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Jean-Eric BOURÉE

3

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771524

	Control and monitoring of optical thin films deposition in a Matrix Distributed Electron Cyclotron Resonance reactor D. Daineka , D. Kouznetsov , Pavel Bulkin , Gabriel Girard , J.E. Bouree European Physical Journal: Applied Physics, 2004, pp.343-346 Article dans une revue hal-00914160v1
	High density plasma enhanced chemical vapor deposition of optical thin films D. Daineka , Pavel Bulkin , Gabriel Girard , J.E. Bouree , Bernard Drévillon European Physical Journal: Applied Physics, 2004, pp.3-9 Article dans une revue hal-00914155v1

	Matrix-distributed ECR-PECVD for high-rate deposition of silica for applications in integrated optics Gabriel Girard , D. Daineka , Pavel Bulkin , J.E. Bouree Proc. SPIE 4944, 2003, Belgium. pp.62 Communication dans un congrès hal-00914161v1