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Bertrand Vilquin

89
Documents

Présentation

Reader (HDR) in condensed matters Bertrand Vilquin (reader, HDR, Ecole Centrale de Lyon) has been working on integration of perovskite materials since the beginning of his PhD in 1999 at Université de Caen (France). In 2002, he joined the Institute for Scientific and Industrial Research at Osaka University (Japan) for a JSPS post doctorate fellowship. In 2005, he moved to Université Paris XI to work on an industrial project with ALTIS Semiconductors to realize New Generation of nanoscale MRAM devices. In 2006, he became lecturer at Ecole Centrale de Lyon working on the integration of perovskite materials on silicon though academic and industrial projects. He has a rich experience in both national and international research projects and had been the coordinator of 2 ANR projects. He was invited professor at Osaka University (Japan) in 2012 and at the University of Tokyo (Japan) in 2016. He became associate professor at Université de Sherbrooke (Canada) in 2016. He is the coordinator of the “nanoscale engineering” master course of University of Lyon. He successfully obtained his habilitation to conduct research (HDR) in 2018 and he is member of IEEE and SFP. **Project leader:** \- ANR MINOS (2007-2011) \- ANR SURFFER (2010-2013) **WorkPackage coordinator:** \- ANR PIEZO2POWER (2011-2015) \- ANR INTENSE (2015-2017) \- H2020 ICT 3eFERRO (2018-2021)

Publications

pedro-rojo-romeo
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Interplay between Strain and Defects at the Interfaces of Ultra‐Thin Hf 0.5 Zr 0.5 O 2 ‐Based Ferroelectric Capacitors

Greta Segantini , Benoît Manchon , Infante Ingrid C. , Matthieu Bugnet , Rabei Barhoumi
Advanced Electronic Materials, 2023, pp.2300171. ⟨10.1002/aelm.202300171⟩
Article dans une revue hal-04186567v1
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First principles study on the lattice thermal conductivity of α-phase Ga 2 O 3

Gang Yang , Pedro Rojo Romeo , Aleksandra Apostoluk , Bertrand Vilquin
Journal of Vacuum Science & Technology A, 2022, 40 (5), pp.052801. ⟨10.1116/6.0001870⟩
Article dans une revue hal-03735982v1
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Insertion of an Ultra‐thin Interfacial Aluminium Layer for the Realisation of a Hf0.5Zr0.5O2 Ferroelectric Tunnel Junction.

Benoît Manchon , Greta Segantini , Nicolas Baboux , Pedro Rojo Romeo , Rabei Barhoumi
physica status solidi (RRL) - Rapid Research Letters, 2022, 16 (10), pp.2100585. ⟨10.1002/pssr.202100585⟩
Article dans une revue hal-03609773v1
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Mechanical Switching of Ferroelectric Domains in 33‐200 nm‐Thick Sol‐Gel‐Grown PbZr 0.2 Ti 0.8 O 3 Films Assisted by Nanocavities

Sergio Gonzalez Casal , Xiaofei Bai , Kevin Alhada‐lahbabi , Bruno Canut , Bertrand Vilquin
Advanced Electronic Materials, 2022, pp.2200077. ⟨10.1002/aelm.202200077⟩
Article dans une revue hal-03662877v1
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Ferroelectricity Improvement in Ultra-Thin Hf0.5Zr0.5O2 Capacitors by the Insertion of a Ti Interfacial Layer

Greta Segantini , Rabei Barhoumi , Benoît Manchon , Ingrid Cañero Infante , Pedro Rojo Romeo
physica status solidi (RRL) - Rapid Research Letters, 2022, 2100583, pp.2100583. ⟨10.1002/pssr.202100583⟩
Article dans une revue hal-03759538v1
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Impact of the channel length on molybdenum disulfide field effect transistors with hafnia-based high- k dielectric gate

Yanxiao Sun , Gang Niu , Wei Ren , Jinyan Zhao , Yankun Wang
AIP Advances, 2021, 11 (6), pp.065229. ⟨10.1063/5.0055574⟩
Article dans une revue hal-03269195v1
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Imprint issue during retention tests for HfO2 -based FRAM: An industrial challenge?

