Jean-Paul Booth

Documents

Présentation

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**Research interests** Physics and chemistry of electrical discharges in reactive gases and their interaction with surfaces. Development of novel diagnostic techniques for reactive plasmas : optical techniques for measuring reactive species densities and kinetics, electric fields, and electrical plasma measurements. Laser-induced fluorescence, Ion Flux Probes, cavity ring-down spectroscopy, broad-band absorption spectroscopy, microwave resonance techniques for electron density measurements. Development of sensors for in-situ control of industrial plasma processes. Physics of capacitively-coupled radiofrequency plasmas : tailored voltage waveform excitation for control of ion and electron fluxes and energy distributions. Gas breakdown in RF fields. **Brief vitae** *2000-Present* : Directeur de Recherche, CNRS at LPP, except : *2006-2008* : Technical Director, Lam Research Corp, Fremont, CA, USA *1990-2000* : Chargé de Recherche, CNRS, Laboratoire de Spectrométrie Physique, Grenoble *1988-1990* : Post-doctoral researcher, CNRS/CNET, Meylan, France *1985-1988* : D. Phil., Physical Chemistry Laboratory, Oxford University, UK *1980-1984* : BA & MA, Chemistry, Oxford University, UK **Distinctions :** *2010* : Fellow of [AVS](https://www.avs.org/Awards-Recognition/Society-Honors/Fellow-of-the-Society) *1984* : Physical Chemistry Part II Thesis Prize, Oxford University *1980-1983* : Stapeldon Scholarship to Exeter College, Oxford **Editorial responsabilities and Conference organisation** Associate Editor of IoP journal [Plasma Sources, Science and Technology](http://iopscience.iop.org/journal/0963-0252/page/Editorial%20Board) Chair, [International Workshop on Oxygen Plasma Kinetics 2016](http://langmuir.raunvis.hi.is/~tumi/wox.html) Chair, Laser-Aided Plasma Diagnostics [2013](<http://plasma.physics.wisc.edu/conferences/LAPD-2013 />)[& 2015](http://lapd17.qe.eng.hokudai.ac.jp/) Program Commitee, [ICPP 2014](http://www.ipfn.ist.utl.pt/ICPP2014/Welcome_to_ICPP_2014.html) Secretary, [AVS Plasma Science and Technology Division, 2012-13](http://www.avs.org/Divisions/pstd) Chair, International Conference on Phenomena in Ionised Gases, 2009

