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Microwave Plasma Carburizing.

Isabelle Jauberteau , Jean-Louis Jauberteau
Isabelle Jauberteau Jean Louis Jauberteau Microwave Plasma Carburizing. In Encyclopedia of Iron, Steel, and Their Alloys. Taylor and Francis: New York, Published online: 31 Mar 2016; 2251-2273., Taylor and Francis, 2016, Encyclopedia of Iron, Steel, and Their Alloys., DOI: 10.1081/E-EISA-120049660
Chapitre d'ouvrage hal-01359852v1

Effect of the electron energy distribution function in plasma on the Bohm criterion and on the drop voltage through the sheath : case of microwave expanding plasma

Jean-Louis Jauberteau , Isabelle Jauberteau
Journal of Applied Physics, 2009, 106, pp.053307-1-053307-9. ⟨10.1063/1.3211910⟩
Article dans une revue hal-00419898v1

An expanding microwave plasma to process thin metal films at low temperature

Isabelle Jauberteau , Jean-Louis Jauberteau , Julie Cornette , Annie Bessaudou , Richard Mayet , et al.
Institut für Oberflächen und Schichtanalytik, Kaiserslautern (Allemagne), Oct 2013, Kaiserslautern, Germany
Communication dans un congrès hal-00918319v1

An expanding plasma process for thin metal films nitriding : reactivity and structure of the surface correlated to microwave plasma parameters

Isabelle Jauberteau , P. Goudeau , Jean-Louis Jauberteau , Bernard Soulestin , M. Marteau , et al.
Physical and Chemical News, 2007, 36, pp.102-108
Article dans une revue hal-00192627v1

Nitriding process at low temperature for thin metal films in (Ar-N2-H2) expanding ternary plasma

Said Touimi , Isabelle Jauberteau , Sébastien J. Weber , Annie Bessaudou , Armand Passelergue , et al.
Innovations in Thin Films Processing and Characterization (IFTPC), Nov 2009, Nancy, France
Communication dans un congrès hal-00438452v1
Image document

Langmuir probe in magnetized plasma: Determination of the electron diffusion parameter and of the electron energy distribution function

Jean-Louis Jauberteau , Isabelle Jauberteau , O. Daniel Cortázar , Ana Maria Megia-Macias
Contributions to Plasma Physics, 2019, 60 (2), pp.e201900067. ⟨10.1002/ctpp.201900067⟩
Article dans une revue hal-02368547v1

A nitriding process of very thin molybdenum films in an expanding microwave plasma at low temperature

Said Touimi , Isabelle Jauberteau , Sébastien J. Weber , Annie Bessaudou , Armand Passelergue , et al.
Innovations in Thin Film Processing and Characterization (ITFPC 2009), Nov 2009, Nancy, France. pp.012009-1-01200-4, ⟨10.1088/1757-899X/12/1/012009⟩
Communication dans un congrès hal-00569506v1
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Silicides and Nitrides Formation in Ti Films Coated on Si and Exposed to (Ar-N2-H2) Expanding Plasma

Isabelle Jauberteau , Richard Mayet , Julie Cornette , Denis Mangin , Annie Bessaudou , et al.
Coatings, 2017, Five Years of Coatings: Coatings Science and Technology for the 21st Century, 7 (2), pp.23. ⟨10.3390/coatings7020023⟩
Article dans une revue hal-01463302v1

Absolute electron-impact ionization cross sections of free radicals from threshold to 30 eV : CHx=2,3, Si(CH3)x=1,2,3, and H2Si(CH3) radicals

Jean-Louis Jauberteau , Isabelle Jauberteau , Jacques Aubreton
Journal of Applied Physics, 2006, 99, pp.124928-1-124908-10. ⟨10.1063/1.2205357⟩
Article dans une revue hal-00087575v1

Electrostatic waves in plasma: the case of an expanding microwave plasma sustained in argon

Jean-Louis Jauberteau , Isabelle Jauberteau
Plasma Sources Science and Technology, 2014, 23, pp.064010
Article dans une revue hal-01091292v1