Jordan Bouaziz , Pedro Rojo Romeo , N. Baboux , Bertrand Vilquin
Applied Physics Letters, 2021, 118 (8), pp.082901. ⟨10.1063/5.0035687⟩
Article dans une revue hal-03177059v1
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Towards low-power near-infrared modulators operating at telecom wavelengths: when graphene plasmons frustrate their metallic counterparts

Thomas Wood , Malik Kemiche , Jérémy Lhuillier , Pierre Demongodin , Bertrand Vilquin
Journal of the Optical Society of America B, 2020, 37 (5), pp.1563. ⟨10.1364/JOSAB.391277⟩
Article dans une revue hal-02618631v1
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Structural studies of epitaxial BaTiO3 thin film on silicon

B. Wagué , J.-B. - B Brubach , G. Niu , G. Dong , L. Dai
Thin Solid Films, 2020, 693, pp.137636. ⟨10.1016/j.tsf.2019.137636⟩
Article dans une revue hal-02324723v1
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Low-voltage, broadband graphene-coated Bragg mirror electro-optic modulator at telecom wavelengths

Thomas Wood , Jérémy Lhuillier , Malik Kemiche , Pierre Demongodin , Bertrand Vilquin
Optics Express, 2020, 28 (19), pp.27506. ⟨10.1364/OE.398480⟩
Article dans une revue hal-02961285v1

Comparison of Epitaxial and Textured Ferroelectric BaTiO<sub>3</sub> Thin Films

Baba Wague , Nicolas Baboux , Pedro Rojo Romeo , Yves Robach , Bertrand Vilquin
International Journal of Modern Physics A, 2020, 11 (04), pp.509-516. ⟨10.4236/jmp.2020.114033⟩
Article dans une revue hal-02536344v1
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Dramatic impact of pressure and annealing temperature on the properties of sputtered ferroelectric HZO layers

Jordan Bouaziz , Pédro Rojo Romeo , Nicolas Baboux , Raluca Negrea , Lucian Pintilie
APL Materials, 2019, 7 (8), pp.081109. ⟨10.1063/1.5110894⟩
Article dans une revue hal-02273286v1
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Characterization of ferroelectric hafnium/zirconium oxide solid solutions deposited by reactive magnetron sputtering

Jordan Bouaziz , Pedro Rojo Romeo , Nicolas Baboux , Bertrand Vilquin
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2019, 37 (2), pp.021203. ⟨10.1116/1.5060643⟩
Article dans une revue hal-02062583v1

Realization of a graphene gate field effect transistor for electrochemical detection and biosensors

Julien Pézard , Mihai Lazar , Naoufel Haddour , Claude Botella , Pascale Roy
Thin Solid Films, 2016, ⟨10.1016/j.tsf.2016.04.031⟩
Article dans une revue hal-01389621v1

Realization and Characterization of Graphene on 4H-SiC for Tera-Hertz Transistors

Julien Pezard , Jérémy Lhuillier , Zakarya El-Friach , Véronique Soulière , Bertrand Vilquin
Materials Science Forum, 2015, 821-823, pp.941 - 944. ⟨10.4028/www.scientific.net/MSF.821-823.941⟩
Article dans une revue hal-01391855v1
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Phase transition in ferroelectric Pb(Zr0.52Ti0.48)O3 epitaxial thin films

Qiang Liu , O. Marconot , M. Piquemal , C. Eypert , Alexis Borowiak
Thin Solid Films, 2014, 553, pp.85-88. ⟨10.1016/j.tsf.2013.12.042⟩
Article dans une revue hal-01489882v1

Influence of Interfaces on the Enhanced Ferroelectricity of Ultra-Thin HZO-Based Tunnel Junctions

Greta Segantini , Benoît Manchon , Infante Ingrid C. , Matthieu Bugnet , Rabei Barhoumi
ISAF-ISIF-PFM 2023 SYMPOSIUM, IEEE; UFFC, Jul 2023, Cleveland, United States
Communication dans un congrès hal-04195857v1

