Microwave Plasma Carburizing.
Isabelle Jauberteau
,
Jean-Louis Jauberteau
Isabelle Jauberteau Jean Louis Jauberteau Microwave Plasma Carburizing. In Encyclopedia of Iron, Steel, and Their Alloys. Taylor and Francis: New York, Published online: 31 Mar 2016; 2251-2273. , Taylor and Francis, 2016, Encyclopedia of Iron, Steel, and Their Alloys., DOI: 10.1081/E-EISA-120049660
Chapitre d'ouvrage
hal-01359852v1
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Effect of the electron energy distribution function in plasma on the Bohm criterion and on the drop voltage through the sheath : case of microwave expanding plasma
Jean-Louis Jauberteau
,
Isabelle Jauberteau
Article dans une revue
hal-00419898v1
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An expanding microwave plasma to process thin metal films at low temperature
Isabelle Jauberteau
,
Jean-Louis Jauberteau
,
Julie Cornette
,
Annie Bessaudou
,
Richard Mayet
,
et al.
Institut für Oberflächen und Schichtanalytik, Kaiserslautern (Allemagne) , Oct 2013, Kaiserslautern, Germany
Communication dans un congrès
hal-00918319v1
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An expanding plasma process for thin metal films nitriding : reactivity and structure of the surface correlated to microwave plasma parameters
Isabelle Jauberteau
,
P. Goudeau
,
Jean-Louis Jauberteau
,
Bernard Soulestin
,
M. Marteau
,
et al.
Physical and Chemical News , 2007, 36, pp.102-108
Article dans une revue
hal-00192627v1
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Nitriding process at low temperature for thin metal films in (Ar-N2-H2) expanding ternary plasma
Said Touimi
,
Isabelle Jauberteau
,
Sébastien J. Weber
,
Annie Bessaudou
,
Armand Passelergue
,
et al.
Innovations in Thin Films Processing and Characterization (IFTPC) , Nov 2009, Nancy, France
Communication dans un congrès
hal-00438452v1
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Langmuir probe in magnetized plasma: Determination of the electron diffusion parameter and of the electron energy distribution function
Jean-Louis Jauberteau
,
Isabelle Jauberteau
,
O. Daniel Cortázar
,
Ana Maria Megia-Macias
Article dans une revue
hal-02368547v1
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A nitriding process of very thin molybdenum films in an expanding microwave plasma at low temperature
Said Touimi
,
Isabelle Jauberteau
,
Sébastien J. Weber
,
Annie Bessaudou
,
Armand Passelergue
,
et al.
Communication dans un congrès
hal-00569506v1
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Silicides and Nitrides Formation in Ti Films Coated on Si and Exposed to (Ar-N2-H2) Expanding Plasma
Isabelle Jauberteau
,
Richard Mayet
,
Julie Cornette
,
Denis Mangin
,
Annie Bessaudou
,
et al.
Coatings , 2017, Five Years of Coatings: Coatings Science and Technology for the 21st Century, 7 (2), pp.23.
⟨10.3390/coatings7020023⟩
Article dans une revue
hal-01463302v1
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Absolute electron-impact ionization cross sections of free radicals from threshold to 30 eV : CHx=2,3, Si(CH3)x=1,2,3, and H2Si(CH3) radicals
Jean-Louis Jauberteau
,
Isabelle Jauberteau
,
Jacques Aubreton
Article dans une revue
hal-00087575v1
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Electrostatic waves in plasma: the case of an expanding microwave plasma sustained in argon
Jean-Louis Jauberteau
,
Isabelle Jauberteau
Plasma Sources Science and Technology , 2014, 23, pp.064010
Article dans une revue
hal-01091292v1
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Determination of the electron density in plasma by means of a floating double proble
Jean-Louis Jauberteau
,
Isabelle Jauberteau
Article dans une revue
hal-00267051v1
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Electron energy distribution function in plasma determined using numerical simulations of multiple harmonic components on langmuir probe characteristic – Efficiency of the method
Jean-Louis Jauberteau
,
Isabelle Jauberteau
Article dans une revue
hal-00141096v1
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Langmuir Probe in Non-Maxwellian Plasma: Correlation Between the Electron Energy Distribution Function, the Ion Energy at the Sheath Edge and the Floating Voltage.
Jean-Louis Jauberteau
,
Isabelle Jauberteau
Article dans une revue
istex
hal-01077203v1
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Dielectric properties in microwave remote plasma sustained in argon : expanding plasma conditions
Jean-Louis Jauberteau
,
Isabelle Jauberteau
Article dans une revue
hal-00771761v1
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Expanding microwave plasma for thin molybdenum films nitriding : nitrogen diffusion and surface structure investigations
Isabelle Jauberteau
,
Thérèse Merle-Méjean
,
Said Touimi
,
Sébastien J. Weber
,
A. Bessaurou
,
et al.
