Accéder directement au contenu

Bertrand Vilquin

58
Documents

Présentation

Reader (HDR) in condensed matters Bertrand Vilquin (reader, HDR, Ecole Centrale de Lyon) has been working on integration of perovskite materials since the beginning of his PhD in 1999 at Université de Caen (France). In 2002, he joined the Institute for Scientific and Industrial Research at Osaka University (Japan) for a JSPS post doctorate fellowship. In 2005, he moved to Université Paris XI to work on an industrial project with ALTIS Semiconductors to realize New Generation of nanoscale MRAM devices. In 2006, he became lecturer at Ecole Centrale de Lyon working on the integration of perovskite materials on silicon though academic and industrial projects. He has a rich experience in both national and international research projects and had been the coordinator of 2 ANR projects. He was invited professor at Osaka University (Japan) in 2012 and at the University of Tokyo (Japan) in 2016. He became associate professor at Université de Sherbrooke (Canada) in 2016. He is the coordinator of the “nanoscale engineering” master course of University of Lyon. He successfully obtained his habilitation to conduct research (HDR) in 2018 and he is member of IEEE and SFP. **Project leader:** \- ANR MINOS (2007-2011) \- ANR SURFFER (2010-2013) **WorkPackage coordinator:** \- ANR PIEZO2POWER (2011-2015) \- ANR INTENSE (2015-2017) \- H2020 ICT 3eFERRO (2018-2021)

Publications

nicolas-baboux
Image document

Insertion of an Ultra‐thin Interfacial Aluminium Layer for the Realisation of a Hf0.5Zr0.5O2 Ferroelectric Tunnel Junction.

Benoît Manchon , Greta Segantini , Nicolas Baboux , Pedro Rojo Romeo , Rabei Barhoumi
physica status solidi (RRL) - Rapid Research Letters, 2022, 16 (10), pp.2100585. ⟨10.1002/pssr.202100585⟩
Article dans une revue hal-03609773v1
Image document

Ferroelectricity Improvement in Ultra-Thin Hf0.5Zr0.5O2 Capacitors by the Insertion of a Ti Interfacial Layer

Greta Segantini , Rabei Barhoumi , Benoît Manchon , Ingrid Cañero Infante , Pedro Rojo Romeo
physica status solidi (RRL) - Rapid Research Letters, 2022, 2100583, pp.2100583. ⟨10.1002/pssr.202100583⟩
Article dans une revue hal-03759538v1
Image document

Imprint issue during retention tests for HfO2 -based FRAM: An industrial challenge?

Jordan Bouaziz , Pedro Rojo Romeo , N. Baboux , Bertrand Vilquin
Applied Physics Letters, 2021, 118 (8), pp.082901. ⟨10.1063/5.0035687⟩
Article dans une revue hal-03177059v1

Comparison of Epitaxial and Textured Ferroelectric BaTiO<sub>3</sub> Thin Films

Baba Wague , Nicolas Baboux , Pedro Rojo Romeo , Yves Robach , Bertrand Vilquin
International Journal of Modern Physics A, 2020, 11 (04), pp.509-516. ⟨10.4236/jmp.2020.114033⟩
Article dans une revue hal-02536344v1
Image document

Huge Reduction of the Wake-Up Effect in Ferroelectric HZO Thin Films

Jordan Bouaziz , Pedro Rojo Romeo , Nicolas Baboux , Bertrand Vilquin
ACS Applied Electronic Materials, 2019, 1 (9), pp.1740-1745. ⟨10.1021/acsaelm.9b00367⟩
Article dans une revue hal-02303151v1
Image document

Dramatic impact of pressure and annealing temperature on the properties of sputtered ferroelectric HZO layers

Jordan Bouaziz , Pédro Rojo Romeo , Nicolas Baboux , Raluca Negrea , Lucian Pintilie
APL Materials, 2019, 7 (8), pp.081109. ⟨10.1063/1.5110894⟩
Article dans une revue hal-02273286v1
Image document