Elaboration and imprint consideration in HfZrO2 ferroelectric capacitors

Jordan Bouaziz , Greta Segantini , Benoît Manchon , Ingrid Cañero Infante , Nicolas Baboux
High k Workshop 2023, NamLab, May 2023, Dresden, Germany
Communication dans un congrès hal-04136940v1

Study of Imprint Dynamics in HZO Ferroelectric Capacitors

Benoît Manchon , Greta Segantini , Pedro Rojo Romeo , Ingrid Canero Infante , Dominique Drouin
International Symposium on Applications of Ferroelectrics 2023, IEEE; UFFC, Jul 2023, Cleveland, United States
Communication dans un congrès hal-04190736v1

Study of Imprint dynamics in CMOS compatible HZO ferroelectric capacitors

Benoît Manchon , Greta Segantini , Pedro Rojo Romeo , Dominique Drouin , Damien Deleruyelle
EMRS 2023 Fall Meeting, European Materials Research Society (E-MRS), Sep 2023, Warsaw, Poland
Communication dans un congrès hal-04213060v1

Interface engineering between HfZrO2 thin films and electrodes for enhanced ferroelectricity

Greta Segantini , Rabei Barhoumi , Benoît Manchon , Ingrid Canero Infante , Mathieu Bugnet
15th International Meeting on Ferroelectricity - IMF 2023, Mar 2023, Tel Aviv, Israel
Communication dans un congrès hal-04055083v1

How ALD deposition analysis can help PVD deposition process!

Bertrand Vilquin , Damien Deleruyelle , Jordan Bouaziz , Martine Le Berre , Céline Chevalier
9ème Workshop RAFALD, GDR RAFALD, Nov 2023, Lille (France), France
Communication dans un congrès hal-04308002v1

Engineering the nano and micro structures of sputtered HfZrO2 thin films

Jordan Bouaziz , Greta Segantini , Benoît Manchon , Rabei Barhoumi , Ingrid Cañero Infante
15th International Meeting on Ferroelectricity - IMF 2023, Mar 2023, Tel Aviv, Israel
Communication dans un congrès hal-04053582v1

Interfaces engineering to enhance ferroelectricity in ultra-thin HZO CMOS compatible FTJ

Greta Segantini , Benoît Manchon , Infante Ingrid C. , Matthieu Bugnet , Pedro Rojo Romeo
EMRS 2023 Fall Meeting, European Materials Research Society, Sep 2023, Warsaw (Poland), Poland
Communication dans un congrès hal-04216334v1

Influence of the electrode interface on the properties of ferroelectric HfZrO2

Jordan Bouaziz , Greta Segantini , Benoît Manchon , Rabei Barhoumi , Ingrid Cañero Infante
High k Workshop 2022, NamLab, Sep 2022, Dresden, Germany
Communication dans un congrès hal-03775873v1

Comparative Study of sub-8 nm HZO-Based Ferroelectric Tunnel Junctions with Enhanced Ferroelectricity

Greta Segantini , Benoit Manchon , Rabei Barhoumi , Pedro Rojo Romeo , Ingrid Cañero Infante
ISAF-PFM-ECAPD 2022, Jun 2022, Tours, France
Communication dans un congrès hal-03715029v1
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A multiscale study of the structure, chemistry and ferroelectric properties of epitaxial sol-gel PbZr0.2Ti0.8O3 films for nanomechanical switching

Ingrid C. Infante , Sergio Gonzalez Casal , Xiaofei Bai , Kevin Alhada‐lahbabi , Sara Gonzalez
ISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Communication dans un congrès hal-03719104v1

How to play on the fabrication process of HfZrO2 ferroelectric thin film to enhance its physical properties

Jordan Bouaziz , Greta Segantini , Benoit Manchon , Rabei Barhoumi , Ingrid Cañero Infante
EMRS 2022 Spring Meeting - Symposium N: Synthesis, processing and characterization of nanoscale multi functional oxide films VIII and 6th E-MRS & MRS-J bilateral symposium, European Materials Research Society, May 2022, Strasbourg, France
Communication dans un congrès hal-03682220v1

Fabrication process for sub-8 nm HfZrO2-based ferroelectric tunnel junctions with enhanced properties