Publications

pascal-chabert

	Plasma non-uniformity in a symmetric radiofrequency capacitively-coupled reactor with dielectric side-wall: a two dimensional particle-in-cell/Monte Carlo collision simulation Yue Liu , Jean-Paul Booth , Pascal Chabert Plasma Sources Science and Technology, 2018, 27 (2), pp.025006. ⟨10.1088/1361-6595/aaa86e⟩ Article dans une revue hal-01895556v1
	Effect of frequency on the uniformity of symmetrical RF CCP discharges Yue Liu , Jean-Paul Booth , Pascal Chabert Plasma Sources Science and Technology, 2018, 27 (5), pp.055012. ⟨10.1088/1361-6595/aabfb4⟩ Article dans une revue hal-01895562v1
	The role of thermal energy accommodation and atomic recombination probabilities in low pressure oxygen plasmas Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans Plasma Physics and Controlled Fusion, 2017, 59 (2), pp.024004. ⟨10.1088/1361-6587/59/2/024004⟩ Article dans une revue hal-01895577v1
	High sensitivity ultra-broad-band absorption spectroscopy of inductively coupled chlorine plasma Daniil Marinov , Mickaël Foucher , Ewen Campbell , Mark Brouard , Pascal Chabert Plasma Sources Science and Technology, 2016, 25 (3), pp.035019 ⟨10.1088/0963-0252/25/3/035019⟩ Article dans une revue hal-01346016v1
	A computational analysis of the vibrational levels of molecular oxygen in low-pressure stationary and transient radio-frequency oxygen plasma Efe Kemaneci , Jean-Paul Booth , Pascal Chabert , Jan van Dijk , Thomas Mussenbrock Plasma Sources Science and Technology, 2016, 25 (2), pp.025025. ⟨10.1088/0963-0252/25/2/025025⟩ Article dans une revue hal-01549335v1
	Highly vibrationally excited O₂ molecules in low-pressure inductively-coupled plasmas detected by high sensitivity ultra-broad-band optical absorption spectroscopy Mickaël Foucher , Daniil Marinov , Emile Carbone , Pascal Chabert , Jean-Paul Booth Plasma Sources Science and Technology, 2015, 24 (4), pp.042001. ⟨10.1088/0963-0252/24/4/042001⟩ Article dans une revue hal-01549357v1
	Electron heating in capacitively coupled plasmas revisited Trevor Lafleur , Pascal Chabert , Jean-Paul Booth Plasma Sources Science and Technology, 2014, 23 (3), pp.035010. ⟨10.1088/0963-0252/23/3/035010⟩ Article dans une revue hal-01549379v1
	Equivalence of the hard-wall and kinetic-fluid models of collisionless electron heating in capacitively coupled discharges Trevor Lafleur , Pascal Chabert , Miles Turner , Jean-Paul Booth Plasma Sources Science and Technology, 2014, 23 (1), pp.015016. ⟨10.1088/0963-0252/23/1/015016⟩ Article dans une revue hal-01549398v1
	Ground state bromine atom density measurements by two-photon absorption laser-induced fluorescence Nishant Sirse , Mickaël Foucher , Pascal Chabert , Jean-Paul Booth Plasma Sources Science and Technology, 2014, 23 (6), pp.062003. ⟨10.1088/0963-0252/23/6/062003⟩ Article dans une revue hal-01549574v1
	Theory for the self-bias formation in capacitively coupled plasmas excited by arbitrary waveforms Trevor Lafleur , Pascal Chabert , M.M. Turner , Jean-Paul Booth Plasma Sources Science and Technology, 2013, 22 (6), pp.065013. ⟨10.1088/0963-0252/22/6/065013⟩ Article dans une revue hal-01549415v1
	Anomalous collisionality in low-pressure plasmas Trevor Lafleur , Pascal Chabert , M.M. Turner , Jean-Paul Booth Physics of Plasmas, 2013, 20 (12), pp.124503. ⟨10.1063/1.4859155⟩ Article dans une revue hal-01549421v1
	Chlorine atom densities in the (3p⁵)² P⁰_1/2 excited spin-orbit state measured by two-photon absorption laser-induced fluorescence in a chlorine inductively coupled plasma Nishant Sirse , Jean-Paul Booth , Pascal Chabert , A. Surzhykov , P. Indelicato Journal of Physics D: Applied Physics, 2013, 46 (29), pp.295203. ⟨10.1088/0022-3727/46/29/295203⟩ Article dans une revue hal-01549418v1
	Secondary electron induced asymmetry in capacitively coupled plasmas Trevor Lafleur , Pascal Chabert , Jean-Paul Booth Journal of Physics D: Applied Physics, 2013, 46, pp.135201. ⟨10.1088/0022-3727/46/13/135201⟩ Article dans une revue hal-01549417v1
	Absolute atomic chlorine densities in a Cl₂ ICP determined by Two-Photon Laser Induced Fluorescence with a new calibration method Jean-Paul Booth , Yasmina Azamoum , Nishant Sirse , Pascal Chabert Journal of Physics D: Applied Physics, 2012, 45, pp.195201. ⟨10.1088/0022-3727/45/19/195201⟩ Article dans une revue hal-01549434v1
	Plasmas froids Jean-Paul Booth , Pascal Chabert FlashX, 2010, 12, pp.3-5 Article dans une revue hal-02570443v1
	Dual-frequency capacitive radiofrequency discharges: effect of low-frequency power on electron density and ion flux Jean-Paul Booth , G. Curley , D. Marić , Pascal Chabert Plasma Sources Science and Technology, 2010, 19, pp.015005. ⟨10.1088/0963-0252/19/1/015005⟩ Article dans une revue hal-01549466v1
	Reactive ion etching of SiC in SF6 gas: detection of CF, CF2 and SiF2 etch products Pascal Chabert , G. Cunge , Jean-Paul Booth Applied Physics Letters, 2001, pp.79, 916 Article dans une revue hal-00475792v1
	Absolute fluorine atoms concentration in fluorocarbon plasma determined from CF2 loss kinetics Gilles Cunge , Pascal Chabert , Jean-Paul Booth Journal of Applied Physics, 2001, 89 (12), pp.7750. ⟨10.1063/1.1371940⟩ Article dans une revue hal-00475790v1