Determination of the electron density in plasma by means of a floating double proble

Jean-Louis Jauberteau , Isabelle Jauberteau
Review of Scientific Instruments, 2008, 79, pp.033505-1-033505-5. ⟨10.1063/1.2900579⟩
Article dans une revue hal-00267051v1

Electron energy distribution function in plasma determined using numerical simulations of multiple harmonic components on langmuir probe characteristic – Efficiency of the method

Jean-Louis Jauberteau , Isabelle Jauberteau
Review of Scientific Instruments, 2007, 78, pp.043501-1-043501-12. ⟨10.1063/1.2719211⟩
Article dans une revue hal-00141096v1

Langmuir Probe in Non-Maxwellian Plasma: Correlation Between the Electron Energy Distribution Function, the Ion Energy at the Sheath Edge and the Floating Voltage.

Jean-Louis Jauberteau , Isabelle Jauberteau
Contributions to Plasma Physics, 2014, 54 (9), pp.791-801. ⟨10.1002/ctpp.201400004⟩
Article dans une revue istex hal-01077203v1
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Dielectric properties in microwave remote plasma sustained in argon : expanding plasma conditions

Jean-Louis Jauberteau , Isabelle Jauberteau
Physics of Plasmas, 2012, 19 (11), pp.110701. ⟨10.1063/1.4766897⟩
Article dans une revue hal-00771761v1

Expanding microwave plasma for thin molybdenum films nitriding : nitrogen diffusion and surface structure investigations

Isabelle Jauberteau , Thérèse Merle-Méjean , Said Touimi , Sébastien J. Weber , A. Bessaurou , et al.
PSE 2010 Twelfth International Conference on Plasma Surface Engineering,, Sep 2010, Garmisch Partenkirchen, Germany. pp.Pages S271-S274
Communication dans un congrès hal-00619183v1

Ionization cross section of radicals produced by hexamethyldisiloxane dissociation

Jean-Louis Jauberteau , Isabelle Jauberteau
Chemical Physics Letters, 2014, 604, pp.116-121. ⟨10.1016/j.cplett.2014.04.044⟩
Article dans une revue hal-01079036v1
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Bi4Ti3O12 Ferroelectric Thin Films: Morphology and Electrical Characteristics

F. Soares-Carvalho , Isabelle Jauberteau , Philippe Thomas , J. Mercurio
Journal de Physique III, 1997, 7 (6), pp.1221-1226. ⟨10.1051/jp3:1997179⟩
Article dans une revue istex jpa-00249643v1

Procédé de nitruration de films minces métalliques dans un plasma étendu activé par micro-onde : réactivité et structure de la surface corrélée aux paramètres du plasma

Isabelle Jauberteau , P. Goudeau , Bernard Soulestin , M. Marteau , Jean-Louis Jauberteau , et al.
Xèmes Journées de Caractérisation Microondes et Matériaux, Apr 2008, Limoiges, France
Communication dans un congrès hal-00365236v1

Determination of the electron energy distribution function in the plasma by means of numerical simulations of multiple harmonic compoents on a Langmuir probe characteristic measurements in expanding microwave plasma

Jean-Louis Jauberteau , Isabelle Jauberteau
Measurement Science and Technology, 2007, 18, pp.1235-1249. ⟨10.1088/0957-0233/18/5/010⟩
Article dans une revue istex hal-00137903v1
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Large Transfer of Nitrogen, Silicon and Titanium through Various Thin Mo–Ti/Si and Ti–Mo/Si Bilayer Films Processed in Expanding Microwave Plasma

Isabelle Jauberteau , Richard Mayet , Julie Cornette , Pierre Carles , Denis Mangin , et al.
Coatings, 2023, Advanced Processing Technologies of Coatings/Films of Transition Metal Nitrides: Plasma Deposition, 13 (10), pp.1787. ⟨10.3390/coatings13101787⟩
Article dans une revue hal-04250415v1

