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Bernard Legrand

5
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130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive Measurements

Lucien Schwab , Pierre-Etienne Allain , Louise Banniard , Nicolas Mauran , Denis Lagrange
IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019), Jan 2019, Seoul, South Korea. pp.819-822, ⟨10.1109/MEMSYS.2019.8870718⟩
Communication dans un congrès hal-02371188v1

Optomechanics: a key towards next-generation experiments in atomic force microscopy?

Lucien Schwab , Pierre Allain , Didier Theron , Marc Faucher , Benjamin Walter
International Conference on Quantum Metrology and Sensing, Dec 2019, Paris, France
Communication dans un congrès hal-02407634v1

[Invited] MEMS-based atomic force microscopy probes: from electromechanical to optomechanical vibrating sensors

Bernard Legrand , Lucien Schwab , Pierre Allain , Ivan Favero , Marc Faucher
AVS 65th International Symposium & Exhibition, American Vacuum Society, Oct 2018, Long Beach, United States
Communication dans un congrès hal-01908666v1

Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors

Lucien Schwab , Pierre Etienne Allain , L Banniard , A Fafin , Marc Gely
64th International Electron Devices Meeting (IEDM 2018), IEEE, Dec 2018, San Francisco, United States
Communication dans un congrès hal-01963015v1