	Experimental and numerical investigation of an iodine plasma Florian Marmuse , Benjamin Esteves , Cyril Drag , Jean-Paul Booth , Anne Bourdon 73rd Annual Gaseous Electronics Virtual Conference, Oct 2020, Virtual, United States Communication dans un congrès hal-03322751v1
	Optical and electrical diagnostics in an iodine plasma Florian Marmuse , Romain Lucken , Cyril Drag , Jean-Paul Booth , Anne Bourdon 36th International Electric Propulsion Conference (IEPC 2019), Sep 2019, Vienne, Austria Communication dans un congrès hal-02341690v1
	2 Dimensional PIC/MCC simulations of RF CCPs with dielectric side wall: non-uniformity in electron heating Yue Liu , Jean-Paul Booth , Pascal Chabert International Workshop on Radio-Frequency Plasmas, May 2017, Presquile de Giens, France Communication dans un congrès hal-02593707v1
	Two Dimensional Particle-in-cell/Monte Carlo (PIC/MC) Simulation of Radio Frequency Capacitively Coupled Plasmas with a Dielectric Side Wall Boundary Yue Liu , Jean-Paul Booth , Pascal Chabert GEC, Oct 2016, Bochum, Germany Communication dans un congrès hal-02593691v1
	Charged and neutral particle dynamics in low pressure chlorine and oxygen plasmas: the role of collisional processes Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans EPS Plasma, Jul 2016, Leuven, Belgium Communication dans un congrès hal-02573351v1
	The role of surface interaction probabilities in reactive plasma modelling Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans ESCAMPIG, Jul 2016, Bratislava, Slovakia Communication dans un congrès hal-02593684v1
	Vibrational excitation in O₂ and Cl₂ inductively-coupled plasmas and DC discharges Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Andrew Gibson , Pascal Chabert ESCAMPIG Workshop on electron processes active in low temperature plasmas, Jul 2016, Bratislava, Slovakia Communication dans un congrès hal-02573355v1
	Dynamics of inductive plasmas in Cl₂, O₂ and Cl₂/O₂ mixtures: quantitative diagnostics and numerical modelling Daniil Marinov , Mickaël Foucher , Andrew Gibson , Pascal Chabert , Jean-Paul Booth IVC (International Vacuum Conference), Aug 2016, Busan, Korea, Unknown Region Communication dans un congrès hal-02573356v1
	The importance of surface interaction probabilities in low pressure plasma simulations for process design Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans PESM (Plasma Etch and Strip for Microelectronics), May 2016, Grenoble, France Communication dans un congrès hal-02593686v1
	Modelling the influence of neutral gas heating mechanisms on particle densities in inductively coupled chlorine discharges Andrew Gibson , T. Gans , Mickaël Foucher , Daniil Marinov , Pascal Chabert Gaseous Electronics Conference, Oct 2015, Honolulu, United States Communication dans un congrès hal-02593670v1
	Validation of Inductively Coupled Plasmas Sustained in Halogen Chemistries Ankur Agarwal , Mickaël Foucher , S. Rauf , Jean-Paul Booth , Pascal Chabert AVS Annual Symposium, Oct 2015, San Jose, California, United States Communication dans un congrès hal-02593676v1
	Inductively-coupled plasmas in Cl₂ and O₂: Comparing HPEM with advanced diagnostic measurements Jean-Paul Booth , Mickaël Foucher , Andrew Gibson , Daniil Marinov , Nishant Sirse Quantumol Workshop -Linking Simulation with Experiment, Sep 2015, London, United Kingdom Communication dans un congrès hal-02573341v1
	Vibrational kinetics in Cl₂ and O₂ low-pressure inductively-coupled plasmas Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert , Adriana Annusova Gaseous Electronics Conference, Oct 2015, Honolulu, United States Communication dans un congrès hal-02593669v1
	Density and temperature measurements in ICP's of Cl₂/O₂ using high sensitivity ultra broad-band absorption spectroscopy Mickaël Foucher , Daniil Marinov , Emile Carbone , Pascal Chabert , Jean-Paul Booth International Symposium on Plasma Chemistry, Jul 2015, Anvers, Belgium Communication dans un congrès hal-02593678v1
	Quantitative Diagnostics of Inductive Plasmas in Cl₂, O₂ AND Cl₂/O₂ Mixtures Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert Symposium on Application of Plasma Processes, Jan 2015, Vysoké Tatry, Slovakia Communication dans un congrès hal-02573337v1
	Ultra broad-band high sensitivity absorption spectroscopy of inductively-coupled plasmas in Cl₂/O₂ mixtures Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert Frontiers in Low-temperature Plasma Diagnostics FLTPD, May 2015, Porquerolles, France Communication dans un congrès hal-02593663v1
	Quantitative Diagnostics of Inductive Plasmas in Chlorine, Oxygen and Chlorine-Oxygen Mixtures Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert MRS-Japan, Dec 2015, Yokohama, Japan Communication dans un congrès hal-02573344v1
	A Comprehensive Quantitative Study of Low Pressure Inductively-Coupled Plasmas in Cl₂, O₂ and Mixtures Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert , Ankur Agarwal AVS Symposium, Oct 2015, San Jose, California, United States Communication dans un congrès hal-02593682v1
	Inductively-coupled plasmas of Cl₂, O₂ and mixtures : measurement of atoms, Cl_xO_y and electron densities Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert PESM, May 2014, Grenoble, France Communication dans un congrès hal-02593657v1
	Dynamique des Plasmas à Couplage Inductive dans les gaz HBr, Cl₂ et O₂ et mixtures: Diagnostiques Laser et Absorption Ultraviolet Large-Bande Jean-Paul Booth , Mickaël Foucher , Pascal Chabert Colloque de Plasma-Québec, Jun 2014, Montreal, Canada Communication dans un congrès hal-02573338v1
	A model for capacitive discharges with arbitrary RF waveform excitation including the electrical asymmetry effect and the associated self-bias Pascal Chabert , Trevor Lafleur , Jean-Paul Booth , Miles Turner 8th International Conference on reactive Plasma, Feb 2014, Fukuoka, Japan Communication dans un congrès hal-02573360v1
	Inductively-coupled plasmas of Cl₂, O₂ and mixtures : measurement of atoms, Cl_xO_y and electron densities Mickaël Foucher , Daniil Marinov , Emile Carbone , Jean-Paul Booth , Pascal Chabert GEC, Nov 2014, Raleigh, North Carolina, United States Communication dans un congrès hal-02593658v1
	Diagnostics of Cl₂/O₂ Inductively-Coupled Plasmas by Ultra-High sensitivity Broad-Band Absorption Spectroscopy Mickaël Foucher , Daniil Marinov , Emile Carbone , Jean-Paul Booth , Pascal Chabert AVS, Nov 2014, Baltimore, Maryland, United States Communication dans un congrès hal-02593659v1
	Diagnostics of Inductively-Coupled Plasmas in Hydrogen Bromide : Bromine Atom and Electron Densities Jean-Paul Booth , Nishant Sirse , Pascal Chabert , Mickaël Foucher AVS Symposium, Oct 2013, Long Beach, California, United States Communication dans un congrès hal-02594800v1
