Jean-Christophe Orlianges - MCF Université de Limoges

Oussama Mortada, Abedel Zahr, Jean-Christophe Orlianges, Aurelian Crunteanu, Matthieu Chatras, et al.. Analysis and optimization of acoustic wave micro-resonators integrating piezoelectric zinc oxide layers. Journal of Applied Physics, American Institute of Physics, 2017, 121 (7), pp.074504. ⟨10.1063/1.4976063⟩. ⟨hal-01471351⟩

Aurelian Crunteanu, Georges Humbert, Jonathan Leroy, Laure Huitema, Jean-Christophe Orlianges, et al.. Tunable THz metamaterials based on phase-changed materials (VO2) triggered by thermal and electrical stimuli. Proceedings of SPIE, the International Society for Optical Engineering, SPIE, The International Society for Optical Engineering, 2017, Proc. SPIE 10103, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications X, pp.101031H. ⟨10.1117/12.2251823⟩. ⟨hal-01478685⟩

A.A Ralib, Oussama Mortada, Jean-Christophe Orlianges, Aurelian Crunteanu, Matthieu Chatras, et al.. Enhanced piezoelectric properties of aluminium doped zinc oxide thin film for surface acoustic wave resonators on a CMOS platform. Journal of Materials Science: Materials in Electronics, Springer Verlag, 2017, 28 (12), pp.9132-9138. ⟨hal-01566404⟩

Virginie Théry, Alexandre Boulle, Aurelian Crunteanu, Jean-Christophe Orlianges, Arnaud Beaumont, et al.. Structural and electrical properties of large area epitaxial VO 2 films grown by electron beam evaporation. Journal of Applied Physics, American Institute of Physics, 2017, 121 (5), pp.055303. ⟨10.1063/1.4975117⟩. ⟨hal-01455047⟩

Virginie Théry, Alexandre Boulle, Aurelian Crunteanu, Jean-Christophe Orlianges, Arnaud Beaumont, et al.. Role of thermal strain in the metal-insulator and structural phase transition of epitaxial VO2 films. Physical Review B: Condensed Matter and Materials Physics (1998-2015), American Physical Society, 2016, 93 (18), pp.184106. ⟨10.1103/PhysRevB.93.184106⟩. ⟨hal-01319503⟩

A.A Ralib, A.N Nordin, N.A Malik, R Othman, A.H.M Zahirul Alam, et al.. A study on controllable aluminum doped zinc oxide patterning by chemical etching for MEMS application . Microsystem Technologies, Springer Verlag, 2016, ⟨10.1007/s00542-015-2783-1⟩. ⟨hal-01264439⟩

Perrine Dutheil, Jean-Christophe Orlianges, Aurelian Crunteanu, Alain Catherinot, Corinne Champeaux. AlN, ZnO thin films and AlN/ ZnO or ZnO/AlN multilayer structures deposited by PLD for surface acoustic wave devices. physica status solidi (a), Wiley, 2015, Phys. Status Solidi A, 1–9 (2015), pp.1-9. ⟨10.1002/pssa.201431747⟩. ⟨hal-01155620⟩

Aurelian Crunteanu, Fabert Marc, Julie Cornette, Maggy Colas, Jean-Christophe Orlianges, et al.. Electric field-assisted metal insulator transition in vanadium dioxide (VO2) thin films: optical switching behavior and anomalous far-infrared emissivity variation. Proceedings SPIE 9364, Oxide-based Materials and Devices VI , SPIE, 2015, Proc. SPIE 9364, Oxide-based Materials and Devices VI, 9364, pp.93640J1-J11. ⟨10.1117/12.2076260⟩. ⟨hal-01155619⟩

Arnaud Beaumont, Jonathan Leroy, Jean-Christophe Orlianges, Aurelian Crunteanu. Current-induced electrical self-oscillations across out-of-plane threshold switches based on VO2 layers integrated in crossbars geometry. Journal of Applied Physics, American Institute of Physics, 2014, 115, pp.154502. ⟨10.1063/1.4871543⟩. ⟨hal-01155624⟩

David Bouyge, Aurelian Crunteanu, Miguel Duran-Sindreu, Arnaud Pothier, Pierre Blondy, et al.. Reconfigurable split rings based on MEMS switches and their application to tunable filters. Journal of Optics, Institute of Physics (IOP), 2012, Special issue: Reconfigurable and Switchable Metamaterials- vol14 (11), 114001 -9 p. ⟨10.1088/2040-8978/14/11/114001⟩. ⟨hal-00787376⟩

Jonathan Leroy, Aurelian Crunteanu, Annie Bessaudou, Françoise Cosset, Corinne Champeaux, et al.. High speed metal insulator transition in vanadium dioxide films induced by an electrical pulsed voltage over nano gap electrodes. Applied Physics Letters, American Institute of Physics, 2012, 100, pp.213507-1-213507-4. ⟨10.1063/1.4721520⟩. ⟨hal-00720474⟩

Jean-Christophe Orlianges, Jonathan Leroy, Aurelian Crunteanu, Richard Mayet, Pierre Carles, et al.. Electrical and optical properties of vanadium dioxide containing gold nanoparticles deposited by pulsed laser deposition. Applied Physics Letters, American Institute of Physics, 2012, 101, pp.133102-133102-4. ⟨10.1063/1.4754708⟩. ⟨hal-00780301⟩

Jean-Christophe Orlianges, Aurelian Crunteanu, Arnaud Pothier, Thérèse Merle-Méjean, Pierre Blondy, et al.. Titanium dioxide thin films deposited by pulsed laser deposition and integration in radio frequency devices: Study of structure, optical and dielectric properties. Applied Surface Science, Elsevier, 2012, 263, pp.111-114. ⟨10.1016/j.apsusc.2012.09.010⟩. ⟨hal-00781840⟩

A. Verger, A. Pothier, C. Guines, Aurelian Crunteanu, Pierre Blondy, et al.. Nanogap MEMS micro-replay with 70 ns switching speed. Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on, 2012, pp.717 - 720. ⟨10.1109/MEMSYS.2012.6170192⟩. ⟨hal-00943467⟩

Aurelian Crunteanu, J. Leroy, G. Humbert, D. Ferachou, Jean-Christophe Orlianges, et al.. Tunable terahertz metamaterials based on metal-insulator phase transition of VO2 layers. Proceedings of the 2012 IEEE-MTT-S International Microwave Symposium - MTT 2012, 2012, pp.1-3. ⟨10.1109/MWSYM.2012.6259429⟩. ⟨hal-00942939⟩