Characterization of ferroelectric hafnium/zirconium oxide solid solutions deposited by reactive magnetron sputtering

Jordan Bouaziz , Pedro Rojo Romeo , Nicolas Baboux , Bertrand Vilquin
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2019, 37 (2), pp.021203. ⟨10.1116/1.5060643⟩
Article dans une revue hal-02062583v1

Large anisotropy of ferroelectric and pyroelectric properties in heteroepitaxial oxide layers

R. Moalla , S. Cueff , J. Penuelas , B. Vilquin , G. Saint-Girons
Scientific Reports, 2018, 8 (1), ⟨10.1038/s41598-018-22349-y⟩
Article dans une revue hal-01848663v1
Image document

Huge gain in pyroelectric energy conversion through epitaxy for integrated self-powered nanodevices

Rahma Moalla , Bertrand Vilquin , Guillaume Saint-Girons , Gwenaël Le Rhun , Emmanuel Defay
Nano Energy, 2017, 41, pp.43 - 48. ⟨10.1016/j.nanoen.2017.09.001⟩
Article dans une revue hal-01848668v1
Image document

Dramatic effect of thermal expansion mismatch on the structural, dielectric, ferroelectric and pyroelectric properties of low-cost epitaxial PZT films on SrTiO 3 and Si (001) subtrates.

Rahma Moalla , B. Vilquin , G. Saint-Girons , Gaël Sebald , N. Baboux
CrystEngComm, 2016, 18 (11), pp.1887 - 1891. ⟨10.1039/C5CE02311D⟩
Article dans une revue hal-01848710v1

Electromechanical response of amorphous LaAlO 3 thin film probed by scanning probe microscopies

Alexis Borowiak , Nicolas Baboux , David Albertini , Bertrand Vilquin , Guillaume Saint Girons
Applied Physics Letters, 2014, 105 (1), ⟨10.1063/1.4889853⟩
Article dans une revue hal-01848759v1
Image document

Phase transition in ferroelectric Pb(Zr0.52Ti0.48)O3 epitaxial thin films

Qiang Liu , O. Marconot , M. Piquemal , C. Eypert , Alexis Borowiak
Thin Solid Films, 2014, 553, pp.85-88. ⟨10.1016/j.tsf.2013.12.042⟩
Article dans une revue hal-01489882v1
Image document

Impact of a γ-Al2O3(001) barrier on LaAlO3 metal-oxide-semiconductor capacitor electrical properties

L. Becerra , C. Merckling , M. El-Kazzi , N. Baboux , B. Vilquin
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2009, 27 (1), pp.384-388. ⟨10.1116/1.3065437⟩
Article dans une revue hal-01939927v1

Growth temperature dependence of epitaxial Gd2O3 films on Si(111)

Guillaume Saint-Girons , G. Niu , B. Vilquin , N. Baboux , C. Plossu
Microelectronic Engineering, 2009, 86 (7-9), pp.1700-1702
Article dans une revue hal-01940600v1

Ultralow equivalent oxide thickness obtained for thin amorphous LaAlO3 layers grown on Si(001)

L. Becerra , C. Merckling , N. Baboux , C. Plossu , O. Marty
Applied Physics Letters, 2007, 91 (19), pp.192909
Article dans une revue hal-01939919v1

Elaboration and imprint consideration in HfZrO2 ferroelectric capacitors

Jordan Bouaziz , Greta Segantini , Benoît Manchon , Ingrid Cañero Infante , Nicolas Baboux
High k Workshop 2023, NamLab, May 2023, Dresden, Germany
Communication dans un congrès hal-04136940v1

How ALD deposition analysis can help PVD deposition process!