PSE 2010 Twelfth International Conference on Plasma Surface Engineering, , Sep 2010, Garmisch Partenkirchen, Germany. pp.Pages S271-S274
Communication dans un congrès
hal-00619183v1
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Ionization cross section of radicals produced by hexamethyldisiloxane dissociation
Jean-Louis Jauberteau
,
Isabelle Jauberteau
Article dans une revue
hal-01079036v1
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Bi4Ti3O12 Ferroelectric Thin Films: Morphology and Electrical Characteristics
F. Soares-Carvalho
,
Isabelle Jauberteau
,
Philippe Thomas
,
J. Mercurio
Article dans une revue
istex
jpa-00249643v1
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Procédé de nitruration de films minces métalliques dans un plasma étendu activé par micro-onde : réactivité et structure de la surface corrélée aux paramètres du plasma
Isabelle Jauberteau
,
P. Goudeau
,
Bernard Soulestin
,
M. Marteau
,
Jean-Louis Jauberteau
,
et al.
Xèmes Journées de Caractérisation Microondes et Matériaux , Apr 2008, Limoiges, France
Communication dans un congrès
hal-00365236v1
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Determination of the electron energy distribution function in the plasma by means of numerical simulations of multiple harmonic compoents on a Langmuir probe characteristic measurements in expanding microwave plasma
Jean-Louis Jauberteau
,
Isabelle Jauberteau
Article dans une revue
istex
hal-00137903v1
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Large Transfer of Nitrogen, Silicon and Titanium through Various Thin Mo–Ti/Si and Ti–Mo/Si Bilayer Films Processed in Expanding Microwave Plasma
Isabelle Jauberteau
,
Richard Mayet
,
Julie Cornette
,
Pierre Carles
,
Denis Mangin
,
et al.
Coatings , 2023, Advanced Processing Technologies of Coatings/Films of Transition Metal Nitrides: Plasma Deposition, 13 (10), pp.1787.
⟨10.3390/coatings13101787⟩
Article dans une revue
hal-04250415v1
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Plasma material surface investigation in a nitriding process of thin molybdenum films using an expanding (Ar-NH2-H2) plasma
Said Touimi
,
Isabelle Jauberteau
,
Jean-Louis Jauberteau
,
Sébastien J. Weber
,
Annie Bessaudou
,
et al.
Physical and Chemical News , 2011, 62, pp.1-9
Article dans une revue
hal-00708486v1
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Designing resonance microwave cavities to optimize plasma generation
Ana Maria Megia-Macias
,
Elena Barrios-Diaz
,
Jean-Louis Jauberteau
,
Isabelle Jauberteau
,
Osvaldo Daniel Cortazar
Article dans une revue
hal-02399600v1
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Molybdenum and titanium nitride films processed in expanding (Ar-N2-H2) microwave plasma
Isabelle Jauberteau
,
Richard Mayet
,
Julie Cornette
,
Pierre Carles
,
D. Mangin
,
et al.
IWAC 07 , Sep 2016, Limoges, France
Poster de conférence
hal-01841155v1
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Time evolution of the electron energy distribution function in pulsed microwave magnetoplasma in H2
Jean-Louis Jauberteau
,
Isabelle Jauberteau
,
Daniel Osvaldo Cortazar
,
Ana Maria Megia-Macias
Article dans une revue
hal-01303766v1
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Corrigendum: Synthesis of cyanides in N 2 –CH 4 discharge afterglow (2018 J. Phys. D: Appl. Phys . 51 315201)
Isabelle Jauberteau
,
Jean-Louis Jauberteau
Article dans une revue
hal-02103685v1
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Competing growth of titanium nitrides and silicides in Ti thin films processed in expanding microwave plasma: Morphology and microstructural properties
Isabelle Jauberteau
,
Pierre Carles
,
Richard Mayet
,
Julie Cornette
,
Annie Bessaudou
,
et al.
Article dans une revue
hal-01875229v1
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Electron energy distribution function in a pulsed 2.45GHz hydrogen magnetoplasma: Study of the decay
Jean-Louis Jauberteau
,
Isabelle Jauberteau
,
Daniel Osvaldo Cortazar
,
Ana Maria Megia-Macias
Article dans une revue
hal-01661993v1
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Plasma and material surface investigations in a nitriding process of thin molybdenum films using an expanding (Ar-N2-H2) plasma
Said Touimi
,
Isabelle Jauberteau
,
Jean-Louis Jauberteau
,
Sébastien J. Weber
,
Annie Bessaudou
,
et al.
PIRM IV Physique des Interactions Rayonnement Matière, 4ème Congrès International , Apr 2010, Dakhla, Morocco
Communication dans un congrès
hal-00618426v1
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A thermochemical process using expanding plasma for nitriding thin molybdenum films at low temperature
Isabelle Jauberteau
,
Jean-Louis Jauberteau
,
Said Touimi
,
Thérèse Merle-Méjean
,
Sébastien J. Weber
,
et al.
Article dans une revue
hal-00771768v1
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Mass spectrometer analysis of plasma containing easily dissociated species: Absolute concentrations of the main free radicals Si(CH3)1,2,3, and H2Si(CH3) produced in a microwave discharge sustained in an Ar–Si(CH3)4 gas mixture
Jean-Louis Jauberteau
,
Isabelle Jauberteau
,
Jacques Aubreton
Article dans une revue
istex
hal-00176482v1
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