Bernard Legrand

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	Electron beam nanolithography in AZnLOF 2020 E. Herth , P. Tilmant , M. Faucher , M. François , Christophe Boyaval Microelectronic Engineering, 2010, 87, pp.2057-2060. ⟨10.1016/j.mee.2009.12.079⟩ Article dans une revue hal-00548989v1