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Dominique CERTON

A venir

"Marie Perroteau"    "Emilie Bahette"    2016    Journal of Micromechanics and Microengineering   

Journal articles1 document

  • Emilie Bahette, Jean-François Michaud, Dominique Certon, Dominique Gross, Marie Perroteau, et al.. Low temperature capacitive micromachined ultrasonic transducers (cMUTs) on glass substrate. Journal of Micromechanics and Microengineering, IOP Publishing, 2016, 26 (11), ⟨10.1088/0960-1317/26/11/115023⟩. ⟨hal-01741067⟩