Jean-François Michaud

Documents

Identifiants chercheurs

jean-francois-michaud
IdRef : 084441380
0000-0002-7441-8982

Présentation

Publications

	How to Accurately Determine the Ohmic Contact Properties on n-Type 4H-SiC Clément Berger , Daniel Alquier , Jean-François Michaud Electronics, 2024, 13 (1), pp.217. ⟨10.3390/electronics13010217⟩ Article dans une revue hal-04378904v1
	Silicon-carbide-based MEMS for gas detection applications Jean-François Michaud , Marc Portail , Daniel Alquier , Dominique Certon , Isabelle Dufour Materials Science in Semiconductor Processing, 2023, 171, pp.107986. ⟨10.1016/j.mssp.2023.107986⟩ Article dans une revue hal-04301385v1
	Gas discrimination by simultaneous sound velocity and attenuation measurements using uncoated capacitive micromachined ultrasonic transducers Luis Iglesias Hernandez , Priyadarshini Shanmugam , Jean-François Michaud , Daniel Alquier , Dominique Certon Scientific Reports, 2022, 12 (1), pp.744. ⟨10.1038/s41598-021-04689-4⟩ Article dans une revue hal-03528025v1
	Electrical, morphological and structural properties of Ti ohmic contacts formed on n-type 4H–SiC by laser thermal annealing Clément Berger , Daniel Alquier , Micka Bah , Jean-François Michaud Materials Science in Semiconductor Processing, 2022, 151, pp.106983. ⟨10.1016/j.mssp.2022.106983⟩ Article dans une revue hal-03755512v1
	Proof of concept and preliminary results of gas detection by measuring the admittance at the resonance and anti-resonance of an uncoated CMUT Luis Iglesias , Priyadarshini Shanmugam , Jean-François Michaud , Daniel Alquier , Dominique Certon Frontiers of Mechanical Engineering, 2020, ⟨10.3389/fmech.2020.00014⟩ Article dans une revue hal-02505916v1
	Investigation of the Young's Modulus and the Residual Stress of 4H-SiC Circular Membranes on 4H-SiC Substrates Jaweb Ben Messaoud , Jean-François Michaud , Dominique Certon , Massimo Camarda , Nicolò Piluso Micromachines, 2019, 10, ⟨10.3390/mi10120801⟩ Article dans une revue hal-02374829v1
	Turning the undesired voids in silicon into a tool: In-situ fabrication of free-standing 3C-SiC membranes Rami Khazaka , Jean-François Michaud , Philippe Vennegues , Daniel Alquier , Marc Portail Applied Physics Letters, 2017, 110 (8), ⟨10.1063/1.4977033⟩ Article dans une revue hal-01741061v1
	Low temperature capacitive micromachined ultrasonic transducers (cMUTs) on glass substrate Emilie Bahette , Jean-François Michaud , Dominique Certon , Dominique Gross , Marie Perroteau Journal of Micromechanics and Microengineering, 2016, 26 (11), ⟨10.1088/0960-1317/26/11/115023⟩ Article dans une revue hal-01741067v1
	On the interplay between Si(110) epilayer atomic roughness and subsequent 3C-SiC growth direction Rami Khazaka , Jean-François Michaud , Philippe Vennegues , Luan Nguyen , Daniel Alquier Journal of Applied Physics, 2016, 120, pp.185306 - 141907. ⟨10.1063/1.4967741⟩ Article dans une revue hal-01740987v1
	Realization of minimum number of rotational domains in heteroepitaxied Si(110) on 3C-SiC(001) Rami Khazaka , Marius Grundmann , Marc Portail , Philippe Vennegues , Marcin Zielinski Applied Physics Letters, 2016, 108 (1), ⟨10.1063/1.4939692⟩ Article dans une revue hal-01741073v1
	Toward high-quality 3C–SiC membrane on a 3C–SiC pseudo-substrate Rami Khazaka , Emilie Bahette , Marc Portail , Daniel Alquier , Jean-François Michaud Materials Letters, 2015, 160, pp.28-30. ⟨10.1016/j.matlet.2015.07.071⟩ Article dans une revue hal-01784769v1