Jonathan Leroy, Aurelian Crunteanu, Julien Givernaud, Jean-Christophe Orlianges, Corinne Champeaux, et al.. Generation of electrical self-oscillations in two-terminal switching devices based on the insulator-to-metal phase transition of V02 thin films. International Journal of Microwave and Wireless Technologies, Cambridge University Press/European Microwave Association 2012, 4 (01), pp.101-107. ⟨10.1017/S175907871100095X⟩. ⟨hal-00682641⟩

Jean-Christophe Orlianges, Corinne Champeaux, Perrine Dutheil, Alain Catherinot, Thérèse Merle-Méjean. Structural, electrical and optical properties of carbon-doped CdS thin films prepared by pulsed-laser deposition. Thin Solid Films, Elsevier, 2011, 519, pp.7611-7614. ⟨10.1016/j.tsf.2010.12.139⟩. ⟨hal-00674541⟩

Julien Givernaud, Aurelian Crunteanu, Jean-Christophe Orlianges, Arnaud Pothier, Corinne Champeaux, et al.. Microwave Power Limiting Devices Based on the Semiconductor-Metal Transition in Vanadium-Dioxide Thin Films. IEEE Transactions on Microwave Theory and Techniques, Institute of Electrical and Electronics Engineers, 2010, 58, pp.2352-2361. ⟨10.1109/TMTT.2010.2057172⟩. ⟨hal-00567204⟩

Aurelian Crunteanu, Julien Givernaud, Jonathan Leroy, David Mardivirin, Corinne Champeaux, et al.. Voltage and current-activated metal-insulator transition in VO2-based electrical switches : a lifetime operation analysis. Science and Technology of Advanced Materials, National Institute for Materials Science, 2010, 11 (6), pp.065002-1-065002-6. ⟨10.1088/1468-6996/11/6/065002⟩. ⟨hal-00584162⟩

Aurélie Verger, Arnaud Pothier, Cyril Guines, Aurelian Crunteanu, Pierre Blondy, et al.. Sub-hundred nanosecond electrostatic actuated RF MEMS switched capacitors. Journal of Micromechanics and Microengineering, IOP Publishing, 2010, 20 (6), pp.064011-1-064011-7. ⟨10.1088/0960-1317/20/6/064011⟩. ⟨hal-00567666⟩

Frédéric Dumas-Bouchiat, Luiz-Fernando Zanini, S. Kustov, Nora Dempsey, R. Grechishkin, et al.. Thermomagnetically patterned micromagnets. Applied Physics Letters, American Institute of Physics, 2010, 96, pp.102511-1-102511-3. ⟨10.1063/1.3341190⟩. ⟨hal-00569295⟩

Takashi Katsuno, Christian Godet, Jean-Christophe Orlianges, A.-S. Loir, Florence Garrelie, et al.. Optical properties of high-density amorphous carbon films grown by nanosecond and femtosecond pulsed laser ablation. Applied physics. A, Materials science & processing, Springer Verlag, 2005, 81 (31), pp.471-476. ⟨ujm-00170162⟩

Jean-Christophe Orlianges, Arnaud Pothier, D. Mercier, Pierre Blondy, Corinne Champeaux, et al.. Application of aluminium oxide and Ta-C thin films deposited at room temperature by PLD in RF-MEMS fabrication. Thin Solid Films, Elsevier, 2005, 482, pp.237-241. ⟨10.1016/j.tsf.2004.11.143⟩. ⟨hal-00088050⟩

Yuye Wang, Shuwen Zeng, Aurelian Crunteanu, Yuanyuan Wei, Georges Humbert, et al.. Highly-Enhanced Plasmonic Biosensors based on Atomically Thin Two-Dimensional Chalcogenide Phase-change Materials. CLEO: QELS_Fundamental Science, May 2020, San Jose, United States. ⟨hal-02915653⟩

Areski Ghalem, Cyril Guines, Damien Passerieux, Laure Huitema, Aurelian Crunteanu, et al.. Activation optique des matériaux à changement de phase pour la réalisation de filtres accordables en bande millimétrique. XXIèmes Journées Nationales Microondes, May 2019, Caen, France. ⟨hal-02267533⟩

A. Crunteanu, Jean-Christophe Orlianges, Virginie Théry, Alexandre Boulle, A. Bessaudou, et al.. Metal-insulator phase transition oxides for high - frequency electronics, THz and optics applications. Journées Annuelles du GDR OXYFUN 2018, Mar 2018, Piriac sur Mer, France. ⟨hal-02139100⟩

Virginie Théry, Alexandre Boulle, A. Crunteanu, Jean-Christophe Orlianges. Etude de la microstructure et des transitions de phases électroniques et cristallines de couches épitaxiales de VO2 déposées sur différents substrats. AFC2018 – Colloque de l’Association Française de Cristallographie, Jul 2018, Lyon, France. ⟨hal-02139124⟩

Areski Ghalem, Cyril Guines, Damien Passerieux, Laure Huitema, Jean-Christophe Orlianges, et al.. Reversible, Fast Optical Switching of Phase Change Materials for Active Control of High-Frequency Functions. International Microwave Symposium, IMS 2018, 10-15 June 2018, Philadelphia, Pa, USA, Jun 2018, Philadelphia, United States. ⟨hal-01873382⟩

Aurelian Crunteanu, Jean-Christophe Orlianges, Virginie Thery, Alexandre Boulle, Annie Bessaudou, et al.. Metal‐ insulator phase transition oxides for high‐frequency electronics, THz and optics applications. GDR Oxydes fonctionnels : des matériaux aux dispositifs OXYFUN, Journées Nationales 2018, VVF Villages, Piriac‐Sur‐Mer (44), 20 ‐ 23 Mars 2018, Mar 2018, Piriac-sur-Mer, France. ⟨hal-01873481⟩

Oussama Mortada, Jean-Christophe Orlianges, Aurelian Crunteanu, Matthieu Chatras, Pierre Blondy. Effet de l’inhomogénéité des films de ZnO sur les performances de micro-résonateurs piézoélectriques. Journées nationales micro-ondes, May 2017, Saint Malo, France. ⟨hal-01566490⟩

