Cédric Frilay

Documents

Publications

"christophe-labbe"

"philippe-marie"

"idhal-mpc"

	Thermally induced evolution of optical and structural properties of Er2O3 films grown on Si substrates by thermal atomic layer deposition L. Khomenkova , M.-P. Chauvat , P. Marie , C. Frilay , Franck Lemarié Materials Letters, 2020, 263, pp.127216. ⟨10.1016/j.matlet.2019.127216⟩ Article dans une revue hal-02424202v1