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Miniaturized Microcantilever-based RF Microwave Probes Using MEMS Technologies

 Jaouad Marzouk , S. Arscott , Kamel Haddadi , Tuami Lasri , Christophe Boyaval , et al.
Procedia Engineering, 2014, 87, pp.692-695. ⟨10.1016/j.proeng.2014.11.631⟩
Article dans une revue hal-02345626v1
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Near-field scanning millimeter-wave microscope operating inside a scanning electron microscope: towards quantitative electrical nanocharacterization

 Petr Polovodov , Didier Theron , Clément Lenoir , D. Deresmes , Sophie Eliet , et al.
Applied Sciences, 2021, 11 (6), pp.2788. ⟨10.3390/app11062788⟩
Article dans une revue hal-03320954v2

Tests sur la HSQ en poudre de EMResist

 Yves Deblock , Christophe Boyaval , J. Elegbe , Saliha Ouendi , Pascal Tilmant , et al.
Rencontres 2023 Renatech Litho. Gravure, Jan 2023, Villeneuve d'Ascq, France
Communication dans un congrès hal-03994064v1

GaN MEMS resonators : from demonstration to microsystem-compatible performances

 Marc Faucher , Achraf Ben Amar , Victor Y. Zhang , Yvon Cordier , Matthieu Werquin , et al.
36th Workshop on Compound Semiconductor Devices and Integrated Circuits, WOCSDICE 2012, 2012, Porquerolles, France. pp.1-4
Communication dans un congrès hal-00801104v1
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Building a near-field scanning millimeter-wave microscope integrated in a scanning electron microscope

 Petr Polovodov , Olaf Haenssler , Didier Theron , Christophe Boyaval , Sophie Eliet , et al.
International Conference on Manipulation, Automation, and Robotics at Small Scales, MARSS 2019, Jul 2019, Helsinki, Finland. 3 p
Communication dans un congrès hal-02281097v1

Optimization of a microelectromechanical systems (MEMS) approach for miniaturized microcantilever-based RF microwave probes

 Jaouad Marzouk , S. Arscott , Abdelhatif El Fellahi , Kamel Haddadi , Christophe Boyaval , et al.
Sensors and Actuators A: Physical , 2016, 238, pp.51-59. ⟨10.1016/j.sna.2015.10.043⟩
Article dans une revue hal-02345465v1
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Control and automation for miniaturized microwave GSG nanoprobing

 Alaa Taleb , Denis Pomorski , Christophe Boyaval , S. Arscott , Gilles Dambrine , et al.
Machine Vision and Navigation, Springer International Publishing, pp.751-768, 2020, ⟨10.1007/978-3-030-22587-2_24⟩
Chapitre d'ouvrage hal-02345340v1

Molecular beam epitaxial growth of 2D boron nitride on Ni substrates

 Jawad Hadid , Ivy Colambo , Alexandre Plaud , Christophe Boyaval , Nicolas Nuns , et al.
Graphene 2020, Oct 2020, Grenoble, France
Communication dans un congrès hal-04485837v1
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Three-Dimensional TiO2 Film Deposited by ALD on Porous Metallic Scaffold for 3D Li-Ion Micro-Batteries: A Road towards Ultra-High Capacity Electrode

 Maxime Hallot , David Troadec , Christophe Boyaval , Marielle Huve , Lotfi Benali Karroubi , et al.
Journal of The Electrochemical Society, 2022, 169 (4), pp.040523. ⟨10.1149/1945-7111/ac6328⟩
Article dans une revue hal-03631330v1

On-wafer probe station for microwave metrology at the nanoscale

 A. El Fellahi , Kamel Haddadi , J. Marzouk , S. Arscott , Christophe Boyaval , et al.
2015 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), May 2015, Pisa, Italy. pp.1960-1964, ⟨10.1109/I2MTC.2015.7151582⟩
Communication dans un congrès hal-02345596v1

Towards high quality CVD graphene growth and transfer

 G. Deokar , J. Avila , I. Razado-Colambo , Jean-Louis Codron , Christophe Boyaval , et al.
Carbon, 2015, 89, pp.82-92. ⟨10.1016/j.carbon.2015.03.017⟩
Article dans une revue hal-02950347v1

CVD graphene growth on Ni films and transfer

 Geetanjali Deokar , Jean-Louis Codron , Christophe Boyaval , Xavier Wallart , Dominique Vignaud
4th Graphene Conference, Graphene 2014, 2014, Toulouse, France
Communication dans un congrès hal-01005676v1

Hybrid organic-inorganic nanocomposites for terahertz applications

 D. Hourlier-Bahloul , Srisaran Venkatachalam , Christophe Boyaval , Guillaume Ducournau , Y. Blum , et al.
European Materials Research Society Spring Meeting, E-MRS Spring 2014, Symposium I - Solution processing and properties of functional oxide thin films and nanostructures, 2014, Lille, France
Communication dans un congrès hal-00964115v1

Robotic on-wafer probe station for microwave characterization in a scanning electron microscope

 Kamel Haddadi , A. El Fellahi , J. Marzouk , S. Arscott , Christophe Boyaval , et al.
2015 IEEE MTT-S International Microwave Symposium (IMS2015), May 2015, Phoenix, Arizona, United States. pp.1-3, ⟨10.1109/MWSYM.2015.7166970⟩
Communication dans un congrès hal-02345575v1

Gallium nitride approach for MEMS resonators with highly tunable piezo-amplified transducers

 Marc Faucher , Yvon Cordier , Fabrice Semond , Virginie Brandli , Bertrand Grimbert , et al.
24th International Conference on Micro Electro Mechanical Systems, MEMS 2011, Jan 2011, Cancun, Mexico. pp.581-584, ⟨10.1109/MEMSYS.2011.5734491⟩
Communication dans un congrès hal-00579046v1