Amine Mennai, Annie Bessaudou, Françoise Cosset, Jean-Christophe Orlianges, Laure Huitema, et al.. Phase- transition and phase change materials integration for broadband, fast switching and agility at high frequency domains. THE 9th INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS, ROCAM 2017, BUCHAREST, ROMANIA, 11-14 JULY 2017 , Jul 2017, Bucarest, Romania. ⟨hal-01568586⟩

Virginie Théry, Alexandre Boulle, A. Crunteanu, Jean-Christophe Orlianges. Influence des déformations épitaxiales et thermiques sur la transition metal-isolant de couches minces de VO2” Rayons X et Matière 2017. Rayons X et Matière 2017, Nov 2017, Villeneuve d'Ascq, France. ⟨hal-01888979⟩

Aurelian Crunteanu, Laure Huitema, Charles Alphonce Mjema, Hang Wong, Jean-Christophe Orlianges, et al.. Commutation optique bistable des matériaux à changement de phase : démonstration d’une antenne agile dans le domaine millimétrique. 20èmes Journées Nationales Micro-Ondes JNM 2017, 16-19 mai 2017 Saint-Malo, France, May 2017, Saint-Malo, France. ⟨hal-01568934⟩

Aurelian Crunteanu, Laure Huitema, Jean-Christophe Orlianges, Cyril Guines, Damien Passerieux, et al.. Optical Switching of GeTe Phase Change Materials for High-Frequency Applications. IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes (IMWS-AMP 2017), 20-22 September 2017, Pavia, Italy, Sep 2017, Pavia, Italy. ⟨hal-01611518⟩

Virginie Théry, Alexandre Boulle, Aurelian Crunteanu, Jean-Christophe Orlianges, Annie Bessaudou. Strain and composition effects in the Metal-Insulator transition of VO2 films epitaxially grown on (001) TiO2. E-MRS 2017 Spring Meeting, Symposium T "Synthesis, processing and characterization of nanoscale multi functional oxide films VI", Strasbourg, France, 22-26 May 2017, E-MRS, May 2017, Strasbourg, France. ⟨hal-01568581⟩

Matthieu Chatras, Oussama Mortada, Jean-Christophe Orlianges, Pierre Blondy, Aurelian Crunteanu. Optimization of High Q Piezoelectric Materials for Microwave Micro-Resonators. World Congress on Smart Materials, Mar 2016, Singapour, Singapore. ⟨hal-01279397⟩

Oussama Mortada, Jean-Christophe Orlianges, Matthieu Chatras, Aurelian Crunteanu, Pierre Blondy. Elimination of spurious modes in Zinc oxide micro-resonators by optimizing structure parameters. EFTF - European Frequency and Time Forum, Apr 2016, York, United Kingdom. ⟨hal-01316641⟩

Matthieu Chatras, Oussama Mortada, Jean-Christophe Orlianges, Aurelian Crunteanu, Pierre Blondy. High Q Piezoelectric Micro-Resonators for microwave filters. International conference on small science, Jun 2016, Prague, Czech Republic. ⟨hal-01316651⟩

Corinne Champeaux, Michael Gaudin, Rafika Zaabi, Jean-Christophe Orlianges, A. Crunteanu, et al.. Nanosecond pulsed-laser ablation processes through the development of VO2 smart materials,. EMRS Fall Meeting 2016, Sep 2016, Varsovie, Poland. ⟨hal-01870391⟩

Virginie Théry, Alexandre Boulle, Aurelian Crunteanu, Jean-Christophe Orlianges, Annie Bessaudou. Strain effects in the metal-insulator and structural phase transition of epitaxial VO2 films. Electroceramics XV, Limoges, France, 27-29 Juin 2016, Jun 2016, Limoges, France. ⟨hal-01343556⟩

Oussama Mortada, Jean-Christophe Orlianges, Matthieu Chatras, Pierre Blondy, Aurelian Crunteanu. Crystal Orientation in Aluminum Nitride Films on Molybdenum Electrodes for Acoustic Micro-resonators. Electroceramics XV, Limoges, France, 27-29 Juin 2016, Jun 2016, Limoges, France. ⟨hal-01343559⟩

Aurelian Crunteanu, Georges Humbert, Annie Bessaudou, Pierre Blondy, Jean-Christophe Orlianges, et al.. Agile THz Metamaterials and Switchable Fabry-Pérot cavity THz Filters Based on the Metal-Insulator Transition of Vanadium Dioxide Material. The 1st Meeting of the GDR NanoTeraMIR, 20th-23rd September 2015, Aussois, France, GDR NanoTeraMIR, Sep 2015, Aussois, France. ⟨hal-01226564⟩

Oussama Mortada, Jean-Christophe Orlianges, Matthieu Chatras, Aurelian Crunteanu, Pierre Blondy. Study of inter-digitated transducers in Zinc Oxide micro-resonators. Memswave, Jun 2015, Barcelone, Spain. ⟨hal-01212496⟩

Oussama Mortada, Jean-Christophe Orlianges, Matthieu Chatras, Aurelian Crunteanu, Pierre Blondy. Réalisation et optimisation d’un micro-résonateur piézoélectrique à très fort coefficient de qualité. Journées nationales micro-ondes, Jun 2015, bordeaux, France. ⟨hal-01212257⟩

Oussama Mortada, Pierre Blondy, Matthieu Chatras, Aurelian Crunteanu, Michel Aubourg, et al.. Quality factor optimization of composite piezoelectric single cristal silicon micro-resonator. International Microwave Symposium, May 2015, Phoenix, United States. ⟨hal-01211792⟩

Oussama Mortada, Jean-Christophe Orlianges, Aurelian Crunteanu, Matthieu Chatras, Pierre Blondy. Comparative properties of ZnO thin films deposited on Molybdenum and platinum electrodes for piezo-acoustic devices. 8th INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS, ROCAM 2015, Jul 2015, BUCHAREST, Romania. ⟨hal-01211798⟩

Jonathan Leroy, Georges Humbert, Jean-Christophe Orlianges, Corinne Champeaux, Pierre Blondy, et al.. Tunable Terahertz metamaterials based on hybrid integration of the VO2 metal-insulator transition material. THE 8th INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS, ROCAM 2015, Jul 2015, Bucarest, Romania. ⟨hal-01223118⟩

