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Bertrand Vilquin
174
Documents
Présentation
Reader (HDR) in condensed matters
Bertrand Vilquin (reader, HDR, Ecole Centrale de Lyon) has been working on integration of perovskite materials since the beginning of his PhD in 1999 at Université de Caen (France). In 2002, he joined the Institute for Scientific and Industrial Research at Osaka University (Japan) for a JSPS post doctorate fellowship. In 2005, he moved to Université Paris XI to work on an industrial project with ALTIS Semiconductors to realize New Generation of nanoscale MRAM devices. In 2006, he became lecturer at Ecole Centrale de Lyon working on the integration of perovskite materials on silicon though academic and industrial projects. He has a rich experience in both national and international research projects and had been the coordinator of 2 ANR projects. He was invited professor at Osaka University (Japan) in 2012 and at the University of Tokyo (Japan) in 2016. He became associate professor at Université de Sherbrooke (Canada) in 2016. He is the coordinator of the “nanoscale engineering” master course of University of Lyon. He successfully obtained his habilitation to conduct research (HDR) in 2018 and he is member of IEEE and SFP.
**Project leader:**
\- ANR MINOS (2007-2011)
\- ANR SURFFER (2010-2013)
**WorkPackage coordinator:**
\- ANR PIEZO2POWER (2011-2015)
\- ANR INTENSE (2015-2017)
\- H2020 ICT 3eFERRO (2018-2021)
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VO2 stabilization on Si for memristor in neuromorphic computing applicationsEMRS 2023 Fall Meeting, Symposium A, European Materials Research Society, Sep 2023, Warsaw (Poland), Poland
Communication dans un congrès
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Study of Imprint dynamics in CMOS compatible HZO ferroelectric capacitorsEMRS 2023 Fall Meeting, European Materials Research Society (E-MRS), Sep 2023, Warsaw, Poland
Communication dans un congrès
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Interface engineering between HfZrO2 thin films and electrodes for enhanced ferroelectricity15th International Meeting on Ferroelectricity - IMF 2023, Mar 2023, Tel Aviv, Israel
Communication dans un congrès
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How ALD deposition analysis can help PVD deposition process!9ème Workshop RAFALD, GDR RAFALD, Nov 2023, Lille (France), France
Communication dans un congrès
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Influence of Interfaces on the Enhanced Ferroelectricity of Ultra-Thin HZO-Based Tunnel JunctionsISAF-ISIF-PFM 2023 SYMPOSIUM, IEEE; UFFC, Jul 2023, Cleveland, United States
Communication dans un congrès
hal-04195857v1
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Elaboration and imprint consideration in HfZrO2 ferroelectric capacitorsHigh-k Workshop 2023, NamLab, May 2023, Dresden, Germany, Germany
Communication dans un congrès
hal-04232584v1
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Elaboration and imprint consideration in HfZrO2 ferroelectric capacitorsHigh k Workshop 2023, NamLab, May 2023, Dresden, Germany
Communication dans un congrès
hal-04136940v1
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Study of Imprint Dynamics in HZO Ferroelectric CapacitorsInternational Symposium on Applications of Ferroelectrics 2023, IEEE; UFFC, Jul 2023, Cleveland, United States
Communication dans un congrès
hal-04190736v1
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Engineering the nano and micro structures of sputtered HfZrO2 thin films15th International Meeting on Ferroelectricity - IMF 2023, Mar 2023, Tel Aviv, Israel
Communication dans un congrès
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Fabrication of HfZrO2 ferroelectric capacitors and study of wake-up & imprint dynamicsFerroelectrics Workshop 2023 - Domains and Domain Walls, NTNU Nano, Apr 2023, Tronso-Trondheim, Norway
Communication dans un congrès
hal-04083650v1
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Interfaces engineering to enhance ferroelectricity in ultra-thin HZO CMOS compatible FTJEMRS 2023 Fall Meeting, European Materials Research Society, Sep 2023, Warsaw (Poland), Poland
Communication dans un congrès
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Thermal information processing using phase change materialsEMRS 2023 Fall Meeting, symposium T, European Materials Research Society, Sep 2023, Warsaw (Poland), Poland
Communication dans un congrès
hal-04216385v1
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How to play on the fabrication process of HfZrO2 ferroelectric thin film to enhance its physical propertiesEMRS 2022 Spring Meeting - Symposium N: Synthesis, processing and characterization of nanoscale multi functional oxide films VIII and 6th E-MRS & MRS-J bilateral symposium, European Materials Research Society, May 2022, Strasbourg, France
Communication dans un congrès
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Fabrication process for sub-8 nm HfZrO2-based ferroelectric tunnel junctions with enhanced propertiesEMRS 2022 Spring Meeting - Symposium E : Adaptive materials and devices for brain-inspired electronics, European Materials Research Society, May 2022, Strasbourg, France
