Number of documents

2

Dominique CERTON


A venir


"Emilie Bahette"   

Journal articles2 documents

  • Emilie Bahette, Jean-François Michaud, Dominique Certon, Dominique Gross, Marie Perroteau, et al.. Low temperature capacitive micromachined ultrasonic transducers (cMUTs) on glass substrate. Journal of Micromechanics and Microengineering, IOP Publishing, 2016, 26 (11), ⟨10.1088/0960-1317/26/11/115023⟩. ⟨hal-01741067⟩
  • Emilie Bahette, Jean-François Michaud, Dominique Certon, Dominique Gross, Daniel Alquier. Progresses in cMUT Device Fabrication Using Low Temperature Processes. Journal of Micromechanics and Microengineering, IOP Publishing, 2014, 24 (4), pp.045020. ⟨10.1088/0960-1317/24/4/045020⟩. ⟨hal-01831020⟩