Bertrand Vilquin , Damien Deleruyelle , Jordan Bouaziz , Martine Le Berre , Céline Chevalier
9ème Workshop RAFALD, GDR RAFALD, Nov 2023, Lille (France), France
Communication dans un congrès hal-04308002v1

Engineering the nano and micro structures of sputtered HfZrO2 thin films

Jordan Bouaziz , Greta Segantini , Benoît Manchon , Rabei Barhoumi , Ingrid Cañero Infante
15th International Meeting on Ferroelectricity - IMF 2023, Mar 2023, Tel Aviv, Israel
Communication dans un congrès hal-04053582v1

Influence of the electrode interface on the properties of ferroelectric HfZrO2

Jordan Bouaziz , Greta Segantini , Benoît Manchon , Rabei Barhoumi , Ingrid Cañero Infante
High k Workshop 2022, NamLab, Sep 2022, Dresden, Germany
Communication dans un congrès hal-03775873v1

Comparative Study of sub-8 nm HZO-Based Ferroelectric Tunnel Junctions with Enhanced Ferroelectricity

Greta Segantini , Benoit Manchon , Rabei Barhoumi , Pedro Rojo Romeo , Ingrid Cañero Infante
ISAF-PFM-ECAPD 2022, Jun 2022, Tours, France
Communication dans un congrès hal-03715029v1
Image document

A multiscale study of the structure, chemistry and ferroelectric properties of epitaxial sol-gel PbZr0.2Ti0.8O3 films for nanomechanical switching

Ingrid C. Infante , Sergio Gonzalez Casal , Xiaofei Bai , Kevin Alhada‐lahbabi , Sara Gonzalez
ISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Communication dans un congrès hal-03719104v1

Study of Polarisation and Conduction Mechanisms in Ferroelectric Hf0.5Zr0.5O2 Down to Deep Cryogenic Temperature 4.2 K

Benoit Manchon , Dorian Coffineau , Greta Segantini , Nicolas Baboux , Pedro Rojo Romeo
ISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Communication dans un congrès hal-03719069v1

How to play on the fabrication process of HfZrO2 ferroelectric thin film to enhance its physical properties

Jordan Bouaziz , Greta Segantini , Benoit Manchon , Rabei Barhoumi , Ingrid Cañero Infante
EMRS 2022 Spring Meeting - Symposium N: Synthesis, processing and characterization of nanoscale multi functional oxide films VIII and 6th E-MRS & MRS-J bilateral symposium, European Materials Research Society, May 2022, Strasbourg, France
Communication dans un congrès hal-03682220v1

Fabrication process for sub-8 nm HfZrO2-based ferroelectric tunnel junctions with enhanced properties

Greta Segantini , Benoit Manchon , Rabei Barhoumi , Pedro Rojo Romeo , Ingrid Cañero Infante
EMRS 2022 Spring Meeting - Symposium E : Adaptive materials and devices for brain-inspired electronics, European Materials Research Society, May 2022, Strasbourg, France
Communication dans un congrès hal-03690321v1

X-ray spectroscopy analysis of the chemical and electronic structure of BaTiO3 ultrathin films

Sara Gonzalez , Pedro Rojo Romeo , Matthieu Bugnet , Patrick Schöffmann , Edwige Otero
ISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Communication dans un congrès hal-03750617v1

Wake-Up Effect and Retention Evolutions of Hf0.5Zr0.5O2 Capacitor by Nanostructuration Engineering

Jordan Bouaziz , Greta Segantini , Benoit Manchon , Rabei Barhoumi , Infante Ingrid C.
ISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Communication dans un congrès hal-03715010v1

Tracking polarization loss and imprint during electrical tests in sputtered TiN/HZO/TiN capacitors

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pedro Rojo Romeo
Novel high-k workshop applications, NamLab, Apr 2021, Dresden, Germany
Communication dans un congrès hal-03273116v1
Image document

Structure, chemical analysis, and ferroelectric properties of chemical solution derived epitaxial PbZr$_{0.2}$Ti$_{0.8}$O$_3$ films for nanomechanical switching

Infante Ingrid C. , Sergio Gonzalez Casal , Xiaofei Bai , Bertrand Vilquin , Pedro Rojo Romeo
JMC-17 - 17ème Journées de la Matière Condensée, SFP, Aug 2021, Rennes, France
Communication dans un congrès hal-03759161v1