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Heteroepitaxial Growth of Lithium Niobate Thin Films on Sapphire Substrates with Different Orientations by Pulsed-Laser Deposition2022 IEEE International Symposium on Applications of Ferroelectrics (ISAF 2022), IEEE, Jun 2022, Tours, France. ⟨10.1109/ISAF51494.2022.9870044⟩
Communication dans un congrès
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X-ray spectroscopy analysis of the chemical and electronic structure of BaTiO3 ultrathin filmsISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Communication dans un congrès
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Interface engineering for vanadium dioxide (VO2) integration on siliconEuropean Materials Research Society(E-MRS) 2022 fall meeting, European Materials Research Society, Sep 2022, Warsaw, Poland
Communication dans un congrès
hal-03792911v1
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Study of Polarisation and Conduction Mechanisms in Ferroelectric Hf0.5Zr0.5O2 Down to Deep Cryogenic Temperature 4.2 KISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Communication dans un congrès
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Influence of the electrode interface on the properties of ferroelectric HfZrO2High k Workshop 2022, NamLab, Sep 2022, Dresden, Germany
Communication dans un congrès
hal-03775873v1
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Comparative Study of sub-8 nm HZO-Based Ferroelectric Tunnel Junctions with Enhanced FerroelectricityISAF-PFM-ECAPD 2022, Jun 2022, Tours, France
Communication dans un congrès
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A multiscale study of the structure, chemistry and ferroelectric properties of epitaxial sol-gel PbZr0.2Ti0.8O3 films for nanomechanical switchingISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Communication dans un congrès
hal-03719104v1
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Wake-Up Effect and Retention Evolutions of Hf0.5Zr0.5O2 Capacitor by Nanostructuration EngineeringISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Communication dans un congrès
hal-03715010v1
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Integration of VO2 on Silicon for thermotronic applicationsJMC 2022 (Journées de la matière condensée), Société française de physique (SFP),, Société française de physique (SFP), Aug 2022, Lyon, France
Communication dans un congrès
hal-03849064v1
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Impact of a dielectric layer at TiN/HfZrO2 interface for ferroelectric tunnel junctions applicationsJournées de la matière condensée (JMC17), Société française de physique (SFP), Aug 2021, Rennes, France
Communication dans un congrès
hal-03372588v1
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Metallic oxide defect luminescent emission for application in solar cells and WLEDs4th Online International Conference On Science & Engineering of Materials (ICSEM-2021), Jul 2021, Online conference, India
Communication dans un congrès
hal-03503407v1
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Electrical Characterisation of HfZrO2 Ferroelectric Tunnel Junctions for Neuromorphic ApplicationEMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland
Communication dans un congrès
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Use of epitaxial PZT thin films for La2/3Sr1/3MnO3 based MEMs devices on SrTiO3/SiDTIP’2021 (23rd edition of the Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS), Aug 2021, ONLINE - Lyon, France. pp.01-05, ⟨10.1109/DTIP54218.2021.9568662⟩
Communication dans un congrès
hal-03431593v1
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Towards La2/3Sr1/3MnO3/SrTiO3/Si resonant MEMS with an epitaxial AlN actuation layerEmrs Fall meeting, Symposium L: Integration of advanced materials on silicon: from classical to neuromorphic and quantum applications, Sep 2021, ONLINE - Warsaw, Poland
Communication dans un congrès
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Role of ultra-thin Ti and Al interfacial layers in HfZrO2 ferroelectric tunnel junctionsEMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland
Communication dans un congrès
hal-03368741v1
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Effect of bottom electrodes on HZO thin film propertiesInternational Symposium on Applications of Ferroelectrics (ISAF) 2021, https://isaf-isif-pfm2021.org/, May 2021, Sydney, Australia
Communication dans un congrès
hal-03274229v1
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Développement de capteurs environnementaux ultra-basse consommation à base de SnO24th international workshop of IEEE Sensors, Nov 2021, Marseille, France
Communication dans un congrès
hal-03503960v1
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Tracking polarization loss and imprint during electrical tests in sputtered TiN/HZO/TiN capacitorsNovel high-k workshop applications, NamLab, Apr 2021, Dresden, Germany
Communication dans un congrès
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Structure, chemical analysis, and ferroelectric properties of chemical solution derived epitaxial PbZr$_{0.2}$Ti$_{0.8}$O$_3$ films for nanomechanical switchingJMC-17 - 17ème Journées de la Matière Condensée, SFP, Aug 2021, Rennes, France
Communication dans un congrès
hal-03759161v1
