Nombre de documents

64

Fabien AMIOT


Chargé de recherches CNRS.

 

Les objets mécaniques de dimensions micrométriques (MEMS) se distinguent, du fait de leurs faibles dimensions, par deux caractéristiques :

 

 

-un rapport surface / volume extrêmement élevé, en comparaison des structures usuelles de la mécanique, de sorte que l'on a pu mettre en évidence des couplages forts, surfaciques, entre mécanique et environnement (chimique ou électro-chimique) ;

- les tolérances géométriques et l'homogénéité des matériaux employés sont très mauvaises, du fait des procédés d'obtention.

 

 

 

 

 

Par conséquent, étudier le comportement mécanique de ces objets micrométriques impose de relever deux défis majeurs :

 

 

- Caractériser le comportement des matériaux à l'échelle micrométrique et quantifier l'influence de l'environnement ;

- Comprendre et exploiter les couplages mécanique-environnement d'intérêt quand les matériaux sont hétérogènes et les structures sont mal définies .

 


Article dans une revue20 documents

  • Emile Renner, Yves Gaillard, Fabrice Richard, Fabien Amiot, Patrick Delobelle. Sensitivity of the residual topography to single crystal plasticity parameters in Berkovich nanoindentation on FCC nickel. International Journal of Plasticity, Elsevier, 2016, 77, pp.118 - 140. 〈hal-01256237〉
  • Yasmine Fedala, Sorin Munteanu, Frédéric Kanoufi, Gilles Tessier, Jean-Paul Roger, et al.. Calibration procedures for quantitative multiple wavelengths reflectance microscopy. Review of Scientific Instruments, American Institute of Physics, 2016, 87 (1), pp.013702. 〈10.1063/1.4939253〉. 〈hal-01480032〉
  • Chang Wu, Valérie Pétrini, Eric Joseph, Fabien Amiot. Design and fabrication of a multiple-thickness electrochemical cantilever sensor. Microelectronic Engineering, Elsevier, 2014, 119, pp.1 - 5. 〈10.1016/j.mee.2014.01.009〉. 〈hal-00956972〉
  • Fabien Amiot. An Euler-Bernoulli second-strain gradient beam theory for cantilever sensors. Philosophical Magazine Letters, Taylor & Francis, 2013, 〈10.1080/09500839.2012.759294〉. 〈hal-00783801〉
  • Fabien Amiot, Michel Bornert, Pascal Doumalin, Jean Christophe DuprÉ, Marina Fazzini, et al.. Assessment of Digital Image Correlation Measurement Accuracy in the Ultimate Error Regime: Main Results of a Collaborative Benchmark. Strain, Wiley-Blackwell, 2013, 49 (6), pp.14. 〈10.1111/str.12054〉. 〈hal-01069741〉
  • Thomas Travaillot, Soren Dohn, Anja Boisen, Fabien Amiot. Imaging interferometry to measure surface rotation field. Applied optics, Optical Society of America, 2013, 52 (18), pp.4360-4369. 〈10.1364/AO.52.004360〉. 〈hal-00835909〉
  • Sorin Munteanu, J.P. Roger, Yasmina Fedala, Fabien Amiot, Catherine Combellas, et al.. Mapping fluxes of radicals from the combination of electrochemical activation and optical microscopy. Faraday Discussions, Royal Society of Chemistry, 2013, 164 (1), pp.241-258. 〈10.1039/C3FD00024A〉. 〈hal-00840314〉
  • S. Munteanu, N. Garraud, J.P. Roger, Fabien Amiot, Jian Shi, et al.. In situ, real time monitoring of surface transformation : ellipsometric microscopy imaging of electrografting at microstructured gold surfaces. Analytical Chemistry, American Chemical Society, 2013, 85 (4), pp.1965-1971. 〈10.1021/ac3034085〉. 〈hal-00797107〉
  • Sorin Munteanu, Sarra Gam-Derouich, Cécile Flammier, Yasmina Fedala, Catherine Combellas, et al.. Scanning electrochemical microscopy monitoring in microcantilever platforms. Analytical Chemistry, American Chemical Society, 2012, 84 (17), pp.7449-7455. 〈10.1021/ac301502a〉. 〈hal-00750683〉
  • J. Le Rouzic, Patrick Delobelle, Bernard Cretin, Pascal Vairac, Fabien Amiot. Simultaneous measurement of Young's modulus and Poisson's ratio at microscale with two-modes scanning microdeformation microscopy. Materials Letters, Elsevier, 2012, 68 (1), pp.370-373. 〈10.1016/j.matlet.2011.11.012〉. 〈hal-00660331〉
  • N. Garraud, Y. Fedala, F. Kanoufi, G. Teissier, J.P. Roger, et al.. Multiple wavelengths reflectance microscopy to study the multi-physical behavior of MEMS. Optics Letters, Optical Society of America, 2011, 36 (4), pp.594-596. 〈10.1364/OL.36.000594〉. 〈hal-00567440〉
  • Soren Dohn, Silvan Schmid, Fabien Amiot, Anja Boisen. Position and mass determination of multiple particles using cantilever based mass sensors. Applied Physics Letters, American Institute of Physics, 2010, 97 (4), 14p. 〈10.1063/1.3473761〉. 〈hal-00520914〉
  • Fabien Amiot, F. Kanoufi, F. Hild, J.P. Roger. Charge redistribution in electrochemically-actuated mechanical sensors. Sensors and Actuators A: Physical , Elsevier, 2009, 152, pp.88-95. 〈10.1016/j.sna.2009.03.009〉. 〈hal-00388422〉
  • Fabien Amiot, François Hild, Frederic Kanoufi, Jean Paul Roger. Identification of the electro-elastic coupling from full multi-physical fields measured at the micrometer scale. Journal of Physics D: Applied Physics, IOP Publishing, 2007, 40, pp.3314-3325. 〈hal-00144426〉
  • Fabien Amiot, F. Hild, F. Kanoufi, J.P. Roger. Identification of the electroelastic coupling from full multi-physical fields measured at the micrometre scale. Journal of Physics D: Applied Physics, IOP Publishing, 2007, 40, pp. 3314-3325. 〈hal-00262231〉
  • Fabien Amiot. A model for chemically-induced mechanical loading on MEMS. Journal of Mechanical Materials and Structures, 2007, 2 (9), pp. 1787-1803. 〈hal-00262224〉
  • Fabien Amiot, François Hild, Jean Paul Roger. Identification of elastic property and loading fields from full-field displacement measurements. International Journal of Solids and Structures, Elsevier, 2007, 44, pp.2863-2887. 〈hal-00138298〉
  • Fabien Amiot. A model for chemically-induced mechanical loading on MEMS. Journal of Mechanics of Materials and Structures, Mathematical Sciences Publishers, 2007, 2 (9), pp.1787-1803. 〈hal-00245167〉
  • Fabien Amiot, Jean Paul Roger. Nomarski imaging interferometry to measure the displacement field of MEMS. Applied optics, Optical Society of America, 2006, 45(30), pp.7800. 〈hal-00108496〉
  • Fabien Amiot, François Hild, Jean Paul Roger. Mesure de champs de déplacement micrométrique d'une surface par corrélation de sa topographie. Instrumentation, Mesure, Métrologie, Lavoisier, 2005, 5, pp.33-43. 〈hal-00023349〉

