Number of documents

34

Short CV - Christophe MALHAIRE, Assistant Professor, INSA LYON


Christophe MALHAIRE was born in 1967. He is assistant professor at the engineers school INSA Lyon, France, and researcher at the Department of Electronic, in the Electronic Devices research group, of the Lyon Institute of Nanotechnology (INL, CNRS UMR 5270). He received his PhD from INSA Lyon in 1998. He contributed to the study of the thermomechanical behaviour of piezoresistive pressure sensors for harsh environments. His research activities involve the development and the modeling of various micro-electromechanical systems (MEMS) with main focus on finite element modeling, thin film stress and elastic parameters measurements, piezoelectric actuators, MEMS reliability and thermomecanical studies of suspended microstructures.


Journal articles21 documents

  • Etienne Puyoo, Solene Brottet, Rémi Rafael, Christophe Malhaire. Ultrahigh Sensitivity to Strain of Cracked Thin Films Based on Metallic Nanoparticles in a Dielectric Matrix. IEEE Sensors Letters, IEEE, 2018, 2 (3), pp.1 - 4. ⟨10.1109/LSENS.2018.2865883⟩. ⟨hal-01885535⟩
  • Christophe Malhaire, A. Danescu, V. Lysenko, A. Sabac. Porous Silicon as Soft Material in Low-Frequency MEMS (MicroElectro-Mechanical Systems) Resonators. World journal of mechanics, 2018, 08 (11), pp.431 - 443. ⟨10.4236/wjm.2018.811031⟩. ⟨hal-01914576⟩
  • S. Valmary-Degano, P. Colpart, L. Villeneuve, F. Monnien, L. M'Hamdi, et al.. Immunohistochemical evaluation of two antibodies against PD-L1 and prognostic significance of PD-L1 expression in epithelioid peritoneal malignant mesothelioma: A RENAPE study. European Journal of Surgical Oncology (EJSO), 2017, 43 (10), pp.1915-1923. ⟨10.1016/j.ejso.2017.05.009⟩. ⟨hal-02269932⟩
  • Rémi Rafael, Etienne Puyoo, Christophe Malhaire. Piezo-tunnel effect in Al/Al2O3/Al junctions elaborated by atomic layer deposition. Journal of Applied Physics, American Institute of Physics, 2017, 122, pp.184501. ⟨hal-01701523⟩
  • Etienne Puyoo, Christophe Malhaire, Daniel Thomas, Rémi Rafael, Mohamed R'Mili, et al.. Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition. Applied Physics Letters, American Institute of Physics, 2017, 110, pp.123103. ⟨10.1063/1.4978778⟩. ⟨hal-01701521⟩
  • N. Alcheikh, P. Xavier, J. Duchamp, K. Schuster, Christophe Malhaire, et al.. Temperature dependence of the electromechanical characteristics of superconducting RF‐MEMS switches. Microsystem Technologies, Springer Verlag, 2015, 21(1), pp.301-307. ⟨hal-01489333⟩
  • Minh-Quyen Le, J. Capsal, Jérémy Galineau, F. Ganet, Y. Xunquian, et al.. ALL-organic electrostrictive polymer composites with low driving electrical voltages for micro-fluidic pump applications. Scientific Reports, Nature Publishing Group, 2015, 5, pp.11814. ⟨10.1038/srep11814⟩. ⟨hal-01489396⟩
  • Minh-Quyen Le, J.-F. Capsal, J. Galineau, F. Ganet, X. Yin, et al.. All-organic electrostrictive polymer composites with low driving electrical voltages for micro-fluidic pump applications. Scientific Reports, Nature Publishing Group, 2015, 5, ⟨10.1038/srep11814⟩. ⟨hal-01769268⟩
  • M. Roussel, Christophe Malhaire, Anne-Laure Deman, Jean-François Chateaux, L Petit, et al.. Electromechanical study of polyurethane films with carbon black nanoparticles for MEMS actuators. Journal of Micromechanics and Microengineering, IOP Publishing, 2014, 24 (5), pp.055011. ⟨10.1088/0960-1317/24/5/055011⟩. ⟨hal-01091260⟩
