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Bernard Legrand

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tuami-lasri
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An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements

 Thomas Dargent , Kamel Haddadi , T. Lasri , N. Clément , D. Ducatteau
Review of Scientific Instruments, 2013, 84 (12), pp.123705. ⟨10.1063/1.4848995⟩
Article dans une revue hal-00922585v1

Materials selection procedure for RF-MEMS

 G. Guisbiers , E. Herth , Bernard Legrand , N. Rolland , T. Lasri
Microelectronic Engineering, 2010, 87, pp.1792-1795. ⟨10.1016/j.mee.2009.10.016⟩
Article dans une revue hal-00549627v1

Optimization of SiNX:H films deposited by PECVD for reliability of electronic, microsystems and optical applications

 E. Herth , Bernard Legrand , L. Buchaillot , N. Rolland , T. Lasri
Microelectronics Reliability, 2010, 50, pp.1103-1106. ⟨10.1016/j.microrel.2010.04.011⟩
Article dans une revue hal-00549491v1