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Equipment Health Diagnosis and Prognosis using a Wavelet-based Windowing Approach in Semiconductor Manufacturing
Hamideh Rostami
,
Jakey Blue
,
Claude Yugma
Advanced Process Control Conference, Oct 2017, Austin,TX, United States
Communication dans un congrès
emse-01621977v1
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Efficient FDC based on Hierarchical Tool Condition Monitoring Scheme
Jakey Blue
,
Alexis Thieullen
,
Agnès Roussy
,
Jacques Pinaton
Advanced Semiconductor Manufacturing Conference 2012, May 2012, Saratoga Springs, New York, United States. pp.359-364
Communication dans un congrès
emse-00742452v1
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Signal shape study from process control by interferometry for STI CMP
Sophia Bourzgui
,
Agnès Roussy
,
Jakey Blue
,
Gaëlle Georges
,
Emilie Faivre
19TH EUROPEAN ADVANCED PROCESS CONTROL AND MANUFACTURING (APC|M) CONFERENCE, Apr 2019, Villach, Austria
Communication dans un congrès
hal-02415540v1
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Embedded spectroscopic reflectometry metrology on FEOL silicon dioxide trench polishing equipment: ER: Equipement reliability and productivity enhancements
Sophia Bourzgui
,
Agnès Roussy
,
Jakey Blue
,
Gaëlle Georges
,
Emilie Faivre
,
et al.
Communication dans un congrès
hal-01622569v1
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Spatial Variance Spectrum Analysis and Its Application to Unsupervised Detection of Systematic Wafer Spatial Variations
Jakey Blue
,
Argon Chen
IEEE Transactions on Automation Science and Engineering, 2011, 8 (1), pp.56-66
Article dans une revue
emse-01098363v1
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Generalized Overall Equipment Effectiveness for integrated scheduling and process control
Yu-Ting Kao
,
Shi-Chung Chang
,
Jakey Blue
,
Stéphane Dauzère-Pérès
Communication dans un congrès
emse-01792276v1
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Device pattern impact on optical endpoint detection by interferometry for STI CMP
Sophia Bourzgui
,
Agnès Roussy
,
Jakey Blue
,
Gaëlle Georges
,
Emilie Faivre
,
et al.
International Conference on Planarization/CMP Technology, Oct 2017, Leuven, Belgium
Communication dans un congrès
hal-01622593v1
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VIRTUAL METROLOGY MODELING BASED ON GAUSSIAN BAYESIAN NETWORK
Wei-Ting Yang
,
Jakey Blue
,
Agnès Roussy
,
Marco Reis
,
Jacques Pinaton
Communication dans un congrès
emse-02499723v1
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Demand Planning Approaches to Aggregating and Forecasting Interrelated Demands for Safety Stock and Backup Capacity Planning
Argon Chen
,
Chia-Hau Hsu
,
Jakey Blue
International Journal of Production Research, 2007, 45 (10), pp.2269-2294
Article dans une revue
emse-01098367v1
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Equipment Health Modelling for Deterioration Prognosis and Fault Signatures Diagnosis
Hamideh Rostami
,
Jakey Blue
,
Claude Yugma
SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2017, Saratoga Springs, NY, United States
Communication dans un congrès
emse-01621971v1
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Performance Analysis of Demand Planning Approaches for Aggregating, Forecasting and Disaggregating Interrelated Demands
Argon Chen
,
Jakey Blue
International Journal of Production Economics, 2010, 128 (2), pp.586-602
Article dans une revue
emse-01098365v1
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The light behavior from Shallow Trench Isolation profiles at Chemical Mechanical Planarization step and correlation with optical endpoint system by interferometry
Sophia Bourzgui
,
Gaelle Georges
,
Agnès Roussy
,
Jakey Blue
,
Emilie Faivre
,
et al.
Reflection, Scattering, and Diffraction from Surfaces VI, Aug 2018, San Diego, United States. pp.11, ⟨10.1117/12.2320966⟩
Communication dans un congrès
hal-02415466v1
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Heterogranular multivariate analytics for detecting and controlling the root causes of the mismatching machines in semiconductor manufacturing
Aabir Chouichi
,
Jakey Blue
,
Claude Yugma
,
François Pasqualini
29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Apr 2018, Saratog, New York, United States
Communication dans un congrès
hal-02067516v1
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Tool Condition Prognosis with the Hierarchical Monitor Scheme
Jakey Blue
,
Agnès Roussy
,
Dietmar Gleispach
,
Haselmann Matthias
,
Stéphane Dauzère-Pérès
Intel European Research & Innovation Conference 2011, Oct 2011, Leixlip, Ireland
Communication dans un congrès
emse-00742436v1
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Equipment Anomaly Detection and Automatic Fault Fingerprint Extraction in Semiconductor Manufacturing
Hamideh Rostami
,
Jakey Blue
,
Claude Yugma
International Symposium on Semiconductor Manufacturing Intelligence (ISMI) , Aug 2016, Hsinchu, Taiwan
Communication dans un congrès
emse-01621968v1
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Optimisation d’un modèle statistique d’empilement de matériaux diélectriques pour la mesure indirecte par réflectométrie des étapes avant et après polissage des caissons d’isolation.