  • Christophe Malhaire. Comparison of two experimental methods for the mechanical characterization of thin or thick films from the study of micromachined circular diaphragms. Review of Scientific Instruments, American Institute of Physics, 2012, 83 (5), ⟨10.1063/1.4719964⟩. ⟨hal-01893587⟩
  • J. Martegoutte, C. Seguineau, T. Fourcade, Christophe Malhaire, P. Martins, et al.. Influence of microstructure and internal stress on the mechanical behavior of electroplated gold freestanding thin films. EPJ Web of Conferences, EDP Sciences, 2010, 6, pp.26009. ⟨hal-02020653⟩
  • V. Servois, P. Mariani, C. Malhaire, S. Petras, S. Piperno-Neumann, et al.. Preoperative staging of liver metastases from uveal melanoma by magnetic resonance imaging (MRI) and fluorodeoxyglucose-positron emission tomography (FDG-PET). EJSO - European Journal of Surgical Oncology, WB Saunders, 2010, 36 (2), pp.189. ⟨10.1016/j.ejso.2009.08.010⟩. ⟨hal-00557766⟩
  • P. Martins, Christophe Malhaire, S. Brida, D. Barbier. On the determination of Poisson’s ratio of stressed monolayer and bilayer submicron thick films. Microsystem Technologies, Springer Verlag, 2009, 15 (9), pp.1343-1348. ⟨hal-02015814⟩
  • P. Martins, P. Delobelle, C. Malhaire, S. Brida, D. Barbier. Bulge test and AFM point deflection method, two technics for the mechanical characterisation of very low stiffness freestanding films. European Physical Journal: Applied Physics, EDP Sciences, 2009, 45 (1), pp.10501. ⟨10.1051/epjap:2008187⟩. ⟨hal-00480182⟩
  • P. Martins, Patrick Delobelle, C. Malhaire, S. Brida, D. Barbier. Bulge test and AFM point deflection method, two technics for the mechanical characterization of very low stiffness free standing film. European Physical Journal: Applied Physics, EDP Sciences, 2009, 45 (10), pp.1-10. ⟨hal-00440995⟩
  • C. Malhaire, C. Seguineau, M. Ignat, C. Josserond, L. Debove, et al.. Experimental setup and realization of thin film specimens for microtensile tests. Review of Scientific Instruments, American Institute of Physics, 2009, 80 (2), pp.023901 1-5. ⟨10.1063/1.3077153⟩. ⟨hal-00437164⟩
  • Michel Ignat, Sabine Lay, Francine Roussel d'Herbey, Cédric Seguineau, Christophe Malhaire, et al.. Micro Tensile Tests on Aluminium Thin Films: Tensile Device and In Situ Observations. MRS Proceedings, 2008, 1139. ⟨hal-02051377⟩
  • G. Fleury, C. Malhaire, C. Populaire, Mireille Verdier, A. Devos, et al.. Mechanical cross-characterisation of sputtered inconel thin films for MEMS applications. Sensors and Actuators B: Chemical, Elsevier, 2007, 126 (1), pp.48-51. ⟨hal-00293917⟩
  • G. Fleury, C. Malhaire, C. Populaire, M. Verdier, A. Devos, et al.. Mechanical cross-characterization of sputtered inconel thin films for MEMS applications. Sensors and Actuators B: Chemical, Elsevier, 2007, 1, pp.126. ⟨hal-00204206⟩
  • P. Martins, S. Beclin, S. Brida, S. Metivet, O. Stojanovic, et al.. Design of bossed silicon membranes for high sensitivity microphone applications. Microsystem Technologies, Springer Verlag, 2007, 13 (11-12), pp.1495-1500. ⟨hal-02051243⟩
  • G. Fleury, C. Malhaire, C. Populaire, M. Verdier, A. Devos, et al.. Mechanical cross-characterization of sputtered inconel thin films for MEMS applications. Sensors and Actuators B: Chemical, Elsevier, 2007, 126 (1), pp.48-51. ⟨hal-00207488⟩

