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Micro-Machining of Microelectronics Chips: a Comparison between ns and fs Laser Cutting
Guillaume Savriama
,
Jean Bonfarnuzoo
,
Virginie Liochon
,
Agnes Petit
,
Vincent Jarry
,
et al.
E-MRS 2013 Spring Meeting, May 2013, Strasbourg (67), France
Communication dans un congrès
hal-00830539v1
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Epitaxial growth of titanium oxide thin films on c-cut and alpha-cut sapphire substrates
N. Sbai
,
J. Perriere
,
W. Seiler
,
E. Millon
Article dans une revue
istex
hal-01293151v1
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Phase separation in oxygen deficient gallium oxide films grown by pulsed-laser deposition
Aline Petitmangin
,
Jacques Perriere
,
Christian Hebert
,
Eric Millon
,
Agnes Petit
,
et al.
E-MRS 2011 Spring Meeting, May 2011, Nice, France
Communication dans un congrès
hal-00667958v1
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Pulsed-laser deposition of nanoparticles for the PECVD growth of carbon nanotubes in a chamber combining both techniques
Hermane Mbitsi
,
Sébastien Kouassi
,
Chantal Boulmer-Leborgne
,
Eric Millon
,
Mathieu Roy
E-MRS 2008 Spring Meeting, May 2008, Strasbourg, France
Communication dans un congrès
hal-00444513v1
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Thin films of a new titanium oxide phase grown by PLD
Nadia Sbai
,
Eric Millon
,
Wilfrid Seiler
,
Daniel Defourneau
,
Jacques Perriere
E-MRS 2007 Spring Meeting, May 2007, strasbourg, France
Communication dans un congrès
hal-00444527v1
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About the key factors driving the resistivity of AuOx thin films grown by reactive magnetron sputtering
Vincent Dolique
,
Anne-Lise Thomann
,
Eric Millon
,
Agnes Petit
,
Pascal Brault
Article dans une revue
hal-00952818v1
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Optimization of DC reactive magnetron sputtering deposition process for efficient YSZ electrolyte thin film SOFC
Hervé Hidalgo
,
Anne-Lise Thomann
,
Thomas Lecas
,
Julien Vuillet
,
K. Wittman-Teneze
,
et al.
Article dans une revue
hal-00757718v1
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Thermal conductivity measurement of porous silicon by pulsed-photothermal method
Eliane Amin-Chalhoub
,
Nadjib Semmar
,
Loïc Coudron
,
Gaël Gautier
,
Chantal Boulmer-Leborgne
,
et al.
Journal of Physics D: Applied Physics, 2011, 44, pp.355401
Article dans une revue
hal-00623107v1
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Electrical and thermal characterization of carbon nanotubes films
Mireille Gaillard
,
Hermane Mbitsi
,
Agnes Petit
,
Eliane Amin-Chalhoub
,
Chantal Boulmer-Leborgne
,
et al.
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2011, 29, pp.041805
Article dans une revue
hal-00623096v1
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Spectroscopic measurement of plume mission from femtosecond laser ablation
D. Moreau
,
Olivier Albert
,
Ratiba Benzerga
,
Chantal Boulmer-Leborgne
,
Eric Millon
,
et al.
Thin Solid Films, 2004, 453-454, pp.340-344
Article dans une revue
hal-00783560v1
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Zirconium-based nanocatalysts by sputtering onto glycerol and solid carbon
Soumya Atmane
,
Seyedehsara Fazeli
,
E. Millon
,
Pascal Brault
,
Anne-Lise Thomann
,
et al.
PLATHINIUM, Sep 2023, ANTIBES, France
Poster de conférence
hal-04243652v1
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Spectroscopic measurement of plume emission from femtosecond laser ablation
D. Moreau
,
O. Albert
,
Ratiba Benzerga
,
C. Boulmer-Leborgne
,
E. Millon
,
et al.
Article dans une revue
istex
hal-00005017v1
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High-resolution transmission electron microscope observations of multiwalled carbon nanotube microstructures grown by plasma enhanced chemical vapor deposition
Mireille Gaillard
,
Christian Kuebel
,
Chantal Boulmer-Leborgne
,
Di Wang
,
Nadjib Semmar
,
et al.
Article dans une revue
hal-00827325v1
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Hot target magnetron sputtering process: Effect of infrared radiation on the deposition of titanium and titanium oxide thin films
Robin Graillot-Vuillecot
,
Anne-Lise Thomann
,
Thomas Lecas
,
Christophe Cachoncinlle
,
Eric Millon
,
et al.
Article dans une revue
hal-03034225v1
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Effect of ultrashort laser surface nanostructuring on the evolution of thermoelectric properties of materials
Abderazek Talbi
,
Thi Trang Dai Huynh
,
Amer Mehlem
,
Eric Millon
,
Arnaud Stolz
,
et al.
