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Diamond/ZnO/LiNbO3 structure for packageless acoustic wave sensors

Cécile Floer , Mohammed Moutaouekkil , Florian Bartoli , Harshad Mishra , Stefan Mcmurtry , et al.
IEEE Sensors, Oct 2017, Glasgow, United Kingdom. ⟨10.1109/ICSENS.2017.8234393⟩
Communication dans un congrès hal-01628938v1
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Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO3 Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Damia Dekkar , Fabien Bénédic , Cécile Floer , Sami Hage-Ali , Ovidiu Brinza , et al.
physica status solidi (a), 2018, 215, ⟨10.1002/pssa.201800251⟩
Article dans une revue hal-02446603v1

Characterization of a distributed antenna array microwave plasma used for low-temperature/large-area nanocrystalline diamond film deposition

Damia Dekkar , Fabien Benedic , Xavier Aubert , Stéphane Béchu , Alexandre Bès
Plathinium, Sep 2019, Antibes, France
Communication dans un congrès hal-03049712v1