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Bertrand Vilquin

174
Documents

Présentation

Reader (HDR) in condensed matters Bertrand Vilquin (reader, HDR, Ecole Centrale de Lyon) has been working on integration of perovskite materials since the beginning of his PhD in 1999 at Université de Caen (France). In 2002, he joined the Institute for Scientific and Industrial Research at Osaka University (Japan) for a JSPS post doctorate fellowship. In 2005, he moved to Université Paris XI to work on an industrial project with ALTIS Semiconductors to realize New Generation of nanoscale MRAM devices. In 2006, he became lecturer at Ecole Centrale de Lyon working on the integration of perovskite materials on silicon though academic and industrial projects. He has a rich experience in both national and international research projects and had been the coordinator of 2 ANR projects. He was invited professor at Osaka University (Japan) in 2012 and at the University of Tokyo (Japan) in 2016. He became associate professor at Université de Sherbrooke (Canada) in 2016. He is the coordinator of the “nanoscale engineering” master course of University of Lyon. He successfully obtained his habilitation to conduct research (HDR) in 2018 and he is member of IEEE and SFP. **Project leader:** \- ANR MINOS (2007-2011) \- ANR SURFFER (2010-2013) **WorkPackage coordinator:** \- ANR PIEZO2POWER (2011-2015) \- ANR INTENSE (2015-2017) \- H2020 ICT 3eFERRO (2018-2021)

Publications

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Interplay between Strain and Defects at the Interfaces of Ultra‐Thin Hf 0.5 Zr 0.5 O 2 ‐Based Ferroelectric Capacitors

Greta Segantini , Benoît Manchon , Infante Ingrid C. , Matthieu Bugnet , Rabei Barhoumi
Advanced Electronic Materials, 2023, pp.2300171. ⟨10.1002/aelm.202300171⟩
Article dans une revue hal-04186567v1
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Roadmap on ferroelectric hafnia- and zirconia-based materials and devices

José Silva , Ruben Alcala , Uygar Avci , Nick Barrett , Laura Bégon-Lours
APL Materials, 2023, 11 (8), pp.089201. ⟨10.1063/5.0148068⟩
Article dans une revue hal-04191448v1
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Mechanical Switching of Ferroelectric Domains in 33‐200 nm‐Thick Sol‐Gel‐Grown PbZr 0.2 Ti 0.8 O 3 Films Assisted by Nanocavities

Sergio Gonzalez Casal , Xiaofei Bai , Kevin Alhada‐lahbabi , Bruno Canut , Bertrand Vilquin
Advanced Electronic Materials, 2022, pp.2200077. ⟨10.1002/aelm.202200077⟩
Article dans une revue hal-03662877v1
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First principles study on the lattice thermal conductivity of α-phase Ga 2 O 3

Gang Yang , Pedro Rojo Romeo , Aleksandra Apostoluk , Bertrand Vilquin
Journal of Vacuum Science & Technology A, 2022, 40 (5), pp.052801. ⟨10.1116/6.0001870⟩
Article dans une revue hal-03735982v1
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Ferroelectricity Improvement in Ultra-Thin Hf0.5Zr0.5O2 Capacitors by the Insertion of a Ti Interfacial Layer

Greta Segantini , Rabei Barhoumi , Benoît Manchon , Ingrid Cañero Infante , Pedro Rojo Romeo
physica status solidi (RRL) - Rapid Research Letters, 2022, 2100583, pp.2100583. ⟨10.1002/pssr.202100583⟩
Article dans une revue hal-03759538v1
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Insertion of an Ultra‐thin Interfacial Aluminium Layer for the Realisation of a Hf0.5Zr0.5O2 Ferroelectric Tunnel Junction.

Benoît Manchon , Greta Segantini , Nicolas Baboux , Pedro Rojo Romeo , Rabei Barhoumi
physica status solidi (RRL) - Rapid Research Letters, 2022, 16 (10), pp.2100585. ⟨10.1002/pssr.202100585⟩
Article dans une revue hal-03609773v1

Effect of strain and stoichiometry on the ferroelectric and pyroelectric properties of the epitaxial Pb(Zr0.2Ti0.8)O-3 films deposited on Si wafers

Cristina Chirila , Georgia Andra Boni , Lucian Dragos Filip , Marius Husanu , Stefan Neatu
Materials Science and Engineering: B, 2021, 266, ⟨10.1016/j.mseb.2021.115042⟩
Article dans une revue hal-03622158v1
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Strain dependence of dissociative adsorption of H 2 O on epitaxially strained, out-of-plane polarized, BaTiO 3 (001) thin films

J.L. L Wang , S.J. J She , F. Gaillard , G. Niu , Bertrand Vilquin
Thin Solid Films, 2021, 717, pp.138428. ⟨10.1016/j.tsf.2020.138428⟩
Article dans une revue hal-03035211v1
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Impact of the channel length on molybdenum disulfide field effect transistors with hafnia-based high- k dielectric gate

Yanxiao Sun , Gang Niu , Wei Ren , Jinyan Zhao , Yankun Wang
AIP Advances, 2021, 11 (6), pp.065229. ⟨10.1063/5.0055574⟩
Article dans une revue hal-03269195v1

Strain dependence of dissociative adsorption of H 2 O on epitaxially strained, out-of-plane polarized, BaTiO 3 (001) thin films

J.L. Wang , S.J. She , F. Gaillard , G. Niu , Bertrand Vilquin
Thin Solid Films, 2021, 717, pp.138428. ⟨10.1016/j.tsf.2020.138428⟩
Article dans une revue cea-04459803v1
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Imprint issue during retention tests for HfO2 -based FRAM: An industrial challenge?

Jordan Bouaziz , Pedro Rojo Romeo , N. Baboux , Bertrand Vilquin
Applied Physics Letters, 2021, 118 (8), pp.082901. ⟨10.1063/5.0035687⟩
Article dans une revue hal-03177059v1
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Towards low-power near-infrared modulators operating at telecom wavelengths: when graphene plasmons frustrate their metallic counterparts

Thomas Wood , Malik Kemiche , Jérémy Lhuillier , Pierre Demongodin , Bertrand Vilquin
Journal of the Optical Society of America B, 2020, 37 (5), pp.1563. ⟨10.1364/JOSAB.391277⟩
Article dans une revue hal-02618631v1

Photo-induced metal-like phase of VO 2 with sub-ns recovery

J. Kenji Clark , Ya-Lun Ho , Hiroaki Matsui , Bertrand Vilquin , Hitoshi Tabata
Article dans une revue hal-02923475v1
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Structural studies of epitaxial BaTiO3 thin film on silicon

B. Wagué , J.-B. - B Brubach , G. Niu , G. Dong , L. Dai
Thin Solid Films, 2020, 693, pp.137636. ⟨10.1016/j.tsf.2019.137636⟩
Article dans une revue hal-02324723v1

Comparison of Epitaxial and Textured Ferroelectric BaTiO<sub>3</sub> Thin Films

Baba Wague , Nicolas Baboux , Pedro Rojo Romeo , Yves Robach , Bertrand Vilquin
International Journal of Modern Physics A, 2020, 11 (04), pp.509-516. ⟨10.4236/jmp.2020.114033⟩
Article dans une revue hal-02536344v1
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Low-voltage, broadband graphene-coated Bragg mirror electro-optic modulator at telecom wavelengths

Thomas Wood , Jérémy Lhuillier , Malik Kemiche , Pierre Demongodin , Bertrand Vilquin
Optics Express, 2020, 28 (19), pp.27506. ⟨10.1364/OE.398480⟩
Article dans une revue hal-02961285v1
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Characterization of ferroelectric hafnium/zirconium oxide solid solutions deposited by reactive magnetron sputtering