	Diagnostics of inductively-coupled plasmas in HBr : Bromine atom and electron densities Jean-Paul Booth , Nishant Sirse , Robert Soriano , Mickaël Foucher , Pascal Chabert Gaseous Electronics Conference, Oct 2013, Princeton, New Jersey, United States Communication dans un congrès hal-02594803v1
	Dynamics of Cl₂ inductively-coupled plasmas: Role of electronic and vibrational excitation Jean-Paul Booth , Nishant Sirse , Pascal Chabert , P. Indelicato , A. Surzhykov FLTPD, Apr 2013, Rolduc, Netherlands Communication dans un congrès hal-02573290v1
	Diagnostics of inductively-coupled plasmas in hydrogen bromide : Bromine atom and electron densities Jean-Paul Booth , Nishant Sirse , Pascal Chabert , Mickaël Foucher UK Technological Plasmas Workshop, Dec 2013, York, United Kingdom Communication dans un congrès hal-02594799v1
	Vibrational kinetics in a Cl2 inductively-coupled plasma B. Pruvost , Jean-Paul Booth , Mickaël Foucher , Pascal Chabert , V. Guerra Gaseous Electronics Conference, Oct 2013, Princeton, New Jersey, United States Communication dans un congrès hal-02594801v1
	Inductively-coupled plasmas in pure chlorine: comparison of atom density, electron density and gas temperature measurements with the HPEM hybrid model. Jean-Paul Booth , Nishant Sirse , Pascal Chabert , B. Pruvost , M.J. Kushner RF Plasma workshop, May 2013, Presqu ile de Giens, France Communication dans un congrès hal-02573293v1
	Optical diagnostics of low-pressure plasmas in halogen gases Jean-Paul Booth , Pascal Chabert , Nishant Sirse , P. Indelicato , A. Surzykov ICPIG, Jul 2013, Granada, Spain Communication dans un congrès hal-02573296v1
	Electron heating in capacitively coupled plasmas revisited: single and multi-frequency discharges Trevor Lafleur , Pascal Chabert , Miles Turner , Jean-Paul Booth Gaseous Electronics Conference, Oct 2013, Princeton, New Jersey, United States Communication dans un congrès hal-02573333v1
	Ground state bromine atom density measurements by two-photon absorption laser-induced fluorescence Mickaël Foucher , Nishant Sirse , Jean-Paul Booth , Pascal Chabert Journées dEchange du Réseau des Technologies des Plasmas Froids, Oct 2013, La Rochelle, France Communication dans un congrès hal-02594807v1
	Absolute Cl and Cl₂ densities in a Cl₂ ICP determined by TALIF with a new calibration method Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert Technological Plasmas Workshop, Jan 2012, Manchester, United Kingdom Communication dans un congrès hal-02594794v1
	Inductively-coupled plasmas in pure chlorine: comparison experiments/HPEM Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert GEC, Oct 2012, Austin, Texas, United States Communication dans un congrès hal-02594735v1
	Gas temperature measurement in Ar and Ar-Cl₂ based ICP discharge: Comparison between experiments and simulations Nishant Sirse , Quentin Délivré , Jean-Paul Booth , Pascal Chabert IEEE International Conference on Plasma Science (ICOPS), Jul 2012, Edinburgh, United Kingdom Communication dans un congrès hal-02594795v1
	Chlorine atom and molecule dynamics in an inductively coupled plasma in pure Cl₂ Jean-Paul Booth , Pascal Chabert , Yasmina Azamoum , Nishant Sirse Plasma Etch and Strip in Microelectronics (PESM), Mar 2012, Grenoble, France Communication dans un congrès hal-02594730v1
	Chlorine atom and molecule dynamics in an inductively coupled plasma in pure Cl₂ Jean-Paul Booth , Pascal Chabert , Yasmina Azamoum , Nishant Sirse International Workshop on Plasma Spectroscopy (IPS), May 2012, Presqu ile de Giens, France Communication dans un congrès hal-02594731v1
	Recombination coefficients of Cl atoms on Al₂O₃ walls determined by TALIF Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Mujahid Zaka-Ul-Islam , Pascal Chabert Plasma Etch and Strip for Microelectronics (PESM), May 2011, Mechelen, Belgium Communication dans un congrès hal-02594744v1
	Atomic Chlorine absolute densities and surface recombination coefficients in inductively coupled plasmas in Cl₂ Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert AVS, Oct 2011, Nashville, Tennessee, United States Communication dans un congrès hal-02594749v1
	Absolute Cl and Cl₂ densities in a Cl₂ ICP determined by TALIF with a new calibration method Nishant Sirse , Yasmina Azamoum , Pascal Chabert , Jean-Paul Booth UK TPW, Dec 2011, Manchester, United Kingdom Communication dans un congrès hal-02594750v1
	Cl atom recombination coefficients in a Cl₂ ICP determined by TALIF Jean-Paul Booth , Pascal Chabert , F. Boutaiba , Mujahid Zaka-Ul-Islam Frontiers in Low Temperature Plasma Diagnostics (FLTPD), May 2011, Zinnowitz, Germany Communication dans un congrès hal-02594745v1
	Seeing Inside Plasma Etch Reactors: from diagnostics to sensors for control Jean-Paul Booth , Pascal Chabert , Rodolphe Sarot , Mujahid Zaka-Ul-Islam IS-Plasma (International Symposium-Plasma), Feb 2011, Nagoya, Japan Communication dans un congrès hal-02573300v1
	Detection of atomic chlorine in an inductively-coupled plasma by TALIF:Absolute densities and surface recombination coefficients Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert LAPD, Oct 2011, Jeju, Korea, Unknown Region Communication dans un congrès hal-02573303v1
	INCLINE - Inductively coupled plasma for CMOS-compatible etching of III-V integrated laser sources S. Bouchoule , L. Gatilova , G. Patriarche , S. Guilet , L. Le Gratiet Journées Nationales en Nanosciences et Nanotechnologies, 2011, Ecole Polytechnique, Palaiseau, France Communication dans un congrès hal-02594797v1
	Absolute atomic chlorine densities in a Cl₂ ICP determined by TALIF with a new calibration method Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert 30th ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom Communication dans un congrès hal-02594798v1
	Effect of low-frequency power on electron density and ion flux in dual-frequency capacitive radiofrequency discharges Jean-Paul Booth , G. Curley , Pascal Chabert PESM, Mar 2010, Grenoble, France Communication dans un congrès hal-02595157v1
	Dual-frequency capacitive radiofrequency discharges : Effect of low-frequency power on electron density and flux Jean-Paul Booth , G. Curley , Pascal Chabert , D. Maric Gaseous Electronics Conference, Oct 2009, Saratoga Springs, New York, United States Communication dans un congrès hal-02595163v1
	CFX kinetics, gas temperature and instabilities in a CF4 inductively coupled discharge J.P Booth , H. Abada , P. Chabert , G. Cunge 48th National AVS symposium & Topical conferences, 2001, San Francisco, United States Communication dans un congrès hal-00494528v1
	High rate silicon carbide etching P. Chabert , J. Perrin , J.P Booth , G. Cunge ISPC, 15th International Symposium on Plasma Chemistry, 2001, Orleans, France Communication dans un congrès hal-00481964v1
	CFx kinetics, gas temperatures and instabilities in a CF4 inductively-coupled discharge J.P Booth , H. Abada , P. Chabert , G. Cunge 48th AVS Annual Symposium, 2001, San Francisco, United States Communication dans un congrès hal-00486179v1