Greta Segantini , Benoit Manchon , Rabei Barhoumi , Pedro Rojo Romeo , Ingrid Cañero Infante
EMRS 2022 Spring Meeting - Symposium E : Adaptive materials and devices for brain-inspired electronics, European Materials Research Society, May 2022, Strasbourg, France
Communication dans un congrès hal-03690321v1

X-ray spectroscopy analysis of the chemical and electronic structure of BaTiO3 ultrathin films

Sara Gonzalez , Pedro Rojo Romeo , Matthieu Bugnet , Patrick Schöffmann , Edwige Otero
ISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Communication dans un congrès hal-03750617v1

Study of Polarisation and Conduction Mechanisms in Ferroelectric Hf0.5Zr0.5O2 Down to Deep Cryogenic Temperature 4.2 K

Benoit Manchon , Dorian Coffineau , Greta Segantini , Nicolas Baboux , Pedro Rojo Romeo
ISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Communication dans un congrès hal-03719069v1

Wake-Up Effect and Retention Evolutions of Hf0.5Zr0.5O2 Capacitor by Nanostructuration Engineering

Jordan Bouaziz , Greta Segantini , Benoit Manchon , Rabei Barhoumi , Infante Ingrid C.
ISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Communication dans un congrès hal-03715010v1

Effect of bottom electrodes on HZO thin film properties

Bertrand Vilquin , Greta Segantini , Benoit Manchon , Ingrid Cañero Infante , Pedro Rojo Romeo
International Symposium on Applications of Ferroelectrics (ISAF) 2021, https://isaf-isif-pfm2021.org/, May 2021, Sydney, Australia
Communication dans un congrès hal-03274229v1

Towards epitaxial Pb(Zr0.52Ti0.48)O3/La2/3Sr1/3MnO3/SrTiO3 based resonant MEMS on Si

Laryssa Carvalho de Araujo , J J Manguele , Bertrand Vilquin , Zhe Wang , Carolina Adamo
JMC 17 (17èmes journées de la matière condensée), Minicolloque 17: Oxydes Fonctionnels : des matériaux aux dispositifs, Aug 2021, ONLINE - Rennes, France. pp.1
Communication dans un congrès hal-03431691v1

Impact of a dielectric layer at TiN/HfZrO2 interface for ferroelectric tunnel junctions applications

Greta Segantini , Pedro Rojo Romeo , Benoit Manchon , Rabei Barhoumi , Damien Deleruyelle
Journées de la matière condensée (JMC17), Société française de physique (SFP), Aug 2021, Rennes, France
Communication dans un congrès hal-03372588v1

Electrical Characterisation of HfZrO2 Ferroelectric Tunnel Junctions for Neuromorphic Application

Benoit Manchon , Greta Segantini , Pedro Rojo Romeo , Nicolas Baboux , Rabei Barhoumi
EMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland
Communication dans un congrès hal-03354311v1
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Use of epitaxial PZT thin films for La2/3Sr1/3MnO3 based MEMs devices on SrTiO3/Si

Laryssa Carvalho de Araujo , J J Manguele , Bertrand Vilquin , Zhe Wang , Carolina Adamo
DTIP’2021 (23rd edition of the Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS), Aug 2021, ONLINE - Lyon, France. pp.01-05, ⟨10.1109/DTIP54218.2021.9568662⟩
Communication dans un congrès hal-03431593v1

Role of ultra-thin Ti and Al interfacial layers in HfZrO2 ferroelectric tunnel junctions

Greta Segantini , Benoit Manchon , Pedro Rojo Romeo , Rabei Barhoumi , Nicolas Baboux
EMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland
Communication dans un congrès hal-03368741v1

Tracking polarization loss and imprint during electrical tests in sputtered TiN/HZO/TiN capacitors

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pedro Rojo Romeo
Novel high-k workshop applications, NamLab, Apr 2021, Dresden, Germany
Communication dans un congrès hal-03273116v1
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Structure, chemical analysis, and ferroelectric properties of chemical solution derived epitaxial PbZr$_{0.2}$Ti$_{0.8}$O$_3$ films for nanomechanical switching