Communication dans un congrès37 documents

  • Thomas Travaillot, Pascal Vairac, Patrick Delobelle, Fabien Amiot. Simultaneous measurement of Young's modulus and Poisson's ratio at microscale with multimode scanning microdeformation microscopy and full-field measurements. International Conference on full-field measurement techniques and their applications in experimental solid mechanics (Photomechanics 2013), Jan 2013, France. pp.1 - 6, 2013. 〈hal-01022214〉
  • Fabien Amiot. An Euler-Bernoulli second-strain gradient beam theory for cantilever sensors. 10th International Workshop on Nanomechanical Sensing, May 2013, Stanford, California, United States. 2 p., 2013. 〈hal-00847249〉
  • Thomas Travaillot, Pascal Vairac, Patrick Delobelle, Fabien Amiot. Simultaneous measurement of Young's modulus and Poisson's ratio at microscale with multimode scanning microdeformation microscopy and full-field measurements. International Conference on full-field measurement techniques and their applications in experimental solid mechanics, May 2013, Montpellier, France. 2013. 〈hal-00835943〉
  • Chang Wu, Fabien Amiot. Design and fabrication of a multiple-thickness electrochemical cantilever sensor. 39th International Conference on Micro and Nano Engineering, Jan 2013, France. pp.1 - 6, 2013. 〈hal-01002398〉
  • Chang Wu, Fabien Amiot. Design and fabrication of a multiple-thickness electrochemical cantilever sensor. 39th International Conference on Micro and Nano Engineering, Sep 2013, London, United Kingdom. 2013. 〈hal-00870416〉
  • Fabien Amiot. An Euler-Bernoulli second-strain gradient beam theory for cantilever sensors. 10th International Workshop on Nanomechanical Sensing, Jan 2013, France. pp.204 - 212, 2013. 〈hal-00982895〉
  • Fabien Amiot, Frédéric Kanoufi, Sorin Munteanu, J.P. Roger, G. Tessier. Chemo-mechanical couplings identification from multiple-wavelengths microscopy. International conference on full-field measurement techniques and their applications in experimental solid mechanics, May 2013, Montpellier, France. 2013. 〈hal-00835946〉
  • Fabien Amiot, F. Kanoufi, S. Munteanu, J.P. Roger, Gilles Tessier. Chemo-mechanical couplings identification from multiple-wavelengths microscopy. PhotoMechanics 2013, Jan 2013, France. pp.6, 2013. 〈hal-00983286〉
  • Frédéric Kanoufi, Sorin Munteanu, Fabien Amiot, J.P. Roger, Catherine Combellas. In situ real time monitoring of surface transformation : ellipsometric microscopy imaging of electrografting at microstructured gold surfaces. The Nanoscale and Electroanalysis : surface nanostructuration, nanobiological systems, coupled techniques, microsystems, May 2013, Bordeaux, France. 2013. 〈hal-00835953〉
  • Thomas Travaillot, Pascal Vairac, Patrick Delobelle, Fabien Amiot. Mesure simultanée du module de Young et du coefficient de Poisson en microscopie à champ proche multimodale. 12ème Journée Scientifique du Groupe Français des Polymères, Jun 2012, Besançon, France. 2012. 〈hal-00840304〉
  • Thomas Travaillot, Pascal Vairac, Patrick Delobelle, Fabien Amiot. Simultaneous measurement of Young's modulus and Poisson's ratio at microscale with multiple modes scanning microdeformation microscopy. International Conference on Nanoscience and Nanotechnology, Jul 2012, La Sorbonne - Paris, France. 2012. 〈hal-00840294〉
  • Fabien Amiot, Y. Fedala, Cécile Flammier, N. Garraud, F. Kanoufi, et al.. Surface mechanics and full-field measurements for micromechanical sensors. IUTAM Symposium on Full-Field Measurements and Identification in Solid Mechanics, Jul 2011, Cachan, France. 〈hal-00659740〉