Virginie Théry, Jean-Christophe Orlianges, Alexandre Boulle, Amine Mennai, Annie Bessaudou, et al.. Strain and thickness dependence of the metal-insulator transition in VO2 epitaxial films. European Material Research Society (E-MRS) Spring Meeting (Symposium M), May 2015, Lille, France. ⟨hal-01226170⟩

Aurelian Crunteanu, Fabert Marc, Julie Cornette, Maggy Colas, Jean-Christophe Orlianges, et al.. Electric field-assisted metal insulator transition in vanadium dioxide (VO2) thin films: optical switching behavior and anomalous far-infrared emissivity variation. SPIE Photonics West 2015, 7 - 12 February 2015, The Moscone Center San Francisco, CA, USA, SPIE, Feb 2015, San Francisco, United States. ⟨hal-01226173⟩

Oussama Mortada, Pierre Blondy, Matthieu Chatras, Aurelian Crunteanu, Michel Aubourg, et al.. A 767 MHz Thin-Film Piezoelectric-On-Substrate Micro-resonator. MEMSWAVE, Jun 2014, La Rochelle, France. ⟨hal-01089107⟩

Oussama Mortada, Pierre Blondy, Matthieu Chatras, Aurelian Crunteanu, Michel Aubourg, et al.. A Zinc Dioxide -on- Silicon MEMS Resonator for Narrowband Filtering. IEEE ICECS, Dec 2014, Marseille, France. ⟨hal-01138356⟩

Z. Bouchkour, Jean-Christophe Orlianges, Christelle Dublanche-Tixier, Elsa Thune, Etienne Laborde, et al.. Morphological and optical properties of AIN nano-islands prepared by plasma enhanced chemical vapor deposition. 40th International Conference on Metallurgical Coatings and Thin films (ICMCTF), Apr 2013, San Diego, United States. ⟨hal-00949362⟩

Aurelian Crunteanu, Emilien Lemoine, Jonathan Leroy, Damien Passerieux, Philippe Lévêque, et al.. Pulsed power operation of power limiters integrating a phase transition material. IEEE MTT−S International Microwave Symposium, Jun 2013, Seattle, United States. Paper ID: TH3G-6, ⟨10.1109/MWSYM.2013.6697605⟩. ⟨hal-00911266⟩

Frédéric Dumas-Bouchiat, N.M Dempsey, D. Givord, L.F Zanini, A. Zaccaria, et al.. Micro-magnet developments for bio-medical applications, ex-vivo and in-vivo magnetic capture. MAGMA 2013, Dec 2013, Guwahati, India. ⟨hal-00944486⟩

Jean-Christophe Orlianges, Rafika Zaabi, Corinne Champeaux, Aurelian Crunteanu. Spectroscopic Ellipsometry Study of Metal to Insulator Transition in Vanadium Dioxide Thin Films. 2013 Materials Research Society, MRS Spring Meeting, Apr 2013, San Francisco, United States. poster presentation. ⟨hal-00911412⟩

Aurelian Crunteanu, Jonathan Leroy, David Bouyge, Georges Humbert, Pierre Blondy, et al.. Métamatériaux accordables pour les micro-ondes et le THz : intégration hybride avec des composants MEMS et matériaux à transition de phase. Colloque National Métamatériaux (CNM 2013), Oct 2013, Orsay, France. ⟨hal-00911255⟩

Jonathan Leroy, Aurelian Crunteanu, Georges Humbert, Jean-Christophe Orlianges, Corinne Champeaux, et al.. Métamatériaux dans le domaine térahertz accordables électriquement. 18èmes Journées Nationales Microondes, May 2013, Paris, France. papier J1-TM-P4. ⟨hal-00911283⟩

Jonathan Leroy, Valérie Madrangeas, Aurelian Crunteanu, Georges Humbert, Damien Passerieux, et al.. Etude de la transition isolant-métal du dioxyde de vanadium du DC aux fréquences THz. Le troisième colloque francophone PLUridisciplinaire sur les Matériaux, l'Environnement et l'Electronique, PLUMEE 2013, May 2013, Bacau, Roumanie. présentation orale 2B-11. ⟨hal-00911337⟩

Jonathan Leroy, Aurelian Crunteanu, Georges Humbert, Damien Passerieux, Jean-Christophe Orlianges, et al.. Caractérisation de la transition isolant/métal du dioxyde de vanadium du DC aux fréquences THz. 18èmes Journées Nationales Microondes, May 2013, Paris, France. papier J3-TM1-5. ⟨hal-00911279⟩

Jonathan Leroy, Aurelian Crunteanu, Georges Humbert, Jean-Christophe Orlianges, Corinne Champeaux, et al.. Design and Characterization of Active THz Metamaterials based on Metal-Insulator Transition of VO2 Patterns. 7th International Congress on Advanced Electromagnetic Materials in Microwaves and Optics - Metamaterials 2013, Sep 2013, Bordeaux, France. oral presentation. ⟨hal-00911296⟩

Jean-Christophe Orlianges, Rafika Zaabi, Corinne Champeaux, Frédéric Dumas-Bouchiat, Pierre Carles, et al.. Oxide thin films containing metal nanoparticles : monitoring the physical properties. 2013 Energy Materials Nanotechnology (EMN Spring), Apr 2013, Orlando, United States. ⟨hal-00911349⟩

Aurelian Crunteanu, Jonathan Leroy, Georges Humbert, Jean-Christophe Orlianges, Corinne Champeaux. Métamatériaux dans le domaine THz basées sur la réponse non-linéaire des matériaux à transition de phase. Journée Envol Recherche de la Fondation d'entreprise EADS, Feb 2013, Paris, France. ⟨hal-00911434⟩

F. Jean, M. Bousquet, Jean-René Duclere, Alexandre Boulle, Fabien Remondiere, et al.. Epitaxial growth and properties of lead-free ferroelectric Na0.5Bi0.5TiO3 thin films grown by pulsed laser deposition on various single crystal substrates. ISAF - ECAPD 2012 : 21st IEEE International Symposium on Applications of Ferroelectrics and 11th European Conference on Polar Dielectrics, Jul 2012, Aveiro, Portugal. pp.1-3. ⟨hal-00945585⟩

