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Study of Hydrogen plasma reduction of Nickel substrate during PEALD Ta2O5 deposition for ReRAM application.

R. Gassilloud , A. Marty , A. Abbadie , P. Rodriguez , S. Favier , et al.
ALD, 2015, PORTLAND, United States
Communication dans un congrès hal-01877931v1

Study of annealing-induced interdiffusion in In2O3/Ag/In2O3 structures by a combined X-ray reflectivity and grazing incidence X-ray fluorescence analysis

B. Caby , F. Brigidi , D. Ingerle , E. Nolot , G. Pepponi , et al.
Spectrochimica Acta Part B: Atomic Spectroscopy, 2015, 113, pp.132-137. ⟨10.1016/j.sab.2015.09.008⟩
Article dans une revue hal-02184181v1

Metal/insulator/semiconductor contacts for ultimately scaled CMOS nodes: projected benefits and remaining challenges

Julien Borrel , Louis Hutin , Helen Grampeix , Emmanuel Nolot , Magali Tessaire , et al.
IWJT 2016 - 16th International Workshop on Junction Technology, May 2016, Shanghai, China. pp.14-19
Communication dans un congrès hal-03325000v1

Elemental depth profiling in transparent conducting oxide thin film by X-ray reflectivity and grazing incidence X-ray fluorescence combined analysis

H. Rotella , B. Caby , Y. Ménesguen , Y. Mazel , A. Valla , et al.
Spectrochimica Acta Part B: Atomic Spectroscopy, 2017, 135, pp.22 - 28. ⟨10.1016/j.sab.2017.06.011⟩
Article dans une revue cea-01849890v1
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Germanium, antimony, tellurium, their binary and ternary alloys and the impact of nitrogen: An X-ray photoelectron study

E. Nolot , C. Sabbione , W. Pessoa , L. Prazakova , G. Navarro
Applied Surface Science, 2021, 536, pp.147703 -. ⟨10.1016/j.apsusc.2020.147703⟩
Article dans une revue hal-03491364v1

A novel 2-step ALD route to ultra-thin Mo$S_{2}$ films on Si$O_{2}$ through a surface organometallic intermediate

Stéphane Cadot , Olivier Renault , Mathieu Frégnaux , Denis Rouchon , Emmanuel Nolot , et al.
Nanoscale, 2017, 9 (2), pp.538--546. ⟨10.1039/c6nr06021h⟩
Article dans une revue hal-01872867v1

Improvement of Capacitive Behavior on Gradient-Free PZT Thin Films

Sylvain Pelloquin , Gwenael Le Rhun , Emmanuel Defaÿ , Philippe Renaux , Emmanuel Nolot , et al.
Integrated Ferroelectrics, 2014, ⟨10.1080/10584587.2014.912887⟩
N°spécial de revue/special issue hal-03265303v1

Considerations on Fermi-depinning, dipoles and oxide tunneling for oxygen-based dielectric insertions in advanced CMOS contacts

Julien Borrel , L. Hutin , H. Grampeix , E. Nolot , E. Ghegin , et al.
IEEE Silicon Nanoelectronics Workshop (SNW), Jun 2016, Honolulu, United States. pp.140-141, ⟨10.1109/SNW.2016.7578022⟩
Communication dans un congrès hal-03325002v1
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Temperature driven structural evolution of Ge-rich GeSbTe alloys and role of N-doping

L. Prazakova , E. Nolot , E. Martinez , F. Fillot , D. Rouchon , et al.
Journal of Applied Physics, 2020, 128 (21), pp.215102. ⟨10.1063/5.0027734⟩
Article dans une revue cea-03707285v1

X-ray reflectometry and grazing-incidence X-ray fluorescence characterization of innovative electrodes for tantalum-based resistive random access memories

