CV Bernard Legrand

Denis Lagrange, Nicolas Mauran, Lucien Schwab, Bernard Legrand. Low Latency Demodulation for High-Frequency Atomic Force Microscopy Probes. IEEE Transactions on Control Systems Technology, Institute of Electrical and Electronics Engineers, 2021, 29 (5), pp.2264 - 2270. ⟨10.1109/TCST.2020.3028737⟩. ⟨hal-02974151⟩

Pierre Etienne Allain, Lucien Schwab, Colin Mismer, Marc Gely, Estelle Mairiaux, et al.. Optomechanical resonating probe for very high frequency sensing of atomic forces. Nanoscale, Royal Society of Chemistry, 2020, 12 (5), pp.2939-2945. ⟨10.1039/c9nr09690f⟩. ⟨hal-02997481⟩

C. Goyhenex, G. Tréglia, Bernard Legrand. Environment dependence of magnetic moment and atomic level shifts within tight-binding approximation: An illustration in the case of cobalt. Surface Science, Elsevier, 2016, 646 (SI), pp.261-268. ⟨10.1016/j.susc.2015.09.004⟩. ⟨hal-01455014⟩

Adhitya Bhaswara, Hohyun Keum, Fabrice Mathieu, Bernard Legrand, Seok Kim, et al.. A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes. Frontiers of Mechanical Engineering in China, Springer Verlag, 2016, 2 (1), ⟨10.3389/fmech.2016.00001⟩. ⟨hal-01960876⟩

Zhuang Xiong, Bernard Legrand. Design and measurement of AFM probe based on MEMS resonator. High Power Laser and Particle Beams, China Academy of Engineering Physics and Nuclear Society, 2015, 27 (2), pp.024119-1. ⟨10.11884/HPLPB201527.024119⟩. ⟨hal-01961045⟩

B. Zhu, H. Guesmi, J. Creuze, Bernard Legrand, C. Mottet. Crossover among structural motifs in Pd–Au nanoalloys. Physical Chemistry Chemical Physics, Royal Society of Chemistry, 2015, 17, pp.28129-28136. ⟨10.1039/C5CP00491H⟩. ⟨hal-01222110⟩

Fei Wang, Nicolas Clément, Damien Ducatteau, David Troadec, Hassan Tanbakuchi, et al.. Quantitative impedance characterization of sub-10 nm scale capacitors and tunnel junctions with an interferometric scanning microwave microscope. Nanotechnology, Institute of Physics, 2014, 25 (40), pp.405703. ⟨10.1088/0957-4484/25/40/405704⟩. ⟨hal-01960609⟩

Zhuang Xiong, Estelle Mairiaux, Benjamin Walter, Marc Faucher, Lionel Buchaillot, et al.. A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection. Sensors, MDPI, 2014, 14 (11), pp.20667-20686. ⟨10.3390/s141120667⟩. ⟨hal-01960848⟩

Zhuang Xiong, Estelle Mairiaux, Benjamin Walter, Marc Faucher, Lionel Buchaillot, et al.. Two types of MEMS-based oscillating AFM probes. Journal of Chinese Electron Microscopy Society , Chinese Physical Society 2014, 2, pp.137-141. ⟨hal-01960910⟩

Adhitya Bhaswara, Hohyun Keum, S Rhee, Bernard Legrand, Fabrice Mathieu, et al.. Fabrication of nanoplate resonating structures via micro-masonry. Journal of Micromechanics and Microengineering, IOP Publishing, 2014, 24 (11), pp.115012. ⟨10.1088/0960-1317/24/11/115012⟩. ⟨hal-01687810⟩

Beien Zhu, Gode Thrimurthulu, Laurent Delannoy, Catherine Louis, Christine Mottet, et al.. Evidence of Pd segregation and stabilization at edges of AuPd nano-clusters in the presence of CO: A combined DFT and DRIFTS study. Journal of Catalysis, Elsevier, 2013, 308, pp.272-281. ⟨10.1016/j.jcat.2013.08.022⟩. ⟨hal-03184658⟩

Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. Piezoresistive ring-shaped AFM sensors with pico-newton force resolution. International Journal of Intelligent Mechatronics and Robotics, 2013, 3, pp.38-52. ⟨10.4018/ijimr.2013010104⟩. ⟨hal-00871948⟩

Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. MEMS piezoresistive ring resonator for AFM imaging with pico-Newton force resolution. Journal of Micromechanics and Microengineering, IOP Publishing, 2013, 23, pp.035016-1-10. ⟨10.1088/0960-1317/23/3/035016⟩. ⟨hal-00795965⟩

T. Dargent, K. Haddadi, T. Lasri, N. Clément, D. Ducatteau, et al.. An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements. Review of Scientific Instruments, American Institute of Physics, 2013, 84, 123705, 7 p. ⟨10.1063/1.4848995⟩. ⟨hal-00922585⟩

Bernard Legrand, D. Ducatteau, D. Theron, B. Walter, H. Tanbakuchi. Detecting response of microelectromechanical resonators by microwave reflectometry. Applied Physics Letters, American Institute of Physics, 2013, 103, pp.053124-1-5. ⟨10.1063/1.4817411⟩. ⟨hal-00871931⟩

E. Algre, Z. Xiong, M. Faucher, B. Walter, L. Buchaillot, et al.. MEMS ring resonators for laserless AFM with sub-nanoNewton force resolution. Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers, 2012, 21, pp.385-397. ⟨10.1109/JMEMS.2011.2179012⟩. ⟨hal-00787407⟩

Emile Maras, Fabienne Berthier, Isabelle Braems, Bernard Legrand. Segregation in bimetallic nanowires: Size and thermodynamic ensemble effects. Physical Review B: Condensed Matter and Materials Physics (1998-2015), American Physical Society, 2012, 86 (5), ⟨10.1103/PhysRevB.86.054205⟩. ⟨hal-02990483⟩