	Direct Insight into Grains Formation in Si Layers Grown on 3C-SiC by Chemical Vapor Deposition Rami Khazaka , Marc Portail , Philippe Vennéguès , Daniel Alquier , Jean-François Michaud Acta Materialia, 2015, 98, pp.336-342. ⟨10.1016/j.actamat.2015.07.052⟩ Article dans une revue hal-01784770v1
	Electrothermally driven high-frequency piezoresistive SiC cantilevers for dynamic atomic force microscopy R. Boubekri , E. Cambril , L. Couraud , L. Bernardi , A. Madouri Journal of Applied Physics, 2014, 116, pp.054304. ⟨10.1063/1.4891833⟩ Article dans une revue hal-01715334v1
	Progresses in cMUT Device Fabrication Using Low Temperature Processes Emilie Bahette , Jean-François Michaud , Dominique Certon , Dominique Gross , Daniel Alquier Journal of Micromechanics and Microengineering, 2014, 24 (4), pp.045020. ⟨10.1088/0960-1317/24/4/045020⟩ Article dans une revue hal-01831020v1
	Original 3C-SiC micro-structure on a 3C-SiC pseudo-substrate Jean-François Michaud , Marc Portail , Thierry Chassagne , Marcin Zielinski , Daniel Alquier Microelectronic Engineering, 2013, 105, pp.65-67. ⟨10.1016/j.mee.2013.01.010⟩ Article dans une revue hal-01810899v1
	Room light anodic etching of highly doped n-type 4 H-SiC in high-concentration HF electrolytes: Difference between C and Si crystalline faces Gaël Gautier , Frédéric Cayrel , Marie Capelle , Jérôme Billoue , Xi Song Nanoscale Research Letters, 2012, 7 (1), pp.367-373. ⟨10.1186/1556-276X-7-367⟩ Article dans une revue hal-01810904v1
	A New Approach for AFM Cantilever Elaboration with 3C-SiC Sai Jiao , Jean-François Michaud , Marc Portail , A. Madouri , Thierry Chassagne Materials Letters, 2012, 77, pp.54-56. ⟨10.1016/j.matlet.2012.02.128⟩ Article dans une revue hal-01810915v1
	Experimental Observation and Analytical Model of the Stress Gradient Inversion in 3C-SiC Layers on Silicon M. Zielinski , Jean-François Michaud , Sai Jiao , Thierry Chassagne , Anne-Elisabeth Bazin Journal of Applied Physics, 2012, 111 (5), pp.053507. ⟨10.1063/1.3687370⟩ Article dans une revue hal-01810913v1
	CW argon laser crystallization of silicon films: structural properties J.F. Michaud , Régis Rogel , Tayeb Mohammed-Brahim , Michel Sarret Journal of Non-Crystalline Solids, 2006, 352 (9-20), pp.998-1002 Article dans une revue hal-00437319v1
	Low frequency noise model in N-MOS transistors operating from sub-threshold to above-threshold regions J.F. Michaud , Christophe Cordier , Abdelmalek Boukhenoufa , Laurent Pichon Solid-State Electronics, 2005, 49, issue 8, pp 1376-1380 Article dans une revue hal-00013581v1
	Solid phase post-treatment of polysilicon films by a continuous argon laser J.F. Michaud , Régis Rogel , Tayeb Mohammed-Brahim , Michel Sarret , Olivier Bonnaud Thin Solid Films, 2005, 487, pp.81-84 Article dans une revue hal-00772824v1
	Low frequency noise model in N-MOS transistors operating from sub-threshold to above-threshold regions Christophe Cordier , Abdelmalek Boukhenoufa , Laurent Pichon , Jean-François Michaud Solid-State Electronics, 2005, 49 (8), pp.1376-1380 Article dans une revue hal-00772760v1
	Polysilicon thin-film transistors based on frequency doubled cw-Nd:YVO4 laser crystallized silicon Amar Saboundji , Jean-François Michaud , Tayeb Mohammed-Brahim , France Le Bihan , G. Andrä Solid State Phenomena, 2003, 93, pp.55-60 Article dans une revue hal-00085671v1