Infante Ingrid C. , Sergio Gonzalez Casal , Xiaofei Bai , Bertrand Vilquin , Pedro Rojo Romeo
JMC-17 - 17ème Journées de la Matière Condensée, SFP, Aug 2021, Rennes, France
Communication dans un congrès hal-03759161v1

Huge reduction of wake-up effect in ferroelectric HfZrO2 nanostructures

Bertrand Vilquin , Nicolas Baboux , Pedro Rojo Romeo , Jordan Bouaziz
EMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland
Communication dans un congrès hal-03351082v1

Nanostructuration effect on the properties of ferroelectric HfZrO2

Bertrand Vilquin , Jordan Bouaziz , Pédro Rojo Romeo , Nicolas Baboux
6th edition of the International Workshop of Materials Physics, The National Institute of Materials Physics (NIMP), Sep 2021, Bucarest, Romania
Communication dans un congrès hal-03351080v1

The discovery of ferroelectricity in HfO2

Bertrand Vilquin , Nicolas Baboux , Pedro Rojo Romeo , Jordan Bouaziz
6th Conference of Bangladesh Crystallographic Association, Bangladesh Crystallographic Association, Jan 2021, Dhaka, Bangladesh
Communication dans un congrès hal-03111364v1
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Towards active photonic dispersion control using graphene-induced non-radiative loss

Jérémy Lhuillier , Pierre Demongodin , Thomas Wood , Malik Kemiche , Bertrand Vilquin
CLEO: Science and Innovations 2020, May 2020, Washington DC, United States. pp.SW4F.4., ⟨10.1364/CLEO_SI.2020.SW4F.4⟩
Communication dans un congrès hal-02617933v1

Hybrid chip-based nonlinear optical devices using graphene

Christelle Monat , Pierre Demongodin , Jérémy Lhuillier , Milan Sinobad , Houssein El Dirani
graphene2020, Oct 2020, Grenoble, France
Communication dans un congrès hal-03299045v1

Wideband Graphene Electro-optic Modulator on 1D Photonic Crystal Cavity

T. Wood , Jérémy Lhuillier , Pierre Demongodin , M. Kemiche , Bertrand Vilquin
European Quantum Electronics Conference 2019, Jun 2019, Munich, Germany. ⟨10.1109/CLEOE-EQEC.2019.8872717⟩
Communication dans un congrès hal-02400046v1

Ferroelectric HfO2 based devices fabrication and remaining issues

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pedro Rojo Romeo
IUMRS-ICA 2019, Sep 2019, Perth, Australia
Communication dans un congrès hal-02310137v1

Ferroelectric hafnium/zirconium oxide solid solutions deposited by RF magnetron sputtering with a single target

Jordan Bouaziz , Pédro Rojo Romeo , Bertrand Vilquin , Nicolas Baboux
E-MRS Spring Meeting 2019, May 2019, Nice, France
Communication dans un congrès hal-02506544v1

Fabrication de dispositifs ferroélectriques à partir de HfO2 dopé et les problèmes en suspens

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pédro Rojo Romeo
Réunion thématique du GDR OXYFUN « Couches minces d'oxydes fonctionnels et applications en électronique et photonique », GDR OXYFUN, Oct 2019, Caen, France
Communication dans un congrès hal-02310135v1

Vanadium Oxide Based Waveguide Modulator Integrated on Silicon

Jimmy John , Regis Orobtchouk , Pedro Rojo Romeo , B. Vilquin , Zhen Zhang
2019 21st International Conference on Transparent Optical Networks (ICTON), Jul 2019, Angers, France. pp.1-1, ⟨10.1109/ICTON.2019.8840555⟩
Communication dans un congrès hal-02408515v1

Integration of Amorphous Low Refractive Index Active Materials in Silicon Photonics

R. Orobtchouk , Ali Belarouci , B. Vilquin , Pedro Rojo Romeo
2019 21st International Conference on Transparent Optical Networks (ICTON), Jul 2019, Angers, France. pp.1-1, ⟨10.1109/ICTON.2019.8840268⟩
Communication dans un congrès hal-02400096v1

Sputtered ferroelectric hafnium/zirconium oxide solid solutions from a single target