E. Herth, E. Algre, P. Tilmant, M. François, C. Boyaval, et al.. Performances of the negative tone resist AZnLOF 2020 for nanotechnology applications. IEEE Transactions on Nanotechnology, Institute of Electrical and Electronics Engineers, 2012, 11, pp.854-859. ⟨10.1109/TNANO.2012.2196802⟩. ⟨hal-00787415⟩

E. Herth, E. Algré, Bernard Legrand, L. Buchaillot. Optimization of ohmic contact and adhesion on polysilicon in MEMS-NEMS wet etching process. Microelectronic Engineering, Elsevier, 2011, 88, pp.724-728. ⟨10.1016/j.mee.2010.06.032⟩. ⟨hal-00579051⟩

Fabienne Berthier, Emile Maras, Isabelle Braems, Bernard Legrand. Multiscale Modelling of the Ageing Kinetics of a 2D Deposit. Solid State Phenomena, Trans Tech Publications Ltd 2011, 172-174, pp.664-669. ⟨10.4028/www.scientific.net/SSP.172-174.664⟩. ⟨hal-02990476⟩

E. Herth, P. Tilmant, M. Faucher, M. François, C. Boyaval, et al.. Electron beam nanolithography in AZnLOF 2020. Microelectronic Engineering, Elsevier, 2010, 87, pp.2057-2060. ⟨10.1016/j.mee.2009.12.079⟩. ⟨hal-00548989⟩

A.S. Rollier, D.F.L. Jenkins, El Hadj Dogheche, Bernard Legrand, M. Faucher, et al.. Development of a new generation of active AFM tools for applications in liquids. Journal of Micromechanics and Microengineering, IOP Publishing, 2010, 20, pp.085010-1-11. ⟨10.1088/0960-1317/20/8/085010⟩. ⟨hal-00548990⟩

G. Guisbiers, E. Herth, Bernard Legrand, N. Rolland, T. Lasri, et al.. Materials selection procedure for RF-MEMS. Microelectronic Engineering, Elsevier, 2010, 87, pp.1792-1795. ⟨10.1016/j.mee.2009.10.016⟩. ⟨hal-00549627⟩

M. Sworowski, F. Neuilly, Bernard Legrand, A. Summanwar, P. Philippe, et al.. Fabrication of 24-MHz-disk resonators with silicon passive integration technology. IEEE Electron Device Letters, Institute of Electrical and Electronics Engineers, 2010, 31, pp.23-25. ⟨10.1109/LED.2009.2034542⟩. ⟨hal-00548984⟩

E. Herth, Bernard Legrand, L. Buchaillot, N. Rolland, T. Lasri. Optimization of SiNX:H films deposited by PECVD for reliability of electronic, microsystems and optical applications. Microelectronics Reliability, Elsevier, 2010, 50, pp.1103-1106. ⟨10.1016/j.microrel.2010.04.011⟩. ⟨hal-00549491⟩

B. Walter, M. Faucher, E. Algré, Bernard Legrand, Rodolphe Boisgard, et al.. Design and operation of a silicon ring resonator for force sensing applications above 1 MHz. Journal of Micromechanics and Microengineering, IOP Publishing, 2009, 19 (11), pp.115009-1-7. ⟨10.1088/0960-1317/19/11/115009⟩. ⟨hal-00472725⟩

M. Ataka, Bernard Legrand, L. Buchaillot, D. Collard, H. Fujita. Design, fabrication, and operation of two-dimensional conveyance system with ciliary actuator arrays. IEEE/ASME Transactions on Mechatronics, Institute of Electrical and Electronics Engineers, 2009, 14, pp.119-125. ⟨10.1109/TMECH.2008.2004770⟩. ⟨hal-00472723⟩

D. Hourlier, Bernard Legrand, C. Boyaval, P. Perrot. Towards silicon-nanowire-structured materials by the intimate mixing of patterning the solid state and chemical reactions. Journal of Nano Research, Trans Tech Publications, 2009, 6, pp.215-224. ⟨10.4028/www.scientific.net/JNanoR.6.215⟩. ⟨hal-00471951⟩

Cédric Durand, Fabrice Casset, Philippe Renaux, Nicolas Abelé, Bernard Legrand, et al.. In-Plane Silicon-On-Nothing Nanometer-Scale Resonant Suspended Gate MOSFET for In-IC Integration Perspectives. IEEE Electron Device Letters, Institute of Electrical and Electronics Engineers, 2008, 29 (5), pp.494-496. ⟨cea-00320837⟩

C. Durand, F. Casset, P. Renaux, N. Abele, Bernard Legrand, et al.. In-plane silicon-on-nothing nanometer-scale resonant suspended gate MOSFET for in-IC integration perspectives. IEEE Electron Device Letters, Institute of Electrical and Electronics Engineers, 2008, 29, pp.494-496. ⟨10.1109/LED.2008.919781⟩. ⟨hal-00357277⟩

C. Yamahata, D. Collard, Bernard Legrand, T. Takekawa, M. Kumemura, et al.. Silicon nanotweezers with subnanometer resolution for the micromanipulation of biomolecules. Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers, 2008, 17, pp.623-631. ⟨10.1109/JMEMS.2008.922080⟩. ⟨hal-00357278⟩

Philippe Basset, A. Kaiser, Bernard Legrand, D. Collard, L. Buchaillot. Complete system for wireless powering and remote control of electrostatic actuators by inductive coupling. IEEE/ASME Transactions on Mechatronics, Institute of Electrical and Electronics Engineers, 2007, 12, pp.23-31. ⟨10.1109/TMECH.2006.886245⟩. ⟨hal-00255847⟩

D. Collard, C. Yamahata, Bernard Legrand, T. Takekawa, M. Kumemura, et al.. Towards mechanical characterization of biomolecules by MNEMS tools. IEEJ Transactions on Electrical and Electronic Engineering, Institute of Electrical Engineers of Japan, 2007, 2, pp.262-271. ⟨10.1002/tee.20154⟩. ⟨hal-00283054⟩