Sophia Bourzgui
,
Emilie Faivre
,
Jacques Pinaton
,
Gaëlle Georges
,
Agnès Roussy
,
et al.
Journées Nationales du Réseau Doctoral en Micro-nanoélectronique (JNRDM), May 2016, Toulouse, France
Poster de conférence
hal-01622523v1
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Response surface approximation for profile monitoring in circular domains
Espéran Padonou
,
Jakey Blue
,
Olivier Roustant
,
Duverneuil Hugues
14th Annual Conference of the European Network for Business and Industrial Statistics ENBIS-14, Sep 2014, Linz, Austria
Communication dans un congrès
emse-01412227v1
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Spatial risk assessment on circular domains: Application to wafer profile monitoring
Espéran Padonou
,
Olivier Roustant
,
Jakey Blue
,
Duverneuil Hugues
26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2015, Saratoga Springs, United States. ⟨10.1109/ASMC.2015.7164475⟩
Communication dans un congrès
emse-01338842v1
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Automatic equipment fault fingerprint extraction for the fault diagnostic on the batch process data
Hamideh Rostami
,
Jakey Blue
,
Claude Yugma
Article dans une revue
emse-01629337v1
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Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition
Wei-Ting Yang
,
Jakey Blue
,
Agnès Roussy
,
Marco Reis
,
Jacques Pinaton
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Apr 2018, Saratoga Springs, United States. pp.346-352, ⟨10.1109/ASMC.2018.8373161⟩
Communication dans un congrès
emse-02499715v1
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Equipment Condition Diagnosis and Fault Fingerprint Extraction in Semiconductor Manufacturing
Hamideh Rostami
,
Jakey Blue
,
Claude Yugma
IEEE International Conferenc on Machine Learning and Applications (ICMLA), Dec 2016, Anaheim, United States
Communication dans un congrès
emse-01621963v1
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Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook
Claude Yugma
,
Jakey Blue
,
Stéphane Dauzere-Peres
,
Ali Obeid
Article dans une revue
emse-01555604v1
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Tool Condition Diagnosis With a Recipe-Independent Hierarchical Monitoring Scheme
Jakey Blue
,
Dietmar Gleispach
,
Agnès Roussy
,
Scheibelhofer Peter
Article dans une revue
hal-01079929v1
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Recipe-Independent Health Indicator for Tool Predictive Maintenance and Fault Diagnosis
Argon Chen
,
Jakey Blue
IEEE Transactions on Semiconductor Manufacturing, 2009, 22 (4), pp.522-535
Article dans une revue
emse-01098366v1
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Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook
Claude Yugma
,
Jakey Blue
,
Stéphane Dauzère-Pérès
,
Philippe Vialletelle
Communication dans un congrès
emse-01792294v1
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Impact of integrating equipment health in production scheduling for semiconductor fabrication
Yu-Ting Kao
,
Stéphane Dauzère-Pérès
,
Jakey Blue
,
Shi-Chung Chang
Article dans une revue
emse-01793390v1
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A Structure Data-Driven Framework for Virtual Metrology Modeling
Wei-Ting Yang
,
Jakey Blue
,
Agnès Roussy
,
Jacques Pinaton
,
Marco Reis
Article dans une revue
emse-02499670v1
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THE DETECTION AND THE CONTROL OF MACHINE/CHAMBER MISMATCHING IN SEMICONDUCTORMANUFACTURING
Aabir Chouichi
,
Jakey Blue
,
Claude Yugma
,
François Pasqualini
Winter Simulation Conference (WSC) 2018, Dec 2018, Gotheborg, Sweden
Communication dans un congrès
hal-02067544v1
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Equipment Deterioration Prognosis and Fault Diagnosis in Semiconductor Manufacturing
Hamideh Rostami
,
Jakey Blue
,
Claude Yugma
European advanced process control and manufacturing (apc|m) Conference, Apr 2017, Dublin, Ireland
Communication dans un congrès
emse-01621974v1
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A physics-informed Run-to-Run control framework for semiconductor manufacturing
Wei-Ting Yang
,
Jakey Blue
,
Agnès Roussy
,
Jacques Pinaton
,
Marco Reis
Article dans une revue
emse-02703773v1
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