Tests sur la Medusa de AllResist

 Yves Deblock , Christophe Boyaval , J. Elegbe , Saliha Ouendi , Pascal Tilmant , et al.
Rencontres 2023 Renatech Litho. Gravure, Jan 2023, Villeneuve d'Ascq, France
Communication dans un congrès hal-03994057v1

La lithographie à l'IEMN : de la micro à la nanostructuration

 Francois Vaurette , Marc François , Yves Deblock , Pascal Tilmant , Christophe Boyaval
15èmes Journées Nano, Micro et Optoélectronique, May 2016, Les Issambres, France
Communication dans un congrès hal-04115909v1

Pilotage de nano-manipulateurs – Application à la nanocaractérisation électrique

 Alaa Taleb , Denis Pomorski , Christophe Boyaval , Gilles Dambrine , Kamel Haddadi
Congrès National de la Recherche en IUT (CNRIUT’2017), May 2017, Auxerre, France
Communication dans un congrès hal-01509792v1
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Fabrication of silicon nitride membrane nanoelectromechanical resonator

 Hao Xu , Srisaran Venkatachalam , Christophe Boyaval , Pascal Tilmant , Francois Vaurette , et al.
Microelectronic Engineering, 2023, 280, pp.112064. ⟨10.1016/j.mee.2023.112064⟩
Article dans une revue hal-04172152v1

Communication Orale : "Synthèse de nanoparticules fonctionnalisées par des peptides et utilisations

 J.O. Durand , O. Melnyk , C. Ollivier , M. Smaihi , H.F. Hildebrand , et al.
2006
Autre publication scientifique hal-00161395v1

Random metamaterial absorber

 Nicolas Fernez , Frédéric Garet , Christophe Boyaval , Eric Lheurette , Jean-Louis Coutaz , et al.
Journées nanosciences et ondes du térahertz au moyen infrarouge (GDR Nano TeraMIR), Nov 2016, Paris, France
Communication dans un congrès hal-02014095v1

Optical switch using InP optical wire technology

 Marie Lesecq , Maxime Beaugeois , Sophie Maricot , Christophe Boyaval , Christiane Legrand , et al.
Photonic Materials, Devices and Applications II, May 2007, Maspalomas, Spain. pp.659305-1-11, ⟨10.1117/12.721659⟩
Communication dans un congrès hal-00284394v1
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A comparison of pad metallization in miniaturized microfabricated silicon microcantilever-based wafer probes for low contact force low skate on-wafer measurements

 Khadim Daffe , Jaouad Marzouk , Christophe Boyaval , Gilles Dambrine , Kamel Haddadi , et al.
Journal of Micromechanics and Microengineering, 2022, 32 (1), pp.015007. ⟨10.1088/1361-6439/ac3cd7⟩
Article dans une revue hal-03449369v1
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Impact of GSG probe to pads contact repeatability for on-wafer RF measurements

 Cerine Mokhtari , Mohamed Sebbache , Vanessa Avramovic , Christophe Boyaval , Gilles Dambrine , et al.
IEEE 7th International Conference on Smart Instrumentation, Measurement and Applications (ICSIMA 2021), Session 4A: Medical Instrumentation, Aug 2021, Bandung, Indonesia. pp.241-246, ⟨10.1109/ICSIMA50015.2021.9526303⟩
Communication dans un congrès hal-03404613v1

Integrated MEMS RF Probe for SEM Station—Pad Size and Parasitic Capacitance Reduction

 A. El Fellahi , Kamel Haddadi , J. Marzouk , S. Arscott , Christophe Boyaval , et al.
IEEE Microwave and Wireless Components Letters, 2015, 25 (10), pp.693-695. ⟨10.1109/LMWC.2015.2463213⟩
Article dans une revue hal-02345556v1

Charging and emission effects of multiwalled carbon nanotubes probed by electric force microscopy

 Mariusz Zdrojek , Thierry Melin , Christophe Boyaval , D. Stievenard , Benoit Jouault , et al.
Applied Physics Letters, 2005, 86 (21), pp.213114-1-3. ⟨10.1063/1.1925782⟩
Article dans une revue hal-00126235v1

Nanorobotic RF probe station for calibrated on-wafer measurements

 A. El Fellahi , Kamel Haddadi , J. Marzouk , S. Arscott , Christophe Boyaval , et al.
2015 European Microwave Conference (EuMC 2015), Sep 2015, Paris, France. pp.163-166, ⟨10.1109/EuMC.2015.7345725⟩
Communication dans un congrès hal-02345580v1
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Transport Properties of Methyl-Terminated Germanane Microcrystallites

 Davide Sciacca , Maxime Berthe , Bradley Ryan , Nemanja Peric , D. Deresmes , et al.
Nanomaterials, 2022, 12 (7), pp.1128. ⟨10.3390/nano12071128⟩
Article dans une revue hal-03634314v1
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Nano-probing station incorporating MEMS probes for 1D device RF on-wafer characterization

 K. Daffe , J. Marzouk , A. El El Fellahi , T. Xu , Christophe Boyaval , et al.
2017 47th European Microwave Conference (EuMC), Oct 2017, Nuremberg, Germany. ⟨10.23919/EuMC.2017.8230973⟩
Communication dans un congrès hal-01726555v1
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Operation of near-field scanning millimeter-wave microscopy up to 67 GHz under scanning electron microscopy vision

 P Polovodov , Didier Theron , S. Eliet , Vanessa Avramovic , Christophe Boyaval , et al.
IEEE MTT International Microwave Symposium, IMS 2020, Jun 2020, Los Angeles (On-line event), United States. pp.95-98, ⟨10.1109/IMS30576.2020.9224090⟩
Communication dans un congrès hal-03022574v1
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