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Bernard Legrand

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937700

Determination of the effective mass and stiffness of a micro resonator from a single optical characterization

Adhitya Bhaswara , Denis Dezest , Liviu Nicu , Thierry Leichle , Bernard Legrand
TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2015, Anchorage, United States. pp.2200-2203, ⟨10.1109/TRANSDUCERS.2015.7181397⟩
Communication dans un congrès hal-01687809v1