Jordan Bouaziz , Nicolas Baboux , Pédro Rojo Romeo , Lucian Pintilie , Raluca Negrea
EMRS Spring Meeting 2019, Jul 2019, Nice, France
Communication dans un congrès hal-02506563v1

Ferroelectric HfZrO2 thin films for IoT applications

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pedro Rojo Romeo
Rencontre RENATECH "Croissance Cristalline", Nov 2019, Grenoble, France
Communication dans un congrès hal-02392443v1

Huge working pressure effect on the ferroelectric properties of RF sputtered hafnia/zirconia layers

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pédro Rojo Romeo , Lucian Pintilie
High-k Workshop 2019, NamLab, Jun 2019, Dresden, Germany
Communication dans un congrès hal-02281215v1

Ferroelectric HfO2 based devices fabrication and remaining issues

Bertrand Vilquin , Jordan Bouaziz , Pédro Rojo Romeo , Nicolas Baboux
IEEE 39th International Conference on ELECTRONICS AND NANOTECHNOLOGY ELNANO-2019, IEEE, Apr 2019, Kyiv, Ukraine
Communication dans un congrès hal-02281214v1

Efficient integration of low refractive index active materials on CMOS compatible photonics platform based on half etch slot waveguide

R. Orobtchouk , Ali Belarouci , Bertrand Vilquin , Pedro Rojo Romeo
Photonics North 2019, May 2019, Québec, Canada
Communication dans un congrès hal-02400614v1
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Modulateur electro-optique large-bande à base de graphene sur résonnateur optique planaire

T. Wood , Jérémy Lhuillier , Pierre Demongodin , M. Kemiche , Bertrand Vilquin
39ème Journées Nationales d'Optique Guidée (JNOG), Jul 2019, Paris-Saclay, France
Communication dans un congrès hal-02400039v1

Half Hetch Slot waveguides for Low-Cost Integration of CMOS compatible low refractive index active materials in Silicon Photonics

R. Orobtchouk , Ali Belarouci , Bertrand Vilquin , Pedro Rojo Romeo , Jordan Bouaziz
Photonics North, Jun 2018, Montréal, Canada
Communication dans un congrès hal-02400084v1

Deposition of hafnium/zirconium oxides solid solution by reactive magnetron sputtering for fast and low power ferroelectric devices

Jordan Bouaziz , Bertrand Vilquin , Pédro Rojo Romeo , Nicolas Baboux , Bruno Masenelli
Journée de la matière condensée 2018, Aug 2018, Grenoble, France
Communication dans un congrès hal-02506592v1

Contrôle dynamique de la lumière par des matériaux fonctionnels

Sébastien Cueff , Regis Orobtchouk , Pedro Rojo Romeo , Bertrand Vilquin , Guillaume Saint-Girons
Workshop du GDR Ondes, Oct 2017, sophia-antipolis, France
Communication dans un congrès hal-01965364v1

Vers la réalisation de composants optiques nonlinéaires intégrés sur puce exploitant du graphène

Alexandra Pavlova , Malik Kemiche , Jérémy Lhuillier , Thomas Wood , Radoslaw Mazurczyk
colloque SFO-PAMO, 24ème Congrès Général de la SFP, Jan 2017, Orsay, France
Communication dans un congrès hal-01701490v1

Functional oxides for optical devices

Guillaume Saint-Girons , Sébastien Cueff , Benjamin Meunier , Romain Bachelet , Jose Penuelas
E-MRS 2016 Fall Meeting, Sep 2016, Warsaw, Poland
Communication dans un congrès hal-01965369v1

Ferroelectric oxide slot waveguide electro-optic modulator on Silicon

Sébastien Cueff , Régis Orobtchouk , Pedro Rojo-Romeo , A. Gutierrez , P. Castéra
SPIE Photonic West 2016 Conference, 2016, San-Francisco (USA), United States
Communication dans un congrès hal-01489100v1

Growth of hybrid GaAs core / shell nanowires

Xin Guan , Jeanne Becdelievre , Guillaume Saint-Girons , Romain Bachelet , Philippe Regreny
GDR PULSE, 2016, Marseille, France
Communication dans un congrès hal-01489098v1

Oxydes fonctionnels intégrés sur Si pour des applications en énergie et photonique