Conference papers11 documents

  • Etienne Puyoo, Daniel Thomas, Martine Le Berre, Liviu Militaru, Christophe Malhaire, et al.. PEALD of Pt nanoparticles: towards the development of single electron transistors and flexible strain sensors. RAFALD (Réseau des Acteurs Français de l’ALD), Nov 2018, Lyon, France. ⟨hal-02075020⟩
  • Etienne Puyoo, Christophe Malhaire, Daniel Thomas, Rémi Rafael, Mohamed R'Mili, et al.. Flexible Platinum Nanoparticle-based Piezoresistive Transducers Elaborated by Atomic Layer Deposition. AVS 17th International Conference on Atomic Layer Deposition, Jan 2017, Denver, United States. ⟨hal-01701470⟩
  • Rémi Rafael, Etienne Puyoo, Christophe Malhaire. Study of piezo-tunnel effect in Metal/Al2O3/Metal junctions. 1st International Conference on Dielectrics (ICD 2016), 2016, Montpellier, France. ⟨hal-01489071⟩
  • H.D. Mousselmal, L. Petit, C. Malhaire, S. Basrour, B. Remaki. Improved MEMS energy harvesters by localized nanostructuring. Journées Nano Micro Technologies au service de l’Energie, Nov 2012, Lyon, France. ⟨hal-01432105⟩
  • Julien Martegoutte, Cédric Seguineau, Christophe Malhaire, Thibaut Fourcade, Jean-Michel Desmarres, et al.. Nanoindentation experiments with small tip radii: an experimental method. 2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP), May 2010, Seville, Spain. ⟨hal-02049369⟩
  • C. Seguineau, M. Ignat, C. Malhaire, S. Brida, X. Lafontan, et al.. Micro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture. DTIP 2008, Apr 2008, Nice, France. pp.8-10. ⟨hal-00277669⟩
  • P. Martins, C. Malhaire, S. Brida, D. Barbier. On the determination of Poisson’s ratio of stressed monolayer and bilayer submicron thick films. DTIP 2008, Apr 2008, Nice, France. pp.197-200. ⟨hal-00277708⟩
  • P. Martins, Patrick Delobelle, C. Malhaire, S. Brida, B. Barbier. Comparison of bulge test and point deflection methods for the mechanical characterisation of submicron thick composite membranes. Transducers'07 and Eurosensors XXI, 2007, Lyon, France. ⟨hal-00330548⟩
  • Christophe Malhaire, Michel Ignat, Karim Dogheche, Sebastiano Brida, Charles Josserond, et al.. Realization of Thin Film Specimens for Micro Tensile Tests. TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2007, Lyon, France. ⟨hal-02049375⟩
  • G. Fleury, C. Malhaire, C. Populaire, M. Verdier, A. Devos, et al.. Mechanical cross-characterization of sputtered Inconel thin films for MEMS applications. Proceedings of the 2006 European Material Research Society Spring Meeting, 2006, Nice, France. ⟨hal-00369948⟩
  • P. Martins, S. Beclin, S. Metivet, O. Stojanovic, C. Malhaire. DESIGN OF BOSSED SILICON MEMBRANES FOR HIGH SENSITIVITY MICROPHONE APPLICATIONS. DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 5 p. ⟨hal-00189255⟩

Poster communications2 documents

  • Rémi Rafael, Etienne Puyoo, Christophe Malhaire. Effet Piezo-Tunnel dans des jonctions Al/Al2O3/Al fabriquées par Atomic Layer Deposition. Effet Piezo-Tunnel dans des jonctions Al/Al2O3/Al fabriquées par Atomic Layer Deposition, 2017, Strasbourg, Unknown Region. 2017. ⟨hal-01701475⟩
  • Rémi Rafael, Etienne Puyoo, Christophe Malhaire. Les jonctions MIM comme jauge de contrainte. Les jonctions MIM comme jauge de contrainte, 2016, Grenoble, Unknown Region. 2016. ⟨hal-01701380⟩