Identifiants chercheur

  • IdHAL : emmanuelle-algre
Nombre de documents

21

Enseignante Chercheuse à l'ESIEE Paris - Laboratoire ESYCOM


Développement de microdispositifs pour l'analyse de polluants d'origine particulaire


Article dans une revue9 documents

  • Evelyne Géhin, U. Soysal, E. Algré, B. Berthelot, G. Da, et al.. Aerosol mass concentration measurements: Recent advancements of real-time nano/micro systems. Journal of Aerosol Science, Elsevier, 2017, 114, pp.42 - 54. 〈10.1016/j.jaerosci.2017.09.008〉. 〈hal-01647397〉
  • Etienne Herth, Laurie Valbin, Franck Lardet-Vieudrin, Emmanuelle Algre. Modeling and detecting response of micromachining square and circular membranes transducers based on AlN thin film piezoelectric layer. Microsystem Technologies, Springer Verlag, 2017, 23 (9), pp.3873 - 3880. 〈10.1007/s00542-015-2727-9〉. 〈hal-01771659〉
  • Etienne Herth, Emmanuelle Algre, Jean-Yves Rauch, Jean-Claude Gerbedoen, Nicolas Defrance, et al.. Modeling and characterization of piezoelectric beams based on an aluminum nitride thin-film layer. physica status solidi (a), Wiley, 2016, 213 (1), pp.114 - 121. 〈10.1002/pssa.201532302〉. 〈hal-01771653〉
  • E. Algre, Z. Xiong, M. Faucher, B. Walter, L. Buchaillot, et al.. MEMS ring resonators for laserless AFM with sub-nanoNewton force resolution. Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers, 2012, 21, pp.385-397. 〈10.1109/JMEMS.2011.2179012〉. 〈hal-00787407〉
  • E. Herth, E. Algre, P. Tilmant, M. François, C. Boyaval, et al.. Performances of the negative tone resist AZnLOF 2020 for nanotechnology applications. IEEE Transactions on Nanotechnology, Institute of Electrical and Electronics Engineers, 2012, 11, pp.854-859. 〈10.1109/TNANO.2012.2196802〉. 〈hal-00787415〉
  • E. Herth, H. Desre, E. Algre, C. Legrand, T. Lasri. Investigation of optical and chemical bond properties of hydrogenated amorphous silicon nitride for optoelectronics applications. Microelectronics Reliability, Elsevier, 2012, 52 (1), pp.141--146. 〈10.1016/j.microrel.2011.09.004〉. 〈hal-00692705〉
  • E. Herth, E. Algré, B. Legrand, L. Buchaillot. Optimization of ohmic contact and adhesion on polysilicon in MEMS-NEMS wet etching process. Microelectronic Engineering, Elsevier, 2011, 88, pp.724-728. 〈10.1016/j.mee.2010.06.032〉. 〈hal-00579051〉
  • B. Walter, M. Faucher, E. Algré, B. Legrand, Rodolphe Boisgard, et al.. Design and operation of a silicon ring resonator for force sensing applications above 1 MHz. Journal of Micromechanics and Microengineering, IOP Publishing, 2009, 19 (11), pp.115009-1-7. 〈10.1088/0960-1317/19/11/115009〉. 〈hal-00472725〉
  • E. Algré, G. Gaudin, A. Bsiesy, J.P. Nozieres. Improved patterned media for probe-based heat assisted magnetic recording. IEEE Transactions on Magnetics, Institute of Electrical and Electronics Engineers, 2005, 41 (10), pp.2857 - 2859. 〈10.1109/TMAG.2005.854680〉. 〈hal-01772554〉

Communication dans un congrès11 documents

  • Etienne Herth, Franck Lardet-Vieudrin, Florent Deux, Laurie Valbin, Emmanuelle Algre, et al.. Detection of out-of-plane and in-plane (XYZ) motions of piezoelectric microcantilever by 3D-Laser Doppler Vibrometry. 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), May 2016, Budapest, France. IEEE, 〈10.1109/DTIP.2016.7514876〉. 〈hal-01771668〉
  • Brice Berthelot, Emmanuelle Algre, Stéphane Moularat, Enric Robine, Evelyne Gehin. Design optimisation of silicon-based MEMS sensors dedicated to bioaerosols monitoring. 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Apr 2015, Montpellier, France. IEEE, 〈10.1109/DTIP.2015.7161009〉. 〈hal-01771681〉
  • Etienne Herth, Franck Lardet-Vieudrin, Laurie Valbin, Emmanuelle Algre. Detecting response of square and circular Si/AlN/Al membranes transducers by Laser Vibrometry Doppler and Impedancemeter. 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Apr 2015, Montpellier, France. IEEE, 〈10.1109/DTIP.2015.7160996〉. 〈hal-01771676〉
  • Lionel Buchaillot, Estelle Mairiaux, Benjamin Walter, Zhuang Xiong, Marc Faucher, et al.. Near-field microscopy : is there an alternative to micro and nano resonating cantilevers ?. IEEE International Frequency Control Symposium, IFCS 2014, 2014, Taipei, Taiwan. 2014, 〈10.1109/FCS.2014.6859928〉. 〈hal-01055047〉
  • B. Walter, Z. Xiong, E. Algre, E. Mairiaux, M. Faucher, et al.. [Invité] Apport des micro et nano-systèmes pour la microscopie à force atomique. Journées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France. 〈hal-00807204〉
  • M. Faucher, B. Legrand, B. Walter, E. Algre, A. Ben-Amar, et al.. [Invité] Micro et nanorésonateurs électromécaniques radio-fréquences. Principes et applications. TELECOM'2011 & 7èmes Journées Franco-Maghrébines des Micro-ondes et leurs Applications, 2011, Tanger, Maroc. CDROM, papier 554, 1-6, 2011. 〈hal-00806730〉
  • E. Algre, B. Legrand, M. Faucher, B. Walter, L. Buchaillot. Surface microscopy with laserless MEMS based AFM probes. 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, 2010, China. _, pp.292-295, 2010, 〈10.1109/MEMSYS.2010.5442509〉. 〈hal-00549972〉
  • E. Algre, B. Legrand, M. Faucher, B. Walter, L. Buchaillot. Tip-matter interaction measurements using MEMS ring resonators. Forum des Microscopies à Sonde Locale, 2009, Hardelot, France. 〈hal-00575264〉
  • B. Legrand, E. Algré, L. Buchaillot, M. Faucher, B. Walter. Vers une nouvelle génération de sonde de microscopie à force atomique à base de micro et nano-systèmes électromécaniques. 4èmes Journées Nationales en Nanosciences et Nanotechnologies, J3N 2009, 2009, Toulouse, France. 〈hal-00575271〉
  • E. Algré, B. Legrand, M. Faucher, B. Walter, L. Buchaillot. Tip-matter interaction measurements using MEMS ring resonators. 15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, 2009, United States. _, pp.1638-1641, 2009, 〈10.1109/SENSOR.2009.5285774〉. 〈hal-00474451〉
  • E. Algre, G. Gaudin, A. Bsiesy, J.P. Nozieres. Improved patterned media for probe-based HAMR. INTERMAG Asia 2005: Digest of the IEEE International Magnetics Conference, Apr 2005, Nagoya, Japan. IEEE, 〈10.1109/INTMAG.2005.1463552〉. 〈hal-01771633〉

Thèse1 document

  • Emmanuelle Algre. Enregistrement thermomagnétique sous pointe AFM: vers les ultrahautes densités d'enregistrement. Matière Condensée [cond-mat]. Université Joseph-Fourier - Grenoble I, 2006. Français. 〈tel-00089261〉