	Contact Strategies for SiC Power Devices Daniel Alquier , Clément Berger , Jean-François Michaud Materials for Advanced Metallization conference (MAM), Mar 2024, Milan (Italie), France Communication dans un congrès hal-04515260v1
	Cubic silicon carbide (3C-SiC) MEMS for gas detection Jean-François Michaud , Marc Portail , Daniel Alquier , Dominique Certon , Isabelle Dufour WOCSDICE - EXMATEC, May 2023, Palerme (Italie), France Communication dans un congrès hal-04515241v1
	A New Approach in the Field of Hydrogen Gas Sensing Using MEMS Based 3C-SiC Microcantilevers Priyadarshini Shanmugam , Luis Iglesias , Marc Portail , Isabelle Dufour , Dominique Certon 13th European Conference on Silicon Carbide and Related Materials (ECSCRM 2020·2021) 2021-10-24, May 2022, Tours, France. pp.593-597, ⟨10.4028/p-m048qs⟩ Communication dans un congrès hal-03708472v1
	Cmut Time of Flight Gas Sensor By Phase Shift Measurement Luis Iglesias , Priyadarshini Shanmugam , Jean-François Michaud , Daniel Alquier , Dominique Certon 18th International Meeting on Chemical Sensors IMCS 2020, 2020, Montreal, France. ⟨10.1149/MA2020-01312323mtgabs⟩ Communication dans un congrès hal-02476748v1
	Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures Isabelle Dufour , Luis Iglesias Hernandez , Priyadarshini Shanmugam , Jean-François Michaud , Daniel Alquier 2020 Joint Conference of the IEEE International Frequency Control Symposium and the IEEE International Symposium on Applications of Ferroelectrics, Jul 2020, Keystone (virtual conference), United States. pp.1-3, ⟨10.1109/IFCS-ISAF41089.2020.9234908⟩ Communication dans un congrès hal-02481928v1
	Time of flight gas sensing with capacitive micro-machined ultrasonic transducers (CMUT’s) Luis Iglesias , Priyadarshini Shanmugam , Steven Pena , Jean-François Michaud , Daniel Alquier Journées de l’école doctorale SPI Université de Bordeaux, Mar 2019, Bordeaux, France Communication dans un congrès hal-02090954v1
	High Frequency Gas Detection With an Uncoated CMUT Array by Impedance Resonant Frequency Measurement Luis Iglesias Hernandez , Isabelle Dufour , Priyadarshini Shanmugam , Jean-François Michaud , Daniel Alquier 2019 IEEE SENSORS, Oct 2019, Montreal, Canada. pp.1-4, ⟨10.1109/SENSORS43011.2019.8956767⟩ Communication dans un congrès hal-02476746v1
	CMUT enabled binary mixture gas sensing through time of flight measurement Luis Iglesias , Priyadarshini Shanmugam , Steven Pena , Jean-François Michaud , Daniel Alquier The 16th International Workshop on Nanomechanical Sensors, 2019, Lausanne, Switzerland Communication dans un congrès hal-02191746v1
	Gas detection in binary mixture by time of flight measurement made by the use of CMUTs Luis Iglesias , Priyadarshini Shanmugam , Steven Pena , J.-F. Michaud , Daniel Alquier Workshop MUT 2019, 2019, Grenoble, France Communication dans un congrès hal-02191737v1
	CMUT Based Air Coupled Transducers for Gas-Mixture Analysis Priyadarshini Shanmugam , Luis Iglesias , Jean-François Michaud , Isabelle Dufour , Daniel Alquier 2018 IEEE International Ultrasonics Symposium (IUS), Oct 2018, Kobe, Japan. pp.1-4, ⟨10.1109/ULTSYM.2018.8579789⟩ Communication dans un congrès hal-02013282v1