Romain Bachelet , Mihai Apreutesei , Rahma Moalla , Benjamin Meunier , Sébastien Cueff
JNMO, Jun 2016, Les Issambres, France
Communication dans un congrès hal-01965366v1

Semiconducting core / piezoelectric shell nanowires

Jose Penuelas , Xin Guan , Jeanne Becdelievre , Guillaume Saint-Girons , Romain Bachelet
PiezoNEMS workshop, 2016, Grenoble, France
Communication dans un congrès hal-01489081v1

Graphene Field Effect Transistors on SiC for High Speed and Bio-sensing Applications

Julien Pézard , Mihai Lazar , Bertrand Vilquin , Pedro Rojo Romeo , Naoufel Haddour
JNTE (Journées Nationales des Technologies Emergentes), Nov 2015, Ecully, France
Communication dans un congrès hal-01946338v1

Realization of a single layer graphene field effect transistor

J. Pezard , Jérémy Lhuillier , Z. El-Friakh , V. Souliere , Pedro Rojo Romeo
EMRS Spring Meeting, 2015, Lille, France
Communication dans un congrès hal-01489358v1

Epitaxial growth of ferroelectric Pb(Zr,Ti)O3 thin layers on SrTiO3-templated GaAs/InGaAs quantum well structure for opto-mechanical application

Benjamin Meunier , Romain Bachelet , Bertrand Vilquin , Pedro Rojo-Romeo , Geneviève Grenet
EMRS 2015 Spring Meeting, 2015, Lille, France
Communication dans un congrès hal-01489362v1

Epitaxial growth of SrTiO3 on GaAs : Towards opto-mechanical applications

Benjamin Meunier , Geneviève Grenet , Claude Botella , Philippe Regreny , Romain Bachelet
Europ. Material research Society EMRS, 2015, Lille, France
Communication dans un congrès hal-01489364v1

Influence of the substrate on structural and electrical behaviors of BST thin film

Baba Wague , Qiang Liu , Simon Martin , Nicolas Baboux , David Albertini
EMRS Spring Meeting 2015, 2015, Lille, France
Communication dans un congrès hal-01489370v1

Hybrid silicon-ferroelectric oxide slot waveguide for on-chip optoelectronics

Sébastien Cueff , Regis Orobtchouk , Pedro Rojo-Romeo , Baba Wague , Xuan Hu
MRS Fall Meeting, 2015, Boston (USA), United States
Communication dans un congrès hal-01489369v1

SrTiO3 thin layers on Si: epitaxy and use as templates for thermal energy management and photonic integrated devices

Sébastien Cueff , Mihai Apreutesei , R. Moalla , B. Meunier , X. Hu
Journees Nationales sur les Technologies Emergentes en micro/nanofabrication (JNTE), Nov 2015, Ecully, France
Communication dans un congrès hal-01291404v1

Epitaxial growth of ferroelectric Pb(Zr,Ti)O3 thin layers on SrTiO3-templated GaAs/InGaAs quantum well structure for opto-mechanical application

Benjamin Meunier , Romain Bachelet , Bertrand Vilquin , Pedro Rojo-Romeo , Geneviève Grenet
EuroMBE 2015 conference, 2015, Canazei, Italy
Communication dans un congrès hal-01489363v1

Heterostructures combining functional oxides and semiconductors for integrated photonics

Guillaume Saint-Girons , Sébastien Cueff , Benjamin Meunier , Xuan Hu , Lamis Louahadj
Workshop “Les oxydes pour l’optique et la photonique”, Dec 2014, Meudon, France
Communication dans un congrès hal-01490286v1

Slot waveguide electro-optic modulator with ferroelectric oxide BaTiO3 on silicon

X. Hu , R. Orobtchouk , S. Cueff , Pedro Rojo Romeo , P. Regreny
2014 IEEE 11th International Conference on Group IV Photonics, Aug 2014, Paris, France. ⟨10.1109/Group4.2014.6961944⟩
Communication dans un congrès hal-01848756v1

Texturation control of Pb(Zr,Ti)O3 films on SOI substrate

C. Debray , C. Delcamp , Z. El-Friakhj , J. Henri , Jérémy Lhuillier
ICMAST, 2014, Bilbao, Spain
Communication dans un congrès hal-01489823v1