	Iodine as propellant for electric propulsion: updated global model and comparisons to experiments Florian Marmuse , Romain Lucken , Cyril Drag , Jean-Paul Booth , Anne Bourdon International Symposium on Plasma Chemistry, Jun 2019, Naples, Italy. 2019 Poster de conférence hal-02341688v1
	Spectroscopic study of an iodine plasma in a low pressure RF-ICP ion source Florian Marmuse , Theo Courtois , Jean-Paul Booth , Cyril Drag , Ane Aanesland 71st Annual Gaseous Electronics Conference, Nov 2018, Portland, Oregon, United States. 2018 Poster de conférence hal-02864740v1
	The role of gas kinetics and surface interaction probabilities in simulations of industrial plasma sources at low pressure Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans International Symposium on Gas Kinetics, Jul 2016, York, United Kingdom. 2016 Poster de conférence hal-02611343v1
	Highly vibrationally excited O₂ molecules in low pressure oxygen plasmas: 1. Broad-band absorption spectroscopy Daniil Marinov , Mickaël Foucher , Olivier Guaitella , Richard Engeln , Pascal Chabert ESCAMPIG, Jul 2016, Bratislava, Slovakia. 2016 Poster de conférence hal-02611336v1
	Capacitively Coupled Radio-Frequency Plasmas Excited by Tailored Voltage Waveforms: Particle-In-Cell/Monte Carlo Simulations in 1 and 2 Dimensions Yue Liu , Jean-Paul Booth , Pascal Chabert Radiofrequency Plasma Workshop, Jun 2015, Dublin, Ireland. 2015 Poster de conférence hal-02611334v1
	A model for inductively coupled plasmas in O2 including vibrational kinetics Adriana Annusova , V. Guerra , Jean-Paul Booth , Mickaël Foucher , Daniil Marinov EPS Plasma, Jun 2015, Lisbon, Portugal. 2015 Poster de conférence hal-02611333v1
	Vibrational kinetics in Cl₂ and O₂ low-pressure inductively-coupled plasmas Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert , Adriana Annusova POSMOL, Jul 2015, Lisbon, Portugal. 2015 Poster de conférence hal-02611335v1
	Inductively-coupled plasmas (ICP) of Cl₂,O₂ and mixtures : measurements of atoms, ClxOy and electron densities Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert PESM, May 2014, Grenoble, France. 2014 Poster de conférence hal-02611325v1
	Inductively-coupled plasmas (ICP) of Cl₂, O₂ and mixtures : measurements of atoms, ClxOy and electron densities Mickaël Foucher , Daniil Marinov , Emile Carbone , Jean-Paul Booth , Pascal Chabert GEC, Nov 2014, Raleigh, North Carolina, United States. 2014 Poster de conférence hal-02611329v1
	Inductively-coupled plasmas (ICP) of Cl₂, O₂ and mixtures : measurements of atoms, ClxOy and electron densit Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert ESCAMPIG, Jul 2014, Greifswald, Germany. 2014 Poster de conférence hal-02611327v1
	High sensitivity ultra-broad-band absorption spectroscopy applied to etching plasmas Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert ESCAMPIG, Jul 2014, Greifswald, Germany. 2014 Poster de conférence hal-02611328v1
	Ground-state bromine atoms measurements by Two-Photon Absorption Laser-Induced Fluorescence Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert PESM, May 2014, Grenoble, France. 2014 Poster de conférence hal-02611326v1
	High sensitivity ultra-broad-band absorption spectroscopy applied to etching plasmas Mickaël Foucher , Daniil Marinov , Emile Carbone , Jean-Paul Booth , Pascal Chabert GEC, Nov 2014, Raleigh, North Carolina, United States. 2014 Poster de conférence hal-02611330v1
	Inductively-coupled plasmas in pure Cl₂, O₂ and mixtures: measurements of atom, Cl_xO_y and electron densities Mickaël Foucher , Pascal Chabert , Jean-Paul Booth Plasma Kinetics Master Class, Oct 2014, Bad Honnef, Germany. 2014 Poster de conférence hal-02611331v1
	Dynamique des plasmas radio-fréquences pulsés à couplage inductif en gaz halogénés simples Mickaël Foucher , Jean-Paul Booth , B. Pruvost , Pascal Chabert Journée de l'industrie Plas@par, Nov 2013, Paris, France. 2013 Poster de conférence hal-02611324v1
	Gas temperature and electron density measurements in Ar and Ar_-Cl₂ ICP discharges Jean-Paul Booth , Nishant Sirse , Quentin Délivré , Pascal Chabert ESCAMPIG, Jul 2012, Viana do Costello, Portugal. 2012 Poster de conférence hal-02611271v1
	Electron density comparison between experiments and simulations in Chlorine based ICP discharge Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom. 2011 Poster de conférence hal-02611275v1
	Recombination coefficient of Cl atoms on Al₂O₃ walls determined byTwo-Photon Laser-Induced Fluorescence Jean-Paul Booth , Nishant Sirse , Pascal Chabert , Yasmina Azamoum , Mujahid Zaka-Ul-Islam ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom. 2011 Poster de conférence hal-02611274v1
	Plasma inductif en Cl₂/Ar : comparaison entre simulations hybrides et expériences Rodolphe Sarot , Emilie Despiau-Pujo , Pascal Chabert , Jean-Paul Booth , L. Gatilova Congres de la Division Plasma du SFP, May 2010, Bordeaux, France. 2010 Poster de conférence hal-02611278v1
	Inductive plasmas in Cl₂/Ar : Comparison of hybrid model results with experimental measurements Jean-Paul Booth , Rodolphe Sarot , Emilie Despiau-Pujo , Pascal Chabert , L. Gatilova ESCAMPIG, Jul 2010, Novi Sad, Serbia. 2010 Poster de conférence hal-02611280v1
	Electron densities and temperatures in a Cl₂/Ar ICP Jean-Paul Booth , Rodolphe Sarot , Emilie Despiau-Pujo , Pascal Chabert , L. Gatilova Gaseous Electronics Conference, Oct 2010, Paris, France. 2010 Poster de conférence hal-02611281v1
	Inductive plasmas in Cl₂/Ar :Comparison of hybrid model results with experimental measurements Jean-Paul Booth , Emilie Despiau-Pujo , Pascal Chabert , Rodolphe Sarot AVS Symposium, Oct 2010, Albuquerque, New Mexico, United States. 2010 Poster de conférence hal-02611282v1