	Influence of Aluminum Incorporation on Mechanical Properties of 3C-SiC Epilayers Jean-François Michaud , Marcin Zielinski , Jaweb Ben Messaoud , Thierry Chassagne , Marc Portail International Conference on Silicon Carbide and Related Materials, Sep 2017, Washington, United States. pp.318-321, ⟨10.4028/www.scientific.net/MSF.924.318⟩ Communication dans un congrès hal-02017420v1
	Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration Jean-François Michaud , Rami Khazaka , M. Portail , G. Andrä , J. Bergmann Conférence MRS Spring Meeting, Apr 2016, Phoenix, United States. pp.3649 - 3654, ⟨10.1557/adv.2016.327⟩ Communication dans un congrès hal-01741555v1
	Cw Argon Laser Crystallization of Silicon Films : Structural properties J.F. Michaud , Regis Rogel , Tayeb Mohammed-Brahim , Michel Sarret Int. Conf. Amorphous and Nanocrystalline Semiconductors (ICANS'21), Sep 2005, Lisbonne, Portugal Communication dans un congrès hal-00776201v1
	Apparent noise parameter behavior in n-MOS transistors operating from subthreshold to above-threshold regions Abdelmalek Boukhenoufa , Laurent Pichon , Christophe Cordier , Bogdan Cretu , Lehui Ding Proceedings of the 18th International Conference on noise in Physical Systems and 1/f Fluctuation ; ICNF 2005 ; CP780 Noise and Fluctuations, Sep 2005, Salamanca, Spain. pp.319-322 Communication dans un congrès hal-00773430v1
	Continuous Argon Laser Crystallization of Patterned Silicon Jean-François Michaud , Amar Saboundji , Regis Rogel , Tayeb Mohammed-Brahim , Michel Sarret The 11th International Displays Workshops IDW'04, Dec 2004, Niigata, Japan Communication dans un congrès hal-00870482v1
	Solid phase post-treatment of polysilicon films by a continuous argon laser Jean-François Michaud , Regis Rogel , Tayeb Mohammed-Brahim , Michel Sarret , Olivier Bonnaud POLYSE 2004, Sep 2004, Potdam, Germany Communication dans un congrès hal-00870429v1
	Modeling to the heating of a silicon thin film on a glass substrate during a cw argon laser crystallization process G. Le Meur , B. Bourouga , J.F. Michaud , Tayeb Mohammed-Brahim 6th International Symposium on Heat Transfer, Jun 2004, pekin, China. pp.137-142 Communication dans un congrès hal-00848465v1
	Cristallisation par laser argon continu de silicium amorphe déposé sur substrat de verre Jean-François Michaud JNRDM, May 2004, Marseille, France. pp.135-137 Communication dans un congrès hal-00906104v1
	Impact of the use of the second harmonic CW Nd:YVO4 laser to crystallize amorphous silicon films on the TFT performance Amar Saboundji , Jean-François Michaud , Tayeb Mohammed-Brahim , Olivier Bonnaud , G. Andrä Proceedings of International Conference on AM-LCD 2004, Aug 2004, Tokyo, Japan Communication dans un congrès hal-00870772v1
	Cristallisation par laser continu de silicium amorphe déposé sur substrat de verre LPCVD Jean-François Michaud JNRDM, May 2003, Toulouse, France. Proceedings p 299 Communication dans un congrès hal-00921466v1