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Towards epitaxial Pb(Zr0.52Ti0.48)O3/La2/3Sr1/3MnO3/SrTiO3 based resonant MEMS on SiJMC 17 (17èmes journées de la matière condensée), Minicolloque 17: Oxydes Fonctionnels : des matériaux aux dispositifs, Aug 2021, ONLINE - Rennes, France. pp.1
Communication dans un congrès
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Huge reduction of wake-up effect in ferroelectric HfZrO2 nanostructuresEMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland
Communication dans un congrès
hal-03351082v1
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Développement d’un capteur environnemental ultra-basse consommation à base de SnO2 en technologie CMOS FDSOIJournées de la matière condensée (JMC17), Société française de physique (SFP), Aug 2021, Rennes, France
Communication dans un congrès
hal-03375553v1
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Nanostructuration effect on the properties of ferroelectric HfZrO26th edition of the International Workshop of Materials Physics, The National Institute of Materials Physics (NIMP), Sep 2021, Bucarest, Romania
Communication dans un congrès
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The discovery of ferroelectricity in HfO26th Conference of Bangladesh Crystallographic Association, Bangladesh Crystallographic Association, Jan 2021, Dhaka, Bangladesh
Communication dans un congrès
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Hybrid chip-based nonlinear optical devices using graphenegraphene2020, Oct 2020, Grenoble, France
Communication dans un congrès
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Towards active photonic dispersion control using graphene-induced non-radiative lossCLEO: Science and Innovations 2020, May 2020, Washington DC, United States. pp.SW4F.4., ⟨10.1364/CLEO_SI.2020.SW4F.4⟩
Communication dans un congrès
hal-02617933v1
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Vanadium Oxide Based Waveguide Modulator Integrated on Silicon2019 21st International Conference on Transparent Optical Networks (ICTON), Jul 2019, Angers, France. pp.1-1, ⟨10.1109/ICTON.2019.8840555⟩
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hal-02408515v1
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Integration of Amorphous Low Refractive Index Active Materials in Silicon Photonics2019 21st International Conference on Transparent Optical Networks (ICTON), Jul 2019, Angers, France. pp.1-1, ⟨10.1109/ICTON.2019.8840268⟩
Communication dans un congrès
hal-02400096v1
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Sputtered ferroelectric hafnium/zirconium oxide solid solutions from a single targetEMRS Spring Meeting 2019, Jul 2019, Nice, France
Communication dans un congrès
hal-02506563v1
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Ferroelectric HfZrO2 thin films for IoT applicationsRencontre RENATECH "Croissance Cristalline", Nov 2019, Grenoble, France
Communication dans un congrès
hal-02392443v1
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Wideband Graphene Electro-optic Modulator on 1D Photonic Crystal CavityEuropean Quantum Electronics Conference 2019, Jun 2019, Munich, Germany. ⟨10.1109/CLEOE-EQEC.2019.8872717⟩
Communication dans un congrès
hal-02400046v1
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Ferroelectric HfO2 based devices fabrication and remaining issuesIUMRS-ICA 2019, Sep 2019, Perth, Australia
Communication dans un congrès
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Ferroelectric hafnium/zirconium oxide solid solutions deposited by RF magnetron sputtering with a single targetE-MRS Spring Meeting 2019, May 2019, Nice, France
Communication dans un congrès
hal-02506544v1
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Fabrication de dispositifs ferroélectriques à partir de HfO2 dopé et les problèmes en suspensRéunion thématique du GDR OXYFUN « Couches minces d'oxydes fonctionnels et applications en électronique et photonique », GDR OXYFUN, Oct 2019, Caen, France
Communication dans un congrès
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Huge working pressure effect on the ferroelectric properties of RF sputtered hafnia/zirconia layersHigh-k Workshop 2019, NamLab, Jun 2019, Dresden, Germany
Communication dans un congrès
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Ferroelectric HfO2 based devices fabrication and remaining issuesIEEE 39th International Conference on ELECTRONICS AND NANOTECHNOLOGY ELNANO-2019, IEEE, Apr 2019, Kyiv, Ukraine
Communication dans un congrès
hal-02281214v1
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Efficient integration of low refractive index active materials on CMOS compatible photonics platform based on half etch slot waveguidePhotonics North 2019, May 2019, Québec, Canada
Communication dans un congrès
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Modulateur electro-optique large-bande à base de graphene sur résonnateur optique planaire39ème Journées Nationales d'Optique Guidée (JNOG), Jul 2019, Paris-Saclay, France
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hal-02400039v1
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Half Hetch Slot waveguides for Low-Cost Integration of CMOS compatible low refractive index active materials in Silicon PhotonicsPhotonics North, Jun 2018, Montréal, Canada
Communication dans un congrès