E-MRS 2017 Spring Meeting (Symposium H), May 2017, Strasbourg (67), France
Communication dans un congrès
hal-01573316v1
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Dynamics of zinc oxide plasma plume in picosecond pulsed-laser deposition
Lionel Lansiart
,
Eric Millon
,
Chantal Boulmer-Leborgne
,
Agnes Petit
,
Jacky Mathias
CIP 2011, 18th International Colloquium on Plasma Processes, Jul 2011, Nantes, France
Communication dans un congrès
hal-00667955v1
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Photon-Assisted Synthesis and Processing of Fonctional Materials
Maria Dinescu
,
Hiroshi Fukumura
,
Henry Helvajian
,
Eric Millon
,
Tamas Szörenyi
Elsevier, pp.604, 2007, Applied Surface Science
Ouvrages
hal-00441544v1
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Influence of RF PE-CVD conditions on carbon nanotube structures
Mireille Gaillard
,
Sébastien Le Chevallier
,
Eliane Amin-Chalhoub
,
Agnès Petit
,
Nadjib Semmar
,
et al.
18th International Colloquium on Plasma Processes (CIP), Jul 2011, Nantes, France
Communication dans un congrès
hal-00662041v1
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Epitaxial Nd:ZnO thin films with inclined c-axis grown on c-cut sapphire substrates
Magda Nistor
,
Wilfrid Seiler
,
Christian Hebert
,
Eric Millon
,
Jacques Perriere
E-MRS 2013 Spring Meeting, May 2013, Strasbourg (67), France
Communication dans un congrès
hal-00830524v1
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Pure and Nb-doped TiO1.5 films grown by pulsed-laser deposition for transparent p-n homojunctions
Emmanuel Le Boulbar
,
Eric Millon
,
Jacky Mathias
,
Chantal Boulmer-Leborgne
,
Magda Nistor
,
et al.
Applied Surface Science, 2011, 257, pp.5380
Article dans une revue
hal-00623063v1
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Influence of helium incorporation on growth process and properties of aluminum thin films deposited by DC magnetron sputtering
Sara Ibrahim
,
Fatima Zahrae Lahboub
,
Pascal Brault
,
Agnès Petit
,
Amael Caillard
,
et al.
Article dans une revue
hal-03384877v1
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Growth and properties of Nd doped TiO2 PLD thin films
Emmanuel Le Boulbar
,
Eric Millon
,
Jacky Mathias
,
Chantal Boulmer-Leborgne
,
Yohely Davila
,
et al.
E-MRS 2010 Spring Meeting, Jun 2010, Strasbourg, France
Communication dans un congrès
hal-00494454v1
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Carbon nanotubes integration for microelectronics interconnection
Hermane Mbitsi
,
Eliane Amin-Chalhoub
,
Mireille Gaillard
,
Chantal Boulmer-Leborgne
,
Nadjib Semmar
,
et al.
E-MRS 2010 Spring Meeting, Jun 2010, Strasbourg, France
Communication dans un congrès
hal-00494446v1
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Synthesis of titanium dioxide thin films obtained by hot target magnetron sputtering
Robin Graillot-Vuillecot
,
Anne Lise Thomann
,
Eric Millon
,
Christophe Cachoncinlle
,
Amael Caillard
European Materials Research Society, Spring Meeting, May 2019, Nice, France
Communication dans un congrès
hal-02394328v1
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A comparative study of the evolution of Zinc oxide plasmas induced by PLD and PED
Sylvain Tricot
,
Magda Nistor
,
Chantal Boulmer-Leborgne
,
Eric Millon
,
Jacques Perriere
E-MRS Spring Meeting, May 2007, Strasbourg, France
Communication dans un congrès
hal-00444063v1
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Comparative study of Laser Induced Periodic Surface Structures formation on pulsed laser deposited and magnetron sputtered titanium oxide thin films
Abderazek Talbi
,
Pierre-Laurent Coddet
,
Vincent Rogé
,
M. Tabbal
,
Eric Millon
,
et al.
EMRS, Jun 2018, Strasbourg, France
Communication dans un congrès
hal-01903382v1
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High-resolution emission spectroscopy of random lasing in GaN films pumped by UV-pulsed laser
Christophe Cachoncinlle
,
Eric Millon
,
Agnes Petit
Article dans une revue
hal-01271370v1
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Performances Enhancement of Thin Film a-Si:H Photovoltaic Devices by incorporating Ag Nanoparticles (Ag NPs)
Perrine Dutheil
,
Anne-Lise Thomann
,
Amaël Caillard
,
Julien Roussel
,
Mustapha Elyaakoubi
,
et al.
4th International Symposium on Energy Challenges and Mechanics-work on small scales 2015, Aug 2015, Aberdeen, United Kingdom
Poster de conférence
hal-01290684v1
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Deposition using pulsed regime in magnetron sputtering : principle, characteristics and comparison with pulsed-electron and pulsed laser deposition
Amael Caillard
,
Eric Millon
,
Christophe Cachoncinlle
EMRS, Jun 2021, virtual, France
Communication dans un congrès
hal-03436398v1
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Micro structuration de couches minces de niobate de lithium
Benoît Fougère
,
Sébastien Kilburger
,
Claire Darraud
,
Catherine Di Bin
,
Philippe Di Bin
,
et al.
Journées Nationales de l'Optique Guidée (JNOG 2007), Jul 2007, Grenoble, France
Communication dans un congrès
hal-00158843v1
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