Florian Jean, M. Bousquet, Jean-René Duclere, Alexandre Boulle, Fabien Remondiere, et al.. Epitaxial growth and properties of lead-free ferroelectric Na0.5Bi0.5TiO3 thin films grown by pulsed laser deposition on various single crystal substrates. Electroceramics XII, Jun 2012, Ensche, Netherlands. ⟨hal-00952016⟩

Florian Jean, M. Bousquet, Jean-René Duclere, Alexandre Boulle, Fabien Remondiere, et al.. Epitaxial growth and properties of lead-free ferroelectrics Na0.5Bi0.5TiO3 thin films grown by pulsed laser deposition on various single crystal substrates. Joint Conference SIMUFER "Single and Multiphase Ferroics and Multiferroics with Restricted Geometries" & IEEE ROMSC 2012, Sep 2012, Iasi, Romania. ⟨hal-00952038⟩

Z. Bouchkour, Jean-Christophe Orlianges, Elsa Thune, Christelle Dublanche-Tixier, Cédric Jaoul, et al.. Quantum confinement effect in nanostructured AlN films. The First International Conference on Materials Energy and Environment (ICMEE 2012), May 2012, Toledo, United States. ⟨hal-00951910⟩

Aurelian Crunteanu, Jonathan Leroy, Georges Humbert, Denis Férachou, Jean-Christophe Orlianges, et al.. Tunable Terahertz Metamaterals based on Metal-Insulator Phase Transition of VO2 Layers. IEEE MTT-S International Microwave Symposium, Jun 2012, Montréal - Quebec - Canada, United States. Papier TH2C-4. ⟨hal-00733819⟩

Jonathan Leroy, Aurelian Crunteanu, Georges Humbert, Denis Férachou, Jean-Christophe Orlianges, et al.. Métamatériaux accordables dans le domaine Térahertz à base des matériaux à transition isolant/métal. 12èmes Journées de Caractérisation Micronondes et Matériaux, Mar 2012, Chambéry, France. ⟨10.1109/ICTON.2011.5970843⟩. ⟨hal-00733830⟩

Aurélie Verger, Arnaud Pothier, Cyril Guines, Aurelian Crunteanu, Pierre Blondy, et al.. Nanogap MEMS micro-relay with 70 ns swithing speed. IEEE MEMS 2012 Conférence, Jan 2012, Paris, France. pp.717 - 720, ⟨10.1109/MEMSYS.2012.6170192⟩. ⟨hal-00734097⟩

Aurelian Crunteanu, Annie Bessaudou, Françoise Cosset, Pierre Blondy, Valérie Madrangeas, et al.. Advanced micro and nano-devices based on metal-insulator phase transition materials. 6th Japanese-French Frontiers of Science Symposium (JFFoS), Jan 2012, Nice, France. ⟨hal-00735873⟩

Aurelian Crunteanu, Jonathan Leroy, Françoise Cosset, Annie Bessaudou, Jean-Christophe Orlianges, et al.. Electrical self oscillations across two end three terminal resistive switches based on VO2 layers integrated in crossbar circuits. 2012 Spring Meeting, Apr 2012, San franscisco - Californie, United States. ⟨hal-00734824⟩

Jean-Christophe Orlianges, Aurelian Crunteanu, Arnaud Pothier, Thérèse Merle-Méjean, Pierre Blondy, et al.. Integration of titanium dioxide thin films deposited by PLD in RF and microwave MEMS : study of structure and dielectric properties. European Material Research Society (E-MRS)- Spring Meeting, Symposium V,, May 2012, Strasbourg, France. Paper P1.43 - Présentation Poster. ⟨hal-00735789⟩

Perrine Dutheil, Jean-Christophe Orlianges, Aurelian Crunteanu, Corinne Champeaux, Anne Roemer, et al.. AlN and ZnO thin films deposited by Pulsed Laser Deposition (PLD) for surface acoustic wave devices. European Material Research Society (E-MRS), May 2012, Strasbourg, France. Paper, P1.50. ⟨hal-00735793⟩

F. Jean, M. Bousquet, Jean-René Duclere, Alexandre Boulle, R. Remondiere, et al.. Epitaxial growth and properties of lead-free ferroelectric Na0.5Bi0.5TiO3 thin films grown by pulsed laser deposition on various single crystal substrates. 2012 International Symposium on Applications of Ferroelectrics held jointly with 2012 European Conference on the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), Jul 2012, Aveiro, Portugal. ⟨10.1109/ISAF.2012.6297851⟩. ⟨hal-00942954⟩

Corinne Champeaux, Frédéric Dumas-Bouchiat, Perrine Dutheil, S. Rives, Jean-Christophe Orlianges, et al.. Procédés d'ablation laser pour la synthèse de films minces, agrégats et composites nanostructurés. Journée de l'Association Arc Electrique, Mar 2011, Limoges, France. ⟨hal-00942425⟩

Aurélie Verger, Arnaud Pothier, Cyril Guines, Aurelian Crunteanu, Pierre Blondy, et al.. Conception de micro-commutateurs MEMS RF miniatures à nanogap pour la reconfiguration ultra rapide. 14ème édition des Journées Nationales du Réseau Doctoral en Micronanoélectronique (JNRDM), May 2011, Cachan, France. Présentation poster - Session :Micro-capteurs, microsystèmes et microdispositifs pour la biologie. ⟨hal-00686448⟩

Jonathan Leroy, Aurelian Crunteanu, Julien Givernaud, David Mardivirin, Jean-Christophe Orlianges, et al.. Propriétés non-linéaires des dispositifs électriques à deux terminaux basées sur la transition isolant-métal du dioxyde de vanadium. Deuxième colloque francophone PLUridisciplinaire sur les Matériaux, l'Environnement et l'Electronique (PLUMEE 2011), May 2011, Limoges, France. Présentation poster- 1A-59-Plumee2011. ⟨hal-00686490⟩

Aurélie Verger, Arnaud Pothier, Cyril Guines, Aurelian Crunteanu, Pierre Blondy, et al.. Design of ohmic miniature MEMS components for fast reconfiguration. MEMSWAVE 2011, 12th International Symposium on RF MEMS and RF Microsystems, Jun 2011, Athênes, Greece. pp.Présentation orale. ⟨hal-00684094⟩