Effect of bottom electrodes on HZO thin film properties

Bertrand Vilquin , Greta Segantini , Benoit Manchon , Ingrid Cañero Infante , Pedro Rojo Romeo
International Symposium on Applications of Ferroelectrics (ISAF) 2021, https://isaf-isif-pfm2021.org/, May 2021, Sydney, Australia
Communication dans un congrès hal-03274229v1

Electrical Characterisation of HfZrO2 Ferroelectric Tunnel Junctions for Neuromorphic Application

Benoit Manchon , Greta Segantini , Pedro Rojo Romeo , Nicolas Baboux , Rabei Barhoumi
EMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland
Communication dans un congrès hal-03354311v1

Role of ultra-thin Ti and Al interfacial layers in HfZrO2 ferroelectric tunnel junctions

Greta Segantini , Benoit Manchon , Pedro Rojo Romeo , Rabei Barhoumi , Nicolas Baboux
EMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland
Communication dans un congrès hal-03368741v1

Nanostructuration effect on the properties of ferroelectric HfZrO2

Bertrand Vilquin , Jordan Bouaziz , Pédro Rojo Romeo , Nicolas Baboux
6th edition of the International Workshop of Materials Physics, The National Institute of Materials Physics (NIMP), Sep 2021, Bucarest, Romania
Communication dans un congrès hal-03351080v1

The discovery of ferroelectricity in HfO2

Bertrand Vilquin , Nicolas Baboux , Pedro Rojo Romeo , Jordan Bouaziz
6th Conference of Bangladesh Crystallographic Association, Bangladesh Crystallographic Association, Jan 2021, Dhaka, Bangladesh
Communication dans un congrès hal-03111364v1

Huge reduction of wake-up effect in ferroelectric HfZrO2 nanostructures

Bertrand Vilquin , Nicolas Baboux , Pedro Rojo Romeo , Jordan Bouaziz
EMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland
Communication dans un congrès hal-03351082v1

Ferroelectric hafnium/zirconium oxide solid solutions deposited by RF magnetron sputtering with a single target

Jordan Bouaziz , Pédro Rojo Romeo , Bertrand Vilquin , Nicolas Baboux
E-MRS Spring Meeting 2019, May 2019, Nice, France
Communication dans un congrès hal-02506544v1

Fabrication de dispositifs ferroélectriques à partir de HfO2 dopé et les problèmes en suspens

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pédro Rojo Romeo
Réunion thématique du GDR OXYFUN « Couches minces d'oxydes fonctionnels et applications en électronique et photonique », GDR OXYFUN, Oct 2019, Caen, France
Communication dans un congrès hal-02310135v1

Ferroelectric HfO2 based devices fabrication and remaining issues

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pedro Rojo Romeo
IUMRS-ICA 2019, Sep 2019, Perth, Australia
Communication dans un congrès hal-02310137v1

Sputtered ferroelectric hafnium/zirconium oxide solid solutions from a single target

Jordan Bouaziz , Nicolas Baboux , Pédro Rojo Romeo , Lucian Pintilie , Raluca Negrea
EMRS Spring Meeting 2019, Jul 2019, Nice, France
Communication dans un congrès hal-02506563v1

Ferroelectric HfZrO2 thin films for IoT applications

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pedro Rojo Romeo
Rencontre RENATECH "Croissance Cristalline", Nov 2019, Grenoble, France
Communication dans un congrès hal-02392443v1

Huge working pressure effect on the ferroelectric properties of RF sputtered hafnia/zirconia layers

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pédro Rojo Romeo , Lucian Pintilie
High-k Workshop 2019, NamLab, Jun 2019, Dresden, Germany
Communication dans un congrès hal-02281215v1

Ferroelectric HfO2 based devices fabrication and remaining issues

Bertrand Vilquin , Jordan Bouaziz , Pédro Rojo Romeo , Nicolas Baboux
IEEE 39th International Conference on ELECTRONICS AND NANOTECHNOLOGY ELNANO-2019, IEEE, Apr 2019, Kyiv, Ukraine
Communication dans un congrès hal-02281214v1