Graphene on 4H-SiC for terahertz transistors and ferroelectric non-volatile memories

J. Pezard , Jérémy Lhuillier , Z. El-Friakh , V. Souliere , Pédro Rojo Romeo
CSCRM, 2014, Grenoble, France
Communication dans un congrès hal-01489926v1
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Silicon CMOS compatible transition metal dioxide technology for boosting highly integrated photonic devices with disruptive performance

P. Sanchis , L. Sanchez , P. Castera , A. Rosa , A. Gutierrez
ICTON 2014 -16th International Conference on Transparent Optical Networks, Jul 2014, Graz, Austria. pp.1-4, ⟨10.1109/ICTON.2014.6876505⟩
Communication dans un congrès hal-01848763v1

Electro-optic modulation with functional oxides monolithically integrated on silicon

Sébastien Cueff , Xuan Hu , Regis Orobtchouk , Pédro Rojo Romeo , C. Bachelet
Silicon Photonics Summer School organized by PLAT4M project, 2014, Ghent, Belgium
Communication dans un congrès hal-01489917v1

Electro-optic modulation using hybrid silicon-ferroelectric oxide slot waveguide

Sébastien Cueff , Xuan Hu , Regis Orobtchouk , Pedro Rojo Romeo , Romain Bachelet
Workshop “Les oxydes pour l’optique et la photonique”, 2014, Meudon, France
Communication dans un congrès hal-01489872v1
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Influence of bottom electrodes on HZO thin film features

Pedro Rojo Romeo , Infante Ingrid C. , Greta Segantini , Pedro Rojo Romeo , Benoit Manchon
Material Challenge for Memory Applications 2021, Apr 2021, New York, United States
Poster de conférence hal-03274227v1
Image document

Bottom electrodes impact on Hf0.5Zr0.5O2 ferroelectric tunnel junctions

Greta Segantini , Pedro Rojo Romeo , Benoit Manchon , Nicolas Baboux , Ingrid C Infante
EMRS Spring Meeting 2021, May 2021, Virtual, France.
Poster de conférence hal-03275569v1
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Reduction of HfZrO2 capacitor wake-up effect

Jordan Bouaziz , Nicolas Baboux , Pedro Rojo Romeo , Bertrand Vilquin
Materials Challenges for Memory, Apr 2021, New York, United States.
Poster de conférence hal-03273119v1
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Spatial modulation of graphene's chemical potential

Jérémy Lhuillier , Pierre Demongodin , Thomas Wood , Malik Kemiche , Bertrand Vilquin
Graphene2020, Jun 2020, Grenoble, France.
Poster de conférence hal-02618057v1

A Thorough Study of Ferroelectric Sputtered (Hf, Zr)O2 Solid Solutions

Jordan Bouaziz , Pedro Rojo Romeo , Nicolas Baboux , Brice Gautier , Bertrand Vilquin
International Symposium on the Application of Ferroelectrics, Jul 2019, Lausanne, Switzerland.
Poster de conférence hal-02461347v1
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Deposition of doped and undoped HfO2 for fast and low energy consumption ferroelectric devices

Jordan Bouaziz , Bertrand Vilquin , Pedro Rojo Romeo , Nicolas Baboux , Bruno Masenelli
6th International Conference SENSO Workshop, Jun 2018, Gardanne, France
Poster de conférence hal-02506625v1
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Comparison between Sputtering and Atomic Layer Deposition of ferroelectric doped and undoped HfO2

Jordan Bouaziz , Bertrand Vilquin , Pedro Rojo Romeo , Nicolas Baboux , Bruno Masenelli
EMRS Spring Meeting 2017, May 2017, Strasbourg, France
Poster de conférence hal-02506676v1

Nanofils et capteurs de gaz

T.-H. Nguyen , A. Apostoluk , B. Masenelli , Pedro Rojo Romeo , B. Vilquin
Workshop Lyonnais sur les Nanosciences et les Nanotechnologies, Jun 2015, Lyon, France. , 2016
Poster de conférence hal-01374549v1