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Micro-Machining of Microelectronics Chips: a Comparison between ns and fs Laser Cutting

 Guillaume Savriama , Jean Bonfarnuzoo , Virginie Liochon , Agnes Petit , Vincent Jarry , et al.
E-MRS 2013 Spring Meeting, May 2013, Strasbourg (67), France
Communication dans un congrès hal-00830539v1

Epitaxial growth of titanium oxide thin films on c-cut and alpha-cut sapphire substrates

 N. Sbai , J. Perriere , W. Seiler , E. Millon
Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2007, 601 (23), pp.5649-5658. ⟨10.1016/j.susc.2007.09.019⟩
Article dans une revue istex hal-01293151v1

Pulsed-laser deposition of nanoparticles for the PECVD growth of carbon nanotubes in a chamber combining both techniques

 Hermane Mbitsi , Sébastien Kouassi , Chantal Boulmer-Leborgne , Eric Millon , Mathieu Roy
E-MRS 2008 Spring Meeting, May 2008, Strasbourg, France
Communication dans un congrès hal-00444513v1

Thin films of a new titanium oxide phase grown by PLD

 Nadia Sbai , Eric Millon , Wilfrid Seiler , Daniel Defourneau , Jacques Perriere
E-MRS 2007 Spring Meeting, May 2007, strasbourg, France
Communication dans un congrès hal-00444527v1
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About the key factors driving the resistivity of AuOx thin films grown by reactive magnetron sputtering

 Vincent Dolique , Anne-Lise Thomann , Eric Millon , Agnes Petit , Pascal Brault
Applied Surface Science, 2014, 295, pp.194- 197. ⟨10.1016/j.apsusc.2014.01.026⟩
Article dans une revue hal-00952818v1

Electrical and thermal characterization of carbon nanotubes films

 Mireille Gaillard , Hermane Mbitsi , Agnes Petit , Eliane Amin-Chalhoub , Chantal Boulmer-Leborgne , et al.
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2011, 29, pp.041805
Article dans une revue hal-00623096v1

Zirconium-based nanocatalysts by sputtering onto glycerol and solid carbon

 Soumya Atmane , Seyedehsara Fazeli , E. Millon , Pascal Brault , Anne-Lise Thomann , et al.
PLATHINIUM, Sep 2023, ANTIBES, France
Poster de conférence hal-04243652v1
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Optimization of DC reactive magnetron sputtering deposition process for efficient YSZ electrolyte thin film SOFC

 Hervé Hidalgo , Anne-Lise Thomann , Thomas Lecas , Julien Vuillet , K. Wittman-Teneze , et al.
Fuel Cells, 2013, 13, pp.279-288. ⟨10.1002/fuce.201200125⟩
Article dans une revue hal-00757718v1

Thermal conductivity measurement of porous silicon by pulsed-photothermal method

 Eliane Amin-Chalhoub , Nadjib Semmar , Loïc Coudron , Gaël Gautier , Chantal Boulmer-Leborgne , et al.
Journal of Physics D: Applied Physics, 2011, 44, pp.355401
Article dans une revue hal-00623107v1

Spectroscopic measurement of plume mission from femtosecond laser ablation

 D. Moreau , Olivier Albert , Ratiba Benzerga , Chantal Boulmer-Leborgne , Eric Millon , et al.
Thin Solid Films, 2004, 453-454, pp.340-344
Article dans une revue hal-00783560v1

Phase separation in oxygen deficient gallium oxide films grown by pulsed-laser deposition

 Aline Petitmangin , Jacques Perriere , Christian Hebert , Eric Millon , Agnes Petit , et al.
E-MRS 2011 Spring Meeting, May 2011, Nice, France
Communication dans un congrès hal-00667958v1

Spectroscopic measurement of plume emission from femtosecond laser ablation

 D. Moreau , O. Albert , Ratiba Benzerga , C. Boulmer-Leborgne , E. Millon , et al.
Thin Solid Films, 2004, 453-454, pp.340. ⟨10.1016/j.tsf.2003.11.098⟩
Article dans une revue istex hal-00005017v1

Growth and properties of Nd doped TiO2 PLD thin films

 Emmanuel Le Boulbar , Eric Millon , Jacky Mathias , Chantal Boulmer-Leborgne , Yohely Davila , et al.
E-MRS 2010 Spring Meeting, Jun 2010, Strasbourg, France
Communication dans un congrès hal-00494454v1

High-resolution transmission electron microscope observations of multiwalled carbon nanotube microstructures grown by plasma enhanced chemical vapor deposition

 Mireille Gaillard , Christian Kuebel , Chantal Boulmer-Leborgne , Di Wang , Nadjib Semmar , et al.
Journal of Vacuum Science and Technology, 2013, 31 (3), pp.031805-1. ⟨10.1116/1.4804543⟩
Article dans une revue hal-00827325v1
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Hot target magnetron sputtering process: Effect of infrared radiation on the deposition of titanium and titanium oxide thin films

 Robin Graillot-Vuillecot , Anne-Lise Thomann , Thomas Lecas , Christophe Cachoncinlle , Eric Millon , et al.
Vacuum, 2020, 181, pp.109734. ⟨10.1016/j.vacuum.2020.109734⟩
Article dans une revue hal-03034225v1