Jean-Paul Booth

Présentation

Publications

Plasma non-uniformity in a symmetric radiofrequency capacitively-coupled reactor with dielectric side-wall: a two dimensional particle-in-cell/Monte Carlo collision simulation

Effect of frequency on the uniformity of symmetrical RF CCP discharges

The role of thermal energy accommodation and atomic recombination probabilities in low pressure oxygen plasmas

High sensitivity ultra-broad-band absorption spectroscopy of inductively coupled chlorine plasma

A computational analysis of the vibrational levels of molecular oxygen in low-pressure stationary and transient radio-frequency oxygen plasma

Highly vibrationally excited O2 molecules in low-pressure inductively-coupled plasmas detected by high sensitivity ultra-broad-band optical absorption spectroscopy

Electron heating in capacitively coupled plasmas revisited

Equivalence of the hard-wall and kinetic-fluid models of collisionless electron heating in capacitively coupled discharges

Ground state bromine atom density measurements by two-photon absorption laser-induced fluorescence

Theory for the self-bias formation in capacitively coupled plasmas excited by arbitrary waveforms

Anomalous collisionality in low-pressure plasmas

Chlorine atom densities in the (3p5)2 P01/2 excited spin-orbit state measured by two-photon absorption laser-induced fluorescence in a chlorine inductively coupled plasma

Secondary electron induced asymmetry in capacitively coupled plasmas

Absolute atomic chlorine densities in a Cl2 ICP determined by Two-Photon Laser Induced Fluorescence with a new calibration method