Bernard Legrand, A.S. Rollier, D. Collard, L. Buchaillot. Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids. Applied Physics Letters, American Institute of Physics, 2006, 88, pp.034105-1-3. ⟨hal-00128662⟩

D. Galayko, A. Kaiser, Bernard Legrand, L. Buchaillot, C. Combi, et al.. Coupled-resonator micromechanical filters with voltage tunable bandpass characteristic in thickfilm polysilicon technology. Sensors and Actuators A: Physical , Elsevier, 2006, 126, pp.227-240. ⟨hal-00138651⟩

A.S. Rollier, Bernard Legrand, D. Collard, L. Buchaillot. Stability and pull-in voltage of electrostatic parallel-plate actuators in liquid solutions. Journal of Micromechanics and Microengineering, IOP Publishing, 2006, 16, pp.794-801. ⟨hal-00128663⟩

D. Stievenard, Bernard Legrand. Silicon surface nano-oxidation using scanning probe microscopy. Progress in Surface Science, Elsevier, 2006, 81, pp.112-140. ⟨hal-00127846⟩

V. Agache, R. Ringot, P. Bigotte, V. Senez, Bernard Legrand, et al.. Modeling and experimental validation of sharpening mechanism based on thermal oxidation for fabrication of ultra-sharp silicon nanotips. IEEE Transactions on Nanotechnology, Institute of Electrical and Electronics Engineers, 2005, 4, pp.548-556. ⟨hal-00125632⟩

D. Galayko, A. Kaiser, Bernard Legrand, L. Buchaillot, D. Collard, et al.. Tunable passband T-filter electrostatically driven polysilicon micromechanical resonators. Sensors and Actuators A: Physical , Elsevier, 2005, 117, pp.115-120. ⟨hal-00125630⟩

V. Agache, Bernard Legrand, D. Collard, L. Buchaillot, H. Fujita. Fabrication and characterization of 1.1 GHz blade nanoelectromechanical resonator. Applied Physics Letters, American Institute of Physics, 2005, 86, pp.213104-1-3. ⟨hal-00125633⟩

O. Millet, Bernard Legrand, D. Collard, L. Buchaillot. Influence on the step covering on fatigue phenomenon for polycrystalline silicon MEMS. Japanese Journal of Applied Physics, Japan Society of Applied Physics, 2003, 41, pp.L1339-L1341. ⟨hal-00146435⟩

D. Galayko, A. Kaiser, L. Buchaillot, Bernard Legrand, D. Collard, et al.. Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode to resonator gap reduction. Journal of Micromechanics and Microengineering, IOP Publishing, 2003, 13, pp.134-140. ⟨hal-00146391⟩

Bernard Legrand, D. Deresmes, D. Stievenard. Silicon nanowires with sub 10 nm lateral dimensions : from AFM lithography based fabrication to electrical measurements. Journal of Vacuum Science and Technology, American Vacuum Society (AVS), 2002, 20, pp.862-870. ⟨hal-00148765⟩

Bernard Legrand, E. Quévy, B. Stefanelli, D. Collard, L. Buchaillot. Vacuum and cryogenic station for Micro-Electro-Mechanical Systems probing and testing. Review of Scientific Instruments, American Institute of Physics, 2002, 73, pp.4393-4395. ⟨hal-00148782⟩

O. Millet, Bernard Legrand, D. Collard, L. Buchaillot. Influence of the step covering on fatigue phenomenon for polycrystalline silicon micro-electro-mechanical-systems (MEMS). Japanese Journal of Applied Physics, part 2 : Letters, Japan Society of Applied Physics, 2002, 41, pp.L1339-L1341. ⟨hal-00250391⟩

D. Collard, H. Fujita, H. Toshiyoshi, Bernard Legrand, L. Buchaillot. Electrostatic micro actuators. Nano et micro technologies, 2002, 2, pp.83-124. ⟨hal-00148761⟩

Bernard Legrand, V. Agache, Thierry Melin, J.P. Nys, V. Senez, et al.. Thermally assisted formation of silicon islands on a silicon-on-insulator substrate. Journal of Applied Physics, American Institute of Physics, 2002, 91, pp.106-111. ⟨hal-00149668⟩

V. Agache, Bernard Legrand, D. Collard, L. Buchaillot. Adhesive forces investigation on a silicon tip by contact mode atomic force microscope. Applied Physics Letters, American Institute of Physics, 2002, 81, pp.2623-2625. ⟨hal-00148768⟩

D. Collard, H. Fujita, H. Toshiyoshi, Bernard Legrand, L. Buchaillot. Surface micro-machining : an overview. Nano et micro technologies, 2002, 2, pp.35-50. ⟨hal-00148781⟩

Bernard Legrand, V. Agache, Thierry Melin, J.P. Nys, V. Senez, et al.. Thermally assisted formation of silicon islands on a silicon on insulator substrate. Journal of Applied Physics, American Institute of Physics, 2001, 91, pp.106-111. ⟨hal-00152464⟩

Bernard Legrand, V. Agache, J.P. Nys, V. Senez, D. Stievenard. Formation of silicon islands on a silicon on insulator substrate upon thermal annealing. Applied Physics Letters, American Institute of Physics, 2000, 76, pp.3271-3273. ⟨hal-00158537⟩

Bernard Legrand, V. Agache, J.P. Nys, V. Senez, D. Stievenard. Formation of silicon islands on a silicon on insulator substrate upon thermal annealing. Applied Physics Letters, American Institute of Physics, 2000, 76, pp.3271-3273. ⟨hal-00158648⟩

Bernard Legrand, D. Stievenard. Atomic force microscope tip-surface behaviour under continuous bias or pulsed voltages in non contact mode. Applied Physics Letters, American Institute of Physics, 2000, 76, pp.1018-1020. ⟨hal-00158646⟩