Jordan Bouaziz , Pedro Rojo Romeo , Nicolas Baboux , Bertrand Vilquin
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2019, 37 (2), pp.021203. ⟨10.1116/1.5060643⟩
Article dans une revue hal-02062583v1
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Huge Reduction of the Wake-Up Effect in Ferroelectric HZO Thin Films

Jordan Bouaziz , Pedro Rojo Romeo , Nicolas Baboux , Bertrand Vilquin
ACS Applied Electronic Materials, 2019, 1 (9), pp.1740-1745. ⟨10.1021/acsaelm.9b00367⟩
Article dans une revue hal-02303151v1
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Dramatic impact of pressure and annealing temperature on the properties of sputtered ferroelectric HZO layers

Jordan Bouaziz , Pédro Rojo Romeo , Nicolas Baboux , Raluca Negrea , Lucian Pintilie
APL Materials, 2019, 7 (8), pp.081109. ⟨10.1063/1.5110894⟩
Article dans une revue hal-02273286v1

Large anisotropy of ferroelectric and pyroelectric properties in heteroepitaxial oxide layers

R. Moalla , S. Cueff , J. Penuelas , B. Vilquin , G. Saint-Girons
Scientific Reports, 2018, 8 (1), ⟨10.1038/s41598-018-22349-y⟩
Article dans une revue hal-01848663v1

Narrowband Thermal Emission Realized through the Coupling of Cavity and Tamm Plasmon Resonances

Zhiyu Wang , J. Kenji Clark , Ya-Lun Ho , Bertrand Vilquin , Hirofumi Daiguji
ACS photonics, 2018, 5 (6), pp.2446 - 2452. ⟨10.1021/acsphotonics.8b00236⟩
Article dans une revue hal-01885715v1

Narrowband thermal emission from Tamm plasmons of a modified distributed Bragg reflector

Zhiyu Wang , J. Kenji Clark , Ya-Lun Ho , Bertrand Vilquin , Hirofumi Daiguji
Applied Physics Letters, 2018, 113 (16), ⟨10.1063/1.5048950⟩
Article dans une revue hal-01919589v1

Barium titanate (BaTiO_3) RF characterization for application in electro-optic modulators

Alvaro Rosa , Domenico Tulli , Pau Castera , Ana Gutierrez , Amadeu Griol
Optical Materials Express, 2017, 7 (12), ⟨10.1364/OME.7.004328⟩
Article dans une revue hal-01885719v1
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Room-temperature soft mode and ferroelectric like polarization in SrTiO3 ultrathin films: Infrared and ab initio study

Wei-Wei Peng , Robert Tétot , Gang Niu , Emilie Amzallag , Bertrand Vilquin
Scientific Reports, 2017, 7, pp.2160. ⟨10.1038/s41598-017-02113-4⟩
Article dans une revue hal-01724280v1
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Huge gain in pyroelectric energy conversion through epitaxy for integrated self-powered nanodevices

Rahma Moalla , Bertrand Vilquin , Guillaume Saint-Girons , Gwenaël Le Rhun , Emmanuel Defay
Nano Energy, 2017, 41, pp.43 - 48. ⟨10.1016/j.nanoen.2017.09.001⟩
Article dans une revue hal-01848668v1
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Dramatic effect of thermal expansion mismatch on the structural, dielectric, ferroelectric and pyroelectric properties of low-cost epitaxial PZT films on SrTiO 3 and Si (001) subtrates.

Rahma Moalla , B. Vilquin , G. Saint-Girons , Gaël Sebald , N. Baboux
CrystEngComm, 2016, 18 (11), pp.1887 - 1891. ⟨10.1039/C5CE02311D⟩
Article dans une revue hal-01848710v1

Chemical reactivity between sol–gel deposited Pb(Zr,Ti)O3 layers and their GaAs substrates

Benjamin Meunier , L. Largeau , Philippe Regreny , Jose Penuelas , Romain Bachelet
CrystEngComm, 2016, 18, pp.7494
Article dans une revue hal-01489114v1

Realization of a graphene gate field effect transistor for electrochemical detection and biosensors

Julien Pézard , Mihai Lazar , Naoufel Haddour , Claude Botella , Pascale Roy
Thin Solid Films, 2016, ⟨10.1016/j.tsf.2016.04.031⟩
Article dans une revue hal-01389621v1

Room temperature optical response of zinc oxide nanowires synthesized by chemical bath deposition to toluene vapors

A. Apostoluk , R. Parize , B. Vilquin , T. H. Nguyen , Vincent Consonni
physica status solidi (a), 2016, 213 (5), pp.1115-1119. ⟨10.1002/pssa.201532748⟩
Article dans une revue hal-01456370v1

Novel Concept of Gas Sensitivity Characterization of Materials Suited for Implementation in FET-Based Gas Sensors

Yosri Ayadi , Lama Rahhal , Bertrand Vilquin , Céline Chevalier , Fabian Ambriz Vargas
Nanoscale Research Letters, 2016, 11 (1), ⟨10.1186/s11671-016-1687-z⟩
Article dans une revue hal-01921508v1

Epitaxial manganite freestanding bridges for low power pressure sensors

D. Le Bourdais , G. Agnus , T. Maroutian , V. Pillard , P. Aubert
Journal of Applied Physics, 2015, 118 (12), ⟨10.1063/1.4931885⟩
Article dans une revue hal-01848720v1

Realization and Characterization of Graphene on 4H-SiC for Tera-Hertz Transistors

Julien Pezard , Jérémy Lhuillier , Zakarya El-Friach , Véronique Soulière , Bertrand Vilquin
Materials Science Forum, 2015, 821-823, pp.941 - 944. ⟨10.4028/www.scientific.net/MSF.821-823.941⟩
Article dans une revue hal-01391855v1

Electrode interface controlled electrical properties in epitaxial Pb(Zr0.52Ti0.48)O-3 films grown on Si substrates with SrTiO3 buffer layer

A. Boni , C. Chirila , I. Pasuk , R. Negrea , L. Trupina
Thin Solid Films, 2015, 593
Article dans une revue hal-01489392v1

X-ray photoelectron spectroscopy and diffraction investigation of a metal–oxide-semiconductor heterostructure: Pt/Gd2O3/Si(111)

D. Ferrah , M. El Kazzi , G. Niu , Claude Botella , J. Penuelas
Journal of Crystal Growth, 2015, 416, pp.118 - 125. ⟨10.1016/j.jcrysgro.2015.02.001⟩
Article dans une revue hal-01848746v1

Comparison between the ferroelectric/electric properties of the PbZr0.52Ti0.48O3 films grown on Si (100) and on STO (100) substrates

C. Chirila , A. Boni , I. Pasuk , R. Negrea , L. Trupina
Journal of Materials Sciences Letters, 2015, 50, Issue: 11, pp.3883-3894
Article dans une revue hal-01489405v1
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Surface atomic and chemical structure of relaxor Sr0.63Ba0.37Nb2O6(001)

J. L. Wang , B. Vilquin , B. Gautier , G. Dezanneau , N. Barrett
Applied Physics Letters, 2015, 106, pp.242901. ⟨10.1063/1.4922773⟩
Article dans une revue hal-01489339v2

Nanoscale study of perovskite BiFeO3/spinel (Fe, Zn)3O4 co-deposited thin film by electrical scanning probe methods

Alexis Borowiak , K. Okada , T. Kanki , Brice Gautier , Bertrand Vilquin
Applied Surface Science, 2015, 351, pp.531
Article dans une revue hal-01489414v1
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Chemistry and structure of BaTiO3 ultra-thin films grown by different O2 plasma power

J.L. Wang , J. Leroy , G. Niu , G. Saint-Girons , B. Gautier
Chemical Physics Letters, 2014, 592, pp.206 - 210. ⟨10.1016/j.cplett.2013.12.030⟩
Article dans une revue cea-01376789v1