Deposition of hafnium/zirconium oxides solid solution by reactive magnetron sputtering for fast and low power ferroelectric devices

Jordan Bouaziz , Bertrand Vilquin , Pédro Rojo Romeo , Nicolas Baboux , Bruno Masenelli
Journée de la matière condensée 2018, Aug 2018, Grenoble, France
Communication dans un congrès hal-02506592v1

Functional oxides on silicon for on-chip thermal management

Ramah Moalla , M. Apreutesei , Bertrand Vilquin , Philippe Regreny , Claude Botella
XVth Electroceramics conference, Jun 2016, Limoges, France
Communication dans un congrès hal-01965438v1

Oxydes fonctionnels intégrés sur Si pour des applications en énergie et photonique

Romain Bachelet , Mihai Apreutesei , Rahma Moalla , Benjamin Meunier , Sébastien Cueff
JNMO, Jun 2016, Les Issambres, France
Communication dans un congrès hal-01965366v1

Influence of the substrate on structural and electrical behaviors of BST thin film

Baba Wague , Qiang Liu , Simon Martin , Nicolas Baboux , David Albertini
EMRS Spring Meeting 2015, 2015, Lille, France
Communication dans un congrès hal-01489370v1

Strong electrocaloric anisotropy in epitaxial Pb(Zr,Ti)O3 heterostructures

Rahma Moalla , Bertrand Vilquin , Guillaume Saint-Girons , Nicolas Baboux , G. Sebald
EMRS 2015 Fall Meeting, Sep 2015, Varsovie, Poland
Communication dans un congrès hal-01489353v1

Electromechanical response of amorphous LaAlO3 thin film probed by scanning probe microscopies

Alexis Borowiak , H. Tanaka , Nicolas Baboux , David Albertini , Bertrand Vilquin
ISAF 2015 conference, 2015, Singapour, Singapore
Communication dans un congrès hal-01489365v1

Epitaxial pyroelectric Pb(Zr,Ti)O3 thin films on silicon for thermal energy harvesting

Rahma Moalla , Qiang Liu , Guillaume Saint-Girons , Bertrand Vilquin , Nicolas Baboux
EMRS 2015 Spring Meeting, 2015, Lille, France
Communication dans un congrès hal-01489367v1

Study of the conduction mechanism through a Pb(Zr,Ti)O3 thin film

Qiang Liu , Simon Martin , Nicolas Baboux , David Albertini , Brice Gautier
EMRS Spring Meeting, 2015, Lille, France
Communication dans un congrès hal-01489622v1

Thermal energy harvesting through epitaxial pyroelectric oxide films integrated on silicon

Rahma Moalla , Qiang Liu , J. Vila-Fungueiriño , Adrien Carretero-Genevrier , B. Rivas-Murias
EMRS 2015 Spring Meeting, 2015, Lille, France
Communication dans un congrès hal-01489612v1

SrTiO3 thin layers on Si: epitaxy and use as templates for thermal energy management and photonic integrated devices

Sébastien Cueff , Mihai Apreutesei , R. Moalla , B. Meunier , X. Hu
Journees Nationales sur les Technologies Emergentes en micro/nanofabrication (JNTE), Nov 2015, Ecully, France
Communication dans un congrès hal-01291404v1

Monolithic integration of pyroelectric oxide films on silicon for thermal energy harvesting and cooling applications

Rahma Moalla , Nicolas Baboux , G. Sebald , Bertrand Vilquin , Guillaume Saint-Girons
EMRS 2015 Fall Meeting, 2015, Varsovie, Poland
Communication dans un congrès hal-01489342v1

Texturation control of Pb(Zr,Ti)O3 films on SOI substrate

C. Debray , C. Delcamp , Z. El-Friakhj , J. Henri , Jérémy Lhuillier
ICMAST, 2014, Bilbao, Spain
Communication dans un congrès hal-01489823v1