B. Grandidier, Y.M. Niquet, Bernard Legrand, J.P. Nys, C. Priester, et al.. Imaging the wave function amplitudes in cleaved semiconductor quantum boxes. Physical Review Letters, American Physical Society, 2000, 85, pp.1068-1071. ⟨hal-00158644⟩

Lucien Schwab, Sebastien Hentz, Ivan Favero, Bernard Legrand, Pierre-Etienne Allain, et al.. 130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive Measurements. IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019), Jan 2019, Seoul, South Korea. pp.819-822, ⟨10.1109/MEMSYS.2019.8870718⟩. ⟨hal-02371188⟩

Lucien Schwab, Pierre Allain, Didier Theron, Marc Faucher, Benjamin Walter, et al.. Optomechanics: a key towards next-generation experiments in atomic force microscopy?. International Conference on Quantum Metrology and Sensing, Dec 2019, Paris, France. ⟨hal-02407634⟩

Lucien Schwab, Pierre Etienne Allain, L Banniard, A Fafin, Marc Gely, et al.. Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors. 64th International Electron Devices Meeting (IEDM 2018), IEEE, Dec 2018, San Francisco, United States. ⟨hal-01963015⟩

Régis Hamelin, Géraldine Andrieux, Isabelle Chartier, Bahaa El Roustom, T. Healy, et al.. The gateone-project: a digital innovation hub accelerating innovation through ecosystem design and product trajectory. International Conference and Exhibition on Integrated Issues of Miniaturized Systems Smart Systems Integration SSI 2018, Apr 2018, Dresden, Germany. ⟨hal-01962997⟩

Bernard Legrand, Lucien Schwab, Pierre Allain, Ivan Favero, Marc Faucher, et al.. MEMS-based atomic force microscopy probes: from electromechanical to optomechanical vibrating sensors. AVS 65th International Symposium & Exhibition, American Vacuum Society, Oct 2018, Long Beach, United States. ⟨hal-01908666⟩

Didier Theron, Fei Wang, Thomas Dargent, Damien Ducatteau, C. Brillard, et al.. SMM characterization of Au nanodots and FcC11SH molecules. XX Annual Linz Winter Workshop, Advances in Single-Molecule Research for Biology & Nanoscience, Feb 2018, Linz, Austria. ⟨hal-01962187⟩

Olivier Thomas, Arthur Givois, Aurélien Grolet, Jean-François Deü, Cécile Fuinel, et al.. Finite elements based reduced order models for nonlinear dynamics of piezoelectric and dielectric laminated micro/nanostructures. EUROMECH Colloquium 603, Dynamics of micro and nano systems, Sep 2018, Porto, Portugal. ⟨hal-01962993⟩

Cécile Fuinel, Fabrice Mathieu, Bernard Legrand. Driving and sensing M/NEMS flexural vibration using dielectric transduction. 31st International Conference EUROSENSORS, EUROSENSORS 2017, Sep 2017, Paris, France. ⟨hal-01962981⟩

Cécile Fuinel, Fabrice Mathieu, Adrian Laborde, Laurent Mazenq, Christian Bergaud, et al.. High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration. 19th International Conference on Solid-State Sensors, Actuators and Microsystems TRANSDUCERS 17, Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994155⟩. ⟨hal-01962426⟩

Cécile Fuinel, Khadim Daffé, Adrian Laborde, Olivier Thomas, Laurent Mazenq, et al.. HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS. The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421850⟩. ⟨hal-01279717⟩

Adhitya Bhaswara, Hohyun Keum, Fabrice Mathieu, Bernard Legrand, Seok Kim, et al.. Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction. 42nd International Conference on Micro and Nano Engineering, MNE 2016, Sep 2016, Vienne, Austria. ⟨hal-01962410⟩

F. Wang, T. Dargent, D. Ducatteau, G. Dambrine, K. Haddadi, et al.. Sub-10 nm-scale capacitors and tunnel junctions measurements by SMM coupled to RF interferometry. 45th European Microwave Conference EuMC 2015, Sep 2015, Paris, France. ⟨10.1109/EuMC.2015.7345849⟩. ⟨hal-01962399⟩

S. Houmadi, Bernard Legrand, J.P. Salvetat, B. Walter, E. Mairiaux, et al.. When capacitive transduction meets the thermomechanical limit: Towards femto-newton force sensors at very high frequency. 28th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2015, Jan 2015, Estoril, Portugal. ⟨10.1109/MEMSYS.2015.7050908⟩. ⟨hal-01962374⟩

Adhitya Bhaswara, Denis Dezest, Liviu Nicu, Thierry Leichle, Bernard Legrand. Determination of the effective mass and stiffness of a micro resonator from a single optical characterization. TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2015, Anchorage, United States. pp.2200-2203, ⟨10.1109/TRANSDUCERS.2015.7181397⟩. ⟨hal-01687809⟩

A. Grira, C. Rotinat-Libersa, Bernard Legrand, L. Buchaillot. A new optimal design method for electrostatically actuated silicon-based MEMS: Application to a micro-gripper with large stroke and high force resolution. 1st International Conference on Engineering and Applied Sciences Optimization, OPT-i 2014, Jun 2014, Kos Island, Greece. pp.2407-2417. ⟨cea-01844451⟩

Fei Wang, Damien Ducatteau, David Troadec, Hassan Tanbakuchi, Bernard Legrand, et al.. Characterization of sub-10nm-scale capacitors and tunnel junctions by SMM coupled to RF interferometry. European Conference on Electrical Measurements at the Nanoscale Using AFM, Jun 2014, Cambridge, United Kingdom. ⟨hal-01962209⟩

Lionel Buchaillot, Estelle Mairiaux, Benjamin Walter, Zhuang Xiong, Marc Faucher, et al.. Near-field microscopy: Is there an alternative to micro and nano resonating cantilevers?. IEEE International Frequency Control Symposium, May 2014, Taipei, Taiwan. ⟨10.1109/FCS.2014.6859928⟩. ⟨hal-01962163⟩