Electromechanical response of amorphous LaAlO 3 thin film probed by scanning probe microscopies

Alexis Borowiak , Nicolas Baboux , David Albertini , Bertrand Vilquin , Guillaume Saint Girons
Applied Physics Letters, 2014, 105 (1), ⟨10.1063/1.4889853⟩
Article dans une revue hal-01848759v1

Application of a sensitive catalytic reactor to the study of CO oxidation over SrTiO3(100) and BaTiO3/SrTiO3(100) ferroelectric surfaces

S. Nassreddine , F. Morfin , G. Niu , B. Vilquin , F. Gaillard
Surface and Interface Analysis, 2014, 46 (10-11), pp.721-725. ⟨10.1002/sia.5391⟩
Article dans une revue hal-01149237v1

Phase transitions in [001]-oriented morphotropic PbZr0.52Ti0.48O3 thin film deposited onto SrTiO3-buffered Si substrate

Y. Shi , M. Cueff , G. Niu , G. Le Rhun , B. Vilquin
Journal of Applied Physics, 2014, 115, pp.214108. ⟨10.1063/1.4881818⟩
Article dans une revue hal-01053264v1

Functional spinel oxide heterostructures on silicon

Romain Bachelet , Patricia de Coux , Bénédicte Warot-Fonrose , Vassil Skumryev , Gang Niu
CrystEngComm, 2014, 16 (47), pp.10741 - 10745. ⟨10.1039/C4CE01817F⟩
Article dans une revue hal-01848780v1
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Phase transition in ferroelectric Pb(Zr0.52Ti0.48)O3 epitaxial thin films

Qiang Liu , O. Marconot , M. Piquemal , C. Eypert , Alexis Borowiak
Thin Solid Films, 2014, 553, pp.85-88. ⟨10.1016/j.tsf.2013.12.042⟩
Article dans une revue hal-01489882v1
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Interface electronic structure in a metal/ferroelectric heterostructure under applied bias

J.E. Rault , T. Maroutian , G. Agnus , Ph. Lecoeur , G. Niu
Physical Review B: Condensed Matter and Materials Physics (1998-2015), 2013, 87, pp.155146. ⟨10.1103/PhysRevB.87.155146⟩
Article dans une revue cea-01477666v1

Full field electron spectromicroscopy applied to ferroelectric materials

N. Barrett , J. E. Rault , L. Wang , C. Mathieu , A. Locatelli
Journal of Applied Physics, 2013, 113 (18), ⟨10.1063/1.4801968⟩
Article dans une revue cea-01477631v1
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Time-resolved photoemission spectroscopy on a metal/ferroelectric heterostructure

J.E. Rault , G. Agnus , T. Maroutian , V. Pillard , Ph. Lecoeur
Physical Review B: Condensed Matter and Materials Physics (1998-2015), 2013, 88, pp.155107. ⟨10.1103/PhysRevB.88.155107⟩
Article dans une revue cea-01477621v1

Morphological and structural properties of InP/Gd2O3 nanowires grown by molecular beam epitaxy on silicon substrate

J. Penuelas , X. Lu , N.P. Blanchard , Guillaume Saint-Girons , B. Vilquin
Journal of Crystal Growth, 2012, 347 (1), pp.49-52. ⟨10.1016/j.jcrysgro.2012.03.003⟩
Article dans une revue hal-01939995v1

Molecular beam epitaxy growth of BaTiO3 thin films and crucial impact of oxygen content conditions on the electrical characteristics

G. Niu , B. Gautier , S. Yin , Guillaume Saint-Girons , P. Lecoeur
Thin Solid Films, 2012, 520 (14), pp.4595-4599
Article dans une revue hal-01939992v1

Chemistry and Atomic Distortion at the Surface of an Epitaxial BaTiO3 Thin Film after Dissociative Adsorption of Water

J. L. Wang , F. Gaillard , A. Pancotti , B. Gautier , G. Niu
Journal of Physical Chemistry C, 2012, 116, pp.21802-21809. ⟨10.1021/jp305826e⟩
Article dans une revue hal-00777517v1

Direct epitaxial growth of SrTiO3 on Si (001): Interface, crystallization and IR evidence of phase transition

G. Niu , W. W. Peng , G. Saint-Girons , J. Penuelas , Pascal Roy
Thin Solid Films, 2011, 519 (17), pp.5722-5725. ⟨10.1016/J.TSF.2010.12.208⟩
Article dans une revue hal-00753321v1

Epitaxy of BaTiO3 thin film on Si(001) using a SrTiO3 buffer layer for non-volatile memory application

G. Niu , S. Yin , Guillaume Saint-Girons , B. Gautier , P. Lecoeur
Microelectronic Engineering, 2011, 88 (7), pp.1232-1235
Article dans une revue hal-01939990v1

Heteroepitaxy of SrTiO3 thin films on Si (001) using different growth strategies: Toward substratelike quality

G. Niu , B. Vilquin , J. Penuelas , C. Botella , G. Hollinger
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2011, 29 (4), pp.041207. ⟨10.1116/1.3609813⟩
Article dans une revue hal-01892239v1
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Evidence for the formation of two phases during the growth of SrTiO3 on silicon

G. Niu , J. Penuelas , L. Largeau , B. Vilquin , J.-L. Maurice
Physical Review B: Condensed Matter and Materials Physics (1998-2015), 2011, 83, pp.054105. ⟨10.1103/PhysRevB.83.054105⟩
Article dans une revue hal-00601296v1

Epitaxial growth of germanium on silicon using a Gd2O3/Si (111) crystalline template

C. Dubourdieu , I. Gelard , O. Salicio , G. Saint Girons , A. Chettaoui
Journal of Vacuum Science & Technology A, 2010, 28 (5), pp.1187-1190. ⟨10.1116/1.3478301⟩
Article dans une revue hal-01939983v1
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Oxides heterostructures for nanoelectronics

Catherine Dubourdieu , Isabelle Gélard , Olivier Salicio , Guillaume Saint-Girons , Bertrand Vilquin
International Journal of Nanotechnology, 2010, 7 (4-8), pp.320-347. ⟨10.1504/IJNT.2010.031723⟩
Article dans une revue hal-01067589v1
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Impact of a γ-Al2O3(001) barrier on LaAlO3 metal-oxide-semiconductor capacitor electrical properties

L. Becerra , C. Merckling , M. El-Kazzi , N. Baboux , B. Vilquin
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2009, 27 (1), pp.384-388. ⟨10.1116/1.3065437⟩
Article dans une revue hal-01939927v1

Molecular beam epitaxy of SrTiO3 on Si (001): Early stages of the growth and strain relaxation

Gang Niu , Guillaume Saint-Girons , Bertrand Vilquin , Gabriel Delhaye , Jean-Luc Maurice
Applied Physics Letters, 2009, 95 (6), pp.2902. ⟨10.1063/1.3193548⟩
Article dans une revue hal-00663481v1

Growth temperature dependence of epitaxial Gd2O3 films on Si(111)

Guillaume Saint-Girons , G. Niu , B. Vilquin , N. Baboux , C. Plossu
Microelectronic Engineering, 2009, 86 (7-9), pp.1700-1702
Article dans une revue hal-01940600v1

Epitaxial growth of high-κ oxides on silicon

C. Merckling , Guillaume Saint-Girons , G. Delhaye , G. Patriarche , L. Largeau
Thin Solid Films, 2008, 517 (1), pp.197-200
Article dans une revue hal-01939925v1

Ultralow equivalent oxide thickness obtained for thin amorphous LaAlO3 layers grown on Si(001)