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Prospects for energy-efficient edge computing with integrated HfO 2-based ferroelectric devicesIFIP/IEEE International Conference on Very Large Scale Integration (VLSI-SOC), Oct 2018, Verona, Italy. ⟨10.1109/VLSI-SoC.2018.8644809⟩
Communication dans un congrès
hal-01916992v1
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Deposition of hafnium/zirconium oxides solid solution by reactive magnetron sputtering for fast and low power ferroelectric devicesJournée de la matière condensée 2018, Aug 2018, Grenoble, France
Communication dans un congrès
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Photoferroelectric Ba(Sn,Ti)O3 solid solutionsJournées Nationales du GDR OXIFUN 2018, Mar 2018, Piriac sur Mer, France
Communication dans un congrès
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Infra-red characterizations of metal oxide thin filmsCMOS ET, May 2017, Varsovie, Poland
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Contrôle dynamique de la lumière par des matériaux fonctionnelsWorkshop du GDR Ondes, Oct 2017, sophia-antipolis, France
Communication dans un congrès
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Vers la réalisation de composants optiques nonlinéaires intégrés sur puce exploitant du graphènecolloque SFO-PAMO, 24ème Congrès Général de la SFP, Jan 2017, Orsay, France
Communication dans un congrès
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Functional oxides for optical devicesE-MRS 2016 Fall Meeting, Sep 2016, Warsaw, Poland
Communication dans un congrès
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Interface reactivity and epitaxial growth of SrTiO3 and other functional oxides on Si and GaAsIC-MBE 2016 international conference, 2016, Montpellier, France
Communication dans un congrès
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Ferroelectric oxide slot waveguide electro-optic modulator on SiliconSPIE Photonic West 2016 Conference, 2016, San-Francisco (USA), United States
Communication dans un congrès
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Functional oxides on silicon for on-chip thermal managementXVth Electroceramics conference, Jun 2016, Limoges, France
Communication dans un congrès
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Growth of hybrid GaAs core / shell nanowiresGDR PULSE, 2016, Marseille, France
Communication dans un congrès
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Hybrid silicon-ferroelectric oxide platform for tunable nanophotonics on silicon2016 18th International Conference on Transparent Optical Networks (ICTON), Jul 2016, Trento, Italy. ⟨10.1109/ICTON.2016.7550429⟩
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Oxydes fonctionnels intégrés sur Si pour des applications en énergie et photoniqueJNMO, Jun 2016, Les Issambres, France
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Semiconducting core / piezoelectric shell nanowiresPiezoNEMS workshop, 2016, Grenoble, France
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Realization of a single layer graphene field effect transistorEMRS Spring Meeting, 2015, Lille, France
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Towards ferroelectric control of topological insulators and surface statesEMRS Spring Meeting, 2015, Lille, France
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Study of the conduction mechanism through a Pb(Zr,Ti)O3 thin filmEMRS Spring Meeting, 2015, Lille, France
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Epitaxial growth of ferroelectric Pb(Zr,Ti)O3 thin layers on SrTiO3-templated GaAs/InGaAs quantum well structure for opto-mechanical applicationEMRS 2015 Spring Meeting, 2015, Lille, France
Communication dans un congrès
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Thermal energy harvesting through epitaxial pyroelectric oxide films integrated on siliconEMRS 2015 Spring Meeting, 2015, Lille, France
Communication dans un congrès
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Strong electrocaloric anisotropy in epitaxial Pb(Zr,Ti)O3 heterostructuresEMRS 2015 Fall Meeting, Sep 2015, Varsovie, Poland
Communication dans un congrès
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Electromechanical response of amorphous LaAlO3 thin film probed by scanning probe microscopiesISAF 2015 conference, 2015, Singapour, Singapore
Communication dans un congrès
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Epitaxial growth of SrTiO3 on GaAs : Towards opto-mechanical applicationsEurop. Material research Society EMRS, 2015, Lille, France
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hal-01489364v1
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Perovskite Oxide MEMS: Strain Control and Sensor ApplicationsMRS 2015 Fall Meeting, 2015, Boston (USA), United States
Communication dans un congrès
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Influence of the substrate on structural and electrical behaviors of BST thin filmEMRS Spring Meeting 2015, 2015, Lille, France
Communication dans un congrès
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Functional spinel oxide heterostructures on siliconMRS 2015 Spring Meeting, Apr 2015, San-Francisco, United States
Communication dans un congrès