Effect of ultrashort laser surface nanostructuring on the evolution of thermoelectric properties of materials

 Abderazek Talbi , Thi Trang Dai Huynh , Amer Mehlem , Eric Millon , Arnaud Stolz , et al.
E-MRS 2017 Spring Meeting (Symposium H), May 2017, Strasbourg (67), France
Communication dans un congrès hal-01573316v1

Dynamics of zinc oxide plasma plume in picosecond pulsed-laser deposition

 Lionel Lansiart , Eric Millon , Chantal Boulmer-Leborgne , Agnes Petit , Jacky Mathias
CIP 2011, 18th International Colloquium on Plasma Processes, Jul 2011, Nantes, France
Communication dans un congrès hal-00667955v1

Photon-Assisted Synthesis and Processing of Fonctional Materials

 Maria Dinescu , Hiroshi Fukumura , Henry Helvajian , Eric Millon , Tamas Szörenyi
Elsevier, pp.604, 2007, Applied Surface Science
Ouvrages hal-00441544v1

Influence of RF PE-CVD conditions on carbon nanotube structures

 Mireille Gaillard , Sébastien Le Chevallier , Eliane Amin-Chalhoub , Agnès Petit , Nadjib Semmar , et al.
18th International Colloquium on Plasma Processes (CIP), Jul 2011, Nantes, France
Communication dans un congrès hal-00662041v1

Epitaxial Nd:ZnO thin films with inclined c-axis grown on c-cut sapphire substrates

 Magda Nistor , Wilfrid Seiler , Christian Hebert , Eric Millon , Jacques Perriere
E-MRS 2013 Spring Meeting, May 2013, Strasbourg (67), France
Communication dans un congrès hal-00830524v1

Pure and Nb-doped TiO1.5 films grown by pulsed-laser deposition for transparent p-n homojunctions

 Emmanuel Le Boulbar , Eric Millon , Jacky Mathias , Chantal Boulmer-Leborgne , Magda Nistor , et al.
Applied Surface Science, 2011, 257, pp.5380
Article dans une revue hal-00623063v1
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Influence of helium incorporation on growth process and properties of aluminum thin films deposited by DC magnetron sputtering

 Sara Ibrahim , Fatima Zahrae Lahboub , Pascal Brault , Agnès Petit , Amael Caillard , et al.
Surface and Coatings Technology, 2021, 426, pp.127808. ⟨10.1016/j.surfcoat.2021.127808⟩
Article dans une revue hal-03384877v1

Zirconium-based nanocatalysts by sputtering onto glycerol and solid carbon

 Soumya Atmane , Seyedehsara Fazeli , E. Millon , Pascal Brault , Anne-Lise Thomann , et al.
PLATHINIUM (Plasma Thin film International Union Meeting), Sep 2023, Antibes, France
Communication dans un congrès hal-04291455v1

Laser annealing of boron silicon doped by Plasma Immersion Ion Implantation (PIII): Control of the melting thickness by TRR and SIMS

 Mohamed Darif , Nadjib Semmar , Eric Millon , Hasnaa Etienne , Philippe Delaporte
E-MRS 2010 Spring Meeting, Jun 2010, Strasbourg, France
Communication dans un congrès hal-00494427v1

Growth of nanocomposite oxide films : an original approach by pulsed-laser deposition

 Eric Millon , Jacques Perriere
Oxide Thin Films (OTF) Fusion Conferences, Jul 2014, Chicago, United States
Communication dans un congrès hal-01057558v1

Study of zinc oxide thin films grown by PED and PLD

 Magda Nistor , Sylvain Tricot , Chantal Boulmer-Leborgne , Eric Millon , Jacques Perriere
E-MRS 2007 Spring Meeting, May 2007, Strasbourg, France
Communication dans un congrès hal-00444528v1

Excimer Laser Activation of Ultra-Shallow Junctions in Doped Si: Modeling, Experiments and Real Time Process Monitoring

 Nadjib Semmar , Mohamed Darif , Eric Millon , Hasnaa Etienne , Philippe Delaporte
High Power Laser Ablation (HPLA - SPIE) 2012, Apr 2012, Santa Fe, United States
Communication dans un congrès hal-00709967v1

Role of the oxygen deficiency in nanocomposite oxide thin films for non-volatile memory devices

 Magda Nistor , Eric Millon , Jacques Perriere
E-MRS 2012 Spring Meeting, May 2012, Strasbourg, France
Communication dans un congrès hal-00709956v1

Growth of titanium oxide thin films by pulsed-laser deposition for transparent electronics

 Emmanuel Le Boulbar , Jacky Mathias , Chantal Boulmer-Leborgne , Eric Millon , Jacques Perriere , et al.
1st Intern. School "laser surface interactions for new materials production : tailoring structure and properties", Jul 2008, Italy
Communication dans un congrès hal-00444492v1

Properties of LiNbO3 based heterostructures grown by pulsed laser deposition for optical waveguiding application

 Sébastien Kilburger , E. Millon , Philippe Di Bin , Catherine Di Bin , Alexandre Boulle , et al.
E-MRS Spring Meeting, Symposium H : Synthesis, Processing and Characterization of Nanoscale Multifonctional Oxide Films II, Jun 2009, Strasbourg, France
Communication dans un congrès hal-00438441v1
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