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Edouard Laudrel
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Documents
Identifiants chercheurs
- edouard-laudrel
- IdRef : 231103697
- 0000-0002-5181-3365
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Design of a Ti-based microsensor for in vivo pressure monitoring2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), 2019, pp.1-5. ⟨10.1109/DTIP.2019.8752842⟩
Article dans une revue
hal-02306974v1
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The effect of SF 6 addition in a Cl 2 /Ar inductively coupled plasma for deep titanium etchingJournal of Micromechanics and Microengineering, 2018, 28 (5), ⟨10.1088/1361-6439/aaafe7⟩
Article dans une revue
hal-01735469v1
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Bulk micromachined Titanium MEMS16th NAMIS Workshop (NAMIS 2018), Jun 2018, Oulu, Finland
Communication dans un congrès
hal-02306373v1
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Titanium-based MEMS: Application for a novel implantable feedthrough using TTV (Through Titanium Vias) technologies6th Micro/Nano-Electronics Packaging and Assembly, Design and Manufacturing Forum (MiNaPAD 2018), May 2018, Grenoble, France
Communication dans un congrès
hal-02306370v1
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Microstructuration of titanium for implantable componentsJournées Nationales sur les Technologies Emergentes en micro-nanofabrication, Nov 2017, Orléans, France
Communication dans un congrès
hal-02306063v1
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DRY DEEP ETCHING OF BULK TITANIUM BY PLASMA PROCESSESAVS 62nd International Symposium & Exhibition, Oct 2015, San Jose, United States
Communication dans un congrès
hal-01228465v1
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Bulk titanium deep etching by plasma processes, 20th International Colloquium on Plasma Processes (CIP), Jun 2015, Saint-Etienne, France
Communication dans un congrès
hal-01166023v1
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Design of a Ti-based microsensor for in vivo pressure monitoring2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), May 2019, Paris, France
Poster de conférence
hal-02306964v1
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Titanium microstructuring for implantable componentsDesign, Test, Integration and Packaging of MEMS/MOEMS, May 2017, Bordeaux, France
Poster de conférence
hal-01561245v1
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Chlorine-based plasma deep etching of bulk titaniumInternational Symposium on Dry Process 2016 (DPS2016), Nov 2016, Sapporo, Japan
Poster de conférence
hal-01561222v1
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