Plasmas froids

Dual-frequency capacitive radiofrequency discharges: effect of low-frequency power on electron density and ion flux

Reactive ion etching of SiC in SF6 gas: detection of CF, CF2 and SiF2 etch products

Absolute fluorine atoms concentration in fluorocarbon plasma determined from CF2 loss kinetics

Experimental and numerical investigation of an iodine plasma

Optical and electrical diagnostics in an iodine plasma

2 Dimensional PIC/MCC simulations of RF CCPs with dielectric side wall: non-uniformity in electron heating

Two Dimensional Particle-in-cell/Monte Carlo (PIC/MC) Simulation of Radio Frequency Capacitively Coupled Plasmas with a Dielectric Side Wall Boundary

Charged and neutral particle dynamics in low pressure chlorine and oxygen plasmas: the role of collisional processes

The role of surface interaction probabilities in reactive plasma modelling

Vibrational excitation in O2 and Cl2 inductively-coupled plasmas and DC discharges

Dynamics of inductive plasmas in Cl2, O2 and Cl2/O2 mixtures: quantitative diagnostics and numerical modelling

The importance of surface interaction probabilities in low pressure plasma simulations for process design

Modelling the influence of neutral gas heating mechanisms on particle densities in inductively coupled chlorine discharges

Validation of Inductively Coupled Plasmas Sustained in Halogen Chemistries

Inductively-coupled plasmas in Cl2 and O2: Comparing HPEM with advanced diagnostic measurements

Vibrational kinetics in Cl2 and O2 low-pressure inductively-coupled plasmas

Density and temperature measurements in ICP's of Cl2/O2 using high sensitivity ultra broad-band absorption spectroscopy

Quantitative Diagnostics of Inductive Plasmas in Cl2, O2 AND Cl2/O2 Mixtures

Ultra broad-band high sensitivity absorption spectroscopy of inductively-coupled plasmas in Cl2/O2 mixtures

Quantitative Diagnostics of Inductive Plasmas in Chlorine, Oxygen and Chlorine-Oxygen Mixtures

A Comprehensive Quantitative Study of Low Pressure Inductively-Coupled Plasmas in Cl2, O2 and Mixtures

Inductively-coupled plasmas of Cl2, O2 and mixtures : measurement of atoms, ClxOy and electron densities

Dynamique des Plasmas à Couplage Inductive dans les gaz HBr, Cl2 et O2 et mixtures: Diagnostiques Laser et Absorption Ultraviolet Large-Bande

A model for capacitive discharges with arbitrary RF waveform excitation including the electrical asymmetry effect and the associated self-bias

Inductively-coupled plasmas of Cl2, O2 and mixtures : measurement of atoms, ClxOy and electron densities

Diagnostics of Cl2/O2 Inductively-Coupled Plasmas by Ultra-High sensitivity Broad-Band Absorption Spectroscopy

Diagnostics of Inductively-Coupled Plasmas in Hydrogen Bromide : Bromine Atom and Electron Densities

Diagnostics of inductively-coupled plasmas in HBr : Bromine atom and electron densities

Dynamics of Cl2 inductively-coupled plasmas: Role of electronic and vibrational excitation

Diagnostics of inductively-coupled plasmas in hydrogen bromide : Bromine atom and electron densities

Vibrational kinetics in a Cl2 inductively-coupled plasma

Inductively-coupled plasmas in pure chlorine: comparison of atom density, electron density and gas temperature measurements with the HPEM hybrid model.

Optical diagnostics of low-pressure plasmas in halogen gases

Electron heating in capacitively coupled plasmas revisited: single and multi-frequency discharges

Ground state bromine atom density measurements by two-photon absorption laser-induced fluorescence

Absolute Cl and Cl2 densities in a Cl2 ICP determined by TALIF with a new calibration method

Inductively-coupled plasmas in pure chlorine: comparison experiments/HPEM

Gas temperature measurement in Ar and Ar-Cl2 based ICP discharge: Comparison between experiments and simulations

Chlorine atom and molecule dynamics in an inductively coupled plasma in pure Cl2

Chlorine atom and molecule dynamics in an inductively coupled plasma in pure Cl2

Recombination coefficients of Cl atoms on Al2O3 walls determined by TALIF

Atomic Chlorine absolute densities and surface recombination coefficients in inductively coupled plasmas in Cl2

Absolute Cl and Cl2 densities in a Cl2 ICP determined by TALIF with a new calibration method

Cl atom recombination coefficients in a Cl2 ICP determined by TALIF

Seeing Inside Plasma Etch Reactors: from diagnostics to sensors for control

Detection of atomic chlorine in an inductively-coupled plasma by TALIF:Absolute densities and surface recombination coefficients

INCLINE - Inductively coupled plasma for CMOS-compatible etching of III-V integrated laser sources

Absolute atomic chlorine densities in a Cl2 ICP determined by TALIF with a new calibration method

Effect of low-frequency power on electron density and ion flux in dual-frequency capacitive radiofrequency discharges

Dual-frequency capacitive radiofrequency discharges : Effect of low-frequency power on electron density and flux

CFX kinetics, gas temperature and instabilities in a CF4 inductively coupled discharge

High rate silicon carbide etching

CFx kinetics, gas temperatures and instabilities in a CF4 inductively-coupled discharge