L. Becerra , C. Merckling , N. Baboux , C. Plossu , O. Marty
Applied Physics Letters, 2007, 91 (19), pp.192909
Article dans une revue hal-01939919v1
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Crystallographic and optical properties of epitaxial Pb(Zr-0.6,Ti-0.4)O-3 thin films grown on LaAlO3 substrates

B. Vilquin , R. Bouregba , G. Poullain , H. Murray , El Hadj Dogheche
Journal of Applied Physics, 2003, 94 (8), pp.5167-5171. ⟨10.1063/1.1610776⟩
Article dans une revue hal-00162729v1

VO2 stabilization on Si for memristor in neuromorphic computing applications

Swayam Sahoo , Anne Lamirand , Infante Ingrid C. , Matthieu Bugnet , Victor Pierron
EMRS 2023 Fall Meeting, Symposium A, European Materials Research Society, Sep 2023, Warsaw (Poland), Poland
Communication dans un congrès hal-04216378v1

Study of Imprint dynamics in CMOS compatible HZO ferroelectric capacitors

Benoît Manchon , Greta Segantini , Pedro Rojo Romeo , Dominique Drouin , Damien Deleruyelle
EMRS 2023 Fall Meeting, European Materials Research Society (E-MRS), Sep 2023, Warsaw, Poland
Communication dans un congrès hal-04213060v1

Interface engineering between HfZrO2 thin films and electrodes for enhanced ferroelectricity

Greta Segantini , Rabei Barhoumi , Benoît Manchon , Ingrid Canero Infante , Mathieu Bugnet
15th International Meeting on Ferroelectricity - IMF 2023, Mar 2023, Tel Aviv, Israel
Communication dans un congrès hal-04055083v1

How ALD deposition analysis can help PVD deposition process!

Bertrand Vilquin , Damien Deleruyelle , Jordan Bouaziz , Martine Le Berre , Céline Chevalier
9ème Workshop RAFALD, GDR RAFALD, Nov 2023, Lille (France), France
Communication dans un congrès hal-04308002v1

Influence of Interfaces on the Enhanced Ferroelectricity of Ultra-Thin HZO-Based Tunnel Junctions

Greta Segantini , Benoît Manchon , Infante Ingrid C. , Matthieu Bugnet , Rabei Barhoumi
ISAF-ISIF-PFM 2023 SYMPOSIUM, IEEE; UFFC, Jul 2023, Cleveland, United States
Communication dans un congrès hal-04195857v1

Elaboration and imprint consideration in HfZrO2 ferroelectric capacitors

Jordan Bouaziz , Bertrand Vilquin
High-k Workshop 2023, NamLab, May 2023, Dresden, Germany, Germany
Communication dans un congrès hal-04232584v1

Elaboration and imprint consideration in HfZrO2 ferroelectric capacitors

Jordan Bouaziz , Greta Segantini , Benoît Manchon , Ingrid Cañero Infante , Nicolas Baboux
High k Workshop 2023, NamLab, May 2023, Dresden, Germany
Communication dans un congrès hal-04136940v1

Study of Imprint Dynamics in HZO Ferroelectric Capacitors

Benoît Manchon , Greta Segantini , Pedro Rojo Romeo , Ingrid Canero Infante , Dominique Drouin
International Symposium on Applications of Ferroelectrics 2023, IEEE; UFFC, Jul 2023, Cleveland, United States
Communication dans un congrès hal-04190736v1

Engineering the nano and micro structures of sputtered HfZrO2 thin films

Jordan Bouaziz , Greta Segantini , Benoît Manchon , Rabei Barhoumi , Ingrid Cañero Infante
15th International Meeting on Ferroelectricity - IMF 2023, Mar 2023, Tel Aviv, Israel
Communication dans un congrès hal-04053582v1

Fabrication of HfZrO2 ferroelectric capacitors and study of wake-up & imprint dynamics

Bertrand Vilquin
Ferroelectrics Workshop 2023 - Domains and Domain Walls, NTNU Nano, Apr 2023, Tronso-Trondheim, Norway
Communication dans un congrès hal-04083650v1

Interfaces engineering to enhance ferroelectricity in ultra-thin HZO CMOS compatible FTJ

Greta Segantini , Benoît Manchon , Infante Ingrid C. , Matthieu Bugnet , Pedro Rojo Romeo
EMRS 2023 Fall Meeting, European Materials Research Society, Sep 2023, Warsaw (Poland), Poland
Communication dans un congrès hal-04216334v1

Thermal information processing using phase change materials

Swayam Sahoo , Anne Lamirand , Infante Ingrid C. , Victor Pierron , Laurence Méchin
EMRS 2023 Fall Meeting, symposium T, European Materials Research Society, Sep 2023, Warsaw (Poland), Poland
Communication dans un congrès hal-04216385v1

How to play on the fabrication process of HfZrO2 ferroelectric thin film to enhance its physical properties

Jordan Bouaziz , Greta Segantini , Benoit Manchon , Rabei Barhoumi , Ingrid Cañero Infante
EMRS 2022 Spring Meeting - Symposium N: Synthesis, processing and characterization of nanoscale multi functional oxide films VIII and 6th E-MRS & MRS-J bilateral symposium, European Materials Research Society, May 2022, Strasbourg, France
Communication dans un congrès hal-03682220v1

Fabrication process for sub-8 nm HfZrO2-based ferroelectric tunnel junctions with enhanced properties

Greta Segantini , Benoit Manchon , Rabei Barhoumi , Pedro Rojo Romeo , Ingrid Cañero Infante
EMRS 2022 Spring Meeting - Symposium E : Adaptive materials and devices for brain-inspired electronics, European Materials Research Society, May 2022, Strasbourg, France
Communication dans un congrès hal-03690321v1
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Heteroepitaxial Growth of Lithium Niobate Thin Films on Sapphire Substrates with Different Orientations by Pulsed-Laser Deposition

Ihor Pershukov , Jérôme Richy , Emma Borel , Elisa Soulat , Marie Bousquet
2022 IEEE International Symposium on Applications of Ferroelectrics (ISAF 2022), IEEE, Jun 2022, Tours, France. ⟨10.1109/ISAF51494.2022.9870044⟩
Communication dans un congrès hal-03715485v1

X-ray spectroscopy analysis of the chemical and electronic structure of BaTiO3 ultrathin films

Sara Gonzalez , Pedro Rojo Romeo , Matthieu Bugnet , Patrick Schöffmann , Edwige Otero
ISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Communication dans un congrès hal-03750617v1

Interface engineering for vanadium dioxide (VO2) integration on silicon

Swayam Sahoo , Alexandre Juneau-Fecteau , Anne Lamirand , Victor Pierron , Laurence Méchin
European Materials Research Society(E-MRS) 2022 fall meeting, European Materials Research Society, Sep 2022, Warsaw, Poland
Communication dans un congrès hal-03792911v1

Study of Polarisation and Conduction Mechanisms in Ferroelectric Hf0.5Zr0.5O2 Down to Deep Cryogenic Temperature 4.2 K

Benoit Manchon , Dorian Coffineau , Greta Segantini , Nicolas Baboux , Pedro Rojo Romeo
ISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Communication dans un congrès hal-03719069v1

Influence of the electrode interface on the properties of ferroelectric HfZrO2

Jordan Bouaziz , Greta Segantini , Benoît Manchon , Rabei Barhoumi , Ingrid Cañero Infante
High k Workshop 2022, NamLab, Sep 2022, Dresden, Germany
Communication dans un congrès hal-03775873v1

Comparative Study of sub-8 nm HZO-Based Ferroelectric Tunnel Junctions with Enhanced Ferroelectricity

Greta Segantini , Benoit Manchon , Rabei Barhoumi , Pedro Rojo Romeo , Ingrid Cañero Infante
ISAF-PFM-ECAPD 2022, Jun 2022, Tours, France
Communication dans un congrès hal-03715029v1
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A multiscale study of the structure, chemistry and ferroelectric properties of epitaxial sol-gel PbZr0.2Ti0.8O3 films for nanomechanical switching