  • Thomas Travaillot, Fabien Amiot. Mechanical characterization using a scanning microdeformation microscope and full-field measurements. International Conference on Full-Field Measurement Techniques and their applications in Experimental Solid Mechanics, Feb 2011, Bruxelles, Belgium. 2011. 〈hal-00624101〉
  • Cécile Flammier, Y. Fedala, F. Kanoufi, G. Teissier, J.P. Roger, et al.. Equilibrium-based regularization of multiple wavelengths imaging microscopy measurements for the electro-elastic coupling modelling. International Conference on Full-Field Measurement Techniques and their applications in Experimental Solid Mechanics, Feb 2011, Bruxelles, Belgium. 2011. 〈hal-00624110〉
  • F. Kanoufi, S. Munteanu, Y. Fedala, Cécile Flammier, J.P. Roger, et al.. Imaging the local electrochemical reactivity of surfaces by light reflectivity : application to the electrografting of aryldiazonium salts. Electrochemistry in Nanostructuration of Substrates and Energy, May 2011, Paris, France. 2011. 〈hal-00624199〉
  • Thomas Travaillot, Pascal Vairac, Patrick Delobelle, Fabien Amiot. Caractérisation mécanique par sollicitation locale et mesure de champ. 20ème Congrès Français de Mécanique (CFM 2011), Aug 2011, Besançon, France. papier 678, 2011. 〈hal-00660202〉
  • Cécile Flammier, Y. Fedala, F. Kanoufi, G. Tessier, J.P. Roger, et al.. Identification du couplage électro-élastique à partir de mesures de champs régularisées par les conditions d'équilibre. 20ème Congrès Français de Mécanique, Aug 2011, Besançon, France. 2011. 〈hal-00847248〉
  • S. Munteanu, Y. Fedala, Cécile Flammier, J.P. Roger, G. Teissier, et al.. Light reflectivity - a real time imaging tool to monitor the electrografting of microelectrodes. 61th Meeting of the International Society of Electrochemistry, Sep 2010, Nice, France. 2010. 〈hal-00659818〉
  • Fabien Amiot, Y. Fedala, Cécile Flammier, N. Garraud, F. Kanoufi, et al.. Surface mechanics and full-field measurements for micromechanical sensors. 7th International Workshop on Nanomechanical Cantilever Sensors, May 2010, Banff, Canada. 〈hal-00659728〉
  • Cécile Flammier, Y. Fedala, F. Kanoufi, G. Teissier, J.P. Roger, et al.. Electro-elastic coupling modeling from multiple-wavelengths imaging microscopy. 14th International Conference on Experimental Mechanics (ICEM 14), Jul 2010, Poitiers, France. pp.id 37001, 2010, 〈10.1051/epjconf/20100637001〉. 〈hal-00659811〉
  • Fabien Amiot. The equilibrium gap method : a two scales approach. 14th International Conference on Experimental Mechanics (ICEM 14), Jul 2010, Poitiers, France. pp.id 37003, 2011, 〈10.1051/epjconf/20100637003〉. 〈hal-00659786〉
  • Fabien Amiot. Capteurs micromécaniques : les couplages mécano-chimiques à l'oeil des mesures de champs. Journées Nationales du GDR MNS, Nov 2009, France. 2009. 〈hal-00441173〉
  • Fabien Amiot, F. Kanoufi, F. Hild, J.P. Roger. On the specificity of electrochemically-actuated micromechanical sensors. International Workshop on Nanomechanical Sensors, 2008, Mainz, Germany. 2 p., 2008. 〈hal-00373498〉
  • N. Garraud, Fabien Amiot, G. Teissier, J.P. Roger, F. Hild. Simultaneous measurement of kinematic and complementary fields for MEMS structures. XI International Conference and Exposition on Experimental and Applied Mechanics, 2008, Orlando, Floride, United States. 2008. 〈hal-00441940〉