Aurelian Crunteanu, Jonathan Leroy, Jean-Christophe Orlianges, Corinne Champeaux, Alain Catherinot, et al.. Current-driven Self-oscillations in Two-terminals Resistive Switches Induced by the Metal-insulator Transition in VO2 Thin Films. ICMAT-2011, Symposium A: Nanostructured Oxides, Interfaces, Heterostructures and Devices, SUNTEC, Jun 2011, Singapour, Singapore. pp.Présentation orale. ⟨hal-00684121⟩

Jean-Christophe Orlianges, Aurelian Crunteanu, Jonathan Leroy, Corinne Champeaux, Pierre Blondy, et al.. Structural, Electrical and Optical Properties of Au- Doped Vo2 Thin Films Performing a Metal-insulator Transition. ICMAT-2011, Symposium A : Nanostructured Oxides, Interfaces, Heterostructures and Devices, SUNTEC, Jun 2011, Singapour, Singapore. pp.Présentation orale. ⟨hal-00684126⟩

Jonathan Leroy, Julien Givernaud, Aurelian Crunteanu, David Mardivirin, Corinne Champeaux, et al.. Analyse de la durée de vie de commutateurs électriques basés sur la transition isolant-métal du dioxyde de vanadium. 17èmes Journées Nationales Microondes, JNM 2011, May 2011, Brest, France. Présentation poster - Session 1E-1 - Papier n°26. ⟨hal-00685994⟩

Jonathan Leroy, Aurelian Crunteanu, Julien Givernaud, Jean-Christophe Orlianges, Corinne Champeaux, et al.. Génération d'auto-oscillations électriques dans des dispositifs à base de films de VO2 présentant une transition de phase isolant-métal. 17èmes Journées Nationales Microondes, JNM 2011, May 2011, Brest, France. Presentation orale - 2B-1 - Papier n°24. ⟨hal-00684939⟩

Aurélie Verger, Arnaud Pothier, Cyril Guines, Aurelian Crunteanu, Pierre Blondy, et al.. Performances de micro-commutateurs MEMS RF miniatures et ultra rapides. 17èmes Journées Nationales Microondes, JNM 2011, May 2011, Brest, France. Presentation orale - 6B-1 - Papier n°16. ⟨hal-00684979⟩

Aurelian Crunteanu, Jean-Christophe Orlianges, Jonathan Leroy, Julien Givernaud, Corinne Champeaux, et al.. Dispositifs et systèmes accordables pour la microélectronique et l'optique en exploitant les propriétés fortement non-linéaires des matériaux à transition de phase isolant-métal. deuxième colloque francophone PLUridisciplinaire sur les Matériaux, l'Environnement et l'Electronique (PLUMEE 2011), May 2011, Limoges, France. ⟨hal-00682983⟩

Aurélie Verger, Arnaud Pothier, Cyril Guines, Aurelian Crunteanu, Pierre Blondy, et al.. Sub-Hundred nanosecond reconfiguration capabilities of Nanogap RF MEMS Switched capacitor. IEEE MTT-S International Microwave Symposium Digest, IMS 2010, May 2010, Anaheim - Californie, United States. pp.Inconnu. ⟨hal-00618664⟩

Corinne Champeaux, Lise Catherinot, Jean-Christophe Orlianges, Aurelian Crunteanu. Optical and Telecom thin films deposited by laser ablation. Conférence Invitée à CIMTEC 2010, 12th International Ceramics Congres,, Jun 2010, Montecatini Terme, Italy. ⟨hal-00620781⟩

Perrine Dutheil, Corinne Champeaux, Gilles Trolliard, Jean-Christophe Orlianges, Matthieu Chatras, et al.. AlN thin films deposited by pulsed laser deposition (PLD) for microelectronic devices. EMRS Spring Meeting, Symposium R : Laser processing and diagnostics for micro and nano applications, Congress Center, Jun 2010, Strasbourg, France. ⟨hal-00619648⟩

Aurelian Crunteanu, Jonathan Leroy, Julien Givernaud, Jean-Christophe Orlianges, Corinne Champeaux, et al.. Current-Induced oscillations in two-terminals electrical switches based on Metal-Insulator Transition of VO2. French Symposium on Emerging Technologies for Micro-nanofabrication, JNTE 10 - Ecole politechnique, Nov 2010, Palaiseau, France. ⟨hal-00619959⟩

Romain Stefanini, Matthieu Chatras, Arnaud Pothier, Pierre Blondy, Jean-Christophe Orlianges. High Q Tunable Cavity Using Air-MEMS Varactors. 11th International Symposium on RF Microsystems, MEMSWAVE 2010, Jun 2010, Otranto, Italy. ⟨hal-00619160⟩

Aurélie Verger, Arnaud Pothier, Cyril Guines, Aurelian Crunteanu, Pierre Blondy, et al.. Miniature RF MEMS Switches with 50 ns Switching Speed. 11th International Symposium on RF Microsystems, MEMSWAVE 2010, Jun 2010, Otranto, Italy. ⟨hal-00619165⟩

Arnaud Pothier, Aurélie Verger, Cyril Guines, Aurelian Crunteanu, Pierre Blondy, et al.. Miniature RF MEMS switched Capacitors using Nanogaps to achieve 50ns switching Speed Capabilities. ESA Round Table on Micro and Nano Technology, Sep 2010, Noordwijk, Netherlands. ⟨hal-00933632⟩

David Bouyge, Aurelian Crunteanu, O. Massague, Jean-Christophe Orlianges, Corinne Champeaux, et al.. Applications of Vanadium Dioxide (V02)-loaded Electrically Small Resonators in the Design of Tunable Filters. EuMW 2010, European Microwave Week, Sep 2010, Paris, France. ⟨hal-00619371⟩

Aurelian Crunteanu, David Bouyge, Jean-Christophe Orlianges, Corinne Champeaux, Lise Catherinot, et al.. Intégration des films de VO2 à transitions de phase pour la réalisation d'un filtre accordable passe-bande en technologie SSR. 11èmes Journées de Caractérisation Microondes et Matériaux (JCMM),, Mar 2010, Brest, France. ⟨hal-00619435⟩

David Bouyge, Aurelian Crunteanu, Arnaud Pothier, Pierre-Olivier Martin, Pierre Blondy, et al.. Reconfigurable 4 Pole Bandstop Filter based on RF-MEMS-loaded Split Ring Resonators. IEEE MTT-S International Microwave Symposium Digest, IMS 2010, May 2010, Anaheim - Californie, United States. pp.588.591, ⟨10.1109/MWSYM.2010.5517736⟩. ⟨hal-00618604⟩