Ingrid C. Infante , Sergio Gonzalez Casal , Xiaofei Bai , Kevin Alhada‐lahbabi , Sara Gonzalez
ISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Communication dans un congrès hal-03719104v1

Wake-Up Effect and Retention Evolutions of Hf0.5Zr0.5O2 Capacitor by Nanostructuration Engineering

Jordan Bouaziz , Greta Segantini , Benoit Manchon , Rabei Barhoumi , Infante Ingrid C.
ISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Communication dans un congrès hal-03715010v1

Integration of VO2 on Silicon for thermotronic applications

Swayam Sahoo , Alexandre Juneau-Fecteau , A. Lamirand , Victor Pierron , Laurence Mechin
JMC 2022 (Journées de la matière condensée), Société française de physique (SFP),, Société française de physique (SFP), Aug 2022, Lyon, France
Communication dans un congrès hal-03849064v1

Impact of a dielectric layer at TiN/HfZrO2 interface for ferroelectric tunnel junctions applications

Greta Segantini , Pedro Rojo Romeo , Benoit Manchon , Rabei Barhoumi , Damien Deleruyelle
Journées de la matière condensée (JMC17), Société française de physique (SFP), Aug 2021, Rennes, France
Communication dans un congrès hal-03372588v1

Metallic oxide defect luminescent emission for application in solar cells and WLEDs

Aleksandra Apostoluk , Y Zhang , Thibaut Cornier , Paul Neumann , Bertrand Vilquin
4th Online International Conference On Science & Engineering of Materials (ICSEM-2021), Jul 2021, Online conference, India
Communication dans un congrès hal-03503407v1

Electrical Characterisation of HfZrO2 Ferroelectric Tunnel Junctions for Neuromorphic Application

Benoit Manchon , Greta Segantini , Pedro Rojo Romeo , Nicolas Baboux , Rabei Barhoumi
EMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland
Communication dans un congrès hal-03354311v1
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Use of epitaxial PZT thin films for La2/3Sr1/3MnO3 based MEMs devices on SrTiO3/Si

Laryssa Carvalho de Araujo , J J Manguele , Bertrand Vilquin , Zhe Wang , Carolina Adamo
DTIP’2021 (23rd edition of the Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS), Aug 2021, ONLINE - Lyon, France. pp.01-05, ⟨10.1109/DTIP54218.2021.9568662⟩
Communication dans un congrès hal-03431593v1

Towards La2/3Sr1/3MnO3/SrTiO3/Si resonant MEMS with an epitaxial AlN actuation layer

Laryssa Carvalho de Araujo , Bertrand Vilquin , Victor Pierron , Bernadette Domengès , Zhe Wang
Emrs Fall meeting, Symposium L: Integration of advanced materials on silicon: from classical to neuromorphic and quantum applications, Sep 2021, ONLINE - Warsaw, Poland
Communication dans un congrès hal-03431697v1

Role of ultra-thin Ti and Al interfacial layers in HfZrO2 ferroelectric tunnel junctions

Greta Segantini , Benoit Manchon , Pedro Rojo Romeo , Rabei Barhoumi , Nicolas Baboux
EMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland
Communication dans un congrès hal-03368741v1

Effect of bottom electrodes on HZO thin film properties

Bertrand Vilquin , Greta Segantini , Benoit Manchon , Ingrid Cañero Infante , Pedro Rojo Romeo
International Symposium on Applications of Ferroelectrics (ISAF) 2021, https://isaf-isif-pfm2021.org/, May 2021, Sydney, Australia
Communication dans un congrès hal-03274229v1

Développement de capteurs environnementaux ultra-basse consommation à base de SnO2

Antonio Assaf , Bernard Pelissier , Theo Levert , Ingrid Cañero Infante , Bassem Salem
4th international workshop of IEEE Sensors, Nov 2021, Marseille, France
Communication dans un congrès hal-03503960v1

Tracking polarization loss and imprint during electrical tests in sputtered TiN/HZO/TiN capacitors

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pedro Rojo Romeo
Novel high-k workshop applications, NamLab, Apr 2021, Dresden, Germany
Communication dans un congrès hal-03273116v1
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Structure, chemical analysis, and ferroelectric properties of chemical solution derived epitaxial PbZr$_{0.2}$Ti$_{0.8}$O$_3$ films for nanomechanical switching

Infante Ingrid C. , Sergio Gonzalez Casal , Xiaofei Bai , Bertrand Vilquin , Pedro Rojo Romeo
JMC-17 - 17ème Journées de la Matière Condensée, SFP, Aug 2021, Rennes, France
Communication dans un congrès hal-03759161v1

Towards epitaxial Pb(Zr0.52Ti0.48)O3/La2/3Sr1/3MnO3/SrTiO3 based resonant MEMS on Si

Laryssa Carvalho de Araujo , J J Manguele , Bertrand Vilquin , Zhe Wang , Carolina Adamo
JMC 17 (17èmes journées de la matière condensée), Minicolloque 17: Oxydes Fonctionnels : des matériaux aux dispositifs, Aug 2021, ONLINE - Rennes, France. pp.1
Communication dans un congrès hal-03431691v1

Huge reduction of wake-up effect in ferroelectric HfZrO2 nanostructures

Bertrand Vilquin , Nicolas Baboux , Pedro Rojo Romeo , Jordan Bouaziz
EMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland
Communication dans un congrès hal-03351082v1

Développement d’un capteur environnemental ultra-basse consommation à base de SnO2 en technologie CMOS FDSOI

Antonio Assaf , João Resende , Levert Theo , Bernard Pelissier , Infante Ingrid C.
Journées de la matière condensée (JMC17), Société française de physique (SFP), Aug 2021, Rennes, France
Communication dans un congrès hal-03375553v1

Nanostructuration effect on the properties of ferroelectric HfZrO2

Bertrand Vilquin , Jordan Bouaziz , Pédro Rojo Romeo , Nicolas Baboux
6th edition of the International Workshop of Materials Physics, The National Institute of Materials Physics (NIMP), Sep 2021, Bucarest, Romania
Communication dans un congrès hal-03351080v1

The discovery of ferroelectricity in HfO2

Bertrand Vilquin , Nicolas Baboux , Pedro Rojo Romeo , Jordan Bouaziz
6th Conference of Bangladesh Crystallographic Association, Bangladesh Crystallographic Association, Jan 2021, Dhaka, Bangladesh
Communication dans un congrès hal-03111364v1

Hybrid chip-based nonlinear optical devices using graphene

Christelle Monat , Pierre Demongodin , Jérémy Lhuillier , Milan Sinobad , Houssein El Dirani
graphene2020, Oct 2020, Grenoble, France
Communication dans un congrès hal-03299045v1
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Towards active photonic dispersion control using graphene-induced non-radiative loss

Jérémy Lhuillier , Pierre Demongodin , Thomas Wood , Malik Kemiche , Bertrand Vilquin
CLEO: Science and Innovations 2020, May 2020, Washington DC, United States. pp.SW4F.4., ⟨10.1364/CLEO_SI.2020.SW4F.4⟩
Communication dans un congrès hal-02617933v1

Vanadium Oxide Based Waveguide Modulator Integrated on Silicon

Jimmy John , Regis Orobtchouk , Pedro Rojo Romeo , B. Vilquin , Zhen Zhang
2019 21st International Conference on Transparent Optical Networks (ICTON), Jul 2019, Angers, France. pp.1-1, ⟨10.1109/ICTON.2019.8840555⟩
Communication dans un congrès hal-02408515v1

Integration of Amorphous Low Refractive Index Active Materials in Silicon Photonics