  • Fabien Amiot, S. Dohn. Full slope field measurement at the micrometer scale. International Conference on full-field measurement techniques and their applications in experimental solid mechanics, 2008, Loughborough, United Kingdom. 2 p., 2008. 〈hal-00350156〉
  • Fabien Amiot, F. Hild. Mécanique des objets micrométriques : quelle mesure pour quelle identification ?. 18ème Congrès Français de Mécanique, Session S20 "Problèmes inverses, Identification", 2007, Grenoble, France. 6 p., 2007. 〈hal-00331631〉
  • Fabien Amiot, F. Hild, F. Kanoufi, J.P. Roger. Identification from multi-physics full-field measurements at the micrometer scale : the electro-elastic coupling. 13th International Conference on Experimental Mechanics (ICEM 13), 2007, Alexandroupolis, Greece. 2007. 〈hal-00331616〉
  • N. Garraud, Fabien Amiot, F. Hild, J.P. Roger. Modeling of adsorption-induced mechanical loading on microcantilevers using full-field measurements. 13th International Conference on Experimental Mechanics (ICEM 13), 2007, Alexandroupolis, Greece. 2007. 〈hal-00331625〉
  • N. Garraud, Fabien Amiot, J.P. Roger, G. Teissier, F. Kanoufi, et al.. Mesure simultanée de champs cinématiques et de chargement pour l'identification du couplage électroélastique à l'échelle micrométrique. 18ème Congrès Français de Mécanique, 2007, Grenoble, France. 6 p., 2007. 〈hal-00331633〉
  • Fabien Amiot, F. Hild, F. Kanoufi, J.P. Roger. Couplage électro-élastique et adsorption : vers une nouvelle instrumentation en chimie analytique. 18ème Congrès Français de Mécanique, Session S18 "Micro et Nanosystèmes, MEMS, Biocapteurs", 2007, Grenoble, France. 6 p., 2007. 〈hal-00331628〉
  • N. Garraud, Fabien Amiot, François Hild, J.P. Roger. Mesure de champs de déplacement d'une micro-poutre soumise à l'adsorption de molécules - identification de paramètres mécaniques. Colloque National Mecamat / Ecole de Mécanique des Matériaux "Approches multiéchelles en mécanique des matériaux", 2006, Aussois, France. 2006. 〈hal-00019271〉
  • Fabien Amiot, François Hild, J.P. Roger. Identification des propriétés élastiques et du chargement d'une structure micrométrique par mesure de champs. CFM 2005 - XVIIe Congrès français de mécanique, 2005, Troyes, France. 2005. 〈hal-00016167〉
  • Fabien Amiot, François Hild, J.P. Roger. Mesure de champs de déplacements pour des MEMS. CFM 2005 - XVIIe Congrès français de mécanique, 2005, Troyes, France. 2005. 〈hal-00016168〉
  • Fabien Amiot, François Hild, J.P. Roger. Retrieving elastic property field and loading pattern on a structure using full-field measurements : identifiability conditions and sensitivity. O. Allix et al. EMMC 8 : Euromech-Mecamat - 8th European Mechanics of Materials Conference on Material and Structural Identification from Full-Field Measurements, 2005, Cachan, France. 2005. 〈hal-00023110〉
  • Fabien Amiot, François Hild, Jean Paul Roger. Model and parameter identification using non-contact loading and full-field measurement. SEM. 2005, SEM, 6 p., 2005. 〈hal-00013812〉
  • E. Pagnacco, D. Lemosse, François Hild, Fabien Amiot. Inverse strategy from displacement field measurement and distributed forces using FEA. 2005 SEM Annual Conference and Exposition on Experimental and Applied Mechanics, 2005, Portland, United States. 2005. 〈hal-00014023〉
  • Fabien Amiot, François Hild, J.P. Roger. Model and parameter identification using non-contact loading and full-field measurement. 2005 SEM Annual Conference and Exposition on Experimental and Applied Mechanics, 2005, Portland, United States. 2005. 〈hal-00014025〉