E. Nolot , B. Caby , R. Gassilloud , M. Veillerot , D. Eichert
Spectrochimica Acta Part B: Atomic Spectroscopy, 2018, 149, pp.71-75. ⟨10.1016/j.sab.2018.07.017⟩
Article dans une revue cea-02186190v1
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Quantitative depth-profile analysis of transition metal nitride materials with combined grazing-incidence X-ray fluorescence and X-ray reflectometry analysis

S. Torrengo , D. Eichert , Y. Mazel , M. Bernard , Yves Ménesguen , et al.
Spectrochimica Acta Part B: Atomic Spectroscopy, 2020, 171, pp.105926. ⟨10.1016/j.sab.2020.105926⟩
Article dans une revue hal-03492233v1
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Grazing-incidence X-ray fluorescence analysis of thin chalcogenide materials deposited on Bragg mirrors

E. Nolot , W. Pessoa , S. Torrengo , Y. Mazel , M. Bernard , et al.
Spectrochimica Acta Part B: Atomic Spectroscopy, 2020, 168, pp.105864. ⟨10.1016/j.sab.2020.105864⟩
Article dans une revue hal-03490712v1

Role of vacancy defects in Al doped ZnO thin films for optoelectronic devices

H. Rotella , Y. Mazel , S. Brochen , A. Valla , A. Pautrat , et al.
Journal of Physics D: Applied Physics, 2017, 50 (48), pp.485106. ⟨10.1088/1361-6463/aa920b⟩
Article dans une revue hal-02175384v1
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Multilayer OTS selectors engineering for high temperature stability, scalability and high endurance

C. Laguna , M. Bernard , N. Bernier , D. Rouchon , N. Rochat , et al.
IMW2021 - 2021 IEEE International Memory Workshop, May 2021, Dresden, Germany. pp.1-4, ⟨10.1109/IMW51353.2021.9439590⟩
Communication dans un congrès cea-03331470v1
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Versailles Project on Advanced Materials and Standards interlaboratory study on intensity calibration for x-ray photoelectron spectroscopy instruments using low-density polyethylene

Benjamen Reed , David Cant , Steve Spencer , Abraham Jorge Carmona-Carmona , Adam Bushell , et al.
Journal of Vacuum Science & Technology A, 2020, 38 (6), pp.063208. ⟨10.1116/6.0000577⟩
Article dans une revue hal-03105700v1

Etude des dispositifs de protection entre les effets des decharges electriques au sein d'un generateur de tres haute tension: l'accelerateur VIVITRON

E. Nolot
Instrumentation and Detectors [physics.ins-det]. Université Joseph-Fourier - Grenoble I, 1996. English. ⟨NNT : ⟩
Thèse in2p3-00019067v1
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Study of annealing-induced interdiffusion in In$_2$O$_3$/Ag/In$_2$O$_3$ structures by a combined X-ray reflectivity and grazing incidence X-ray fluorescence analysis

Béranger Caby , Fabio Brigidi , D. Ingerle , Emmanuel Nolot , Giancarlo Pepponi , et al.
Spectrochimica Acta Part B: Atomic Spectroscopy, 2015, 113, pp.132-137. ⟨10.1016/j.sab.2015.09.008⟩
Article dans une revue cea-02957349v1
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Phase-Change Memory: Performance, Roles and Challenges

G. Navarro , G. Bourgeois , J. Kluge , A. L. Serra , A. Verdy , et al.
2018 IEEE International Memory Workshop (IMW), May 2018, Kyoto, Japan
Communication dans un congrès cea-02185419v1
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Innovative Multilayer OTS Selectors for Performance Tuning and Improved Reliability

C. Laguna , N. Castellani , M. Bernard , N. Rochat , D. Rouchon , et al.
IMW 2020 - 2020 IEEE International Memory Workshop, May 2020, Dresde, Germany. pp.1-4, ⟨10.1109/IMW48823.2020.9108130⟩
Communication dans un congrès cea-02930899v1
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CASTOR, a new instrument for combined XRR-GIXRF analysis at SOLEIL

