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Equipment Health Diagnosis and Prognosis using a Wavelet-based Windowing Approach in Semiconductor Manufacturing

 Hamideh Rostami , Jakey Blue , Claude Yugma
Advanced Process Control Conference, Oct 2017, Austin,TX, United States
Communication dans un congrès emse-01621977v1

Efficient FDC based on Hierarchical Tool Condition Monitoring Scheme

 Jakey Blue , Alexis Thieullen , Agnès Roussy , Jacques Pinaton
Advanced Semiconductor Manufacturing Conference 2012, May 2012, Saratoga Springs, New York, United States. pp.359-364
Communication dans un congrès emse-00742452v1
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Signal shape study from process control by interferometry for STI CMP

 Sophia Bourzgui , Agnès Roussy , Jakey Blue , Gaëlle Georges , Emilie Faivre
19TH EUROPEAN ADVANCED PROCESS CONTROL AND MANUFACTURING (APC|M) CONFERENCE, Apr 2019, Villach, Austria
Communication dans un congrès hal-02415540v1
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Embedded spectroscopic reflectometry metrology on FEOL silicon dioxide trench polishing equipment: ER: Equipement reliability and productivity enhancements

 Sophia Bourzgui , Agnès Roussy , Jakey Blue , Gaëlle Georges , Emilie Faivre , et al.
Advanced Semiconductor Manufacturing Conference (ASMC 2017 ), May 2017, Saratoga Springs, United States. ⟨10.1109/ASMC.2017.7969267⟩
Communication dans un congrès hal-01622569v1

Tool Condition Diagnosis With a Recipe-Independent Hierarchical Monitoring Scheme

 Jakey Blue , Dietmar Gleispach , Agnès Roussy , Scheibelhofer Peter
IEEE Transactions on Semiconductor Manufacturing, 2013, 26 (1), pp.82-91. ⟨10.1109/TSM.2012.2230279⟩
Article dans une revue hal-01079929v1

Recipe-Independent Health Indicator for Tool Predictive Maintenance and Fault Diagnosis

 Argon Chen , Jakey Blue
IEEE Transactions on Semiconductor Manufacturing, 2009, 22 (4), pp.522-535
Article dans une revue emse-01098366v1

Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

 Claude Yugma , Jakey Blue , Stéphane Dauzère-Pérès , Philippe Vialletelle
2014 IEEE International Conference on Automation Science and Engineering (CASE), Aug 2014, Taipei, Taiwan. ⟨10.1109/CoASE.2014.6899310⟩
Communication dans un congrès emse-01792294v1

Impact of integrating equipment health in production scheduling for semiconductor fabrication

 Yu-Ting Kao , Stéphane Dauzère-Pérès , Jakey Blue , Shi-Chung Chang
Computers & Industrial Engineering, 2018, 120, pp.450 - 459. ⟨10.1016/j.cie.2018.04.053⟩
Article dans une revue emse-01793390v1

Generalized Overall Equipment Effectiveness for integrated scheduling and process control

 Yu-Ting Kao , Shi-Chung Chang , Jakey Blue , Stéphane Dauzère-Pérès
2016 International Symposium on Semiconductor Manufacturing (ISSM), Dec 2016, Tokyo, Japan. ⟨10.1109/ISSM.2016.7934514⟩
Communication dans un congrès emse-01792276v1
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Device pattern impact on optical endpoint detection by interferometry for STI CMP

 Sophia Bourzgui , Agnès Roussy , Jakey Blue , Gaëlle Georges , Emilie Faivre , et al.
International Conference on Planarization/CMP Technology, Oct 2017, Leuven, Belgium
Communication dans un congrès hal-01622593v1

Spatial Variance Spectrum Analysis and Its Application to Unsupervised Detection of Systematic Wafer Spatial Variations

 Jakey Blue , Argon Chen
IEEE Transactions on Automation Science and Engineering, 2011, 8 (1), pp.56-66
Article dans une revue emse-01098363v1
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The light behavior from Shallow Trench Isolation profiles at Chemical Mechanical Planarization step and correlation with optical endpoint system by interferometry

 Sophia Bourzgui , Gaelle Georges , Agnès Roussy , Jakey Blue , Emilie Faivre , et al.
Reflection, Scattering, and Diffraction from Surfaces VI, Aug 2018, San Diego, United States. pp.11, ⟨10.1117/12.2320966⟩
Communication dans un congrès hal-02415466v1

Tool Condition Prognosis with the Hierarchical Monitor Scheme

 Jakey Blue , Agnès Roussy , Dietmar Gleispach , Haselmann Matthias , Stéphane Dauzère-Pérès
Intel European Research & Innovation Conference 2011, Oct 2011, Leixlip, Ireland
Communication dans un congrès emse-00742436v1

Equipment Anomaly Detection and Automatic Fault Fingerprint Extraction in Semiconductor Manufacturing

 Hamideh Rostami , Jakey Blue , Claude Yugma
International Symposium on Semiconductor Manufacturing Intelligence (ISMI) , Aug 2016, Hsinchu, Taiwan
Communication dans un congrès emse-01621968v1

Optimisation d’un modèle statistique d’empilement de matériaux diélectriques pour la mesure indirecte par réflectométrie des étapes avant et après polissage des caissons d’isolation.