	3C-SiC — From Electronic to MEMS Devices Jean-François Michaud , Marc Portail , Daniel Alquier Advanced Silicon Carbide Devices and Processing, InTech, 2015 Chapitre d'ouvrage hal-02132700v1

	Dispositif et procédé d’identification d’une contamination gazeuse Luis Iglesias Hernandez , Dominique Certon , Jean-François Michaud , Priyadarshini Shanmugam , Laurent Colin France, N° de brevet: FR2009223. 2020 Brevet hal-02978837v1
	Dispositif et procédé de détection d’hydrogène Luis Iglesias Hernandez , Dominique Certon , Jean-François Michaud , Priyadarshini Shanmugam , Laurent Colin France, N° de brevet: FR2009222. 2020 Brevet hal-02978825v1

Jean-François Michaud

Présentation

Publications

How to Accurately Determine the Ohmic Contact Properties on n-Type 4H-SiC

Silicon-carbide-based MEMS for gas detection applications

Gas discrimination by simultaneous sound velocity and attenuation measurements using uncoated capacitive micromachined ultrasonic transducers

Electrical, morphological and structural properties of Ti ohmic contacts formed on n-type 4H–SiC by laser thermal annealing

Proof of concept and preliminary results of gas detection by measuring the admittance at the resonance and anti-resonance of an uncoated CMUT

Investigation of the Young's Modulus and the Residual Stress of 4H-SiC Circular Membranes on 4H-SiC Substrates

Turning the undesired voids in silicon into a tool: In-situ fabrication of free-standing 3C-SiC membranes

Low temperature capacitive micromachined ultrasonic transducers (cMUTs) on glass substrate

On the interplay between Si(110) epilayer atomic roughness and subsequent 3C-SiC growth direction

Realization of minimum number of rotational domains in heteroepitaxied Si(110) on 3C-SiC(001)

Toward high-quality 3C–SiC membrane on a 3C–SiC pseudo-substrate

Direct Insight into Grains Formation in Si Layers Grown on 3C-SiC by Chemical Vapor Deposition

Electrothermally driven high-frequency piezoresistive SiC cantilevers for dynamic atomic force microscopy

Progresses in cMUT Device Fabrication Using Low Temperature Processes

Original 3C-SiC micro-structure on a 3C-SiC pseudo-substrate

Room light anodic etching of highly doped n-type 4 H-SiC in high-concentration HF electrolytes: Difference between C and Si crystalline faces

A New Approach for AFM Cantilever Elaboration with 3C-SiC

Experimental Observation and Analytical Model of the Stress Gradient Inversion in 3C-SiC Layers on Silicon

CW argon laser crystallization of silicon films: structural properties

Low frequency noise model in N-MOS transistors operating from sub-threshold to above-threshold regions

Solid phase post-treatment of polysilicon films by a continuous argon laser

Low frequency noise model in N-MOS transistors operating from sub-threshold to above-threshold regions

Polysilicon thin-film transistors based on frequency doubled cw-Nd:YVO4 laser crystallized silicon

Contact Strategies for SiC Power Devices

Cubic silicon carbide (3C-SiC) MEMS for gas detection

A New Approach in the Field of Hydrogen Gas Sensing Using MEMS Based 3C-SiC Microcantilevers

Cmut Time of Flight Gas Sensor By Phase Shift Measurement

Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures

Time of flight gas sensing with capacitive micro-machined ultrasonic transducers (CMUT’s)

High Frequency Gas Detection With an Uncoated CMUT Array by Impedance Resonant Frequency Measurement

CMUT enabled binary mixture gas sensing through time of flight measurement

Gas detection in binary mixture by time of flight measurement made by the use of CMUTs

CMUT Based Air Coupled Transducers for Gas-Mixture Analysis

Influence of Aluminum Incorporation on Mechanical Properties of 3C-SiC Epilayers

Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration

Cw Argon Laser Crystallization of Silicon Films : Structural properties

Apparent noise parameter behavior in n-MOS transistors operating from subthreshold to above-threshold regions

Continuous Argon Laser Crystallization of Patterned Silicon

Solid phase post-treatment of polysilicon films by a continuous argon laser

Modeling to the heating of a silicon thin film on a glass substrate during a cw argon laser crystallization process

Cristallisation par laser argon continu de silicium amorphe déposé sur substrat de verre

Impact of the use of the second harmonic CW Nd:YVO4 laser to crystallize amorphous silicon films on the TFT performance

Cristallisation par laser continu de silicium amorphe déposé sur substrat de verre LPCVD

3C-SiC — From Electronic to MEMS Devices

Dispositif et procédé d’identification d’une contamination gazeuse

Dispositif et procédé de détection d’hydrogène