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JM
Jean-François Michaud
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Documents
Identifiants chercheurs
jean-francois-michaud- IdRef : 084441380
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0000-0002-7441-8982
Présentation
Jean-François MICHAUD was born in 1976. In 2004, he received the Ph.D. degree in electronics, from the University of Rennes 1. Since September 2006, he is an associate professor at the University of Tours. His current research, in the GREMAN laboratory, focuses mainly on silicon carbide for electronic and MEMS applications. He is the GREMAN responsible person for the ANDRA project H2MEMS (resonant microsystems for hydrogen detection) leaded by IMS Bordeaux and the ECSEL-H2020 WInSiC4AP (Wide band gap Innovative SiC for Advanced Power) coordinated by Distretto Tecnologico Sicilia Micro E Nano Sistemi SRL (Italie)
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Proof of concept and preliminary results of gas detection by measuring the admittance at the resonance and anti-resonance of an uncoated CMUTFrontiers of Mechanical Engineering, 2020, ⟨10.3389/fmech.2020.00014⟩
Article dans une revue
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Investigation of the Young's Modulus and the Residual Stress of 4H-SiC Circular Membranes on 4H-SiC SubstratesMicromachines, 2019, 10, ⟨10.3390/mi10120801⟩
Article dans une revue
hal-02374829v1
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Low temperature capacitive micromachined ultrasonic transducers (cMUTs) on glass substrateJournal of Micromechanics and Microengineering, 2016, 26 (11), ⟨10.1088/0960-1317/26/11/115023⟩
Article dans une revue
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Progresses in cMUT Device Fabrication Using Low Temperature ProcessesJournal of Micromechanics and Microengineering, 2014, 24 (4), pp.045020. ⟨10.1088/0960-1317/24/4/045020⟩
Article dans une revue
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Cubic silicon carbide (3C-SiC) MEMS for gas detectionWOCSDICE - EXMATEC, May 2023, Palerme (Italie), France
Communication dans un congrès
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Cmut Time of Flight Gas Sensor By Phase Shift Measurement18th International Meeting on Chemical Sensors IMCS 2020, 2020, Montreal, France. ⟨10.1149/MA2020-01312323mtgabs⟩
Communication dans un congrès
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Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures2020 Joint Conference of the IEEE International Frequency Control Symposium and the IEEE International Symposium on Applications of Ferroelectrics, Jul 2020, Keystone (virtual conference), United States. pp.1-3, ⟨10.1109/IFCS-ISAF41089.2020.9234908⟩
Communication dans un congrès
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High Frequency Gas Detection With an Uncoated CMUT Array by Impedance Resonant Frequency Measurement2019 IEEE SENSORS, Oct 2019, Montreal, Canada. pp.1-4, ⟨10.1109/SENSORS43011.2019.8956767⟩
Communication dans un congrès
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CMUT enabled binary mixture gas sensing through time of flight measurementThe 16th International Workshop on Nanomechanical Sensors, 2019, Lausanne, Switzerland
Communication dans un congrès
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Time of flight gas sensing with capacitive micro-machined ultrasonic transducers (CMUT’s)Journées de l’école doctorale SPI Université de Bordeaux, Mar 2019, Bordeaux, France
Communication dans un congrès
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Gas detection in binary mixture by time of flight measurement made by the use of CMUTsWorkshop MUT 2019, 2019, Grenoble, France
Communication dans un congrès
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CMUT Based Air Coupled Transducers for Gas-Mixture Analysis2018 IEEE International Ultrasonics Symposium (IUS), Oct 2018, Kobe, Japan. pp.1-4, ⟨10.1109/ULTSYM.2018.8579789⟩
Communication dans un congrès
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Dispositif et procédé d’identification d’une contamination gazeuseFrance, N° de brevet: FR2009223. 2020
Brevet
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Dispositif et procédé de détection d’hydrogèneFrance, N° de brevet: FR2009222. 2020
Brevet
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