R. Orobtchouk , Ali Belarouci , B. Vilquin , Pedro Rojo Romeo
2019 21st International Conference on Transparent Optical Networks (ICTON), Jul 2019, Angers, France. pp.1-1, ⟨10.1109/ICTON.2019.8840268⟩
Communication dans un congrès hal-02400096v1

Sputtered ferroelectric hafnium/zirconium oxide solid solutions from a single target

Jordan Bouaziz , Nicolas Baboux , Pédro Rojo Romeo , Lucian Pintilie , Raluca Negrea
EMRS Spring Meeting 2019, Jul 2019, Nice, France
Communication dans un congrès hal-02506563v1

Ferroelectric HfZrO2 thin films for IoT applications

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pedro Rojo Romeo
Rencontre RENATECH "Croissance Cristalline", Nov 2019, Grenoble, France
Communication dans un congrès hal-02392443v1

Wideband Graphene Electro-optic Modulator on 1D Photonic Crystal Cavity

T. Wood , Jérémy Lhuillier , Pierre Demongodin , M. Kemiche , Bertrand Vilquin
European Quantum Electronics Conference 2019, Jun 2019, Munich, Germany. ⟨10.1109/CLEOE-EQEC.2019.8872717⟩
Communication dans un congrès hal-02400046v1

Ferroelectric HfO2 based devices fabrication and remaining issues

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pedro Rojo Romeo
IUMRS-ICA 2019, Sep 2019, Perth, Australia
Communication dans un congrès hal-02310137v1

Ferroelectric hafnium/zirconium oxide solid solutions deposited by RF magnetron sputtering with a single target

Jordan Bouaziz , Pédro Rojo Romeo , Bertrand Vilquin , Nicolas Baboux
E-MRS Spring Meeting 2019, May 2019, Nice, France
Communication dans un congrès hal-02506544v1

Fabrication de dispositifs ferroélectriques à partir de HfO2 dopé et les problèmes en suspens

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pédro Rojo Romeo
Réunion thématique du GDR OXYFUN « Couches minces d'oxydes fonctionnels et applications en électronique et photonique », GDR OXYFUN, Oct 2019, Caen, France
Communication dans un congrès hal-02310135v1

Huge working pressure effect on the ferroelectric properties of RF sputtered hafnia/zirconia layers

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pédro Rojo Romeo , Lucian Pintilie
High-k Workshop 2019, NamLab, Jun 2019, Dresden, Germany
Communication dans un congrès hal-02281215v1

Ferroelectric HfO2 based devices fabrication and remaining issues

Bertrand Vilquin , Jordan Bouaziz , Pédro Rojo Romeo , Nicolas Baboux
IEEE 39th International Conference on ELECTRONICS AND NANOTECHNOLOGY ELNANO-2019, IEEE, Apr 2019, Kyiv, Ukraine
Communication dans un congrès hal-02281214v1

Efficient integration of low refractive index active materials on CMOS compatible photonics platform based on half etch slot waveguide

R. Orobtchouk , Ali Belarouci , Bertrand Vilquin , Pedro Rojo Romeo
Photonics North 2019, May 2019, Québec, Canada
Communication dans un congrès hal-02400614v1
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Modulateur electro-optique large-bande à base de graphene sur résonnateur optique planaire

T. Wood , Jérémy Lhuillier , Pierre Demongodin , M. Kemiche , Bertrand Vilquin
39ème Journées Nationales d'Optique Guidée (JNOG), Jul 2019, Paris-Saclay, France
Communication dans un congrès hal-02400039v1

Half Hetch Slot waveguides for Low-Cost Integration of CMOS compatible low refractive index active materials in Silicon Photonics

R. Orobtchouk , Ali Belarouci , Bertrand Vilquin , Pedro Rojo Romeo , Jordan Bouaziz
Photonics North, Jun 2018, Montréal, Canada
Communication dans un congrès hal-02400084v1
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Prospects for energy-efficient edge computing with integrated HfO 2-based ferroelectric devices

Ian O'Connor , Mayeul Cantan , Cedric Marchand , Bertrand Vilquin , Bastien Giraud
IFIP/IEEE International Conference on Very Large Scale Integration (VLSI-SOC), Oct 2018, Verona, Italy. ⟨10.1109/VLSI-SoC.2018.8644809⟩
Communication dans un congrès hal-01916992v1

Deposition of hafnium/zirconium oxides solid solution by reactive magnetron sputtering for fast and low power ferroelectric devices

Jordan Bouaziz , Bertrand Vilquin , Pédro Rojo Romeo , Nicolas Baboux , Bruno Masenelli
Journée de la matière condensée 2018, Aug 2018, Grenoble, France
Communication dans un congrès hal-02506592v1

Photoferroelectric Ba(Sn,Ti)O3 solid solutions

Halyna Volkova , P Gemeiner , Baba Wague , B. Vilquin , J. Guillot
Journées Nationales du GDR OXIFUN 2018, Mar 2018, Piriac sur Mer, France
Communication dans un congrès hal-01808081v1

Infra-red characterizations of metal oxide thin films

Bertrand Vilquin
CMOS ET, May 2017, Varsovie, Poland
Communication dans un congrès hal-02017626v1

Contrôle dynamique de la lumière par des matériaux fonctionnels

Sébastien Cueff , Regis Orobtchouk , Pedro Rojo Romeo , Bertrand Vilquin , Guillaume Saint-Girons
Workshop du GDR Ondes, Oct 2017, sophia-antipolis, France
Communication dans un congrès hal-01965364v1

Vers la réalisation de composants optiques nonlinéaires intégrés sur puce exploitant du graphène

Alexandra Pavlova , Malik Kemiche , Jérémy Lhuillier , Thomas Wood , Radoslaw Mazurczyk
colloque SFO-PAMO, 24ème Congrès Général de la SFP, Jan 2017, Orsay, France
Communication dans un congrès hal-01701490v1

Functional oxides for optical devices

Guillaume Saint-Girons , Sébastien Cueff , Benjamin Meunier , Romain Bachelet , Jose Penuelas
E-MRS 2016 Fall Meeting, Sep 2016, Warsaw, Poland
Communication dans un congrès hal-01965369v1

Interface reactivity and epitaxial growth of SrTiO3 and other functional oxides on Si and GaAs

Benjamin Meunier , Rahma Moalla , Adrien Carretero-Genevrier , L. Largeau , J. Gazquez
IC-MBE 2016 international conference, 2016, Montpellier, France
Communication dans un congrès hal-01489068v1

Ferroelectric oxide slot waveguide electro-optic modulator on Silicon

Sébastien Cueff , Régis Orobtchouk , Pedro Rojo-Romeo , A. Gutierrez , P. Castéra
SPIE Photonic West 2016 Conference, 2016, San-Francisco (USA), United States
Communication dans un congrès hal-01489100v1

Functional oxides on silicon for on-chip thermal management

Ramah Moalla , M. Apreutesei , Bertrand Vilquin , Philippe Regreny , Claude Botella
XVth Electroceramics conference, Jun 2016, Limoges, France
Communication dans un congrès hal-01965438v1

Growth of hybrid GaAs core / shell nanowires

Xin Guan , Jeanne Becdelievre , Guillaume Saint-Girons , Romain Bachelet , Philippe Regreny
GDR PULSE, 2016, Marseille, France
Communication dans un congrès hal-01489098v1

Hybrid silicon-ferroelectric oxide platform for tunable nanophotonics on silicon

S. Cueff , P. Castera , A. Gutierrez , P. Romeo , R. Orobtchouk
2016 18th International Conference on Transparent Optical Networks (ICTON), Jul 2016, Trento, Italy. ⟨10.1109/ICTON.2016.7550429⟩
Communication dans un congrès hal-01848690v1

Oxydes fonctionnels intégrés sur Si pour des applications en énergie et photonique