Fei Wang, Nicolas Clément, Damien Ducatteau, David Troadec, Bernard Legrand, et al.. Caractérisation quantitative des capacités sous échelle de 10 nm avec un interférométrique scanning-microwave-microscopy. 17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, JNRDM 2014, 2014, Villeneuve d'Ascq, France. 3 p. ⟨hal-01018379⟩

Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. Towards a new generation of MEMS-based AFM probes. International Scanning Probe Microscopy Conference, ISPM 2013, 2013, Dijon, France. ⟨hal-00878807⟩

Bernard Legrand, D. Ducatteau, D. Theron, B. Walter, H. Tanbakuchi. Microwave reflectometry : a high-resolution technique for measuring vibration of capacitive microresonators. 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, 2013, Barcelona, Spain. paper M3P.140, 566-569, Outstanding poster presentation award nomination, ⟨10.1109/Transducers.2013.6626829⟩. ⟨hal-00877759⟩

Fei Wang, Nicolas Clément, David Troadec, Bernard Legrand, Gilles Dambrine, et al.. Nanoscale capacitors study with an interferometric scanning microwave microscope. Materials Research Society Fall Meeting, MRS Fall 2013, Symposium LL : Advances in Scanning Probe Microscopy, 2013, Boston, MA, United States. ⟨hal-00944017⟩

Z. Xiong, E. Mairiaux, B. Walter, M. Faucher, L. Buchaillot, et al.. 5.4 MHz dog-bone oscillating AFM probe with thermal actuation and piezoresistive detection. 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013, 2013, Taipei, Taiwan. pp.592-595, ⟨10.1109/MEMSYS.2013.6474311⟩. ⟨hal-00809858⟩

N. Clement, T. Dargent, H. Tanbakuchi, K. Nishiguchi, R. Sivakumarasamy, et al.. Interferometric scanning microwave microscope for nanotechnology application. American Physical Society March Meeting, APS March Meeting 2013, 2013, Baltimore, MD, United States. ⟨hal-00811777⟩

B. Walter, E. Mairiaux, Z. Xiong, M. Faucher, L. Buchaillot, et al.. DNA origami imaging with 10.9 MHz AFM MEMS probes. 25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, 2012, Paris, France. pp.555-558, ⟨10.1109/MEMSYS.2012.6170236⟩. ⟨hal-00801107⟩

B. Walter, M. Faucher, E. Mairiaux, Z. Xiong, L. Buchaillot, et al.. [Invité] Apport des microsystèmes pour la microscopie à force atomique. Journée thématique trans-GDR '' Micromanipulation pour les Micro-Nano Systèmes '', 2012, Besançon, France. ⟨hal-00797716⟩

B. Walter, M. Faucher, E. Mairiaux, Z. Xiong, L. Buchaillot, et al.. Micro-résonateurs haute fréquence pour la microscopie à force atomique. Journées Nationales du GDR Micro Nano Systèmes-Micro Nano Fluidique, 2012, Bordeaux, France. ⟨hal-00797720⟩

B. Walter, M. Faucher, E. Mairiaux, Z. Xiong, L. Buchaillot, et al.. Micro-résonateurs haute fréquence pour la microscopie à force atomique. 15ème Forum des Microscopies à Sonde Locale, 2012, Saint-Jacut-de-la-Mer, France. ⟨hal-00797718⟩

T. Dargent, D. Ducatteau, Bernard Legrand, H. Tanbakuchi, D. Theron. SOL-like calibrated RF measurements at the nanoscale on a modified scanning microwave microscope. 2nd Nano Measure Scientific Symposium, Nano Measure 2012, 2012, Stanford, CA, United States. ⟨hal-00797722⟩

Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. Conception and fabrication of piezo-resistive ring shaped AFM probe. 25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, 2012, Paris, France. pp.547-550, ⟨10.1109/MEMSYS.2012.6170180⟩. ⟨hal-00801106⟩

Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. Piezo-resistive ring-shaped AFM sensors with pico-newton force resolution. 2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012, 2012, Xi'an, China. Paper ID 1200991, Best application paper award, 184-189. ⟨hal-00801105⟩

B. Walter, E. Mairiaux, M. Faucher, Z. Xiong, L. Buchaillot, et al.. 4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips. XXIème Congrès Général de la Société Française de Physique, SFP 2011, 2011, Bordeaux, France. ⟨hal-00807202⟩

B. Walter, M. Faucher, E. Mairiaux, Z. Xiong, L. Buchaillot, et al.. 4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips. 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011, 2011, Mexico. pp.517-520, ⟨10.1109/MEMSYS.2011.5734475⟩. ⟨hal-00579045⟩

Bernard Legrand, J.P. Aime, L. Buchaillot. IMPROVE-LM - Imaging probe for vacuum environment and liquid medium. Journées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France. ⟨hal-00807209⟩

M. Faucher, Bernard Legrand, B. Walter, E. Algre, A. Ben-Amar, et al.. [Invité] Micro et nanorésonateurs électromécaniques radio-fréquences. Principes et applications. TELECOM'2011 & 7èmes Journées Franco-Maghrébines des Micro-ondes et leurs Applications, 2011, Tanger, Maroc. CDROM, papier 554, 1-6. ⟨hal-00806730⟩

B. Walter, Z. Xiong, E. Algre, E. Mairiaux, M. Faucher, et al.. [Invité] Apport des micro et nano-systèmes pour la microscopie à force atomique. Journées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France. ⟨hal-00807204⟩

Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applications. ASME 2011 International Mechanical Engineering Congress & Exposition, IMECE 2011, 2011, Denver, CO, United States. pp.IMECE2011-65083-1-5. ⟨hal-00800036⟩

A. Grira, Bernard Legrand, C. Rotinat-Libersa, E. Mairiaux, L. Buchaillot. Optimal design of non intuitive compliant microgripper with high resolution. IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2011, 2011, San Francisco, CA, United States. pp.45-50, ⟨10.1109/IROS.2011.6048665⟩. ⟨hal-00800034⟩

Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, et al.. Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applications. 5èmes Journées Nationales du GDR Micro et Nano Systèmes, 2010, Lyon, France. ⟨hal-00808200⟩

E. Algre, Bernard Legrand, M. Faucher, B. Walter, L. Buchaillot. Surface microscopy with laserless MEMS based AFM probes. 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, 2010, China. pp.292-295, ⟨10.1109/MEMSYS.2010.5442509⟩. ⟨hal-00549972⟩

B. Walter, M. Faucher, Bernard Legrand, E. Mairiaux, R. Boisgard, et al.. Improve-LM imaging probe for vacuum environment and liquid medium. Journées du Réseau National en Nanosciences et en Nanotechnologies, J3N 2010, 2010, Lille, France. ⟨hal-00808210⟩

B. Walter, E. Mairiaux, M. Faucher, Z. Xiong, L. Buchaillot, et al.. Atomic force probe using silicon ring resonator conception. 5èmes Journées Nationales du GDR Micro et Nano Systèmes, 2010, Lyon, France. ⟨hal-00808199⟩

Bernard Legrand, E. Algré, L. Buchaillot, M. Faucher, B. Walter. Vers une nouvelle génération de sonde de microscopie à force atomique à base de micro et nano-systèmes électromécaniques. 4èmes Journées Nationales en Nanosciences et Nanotechnologies, J3N 2009, 2009, Toulouse, France. ⟨hal-00575271⟩

E. Algré, Bernard Legrand, M. Faucher, B. Walter, L. Buchaillot. Tip-matter interaction measurements using MEMS ring resonators. 15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, 2009, United States. pp.1638-1641, ⟨10.1109/SENSOR.2009.5285774⟩. ⟨hal-00474451⟩

E. Algre, Bernard Legrand, M. Faucher, B. Walter, L. Buchaillot. Tip-matter interaction measurements using MEMS ring resonators. Forum des Microscopies à Sonde Locale, 2009, Hardelot, France. ⟨hal-00575264⟩

M. Sworowski, F. Neuilly, Bernard Legrand, A. Summanwar, F. Lallemand, et al.. High-Q and low-RM 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology. 15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, 2009, USA, United States. pp.2114-2117, ⟨10.1109/SENSOR.2009.5285623⟩. ⟨hal-00474452⟩

C. Durand, F. Casset, Bernard Legrand, M. Faucher, P. Renaux, et al.. Characterization of in-IC integrable in-plane nanometer scale resonators fabricated by a silicon on nothing advanced CMOS technology. 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008, 2008, United States. pp.1016-1019, ⟨10.1109/MEMSYS.2008.4443831⟩. ⟨hal-00361112⟩

Cédric Durand, Fabrice Casset, Bernard Legrand, Marc Faucher, Philippe Renaux, et al.. CHARACTERIZATION OF IN-IC INTEGRABLE IN-PLANE NANOMETER SCALE RESONATORS FABRICATED BY A SILICON ON NOTHING ADVANCED CMOS TECHNOLOGY. Micro Electro Mechanical Sysetms, Jan 2008, Tucson - AZ, United States. pp.1016-1019. ⟨cea-00320830⟩

A. S. Rollier, C. Bernard, S. Marsaudon, A. M. Bonnot, M. Faucher, et al.. High yield grafting of carbon nanotube on ultra-sharp silicon nanotips: Mechanical characterization and AFM imaging. 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), 2007, Unknown, Unknown Region. pp.878-+. ⟨hal-01553035⟩

J.B. Bureau, Bernard Legrand, D. Collard, L. Buchaillot. Compact multilayer piezoresistive gauge for in-plane strain measurement in liquids. 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, 2007, France. pp.2267-2270, ⟨10.1109/SENSOR.2007.4300621⟩. ⟨hal-00284392⟩

Bernard Legrand. Résonateurs électromécaniques : principe et applications. Ecole Thématique CNRS : Microsystèmes acoustiques, 2007, Lille, France. ⟨hal-00367378⟩

A.S. Rollier, C. Bernard, S. Marsaudon, A.M. Bonnot, M. Faucher, et al.. High yield grafting of carbon nanotube on ultra-sharp silicon nanotips : mechanical characterization and AFM imaging. 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, 2007, Japan. pp.851-854, ⟨10.1109/MEMSYS.2007.4433179⟩. ⟨hal-00284388⟩

M. Faucher, B. Walter, A.S. Rollier, K. Segueni, Bernard Legrand, et al.. Proposition of atomic force probes based on silicon ring-resonators. 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, 2007, France. pp.1529-1532, ⟨10.1109/SENSOR.2007.4300436⟩. ⟨hal-00284391⟩

C. Yamahata, T. Takekawa, K. Ayano, M. Hosogi, M. Kumemura, et al.. Silicon nanotweezers with adjustable and controlable gap for the manipulation and characterization of DNA molecules. 2006, 4 pp. ⟨hal-00147724⟩

Bernard Legrand, L. Buchaillot, D. Collard. Micro-machined actuators for the friction driven micro-motor. 2006, pp.211-214. ⟨hal-00128670⟩

Bernard Legrand, A.S. Rollier, L. Buchaillot, D. Collard. Parallel-plate electrostatic actuators in liquids : displacement-voltage optimisation for microfluidic applications. 2006, pp.718-721. ⟨hal-00128668⟩

A.S. Rollier, M. Faucher, Bernard Legrand, D. Collard, L. Buchaillot. Electrostatic actuators operating in liquid environment: suppression of pull-in instability and dynamic response. 2006, pp.244-249. ⟨hal-00128674⟩

Bernard Legrand, L. Buchaillot, D. Collard. Micro et nanomécanique, MEMS et NEMS. Ecole CNRS : Nanosciences et Nanotechnologies, 2006, Autrans, France. ⟨hal-00128667⟩