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Monolithic integration of pyroelectric oxide films on silicon for thermal energy harvesting and cooling applicationsEMRS 2015 Fall Meeting, 2015, Varsovie, Poland
Communication dans un congrès
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Hybrid silicon-ferroelectric oxide slot waveguide for on-chip optoelectronicsMRS Fall Meeting, 2015, Boston (USA), United States
Communication dans un congrès
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SrTiO3 thin layers on Si: epitaxy and use as templates for thermal energy management and photonic integrated devicesJournees Nationales sur les Technologies Emergentes en micro/nanofabrication (JNTE), Nov 2015, Ecully, France
Communication dans un congrès
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Graphene Field Effect Transistors on SiC for High Speed and Bio-sensing ApplicationsJNTE (Journées Nationales des Technologies Emergentes), Nov 2015, Ecully, France
Communication dans un congrès
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Functional oxide pressure sensorEMRS Spring Meeting, 2015, Lille, France
Communication dans un congrès
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Epitaxial pyroelectric Pb(Zr,Ti)O3 thin films on silicon for thermal energy harvestingEMRS 2015 Spring Meeting, 2015, Lille, France
Communication dans un congrès
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Epitaxial growth of ferroelectric Pb(Zr,Ti)O3 thin layers on SrTiO3-templated GaAs/InGaAs quantum well structure for opto-mechanical applicationEuroMBE 2015 conference, 2015, Canazei, Italy
Communication dans un congrès
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Slot waveguide electro-optic modulator with ferroelectric oxide BaTiO
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Texturation control of Pb(Zr,Ti)O3 films on SOI substrateICMAST, 2014, Bilbao, Spain
Communication dans un congrès
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Integration of functional oxides on silicon for nanoelectronics and energyInternational Conference on Materials and Characterization Techniques (ICMCT), 2014, VIT Univ., Vellore, Chennai, India
Communication dans un congrès
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Graphene on 4H-SiC for terahertz transistors and ferroelectric non-volatile memoriesCSCRM, 2014, Grenoble, France
Communication dans un congrès
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Epitaxial pyroelectric thin films on silicon for thermal energy harvestingEuropean Materials Research Society (E-MRS), Spring Meeting, 2014, Lille, France
Communication dans un congrès
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Heterostructures combining functional oxides and semiconductors for integrated photonicsWorkshop “Les oxydes pour l’optique et la photonique”, Dec 2014, Meudon, France
Communication dans un congrès
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Silicon CMOS compatible transition metal dioxide technology for boosting highly integrated photonic devices with disruptive performanceICTON 2014 -16th International Conference on Transparent Optical Networks, Jul 2014, Graz, Austria. pp.1-4, ⟨10.1109/ICTON.2014.6876505⟩
Communication dans un congrès
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Electro-optic modulation with functional oxides monolithically integrated on siliconSilicon Photonics Summer School organized by PLAT4M project, 2014, Ghent, Belgium
Communication dans un congrès
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Epitaxial pyroelectric thin films on silicon for thermal energy harvestingNanotech MEET conference 2014, Apr 2014, Hammamet, Tunisia
Communication dans un congrès
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Electro-optic modulation using hybrid silicon-ferroelectric oxide slot waveguideWorkshop “Les oxydes pour l’optique et la photonique”, 2014, Meudon, France
Communication dans un congrès
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Young modulus and Poisson ratio of polycrystalline and single crystal PZT thin-film measured by picosecond ultrasonicsIEEE International Ultrasonics Symposium, IUS 2013, 2013, Prague, Czech Republic
Communication dans un congrès
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Growth of semiconducting core / functional oxide shell nanowiresPiezoNEMS'2013, Nov 2013, grenoble, France
Communication dans un congrès
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Epitaxial Systems Combining Oxides and SemiconductorsMolecular Beam Epitaxy (Second Edition) From Research to Mass Production, Elsevier, pp.377-402, 2018
Chapitre d'ouvrage
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Epitaxial systems combining oxides and semiconductorsMolecular Beam Epitaxy, Elsevier, pp.451-475, 2013
Chapitre d'ouvrage
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Nanowires on film for photoelectrochemical water splittingNanowires - Recent Advances, InTech, 2012, ⟨10.5772/52593⟩
Chapitre d'ouvrage
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Vers l'intégration monolithique d'hétérostructures et de nanostructures III-V et Ge sur silicium pour la microélectronique et l'optoélectroniqueLeray J.L., Boudenot J.C., Gautier J. La micro-nano électronique, enjeux et mutations, CNRS ÉDITIONS, pp.179-182, 2009
Chapitre d'ouvrage
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