Aurelian Crunteanu, Fabert Marc, Julien Givernaud, Vincent Kermène, Agnès Desfarges-Berthelemot, et al.. Vis-IR Optical switching modulation based on the electrically activated phase transition of VO2 thin films. Conference on Lasers and Electro-Optics (CLEO) and the Quantum Electronics and Laser Science Conference (QELS) (Optical Society of America, Washington DC, 2010), May 2010, San José - CALIFORNIE, United States. 3 p. ⟨hal-00620645⟩

Fabien Maury, Arnaud Pothier, Jean-Christophe Orlianges, David Mardivirin, Tibault Reveyrand, et al.. Ku Band DMTL Medium Power Phase Shifters. IEEE MTT-S Digest, IMS 2009, TH1E-3, Jun 2009, Boston - Massachusetts, France. pp. 1153-1156, ⟨10.1109/MWSYM.2009.5165906⟩. ⟨hal-00758893⟩

Aurélie Verger, Arnaud Pothier, Jean-Christophe Orlianges, Pierre Blondy. Miniature RF MEMS switchable capacitor mechanical design for reconfiguration capabilities in the 100ns range. International Conference Micromechanics Europe'09, Sep 2009, Toulouse, France. ⟨hal-00437604⟩

Aurelian Crunteanu, Julien Givernaud, Jean-Christophe Orlianges, Corinne Champeaux, Alain Catherinot, et al.. Vanadium dioxide thin films showing a semiconductor-metal transition and their integration in advanced filtering devices in the RF/microwave domain. E-MRS Spring Meeting 2009, Jun 2009, Strasbourg, France. ⟨hal-00437618⟩

Pierre Blondy, Romain Stefanini, Stanis Courrèges, Arnaud Pothier, Jean-Christophe Orlianges, et al.. Development of reliable and high power MEMS varactors. International Workshop on Microwave Filters, Jun 2009, Saint-Petersbourg, Russia. ⟨hal-00438295⟩

Romain Stefanini, Matthieu Chatras, Arnaud Pothier, Jean-Christophe Orlianges, Pierre Blondy. High Q tunable cavity using dielectric less RF-MEMS varactors. EuMW 2009 (European Microwave Week), Sep 2009, Rome, Italy. pp.EuMC/EuMIC05-2. ⟨hal-00436236⟩

David Mardivirin, Arnaud Pothier, Jean-Christophe Orlianges, Aurelian Crunteanu, Pierre Blondy. Etude du chargement résiduel d'actionneurs électrostatiques sans diélectrique dans les commutateurs MEMS RF. 16èmes Journées Nationales Microondes (JNM 2009), May 2009, Grenoble, France. pp.4F-1 Session Affiche. ⟨hal-00436305⟩

Aurélie Verger, Arnaud Pothier, Jean-Christophe Orlianges, Pierre Blondy. Conception de micro-commutateurs MEMS capacitifs miniatures utilisant des nanotubes de carbone comme matériau structurel. 16èmes Journées Nationales Microondes (JNM 2009), May 2009, Grenoble, France. pp.4F-3 Session Affiche. ⟨hal-00436307⟩

Romain Stefanini, Matthieu Chatras, Arnaud Pothier, Jean-Christophe Orlianges, Pierre Blondy. Résonateur volumique accordable fort Q0 intégrant une capacité commutée MEMS. 16èmes Journées Nationales Microondes (JNM 2009), May 2009, Grenoble, France. pp.2B-1 Session Orale. ⟨hal-00436285⟩

Corinne Champeaux, Frédéric Dumas-Bouchiat, Alain Catherinot, Julien Givernaud, Jean-Christophe Orlianges, et al.. Clusters and nanostructured thin films by laser ablation for telecom or optic applications. E-MRS Spring Meeting 2009, Symposium Q : Laser and plasma processing for advanced materials, Jun 2009, Strasbourg, France. ⟨hal-00437694⟩

David Bouyge, Aurelian Crunteanu, Jean-Christophe Orlianges, Damien Passerieux, Pierre Blondy, et al.. Tuneable bandpass filter based on split ring resonators using semiconductor-to-metal transition of vanadium dioxide thin film. 2009 CNES-ESA International Workshop on Microwave Filters, IWMF, Nov 2009, Toulouse, France. ⟨hal-00437745⟩

Jean-Christophe Orlianges, Julien Givernaud, Corinne Champeaux, Alain Catherinot, Thérèse Merle-Méjean, et al.. The effect of thermal annealing on the electrical and structural properties of pure and nickel-doped amprphous carbon thin films deposited by PLD. E-MRS Spring Meeting 2009, Symposium Q : Laser and plasma processing for advanced materials, Jun 2009, Strasbourg, France. ⟨hal-00437747⟩

Romain Stefanini, Matthieu Chatras, Arnaud Pothier, Jean-Christophe Orlianges, Pierre Blondy. High Q tunable resonator with RF-MEMS varactors. CNES International Workshop on Microwave Filters, Nov 2009, Toulouse, France. ⟨hal-00437595⟩

David Bouyge, Aurelian Crunteanu, Jean-Christophe Orlianges, Damien Passerieux, Corinne Champeaux, et al.. Reconfigurable bandpass filter based on split ring resonators and vanadium dioxide (VO2) microwave switches. Asia-Pacific Microwave Conference (APMC 2009), Dec 2009, Singapour, Singapore. pp.Présentation Orale. ⟨hal-00437738⟩

Vincent Laur, Romain Costes, Fiffamen Houndonougbo, Jean-Christophe Orlianges, M. Pate, et al.. Etude de capacités planaires accordables sur céramiques BST dopées. 16èmes Journées Nationales Microondes (JNM 2009), May 2009, Grenoble, France. pp.6F-3 Session Affiche. ⟨hal-00436613⟩

Julien Givernaud, Aurelian Crunteanu, Jean-Christophe Orlianges, Arnaud Pothier, Corinne Champeaux, et al.. Dispositifs limiteurs de puissance RF/microonde basés sur la transition semi-conducteur-métal du dioxyde de vanadium. 16èmes Journées Nationales Microondes (JNM 2009), May 2009, Grenoble, France. pp.1B-5 Session Orale. ⟨hal-00437197⟩