Plasma material surface investigation in a nitriding process of thin molybdenum films using an expanding (Ar-NH2-H2) plasma

Said Touimi , Isabelle Jauberteau , Jean-Louis Jauberteau , Sébastien J. Weber , Annie Bessaudou , et al.
Physical and Chemical News, 2011, 62, pp.1-9
Article dans une revue hal-00708486v1

Designing resonance microwave cavities to optimize plasma generation

Ana Maria Megia-Macias , Elena Barrios-Diaz , Jean-Louis Jauberteau , Isabelle Jauberteau , Osvaldo Daniel Cortazar
IEEE Transactions on Instrumentation and Measurement, 2020, 69 (7), pp.5128-5137. ⟨10.1109/TIM.2019.2957891⟩
Article dans une revue hal-02399600v1

Molybdenum and titanium nitride films processed in expanding (Ar-N2-H2) microwave plasma

Isabelle Jauberteau , Richard Mayet , Julie Cornette , Pierre Carles , D. Mangin , et al.
IWAC 07, Sep 2016, Limoges, France
Poster de conférence hal-01841155v1
Image document

Time evolution of the electron energy distribution function in pulsed microwave magnetoplasma in H2

Jean-Louis Jauberteau , Isabelle Jauberteau , Daniel Osvaldo Cortazar , Ana Maria Megia-Macias
Physics of Plasmas, 2016, 23, pp.033513. ⟨10.1063/1.4944677⟩
Article dans une revue hal-01303766v1

Corrigendum: Synthesis of cyanides in N 2 –CH 4 discharge afterglow (2018 J. Phys. D: Appl. Phys . 51 315201)

Isabelle Jauberteau , Jean-Louis Jauberteau
Journal of Physics D: Applied Physics, 2018, 51 (43), pp.439501. ⟨10.1088/1361-6463/aade5e⟩
Article dans une revue hal-02103685v1
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Competing growth of titanium nitrides and silicides in Ti thin films processed in expanding microwave plasma: Morphology and microstructural properties

Isabelle Jauberteau , Pierre Carles , Richard Mayet , Julie Cornette , Annie Bessaudou , et al.
AIP Advances, 2018, 8 (9), pp.095105. ⟨10.1063/1.5035188⟩
Article dans une revue hal-01875229v1
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Electron energy distribution function in a pulsed 2.45GHz hydrogen magnetoplasma: Study of the decay

Jean-Louis Jauberteau , Isabelle Jauberteau , Daniel Osvaldo Cortazar , Ana Maria Megia-Macias
AIP Advances, 2017, 7, pp.125107. ⟨10.1063/1.5001271⟩
Article dans une revue hal-01661993v1

Plasma and material surface investigations in a nitriding process of thin molybdenum films using an expanding (Ar-N2-H2) plasma

Said Touimi , Isabelle Jauberteau , Jean-Louis Jauberteau , Sébastien J. Weber , Annie Bessaudou , et al.
PIRM IV Physique des Interactions Rayonnement Matière, 4ème Congrès International, Apr 2010, Dakhla, Morocco
Communication dans un congrès hal-00618426v1

A thermochemical process using expanding plasma for nitriding thin molybdenum films at low temperature

Isabelle Jauberteau , Jean-Louis Jauberteau , Said Touimi , Thérèse Merle-Méjean , Sébastien J. Weber , et al.
Engineering, 2012, 4, pp.857-868. ⟨10.4236/eng.2012.412109⟩
Article dans une revue hal-00771768v1

Mass spectrometer analysis of plasma containing easily dissociated species: Absolute concentrations of the main free radicals Si(CH3)1,2,3, and H2Si(CH3) produced in a microwave discharge sustained in an Ar–Si(CH3)4 gas mixture

Jean-Louis Jauberteau , Isabelle Jauberteau , Jacques Aubreton
International Journal of Mass Spectrometry, 2007, 266, pp.15-24. ⟨10.1016/j.ijms.2007.06.009⟩
Article dans une revue istex hal-00176482v1