T. Novikova, E.V. Johnson, M. Mao, P. Bulkin, Jean-Paul Booth, et al.. Investigation of Voltage Waveform Tailoring Effect in CapacitivelyCoupled H
2 Discharge: Fluid Simulations and Experimental Validation.
EPS Plasma Physics, Jul 2012, Stockholm, Sweden. 2012.
⟨hal-02611270⟩