Romain Bachelet , Mihai Apreutesei , Rahma Moalla , Benjamin Meunier , Sébastien Cueff
JNMO, Jun 2016, Les Issambres, France
Communication dans un congrès hal-01965366v1

Semiconducting core / piezoelectric shell nanowires

Jose Penuelas , Xin Guan , Jeanne Becdelievre , Guillaume Saint-Girons , Romain Bachelet
PiezoNEMS workshop, 2016, Grenoble, France
Communication dans un congrès hal-01489081v1

Realization of a single layer graphene field effect transistor

J. Pezard , Jérémy Lhuillier , Z. El-Friakh , V. Souliere , Pedro Rojo Romeo
EMRS Spring Meeting, 2015, Lille, France
Communication dans un congrès hal-01489358v1

Towards ferroelectric control of topological insulators and surface states

O. Copie , G. Le Rhun , Bertrand Vilquin , L. Tortech , C. Mathieu
EMRS Spring Meeting, 2015, Lille, France
Communication dans un congrès hal-01489616v1

Study of the conduction mechanism through a Pb(Zr,Ti)O3 thin film

Qiang Liu , Simon Martin , Nicolas Baboux , David Albertini , Brice Gautier
EMRS Spring Meeting, 2015, Lille, France
Communication dans un congrès hal-01489622v1

Epitaxial growth of ferroelectric Pb(Zr,Ti)O3 thin layers on SrTiO3-templated GaAs/InGaAs quantum well structure for opto-mechanical application

Benjamin Meunier , Romain Bachelet , Bertrand Vilquin , Pedro Rojo-Romeo , Geneviève Grenet
EMRS 2015 Spring Meeting, 2015, Lille, France
Communication dans un congrès hal-01489362v1

Thermal energy harvesting through epitaxial pyroelectric oxide films integrated on silicon

Rahma Moalla , Qiang Liu , J. Vila-Fungueiriño , Adrien Carretero-Genevrier , B. Rivas-Murias
EMRS 2015 Spring Meeting, 2015, Lille, France
Communication dans un congrès hal-01489612v1

Strong electrocaloric anisotropy in epitaxial Pb(Zr,Ti)O3 heterostructures

Rahma Moalla , Bertrand Vilquin , Guillaume Saint-Girons , Nicolas Baboux , G. Sebald
EMRS 2015 Fall Meeting, Sep 2015, Varsovie, Poland
Communication dans un congrès hal-01489353v1

Electromechanical response of amorphous LaAlO3 thin film probed by scanning probe microscopies

Alexis Borowiak , H. Tanaka , Nicolas Baboux , David Albertini , Bertrand Vilquin
ISAF 2015 conference, 2015, Singapour, Singapore
Communication dans un congrès hal-01489365v1

Epitaxial growth of SrTiO3 on GaAs : Towards opto-mechanical applications

Benjamin Meunier , Geneviève Grenet , Claude Botella , Philippe Regreny , Romain Bachelet
Europ. Material research Society EMRS, 2015, Lille, France
Communication dans un congrès hal-01489364v1

Perovskite Oxide MEMS: Strain Control and Sensor Applications

P. Lecoeur , D. Le Bourdais , G. Agnus , T. Maroutian , M. Matzen
MRS 2015 Fall Meeting, 2015, Boston (USA), United States
Communication dans un congrès hal-01489582v1

Influence of the substrate on structural and electrical behaviors of BST thin film

Baba Wague , Qiang Liu , Simon Martin , Nicolas Baboux , David Albertini
EMRS Spring Meeting 2015, 2015, Lille, France
Communication dans un congrès hal-01489370v1

Functional spinel oxide heterostructures on silicon

Romain Bachelet , Patricia de Coux , Bénédicte Warot-Fonrose , Vassil Skumryev , G. Niu
MRS 2015 Spring Meeting, Apr 2015, San-Francisco, United States
Communication dans un congrès hal-01965452v1

Monolithic integration of pyroelectric oxide films on silicon for thermal energy harvesting and cooling applications

Rahma Moalla , Nicolas Baboux , G. Sebald , Bertrand Vilquin , Guillaume Saint-Girons
EMRS 2015 Fall Meeting, 2015, Varsovie, Poland
Communication dans un congrès hal-01489342v1

Hybrid silicon-ferroelectric oxide slot waveguide for on-chip optoelectronics

Sébastien Cueff , Regis Orobtchouk , Pedro Rojo-Romeo , Baba Wague , Xuan Hu
MRS Fall Meeting, 2015, Boston (USA), United States
Communication dans un congrès hal-01489369v1

SrTiO3 thin layers on Si: epitaxy and use as templates for thermal energy management and photonic integrated devices

Sébastien Cueff , Mihai Apreutesei , R. Moalla , B. Meunier , X. Hu
Journees Nationales sur les Technologies Emergentes en micro/nanofabrication (JNTE), Nov 2015, Ecully, France
Communication dans un congrès hal-01291404v1

Graphene Field Effect Transistors on SiC for High Speed and Bio-sensing Applications

Julien Pézard , Mihai Lazar , Bertrand Vilquin , Pedro Rojo Romeo , Naoufel Haddour
JNTE (Journées Nationales des Technologies Emergentes), Nov 2015, Ecully, France
Communication dans un congrès hal-01946338v1

Functional oxide pressure sensor

D. Le Bourdais , G. Agnus , T. Maroutian , V. Pillard , Guillaume Saint-Girons
EMRS Spring Meeting, 2015, Lille, France
Communication dans un congrès hal-01489374v1

Epitaxial pyroelectric Pb(Zr,Ti)O3 thin films on silicon for thermal energy harvesting

Rahma Moalla , Qiang Liu , Guillaume Saint-Girons , Bertrand Vilquin , Nicolas Baboux
EMRS 2015 Spring Meeting, 2015, Lille, France
Communication dans un congrès hal-01489367v1

Epitaxial growth of ferroelectric Pb(Zr,Ti)O3 thin layers on SrTiO3-templated GaAs/InGaAs quantum well structure for opto-mechanical application

Benjamin Meunier , Romain Bachelet , Bertrand Vilquin , Pedro Rojo-Romeo , Geneviève Grenet
EuroMBE 2015 conference, 2015, Canazei, Italy
Communication dans un congrès hal-01489363v1

Slot waveguide electro-optic modulator with ferroelectric oxide BaTiO3 on silicon

X. Hu , R. Orobtchouk , S. Cueff , Pedro Rojo Romeo , P. Regreny
2014 IEEE 11th International Conference on Group IV Photonics, Aug 2014, Paris, France. ⟨10.1109/Group4.2014.6961944⟩
Communication dans un congrès hal-01848756v1

Texturation control of Pb(Zr,Ti)O3 films on SOI substrate

C. Debray , C. Delcamp , Z. El-Friakhj , J. Henri , Jérémy Lhuillier
ICMAST, 2014, Bilbao, Spain
Communication dans un congrès hal-01489823v1

Integration of functional oxides on silicon for nanoelectronics and energy

Romain Bachelet , Lamis Louahadj , Lucie Mazet , Rahma Moalla , Gang Niu
International Conference on Materials and Characterization Techniques (ICMCT), 2014, VIT Univ., Vellore, Chennai, India
Communication dans un congrès hal-01490283v1

Graphene on 4H-SiC for terahertz transistors and ferroelectric non-volatile memories

J. Pezard , Jérémy Lhuillier , Z. El-Friakh , V. Souliere , Pédro Rojo Romeo
CSCRM, 2014, Grenoble, France
Communication dans un congrès hal-01489926v1

Epitaxial pyroelectric thin films on silicon for thermal energy harvesting

Rahma Moalla , Lucie Mazet , Lamis Louahadj , Qiang Liu , Jose Penuelas
European Materials Research Society (E-MRS), Spring Meeting, 2014, Lille, France
Communication dans un congrès hal-01489913v1

