- 1
- 1
Bernard Legrand
2
Documents
Publications
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 2
- 2
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
Performances of the negative tone resist AZnLOF 2020 for nanotechnology applicationsIEEE Transactions on Nanotechnology, 2012, 11 (4), pp.854-859. ⟨10.1109/TNANO.2012.2196802⟩
Article dans une revue
hal-00787415v1
|
|
Electron beam nanolithography in AZnLOF 2020Microelectronic Engineering, 2010, 87, pp.2057-2060. ⟨10.1016/j.mee.2009.12.079⟩
Article dans une revue
hal-00548989v1
|