Gérard Henrion
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- 0000-0002-8963-6472
- IdRef : 130897620
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Towards control of TiO₂ thickness film in R-HiPIMS process with a coupled optical and electrical monitoring of plasmaSurface and Coatings Technology, 2022, 433, pp.128073. ⟨10.1016/j.surfcoat.2021.128073⟩
Article dans une revue
hal-03813109v1
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