Heterostructures combining functional oxides and semiconductors for integrated photonics

Guillaume Saint-Girons , Sébastien Cueff , Benjamin Meunier , Xuan Hu , Lamis Louahadj
Workshop “Les oxydes pour l’optique et la photonique”, Dec 2014, Meudon, France
Communication dans un congrès hal-01490286v1
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Silicon CMOS compatible transition metal dioxide technology for boosting highly integrated photonic devices with disruptive performance

P. Sanchis , L. Sanchez , P. Castera , A. Rosa , A. Gutierrez
ICTON 2014 -16th International Conference on Transparent Optical Networks, Jul 2014, Graz, Austria. pp.1-4, ⟨10.1109/ICTON.2014.6876505⟩
Communication dans un congrès hal-01848763v1

Electro-optic modulation with functional oxides monolithically integrated on silicon

Sébastien Cueff , Xuan Hu , Regis Orobtchouk , Pédro Rojo Romeo , C. Bachelet
Silicon Photonics Summer School organized by PLAT4M project, 2014, Ghent, Belgium
Communication dans un congrès hal-01489917v1

Epitaxial pyroelectric thin films on silicon for thermal energy harvesting

Rahma Moalla , Lucie Mazet , Lamis Louahadj , Qiang Liu , Jose Penuelas
Nanotech MEET conference 2014, Apr 2014, Hammamet, Tunisia
Communication dans un congrès hal-01489914v1

Electro-optic modulation using hybrid silicon-ferroelectric oxide slot waveguide

Sébastien Cueff , Xuan Hu , Regis Orobtchouk , Pedro Rojo Romeo , Romain Bachelet
Workshop “Les oxydes pour l’optique et la photonique”, 2014, Meudon, France
Communication dans un congrès hal-01489872v1

Young modulus and Poisson ratio of polycrystalline and single crystal PZT thin-film measured by picosecond ultrasonics

F. Casset , Arnaud Devos , J. Abergel , G. Le Rhun , B. Vilquin
IEEE International Ultrasonics Symposium, IUS 2013, 2013, Prague, Czech Republic
Communication dans un congrès hal-00944050v1

Growth of semiconducting core / functional oxide shell nanowires

J. Penuelas , F. Boudaa , R. Bachelet , B. Vilquin , Bruno Masenelli
PiezoNEMS'2013, Nov 2013, grenoble, France
Communication dans un congrès hal-01060922v1

Homo-epitaxial growth of Lithium Niobate by Pulsed-Laser Deposition

Ihor Pershukov , Florian Dupont , Jérôme Richy , Marie Bousquet , Bertrand Vilquin
EMRS 2023 Spring Meeting, May 2023, Strasbourg (France), France
Poster de conférence hal-04349091v1
Image document

Bottom electrodes impact on Hf0.5Zr0.5O2 ferroelectric tunnel junctions

Greta Segantini , Pedro Rojo Romeo , Benoit Manchon , Nicolas Baboux , Ingrid C Infante
EMRS Spring Meeting 2021, May 2021, Virtual, France.
Poster de conférence hal-03275569v1
Image document

Reduction of HfZrO2 capacitor wake-up effect

Jordan Bouaziz , Nicolas Baboux , Pedro Rojo Romeo , Bertrand Vilquin
Materials Challenges for Memory, Apr 2021, New York, United States.
Poster de conférence hal-03273119v1
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Influence of bottom electrodes on HZO thin film features

Pedro Rojo Romeo , Infante Ingrid C. , Greta Segantini , Pedro Rojo Romeo , Benoit Manchon
Material Challenge for Memory Applications 2021, Apr 2021, New York, United States
Poster de conférence hal-03274227v1
Image document

Spatial modulation of graphene's chemical potential

Jérémy Lhuillier , Pierre Demongodin , Thomas Wood , Malik Kemiche , Bertrand Vilquin
Graphene2020, Jun 2020, Grenoble, France.
Poster de conférence hal-02618057v1

A Thorough Study of Ferroelectric Sputtered (Hf, Zr)O2 Solid Solutions

Jordan Bouaziz , Pedro Rojo Romeo , Nicolas Baboux , Brice Gautier , Bertrand Vilquin
International Symposium on the Application of Ferroelectrics, Jul 2019, Lausanne, Switzerland.
Poster de conférence hal-02461347v1

Study of the Electrical and Electronic Properties of Domains and Domain Walls in Ferroelectrics Combining AFM and STEM Techniques

Sergio Gonzalez Casal , David Albertini , Infante Ingrid C. , Nicolas Baboux , Solène Brottet
International Symposium on the Application of Ferroelectrics (ISAF), Jul 2019, Lausanne, Switzerland
Poster de conférence hal-02461378v1
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Deposition of doped and undoped HfO2 for fast and low energy consumption ferroelectric devices

Jordan Bouaziz , Bertrand Vilquin , Pedro Rojo Romeo , Nicolas Baboux , Bruno Masenelli
6th International Conference SENSO Workshop, Jun 2018, Gardanne, France
Poster de conférence hal-02506625v1
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Comparison between Sputtering and Atomic Layer Deposition of ferroelectric doped and undoped HfO2

Jordan Bouaziz , Bertrand Vilquin , Pedro Rojo Romeo , Nicolas Baboux , Bruno Masenelli
EMRS Spring Meeting 2017, May 2017, Strasbourg, France
Poster de conférence hal-02506676v1

Metal oxides nanowires for optical gas sensing

T.-H. H Nguyen , Vincent Consonni , E. Appert , R. Parize , F. Gaillard
Journées Nationales sur les Technologies Emergentes en Micro-Nanofabrication, JNTE 2015, Nov 2015, Lyon, France
Poster de conférence hal-01374542v1

Nanofils et capteurs de gaz

T.-H. Nguyen , A. Apostoluk , B. Masenelli , Pedro Rojo Romeo , B. Vilquin
Workshop Lyonnais sur les Nanosciences et les Nanotechnologies, Jun 2015, Lyon, France. , 2016
Poster de conférence hal-01374549v1

Epitaxial pyroelectric thin films on silicon for thermal energy harvesting

Rahma Moalla , Lucie Mazet , Lamis Louahadj , Qiang Liu , Jose Penuelas
Nanotech MEET conference 2014, Apr 2014, Hammamet, Tunisia. , 2014
Poster de conférence hal-01489793v1

Epitaxial Systems Combining Oxides and Semiconductors

Gang Niu , Guillaume Saint-Girons , Bertrand Vilquin
Molecular Beam Epitaxy (Second Edition) From Research to Mass Production, Elsevier, pp.377-402, 2018
Chapitre d'ouvrage hal-02273400v1

Epitaxial systems combining oxides and semiconductors

Gang Niu , Guillaume Saint-Girons , Bertrand Vilquin
Molecular Beam Epitaxy, Elsevier, pp.451-475, 2013
Chapitre d'ouvrage hal-02273398v1

Nanowires on film for photoelectrochemical water splitting

Miao Zhong , Mario Kurniawan , Aleksandra Apostoluk , Bertrand Vilquin , Jean-Jacques Delaunay
Nanowires - Recent Advances, InTech, 2012, ⟨10.5772/52593⟩
Chapitre d'ouvrage hal-01986747v1

Vers l'intégration monolithique d'hétérostructures et de nanostructures III-V et Ge sur silicium pour la microélectronique et l'optoélectronique

G. Saint-Girons , M. Gendry , H. Dumont , P. Regreny , J. Cheng
Leray J.L., Boudenot J.C., Gautier J. La micro-nano électronique, enjeux et mutations, CNRS ÉDITIONS, pp.179-182, 2009
Chapitre d'ouvrage hal-00575787v1