Yves Ménesguen , Bruno Boyer , H. Rotella , J. Lubeck , J. Weser , et al.
X-Ray Spectrometry, 2017, 46 (5), pp.303-308. ⟨10.1002/xrs.2742⟩
Article dans une revue cea-01801603v1
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Carbon ion implantation as healing strategy for improved reliability in phase-change memory arrays

G. Bourgeois , V. Meli , F. Al Mamun , F. Mazen , E. Nolot , et al.
Microelectronics Reliability, 2021, 126, pp.114221. ⟨10.1016/j.microrel.2021.114221⟩
Article dans une revue cea-03373794v1
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Encapsulation Effects on Ge‐Rich GeSbTe Phase‐Change Materials at High Temperature

Oumaima Daoudi , Emmanuel Nolot , Mélanie Dartois , Magali Tessaire , François Aussenac , et al.
physica status solidi (RRL) - Rapid Research Letters, 2024, ⟨10.1002/pssr.202300448⟩
Article dans une revue hal-04493833v1
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Reliability analysis in GeTe and GeSbTe based phase-change memory 4 kb arrays targeting storage class memory applications

G. Lama , G. Bourgeois , M. Bernard , N. Castellani , J. Sandrini , et al.
Microelectronics Reliability, 2020, 114, pp.113823. ⟨10.1016/j.microrel.2020.113823⟩
Article dans une revue cea-03086418v1
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Elemental depth profiling in transparent conducting oxide thin film by X-ray reflectivity and grazing incidence X-ray fluorescence combined analysis

H. Rotella , B. Caby , Y. Ménesguen , Y. Mazel , A. Valla , et al.
Spectrochimica Acta Part B: Atomic Spectroscopy, 2017, 135, pp.22-28. ⟨10.1016/j.sab.2017.06.011⟩
Article dans une revue cea-02957331v1
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Multilevel programming reliability in Si-doped GeSbTe for Storage Class Memory

G. Lama , M. Bernard , N. Bernier , G. Bourgeois , E. Nolot , et al.
IRPS 2021 - 2021 IEEE International Reliability Physics Symposium, Mar 2021, Monterey, United States. pp.1-6, ⟨10.1109/IRPS46558.2021.9405116⟩
Communication dans un congrès cea-03331482v1

Oxygen scavenging in TiN/Ta2O5 stack by thin PVD-flashed Al layers for RRAM application.

A. Marty , R. Gassilloud , M. C. Bernard , E. Nolot , S. Favier , et al.
ECASIA, 2015, Granada, Spain
Communication dans un congrès hal-01877920v1
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Analysis of InGaN surfaces after chemical treatments and atomic layer deposition of Al2O3 for uLED applications

Corentin Le Maoult , David Vaufrey , François Martin , Eugénie Martinez , Emmanuel Nolot , et al.
Proceedings of SPIE, the International Society for Optical Engineering, 2020, 11280, pp.112801C. ⟨10.1117/12.2544787⟩
Article dans une revue cea-02941396v2

Use of ARXPS for studying the oxidation kinetic of tantalum carbide (TaC) 200mm wafers

B. Pelissier , A. Beaurain , C. Dubarry , E. Nolot , O. Joubert
Présentation ECASIA, 2007, Bruxelles, Belgium
Communication dans un congrès hal-00390582v1

Carbon electrode for Ge-Se-Sb based OTS selector for ultra low leakage current and outstanding endurance

A. Verdy , G. Navarro , M. C. Bernard , S. Chevalliez , N. Castellani , et al.
2018 IEEE International Reliability Physics Symposium (IRPS), Mar 2018, Burlingame, United States. pp.6D.4-1-6D.4-6
Communication dans un congrès cea-02187673v1

Low-temperature and scalable CVD route to WS2 monolayers on SiO2/Si substrates

Stéphane Cadot , Olivier Renault , Denis Rouchon , Denis Mariolle , Emmanuel Nolot , et al.
Journal of Vacuum Science & Technology A, 2017, 35 (6), pp.061502. ⟨10.1116/1.4996550⟩
Article dans une revue hal-01872852v1