 Sophia Bourzgui , Emilie Faivre , Jacques Pinaton , Gaëlle Georges , Agnès Roussy , et al.
Journées Nationales du Réseau Doctoral en Micro-nanoélectronique (JNRDM), May 2016, Toulouse, France
Poster de conférence hal-01622523v1

Heterogranular multivariate analytics for detecting and controlling the root causes of the mismatching machines in semiconductor manufacturing

 Aabir Chouichi , Jakey Blue , Claude Yugma , François Pasqualini
29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Apr 2018, Saratog, New York, United States
Communication dans un congrès hal-02067516v1

VIRTUAL METROLOGY MODELING BASED ON GAUSSIAN BAYESIAN NETWORK

 Wei-Ting Yang , Jakey Blue , Agnès Roussy , Marco Reis , Jacques Pinaton
2018 Winter Simulation Conference (WSC), Dec 2018, Gothenburg, Sweden. pp.3574-3582, ⟨10.1109/WSC.2018.8632485⟩
Communication dans un congrès emse-02499723v1

Equipment Health Modelling for Deterioration Prognosis and Fault Signatures Diagnosis

 Hamideh Rostami , Jakey Blue , Claude Yugma
SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2017, Saratoga Springs, NY, United States
Communication dans un congrès emse-01621971v1

Demand Planning Approaches to Aggregating and Forecasting Interrelated Demands for Safety Stock and Backup Capacity Planning

 Argon Chen , Chia-Hau Hsu , Jakey Blue
International Journal of Production Research, 2007, 45 (10), pp.2269-2294
Article dans une revue emse-01098367v1

Performance Analysis of Demand Planning Approaches for Aggregating, Forecasting and Disaggregating Interrelated Demands

 Argon Chen , Jakey Blue
International Journal of Production Economics, 2010, 128 (2), pp.586-602
Article dans une revue emse-01098365v1

Equipment Condition Diagnosis and Fault Fingerprint Extraction in Semiconductor Manufacturing

 Hamideh Rostami , Jakey Blue , Claude Yugma
IEEE International Conferenc on Machine Learning and Applications (ICMLA), Dec 2016, Anaheim, United States
Communication dans un congrès emse-01621963v1

Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition

 Wei-Ting Yang , Jakey Blue , Agnès Roussy , Marco Reis , Jacques Pinaton
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Apr 2018, Saratoga Springs, United States. pp.346-352, ⟨10.1109/ASMC.2018.8373161⟩
Communication dans un congrès emse-02499715v1

Automatic equipment fault fingerprint extraction for the fault diagnostic on the batch process data

 Hamideh Rostami , Jakey Blue , Claude Yugma
Applied Soft Computing, 2017, 68, pp.972-989. ⟨10.1016/j.asoc.2017.10.029⟩
Article dans une revue emse-01629337v1

Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

 Claude Yugma , Jakey Blue , Stéphane Dauzere-Peres , Ali Obeid
Journal of Scheduling, 2015, 18 (2), pp.195-205. ⟨10.1007/s10951-014-0381-1⟩
Article dans une revue emse-01555604v1

Spatial risk assessment on circular domains: Application to wafer profile monitoring

 Espéran Padonou , Olivier Roustant , Jakey Blue , Duverneuil Hugues
26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2015, Saratoga Springs, United States. ⟨10.1109/ASMC.2015.7164475⟩
Communication dans un congrès emse-01338842v1

Response surface approximation for profile monitoring in circular domains

 Espéran Padonou , Jakey Blue , Olivier Roustant , Duverneuil Hugues
14th Annual Conference of the European Network for Business and Industrial Statistics ENBIS-14, Sep 2014, Linz, Austria
Communication dans un congrès emse-01412227v1

Equipment Deterioration Prognosis and Fault Diagnosis in Semiconductor Manufacturing

 Hamideh Rostami , Jakey Blue , Claude Yugma
European advanced process control and manufacturing (apc|m) Conference, Apr 2017, Dublin, Ireland
Communication dans un congrès emse-01621974v1

A physics-informed Run-to-Run control framework for semiconductor manufacturing

 Wei-Ting Yang , Jakey Blue , Agnès Roussy , Jacques Pinaton , Marco Reis
Expert Systems with Applications, 2020, 155, pp.113424. ⟨10.1016/j.eswa.2020.113424⟩
Article dans une revue emse-02703773v1

Wafer Spatial Pattern Decomposition and Diagnosis Based on Processing Characteristics

 Espéran Padonou , Jakey Blue
15th Annual Conference of the European Network for Business and Industrial Statistics ENBIS-15, Sep 2015, Prague, Czech Republic
Communication dans un congrès emse-01412221v1

Hierarchical Monitor Scheme for Recipe-independent Tool Condition Evaluation. One approach of EHF (Equipment Health Factor)

 Dietmar Gleispach , Jakey Blue , Agnès Roussy , Haselmann Matthias
European Advanced Process Control and Manufacturing Conference 2012, Apr 2012, Grenoble, France
Communication dans un congrès emse-00742445v1
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