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  • Corentin Le Maoult, David Vaufrey, François Martin, Eugénie Martinez, Emmanuel Nolot, et al.. Analysis of InGaN surfaces after chemical treatments and atomic layer deposition of Al2O3 for uLED applications. Proceedings of SPIE, the International Society for Optical Engineering, SPIE, The International Society for Optical Engineering, 2020, 11280, pp.112801C. ⟨10.1117/12.2544787⟩. ⟨cea-02941396v2⟩