A.-S. Rollier, M. Faucher, Bernard Legrand, D. Collard, L. Buchaillot. ELECTROSTATIC ACTUATORS OPERATING IN LIQUID ENVIRONMENT : SUPPRESSION OF PULL-IN INSTABILITY AND DYNAMIC RESPONSE. DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 6 p. ⟨hal-00189294⟩

N. Abele, K. Segueni, K. Boucart, F. Casset, Bernard Legrand, et al.. Ultra-low voltage MEMS resonator based on RSG-MOSFET. 2006, pp.882-885. ⟨hal-00128669⟩

A.S. Rollier, Bernard Legrand, L. Buchaillot, D. Collard. Actionneurs électrostatiques complètement isolés : fabrication, fonctionnement et caractérisation en milieu liquide. Actes du XVIIème Congrès Français de Mécanique, CFM 2005, 2005, Troyes, France. ⟨hal-00131359⟩

Bernard Legrand, L. Buchaillot, D. Collard. Micromachined actuators for friction driven linear micro-motors. Proceedings of the Fifth International Symposium on Linear Drive for Industry Applications, LDIA 2005, 2005, Hyogo, Japan. ⟨hal-00131348⟩

L. Buchaillot, D. Collard, Bernard Legrand. Microsystèmes : principales applications et contexte national. Ecoles Nanosciences, 2005, Anglet, France. ⟨hal-00126216⟩

A.S. Rollier, Bernard Legrand, D. Collard, L. Buchaillot. Electrostatic actuators operating in liquid environment : position control without pull-in effect. 2005, pp.341-346. ⟨hal-00128651⟩

V. Agache, Bernard Legrand, D. Collard, H. Fujita, L. Buchaillot. RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducers. 2005, pp.26-31. ⟨hal-00128656⟩

M. Ataka, Bernard Legrand, L. Buchaillot, D. Collard, H. Fujita. The 2D feedback conveyance with ciliary actuator arrays. 2005, pp.31-34. ⟨hal-00125659⟩

Bernard Legrand, L. Buchaillot, D. Collard. Micromoteur entraîné par friction à double sens de rotation. Actes du XVIIème Congrès Français de Mécanique, CFM 2005, 2005, Troyes, France. ⟨hal-00131347⟩

J.B. Bureau, Bernard Legrand, D. Collard, L. Buchaillot. 3D self-assembling of SU-8 microstructures on silicon by plasma induced compressive stress. 2005, pp.19-22. ⟨hal-00128655⟩

O. Millet, O. Blanrue, Bernard Legrand, D. Collard, L. Buchaillot. MEMS reliability : metrology set-up for investigation of fatigue causes. 2005, pp.483-486. ⟨hal-00125627⟩

Bernard Legrand, D. Collard, L. Buchaillot. Stiction drive operation of micromotors : direct and reverse rotation control. 2005, pp.57-60. ⟨hal-00125661⟩

O. Millet, P. Muller, O. Blanrue, Bernard Legrand, D. Collard, et al.. Reliability of non-released microstructures : failure analysis and innovative solution process. 2005, pp.840-842. ⟨hal-00125662⟩

V. Agache, E. Quévy, O. Millet, A.S. Rollier, R. Ringot, et al.. Microsystèmes, résonateurs électromécaniques : où cela nous mène-t-il ?. Ecole Nanosciences, 2005, Anglet, France. ⟨hal-00126215⟩

Bernard Legrand. Nanotechnologie, micro et nanosystèmes. 5ème Colloque International TELECOM'2005 & 4èmes Journées Franco-Magrhébines des Micro-ondes et leurs Applications, JFMMA, 2005, Rabat, Maroc. ⟨hal-00126233⟩

A.S. Rollier, Bernard Legrand, D. Deresmes, M. Lagouge, D. Collard, et al.. Tensile stress determination in silicon nitride membrane by AFM characterization. 2005, pp.828-831. ⟨hal-00125660⟩

V. Agache, Bernard Legrand, K. Nakamura, H. Kawakatsu, L. Buchaillot, et al.. Characterization of vertical vibration of electrostatically actuated resonators using Atomic Force Microscope in noncontact mode. 2005, pp.2023-2026. ⟨hal-00125631⟩

V. Agache, Bernard Legrand, D. Collard, H. Fujita, L. Buchaillot. 1.1 GHz silicon blade nano-electromechanical resonator featuring 20 nm gap lateral transducers. 2005, pp.121-124. ⟨hal-00125628⟩

Y.H. Cho, D. Collard, L. Buchaillot, Bernard Legrand, K. Beomjoon. Characterization of individual bio-cells with thermally actuated probe arrays. 2004, pp.425-429. ⟨hal-00141170⟩

Bernard Legrand, H. Happy. TP de nanotechnologie : réalisation et observation de nanofils de silicium à l'aide de l'AFM. 8èmes Journées Pédagogiques du CNFM, 2004, Saint Malo, France. ⟨hal-00133919⟩

O. Millet, Pierre Bertrand, Bernard Legrand, D. Collard, L. Buchaillot. An original methodology to assess fatigue behavior in RF MEMS devices. European Microwave Week, 2004, Amsterdam, Netherlands. ⟨hal-00141031⟩

O. Millet, Pierre Bertrand, Bernard Legrand, D. Collard, L. Buchaillot. Reliability of polycrystalline MEMS : prediction of the debugging-time. International Symposium for Testing and Failure Analysis, ISTFA 2004, 2004, Worcester, MA, United States. ⟨hal-00141030⟩

O. Millet, Pierre Bertrand, Bernard Legrand, D. Collard, L. Buchaillot. Predictive modelling of the fatigue phenomenon for polycristalline structural layers. 2004, pp.145-148. ⟨hal-00141028⟩

D. Galayko, A. Kaiser, Bernard Legrand, L. Buchaillot, D. Collard, et al.. Microelectromechanical coupled resonsator IF filters with variable bandwidth in thick-film epitaxial polysilicon technology. 2003, pp.F23-F26. ⟨hal-00146406⟩