Benjamin Lacroix, Aurélie Verger, Arnaud Pothier, Aurelian Crunteanu, Jean-Christophe Orlianges, et al.. Apport de capacités commutées MEMS-RF miniatures pour la réalisation de fonctions de déphasage à faibles pertes et forte linéarité. 16èmes Journées Nationales Microondes (JNM 2009), May 2009, Grenoble, France. pp.2B-3 Session Orale. ⟨hal-00437198⟩

Fabien Maury, Arnaud Pothier, Jean-Christophe Orlianges, Tibault Reveyrand, David Mardivirin, et al.. Performances et fiabilité de capacités commutables MEMS pour les déphaseurs DMTL de puissance. 16èmes Journées Nationales Microondes (JNM 2009), May 2009, Grenoble, France. pp.2B-4 Session Orale. ⟨hal-00437199⟩

Jean-Christophe Orlianges, Aurelian Crunteanu, Julien Givernaud, Arnaud Pothier, Vincent Laur, et al.. Propriétés électriques des films minces de carbone amorphe dopé au nickel déposés par ablation laser : intégration dans des composants RF et microonde. 16èmes Journées Nationales Microondes (JNM 2009), May 2009, Grenoble, France. pp.1B-1 Session Orale. ⟨hal-00437196⟩

David Mardivirin, Arnaud Pothier, Jean-Christophe Orlianges, Aurelian Crunteanu, Pierre Blondy. Charging Acceleration in Dielectric Less RF MEMS Switched Varactors under CW Microwave Power. IEEE MTT-S International Microwave Symposium Digest, IMS 2009, Jun 2009, Boston, United States. pp.1649 - 1652, ⟨10.1109/MWSYM.2009.5166030⟩. ⟨hal-00742571⟩

Corinne Champeaux, Jean-Christophe Orlianges, Alain Catherinot, Aurelian Crunteanu. Laser ablation : a way to synthesize clusters and nanostructured thin films. Innovations in Thin Film Processing and Characterisation (ITFPC 09), Nov 2009, Nancy, France. ⟨hal-00709395⟩

Denis Mercier, Matthieu Chatras, Jean-Christophe Orlianges, Pierre Blondy, Dominique Cros. A micro-machined tunable cavity resonator. European Microwave Conference 2003, Oct 2003, Germany. pp.55. ⟨hal-00915925⟩

Virginie Théry, Alexandre Boulle, Aurelian Crunteanu, Jean-Christophe Orlianges. Role of interfacial defects and strain in the metal-insulator transition of epitaxial VO2 films. IWAC 07 : 7th International Workshop on Advanced Ceramics, Sep 2016, Limoges, France. ⟨hal-01838202⟩

Oussama Mortada, Jean-Christophe Orlianges, Aurelian Crunteanu, Matthieu Chatras, Pierre Blondy. Performances de micro-résonateurs acoustiques intégrant des couches piézoélectriques de ZnO sur des électrodes de molybdène et de platine. GDR Ondes, Oct 2015, Lyon, France. ⟨hal-01212262⟩

Arnaud Beaumont, Jean-Christophe Orlianges, Alexandre Boulle, Samir Adly, Arnaud Tonnelier, et al.. Metal-insulator transition materials for bioinspired functions implementation. Le premier colloque du GDR BioComp 4 au 8 octobre 2015 à Saint Paul de Vence, France, Oct 2015, Saint Paul de Vence, France. ⟨hal-01226172⟩

Arnaud Beaumont, Jean-Christophe Orlianges, Alexandre Boulle, Alexander Pergament, Aurelian Crunteanu. Switching and oscillations in vanadium dioxide based devices for neuromorphic function implementation. Workshop on Oxide Electronics, WOE 22, College de France, Paris - October 7-9, 2015, Oct 2015, Paris, France. ⟨hal-01226188⟩

Aurelian Crunteanu, Fabert Marc, Julie Cornette, Maggy Colas, Jean-Christophe Orlianges, et al.. Optical Switching and Anomalous Infrared Emissivity Variation in Vanadium Dioxide Thin Films Performing a Metal-Insulator Transition. The 1st Meeting of the GDR NanoTeraMIR, 20th-23rd September 2015, Aussois, France, Sep 2015, Aussois, France. ⟨hal-01226560⟩

Aurelian Crunteanu, Julien Givernaud, Pierre Blondy, Jean-Christophe Orlianges, Corinne Champeaux, et al.. Exploiting the semiconductor-metal phase transition of V02 materials : a novel direction towards tuneable devices and systmes for RF-microwave applications. Moumita Mukherjee. Advanced Microwave and Millimeter Wave Technologies Semiconductor Devices Circuits and Systems, INTECH - ISBN 978-953-307-031-5, 22 p., 2010. ⟨hal-00620195⟩

Pierre Blondy, Stanis Courrèges, Arnaud Pothier, Jean-Christophe Orlianges. Electromechanical microsystems with air gaps. United States, Patent n° : 8941452. 2015. ⟨hal-01276093⟩

Pierre Blondy, Stanis Courrèges, Arnaud Pothier, Jean-Christophe Orlianges. MICROELECTROMECHANICAL SYSTEM WITH AIR GAP. Patent n° : 2012020095. 2012. ⟨hal-00922828⟩

Pierre Blondy, Arnaud Pothier, Stanis Courrèges, Jean-Christophe Orlianges. Amélioration de la durée de vie des micro commutateurs MEMS à gap d'air. France, N° de brevet: Priority number : n° INPI 244722. 2010. ⟨hal-00620316⟩

Aurelian Crunteanu, Julie Cornette, Maggy Colas, Jean-Christophe Orlianges, Annie Bessaudou, et al.. Metal insulator transition in vanadium dioxide (VO2) thin films: optical switching behavior and far-infrared emissivity variation under electrical stimuli. 2014. ⟨hal-01227263⟩

Aurelian Crunteanu, Jean-Christophe Orlianges, Corinne Champeaux, Pierre Blondy. Advanced microwave and optical switching devices based on reversible metal-insulator transition (MIT) in VO2 thin films. 2011. ⟨hal-00686629⟩

Jean-Christophe Orlianges. Optimisation du dépôt par ablation laser de films minces d'alumine et de carbone tétraédrique amorphe pure et dopé; propriétés des couches et intégration dans le fabrication de composants MEMS RF. Matériaux. Université de Limoges, 2003. Français. ⟨tel-00006701⟩