxOy and electron densities

Mickaël Foucher , Pascal Chabert , Jean-Paul Booth
Plasma Kinetics Master Class, Oct 2014, Bad Honnef, Germany. 2014
Poster de conférence hal-02611331v1

Inductively-coupled plasmas (ICP) of Cl2, O2 and mixtures : measurements of atoms, ClxOy and electron densities

Mickaël Foucher , Daniil Marinov , Emile Carbone , Jean-Paul Booth , Pascal Chabert
GEC, Nov 2014, Raleigh, North Carolina, United States. 2014
Poster de conférence hal-02611329v1

Inductively-coupled plasmas (ICP) of Cl2, O2 and mixtures : measurements of atoms, ClxOy and electron densit

Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert
ESCAMPIG, Jul 2014, Greifswald, Germany. 2014
Poster de conférence hal-02611327v1

High sensitivity ultra-broad-band absorption spectroscopy applied to etching plasmas

Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert
ESCAMPIG, Jul 2014, Greifswald, Germany. 2014
Poster de conférence hal-02611328v1

Dynamique des plasmas radio-fréquences pulsés à couplage inductif en gaz halogénés simples

Mickaël Foucher , Jean-Paul Booth , B. Pruvost , Pascal Chabert
Journée de l'industrie Plas@par, Nov 2013, Paris, France. 2013
Poster de conférence hal-02611324v1

Atomic bromine density measurements in HBr inductively coupled plasma by two-photon absorption laser-induced fluorescence

Jean-Paul Booth , Nishant Sirse , Mickaël Foucher
Laser Aided Plasma Diagnostics, Sep 2013, Madison, Wisconsin, United States. 2013
Poster de conférence hal-02611316v1

Hybrid Model of Parallel Plate RF Discharges in H2: Effect of DC and Tailored Voltage Waveforms

P. Diomede , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth , S. Longo
ESCAMPIG, Jul 2012, Viana do Costello, Portugal. 2012
Poster de conférence hal-02611272v1

Ozone production in O2 plasma at low pressure: evaluation of surface and gas phase mechanisms

Daniil Marinov , Olivier Guaitella , V. Guerra , Nishant Sirse , Jean-Paul Booth
IPS, May 2012, Presqu'île de Giens, France. 2012
Poster de conférence hal-02611269v1

Investigation of Voltage Waveform Tailoring Effect in CapacitivelyCoupled H2 Discharge: Fluid Simulations and Experimental Validation

T. Novikova , E.V. Johnson , M. Mao , P. Bulkin , Jean-Paul Booth
EPS Plasma Physics, Jul 2012, Stockholm, Sweden. 2012
Poster de conférence hal-02611270v1

Gas temperature and electron density measurements in Ar and Ar-Cl2 ICP discharges

Jean-Paul Booth , Nishant Sirse , Quentin Délivré , Pascal Chabert
ESCAMPIG, Jul 2012, Viana do Costello, Portugal. 2012
Poster de conférence hal-02611271v1

Voltage Waveform Tailoring in a RF-CCP reactor: Exploration of self-bias, electron density and current waveform

Pierre-Alexandre Delattre , S. Pouliquen , E.V. Johnson , Jean-Paul Booth
ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom. 2011
Poster de conférence hal-02611277v1

Recombination coefficient of Cl atoms on Al2O3 walls determined byTwo-Photon Laser-Induced Fluorescence

Jean-Paul Booth , Nishant Sirse , Pascal Chabert , Yasmina Azamoum , Mujahid Zaka-Ul-Islam
ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom. 2011
Poster de conférence hal-02611274v1

Electron density comparison between experiments and simulations in Chlorine based ICP discharge

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert
ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom. 2011
Poster de conférence hal-02611275v1

Inductive plasmas in Cl2/Ar :Comparison of hybrid model results with experimental measurements

Jean-Paul Booth , Emilie Despiau-Pujo , Pascal Chabert , Rodolphe Sarot
AVS Symposium, Oct 2010, Albuquerque, New Mexico, United States. 2010
Poster de conférence hal-02611282v1

Electron densities and temperatures in a Cl2/Ar ICP

Jean-Paul Booth , Rodolphe Sarot , Emilie Despiau-Pujo , Pascal Chabert , L. Gatilova
Gaseous Electronics Conference, Oct 2010, Paris, France. 2010
Poster de conférence hal-02611281v1

Plasma inductif en Cl2/Ar : comparaison entre simulations hybrides et expériences

Rodolphe Sarot , Emilie Despiau-Pujo , Pascal Chabert , Jean-Paul Booth , L. Gatilova
Congres de la Division Plasma du SFP, May 2010, Bordeaux, France. 2010
Poster de conférence hal-02611278v1

Inductive plasmas in Cl2/Ar : Comparison of hybrid model results with experimental measurements

Jean-Paul Booth , Rodolphe Sarot , Emilie Despiau-Pujo , Pascal Chabert , L. Gatilova
ESCAMPIG, Jul 2010, Novi Sad, Serbia. 2010
Poster de conférence hal-02611280v1

Broadband absorption with UV Light-Emitting Diodes in a dual-frequency capacitively coupled reactor

Jérôme Bredin , Jean-Paul Booth
Radiofrequency Plasma Workshop, May 2009, Presqu ile de Giens, France. 2009
Poster de conférence hal-02611283v1