E. Quevy, Bernard Legrand, D. Collard, L. Buchaillot. Tapping-mode HF nanometric lateral gap resonators : experimental and theory. 2003, pp.879-882. ⟨hal-00146456⟩

O. Millet, V. Agache, Bernard Legrand, D. Collard, L. Buchaillot. Modeling of failure mechanisms for optimized MEMS CAD : design, fabrication and characterization of in situ test benches. 2003, pp.1578-1581. ⟨hal-00146440⟩

E. Quevy, Bernard Legrand, D. Collard, L. Buchaillot. Ultimate technology for micromachining of nanometric gap HF micromechanical resonators. 2003, pp.157-160. ⟨hal-00146462⟩

K. Beomjoon, D. Collard, M. Lagouge, F. Conseil, Bernard Legrand, et al.. Thermally actuated probe arrays for manipulation and characterization of individual bio-cell. 2003, pp.1255-1258. ⟨hal-00146460⟩

V. Agache, P. Bigotte, Bernard Legrand, V. Senez, L. Buchaillot, et al.. Modeling and experimental validation of silicon nanotip oxidation : towards a nanoelectromechanical filter application. 2003, pp.1287-1290. ⟨hal-00146438⟩

D. Galayko, A. Kaiser, Bernard Legrand, L. Buchaillot, C. Combi, et al.. Design of clamped-clamped beam resonator in thick-film epitaxial polysilicon technology. 2002, pp.447-450. ⟨hal-00148736⟩

D. Galayko, A. Kaiser, Bernard Legrand, C. Combi, D. Collard, et al.. High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustment. 2002, pp.665-668. ⟨hal-00148737⟩

O. Biloint, D. Galayko, Bernard Legrand, A. Kaiser. Architecture level center frequency drift compensation method for micro-mechanical filters used in IF stages of wireless telecommunication receivers. 2002, pp.136-142. ⟨hal-00148741⟩

D. Galayko, A. Kaiser, Bernard Legrand, L. Buchaillot, D. Collard, et al.. Conception de résonateurs micromécaniques pour les filtres IF dans la technologie de couches épaisses épitaxiées. Colloque CAO des Circuits Intégrés et Systèmes, 2002, Paris, France. ⟨hal-00148748⟩

V. Agache, Bernard Legrand, D. Collard, L. Buchaillot. Study of adhesive forces on a silicon nanotip force microscope in contact mode. 2002, pp.601-612. ⟨hal-00148788⟩

E. Quevy, D. Galayko, Bernard Legrand, C. Renaux, C. Combi, et al.. IF MEMS filters for mobile communication. 2001, pp.733-736. ⟨hal-00152458⟩

D. Collard, L. Buchaillot, Bernard Legrand. Microsystem technology : trends and possible application for textile. Conference on Modern Textile Factory, HIGHTEX 2001, 2001, Lille, France. ⟨hal-00152473⟩

D. Collard, L. Buchaillot, Bernard Legrand. Microsysteme : un état des lieux, enjeux et perspectives. 48èmes Journées Nationales de l'Union des Physiciens, 2000, Lille, France. ⟨hal-00158538⟩

D. Collard, L. Buchaillot, Bernard Legrand. Microsystème : enjeux et perspectives. Journée IMAPS : International Microelectronics and Packaging Society, 2000, Lille, France. ⟨hal-00158539⟩

Nicolas Mauran, Denis Lagrange, Xavier Dollat, Laurent Mazenq, Lucien Schwab, et al.. High Speed Atomic Force Microscope. NI-Week 2017, May 2017, Austin, TX, United States. 2017. ⟨hal-01529673⟩

Bernard Legrand, C. Durand, M. Faucher, L. Buchaillot. Micro et nanorésonateurs radio-fréquence. Leray J.L., Boudenot J.C., Gautier J. La micro-nano électronique, enjeux et mutations, CNRS ÉDITIONS, pp.239-242, 2009. ⟨hal-00575789⟩

H. Tanbakuchi, Bernard Legrand, D. Theron, D. Ducatteau. Système pour détecter des réponses d'un dispositif résonateur micro-électromécanique (MEMS). N° de brevet: FR2985251 (A1). 2013. ⟨hal-00846338⟩

M. Faucher, L. Buchaillot, J.P. Aime, Bernard Legrand, G. Couturier. Sonde pour microscopie à force atomique. N° de brevet: FR2915803 (A1). 2008. ⟨hal-00372090⟩

A. Kaiser, O. Billoint, D. Galayko, Bernard Legrand. Circuit superhétérodyne à filtre passe-bande de sélection de canal. N° de brevet: FR2836765 (A1). 2003. ⟨hal-00372460⟩

D. Stievenard, C. Delerue, Bernard Legrand. Détecteur infrarouge semi-conducteur et son procédé de fabrication. N° de brevet: FR2791474 (A1). 2000. ⟨hal-00372676⟩

Bernard Legrand. Contribution au domaine des actionneurs et résonateurs microélectromécaniques. Applications à la nanocaractérisation. 2012. ⟨hal-00799254⟩

Bernard Legrand. Elaboration et caractérisation physique par microscopie à champ proche de nanostructures semi-conductrices. 2000. ⟨hal-00158616⟩

L Schwab, P Allain, Nicolas Mauran, Xavier Dollat, Laurent Mazenq, et al.. Very high frequency probes for atomic force microscopy with silicon optomechanics. 2021. ⟨hal-03326075⟩

Bernard Legrand. CONTRIBUTION AU DOMAINE DES ACTIONNEURS ET RÉSONATEURS MICRO-‐ÉLECTROMÉCANIQUES. APPLICATIONS À LA NANO­‐CARACTÉRISATION.. Micro et nanotechnologies/Microélectronique. Université des Sciences et Technologie de Lille - Lille I, 2012. ⟨tel-00706851⟩