Iodine as propellant for electric propulsion: updated global model and comparisons to experiments

Spectroscopic study of an iodine plasma in a low pressure RF-ICP ion source

The role of gas kinetics and surface interaction probabilities in simulations of industrial plasma sources at low pressure

Highly vibrationally excited O2 molecules in low pressure oxygen plasmas: 1. Broad-band absorption spectroscopy

Capacitively Coupled Radio-Frequency Plasmas Excited by Tailored Voltage Waveforms: Particle-In-Cell/Monte Carlo Simulations in 1 and 2 Dimensions

A model for inductively coupled plasmas in O2 including vibrational kinetics

Vibrational kinetics in Cl2 and O2 low-pressure inductively-coupled plasmas

Inductively-coupled plasmas (ICP) of Cl2,O2 and mixtures : measurements of atoms, ClxOy and electron densities

Inductively-coupled plasmas (ICP) of Cl2, O2 and mixtures : measurements of atoms, ClxOy and electron densities

Highly vibrationally excited O₂ molecules in low-pressure inductively-coupled plasmas detected by high sensitivity ultra-broad-band optical absorption spectroscopy

Chlorine atom densities in the (3p⁵)² P⁰_1/2 excited spin-orbit state measured by two-photon absorption laser-induced fluorescence in a chlorine inductively coupled plasma

Absolute atomic chlorine densities in a Cl₂ ICP determined by Two-Photon Laser Induced Fluorescence with a new calibration method

Vibrational excitation in O₂ and Cl₂ inductively-coupled plasmas and DC discharges

Dynamics of inductive plasmas in Cl₂, O₂ and Cl₂/O₂ mixtures: quantitative diagnostics and numerical modelling

Inductively-coupled plasmas in Cl₂ and O₂: Comparing HPEM with advanced diagnostic measurements

Vibrational kinetics in Cl₂ and O₂ low-pressure inductively-coupled plasmas

Density and temperature measurements in ICP's of Cl₂/O₂ using high sensitivity ultra broad-band absorption spectroscopy

Quantitative Diagnostics of Inductive Plasmas in Cl₂, O₂ AND Cl₂/O₂ Mixtures

Ultra broad-band high sensitivity absorption spectroscopy of inductively-coupled plasmas in Cl₂/O₂ mixtures

A Comprehensive Quantitative Study of Low Pressure Inductively-Coupled Plasmas in Cl₂, O₂ and Mixtures

Inductively-coupled plasmas of Cl₂, O₂ and mixtures : measurement of atoms, Cl_xO_y and electron densities

Dynamique des Plasmas à Couplage Inductive dans les gaz HBr, Cl₂ et O₂ et mixtures: Diagnostiques Laser et Absorption Ultraviolet Large-Bande

Inductively-coupled plasmas of Cl₂, O₂ and mixtures : measurement of atoms, Cl_xO_y and electron densities

Diagnostics of Cl₂/O₂ Inductively-Coupled Plasmas by Ultra-High sensitivity Broad-Band Absorption Spectroscopy

Dynamics of Cl₂ inductively-coupled plasmas: Role of electronic and vibrational excitation

Absolute Cl and Cl₂ densities in a Cl₂ ICP determined by TALIF with a new calibration method

Gas temperature measurement in Ar and Ar-Cl₂ based ICP discharge: Comparison between experiments and simulations

Chlorine atom and molecule dynamics in an inductively coupled plasma in pure Cl₂

Chlorine atom and molecule dynamics in an inductively coupled plasma in pure Cl₂

Recombination coefficients of Cl atoms on Al₂O₃ walls determined by TALIF

Atomic Chlorine absolute densities and surface recombination coefficients in inductively coupled plasmas in Cl₂

Absolute Cl and Cl₂ densities in a Cl₂ ICP determined by TALIF with a new calibration method

Cl atom recombination coefficients in a Cl₂ ICP determined by TALIF

Absolute atomic chlorine densities in a Cl₂ ICP determined by TALIF with a new calibration method

Highly vibrationally excited O₂ molecules in low pressure oxygen plasmas: 1. Broad-band absorption spectroscopy

Vibrational kinetics in Cl₂ and O₂ low-pressure inductively-coupled plasmas

Inductively-coupled plasmas (ICP) of Cl₂,O₂ and mixtures : measurements of atoms, ClxOy and electron densities

Inductively-coupled plasmas (ICP) of Cl₂, O₂ and mixtures : measurements of atoms, ClxOy and electron densities

Inductively-coupled plasmas (ICP) of Cl₂, O₂ and mixtures : measurements of atoms, ClxOy and electron densit

Inductively-coupled plasmas in pure Cl₂, O₂ and mixtures: measurements of atom, Cl_xO_y and electron densities

Gas temperature and electron density measurements in Ar and Ar_-Cl₂ ICP discharges

Recombination coefficient of Cl atoms on Al₂O₃ walls determined byTwo-Photon Laser-Induced Fluorescence

Plasma inductif en Cl₂/Ar : comparaison entre simulations hybrides et expériences

Inductive plasmas in Cl₂/Ar : Comparison of hybrid model results with experimental measurements

Electron densities and temperatures in a Cl₂/Ar ICP

Inductive plasmas in Cl₂/Ar :Comparison of hybrid model results with experimental measurements