Chapitre d'ouvrage4 documents

  • Cécile Flammier, F. Kanoufi, Sorin Munteanu, J.P. Roger, G. Tessier, et al.. Surface mechanics and full-field measurements : investigation of the electro-elastic coupling. Surface effects in Solid Mechanics, Springer, pp.193, 2013, 978-3-642-35782-4. 〈hal-00768477〉
  • Cécile Flammier, F. Kanoufi, S. Munteanu, J.P. Roger, Gilles Tessier, et al.. Surface mechanics and full-field measurements : investigation of the electro-elastic coupling. Surface effects in Solid Mechanics, Springer, pp.193, 2013. 〈hal-01022294〉
  • Fabien Amiot, Jean-Noël Périé, S. Roux. Equilibrium gap. Michel Grediac, François Hild. Full-Field Measurements and Identification in Solid Mechanics, Wiley, 2012, 978-1-84821-294-7. 〈hal-00750690〉
  • Fabien Amiot, Jean-Noël Périé, S. Roux. Méthode de l'écart à l'équilibre. Mesures de champs et identification, Hermès-Lavoisier, Chapitre 12, 2010, Mécanique et Ingénierie des Matériaux. 〈hal-00660260〉

Pré-publication, Document de travail1 document

  • Fabien Amiot, François Hild, Jean Paul Roger. The equilibrium gap method with modeling parameters: identifiability conditions and sensitivity. 2008. 〈hal-00245303〉

Thèse1 document

  • Fabien Amiot. Mesure de champs à l'échelle micrométrique pour l'identification d'effets mécaniques surfaciques : vers une nouvelle instrumentation pour la biologie. Mécanique [physics.med-ph]. École normale supérieure de Cachan - ENS Cachan, 2005. Français. 〈tel-00011341〉

HDR1 document

  • Fabien Amiot. Full-field measurements for the mechanics of micrometer-sized structures. Mechanics of materials [physics.class-ph]. ENS Cachan, 2015. 〈tel-01145815v2〉