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Bernard Legrand

2
Documents

Publications

"vincent-senez"
"lionel-buchaillot"

Modeling and experimental validation of sharpening mechanism based on thermal oxidation for fabrication of ultra-sharp silicon nanotips

 Vincent Agache , Roger Ringot , Patrice Bigotte , Vincent Senez , Bernard Legrand
IEEE Transactions on Nanotechnology, 2005, 4, pp.548-556. ⟨10.1109/TNANO.2005.851386⟩
Article dans une revue hal-00125632v1

Modeling and experimental validation of silicon nanotip oxidation : towards a nanoelectromechanical filter application

 Vincent Agache , Patrice Bigotte , Bernard Legrand , Vincent Senez , Lionel Buchaillot
12th International Conference on Solid-State Sensors, Jun 2003, Boston, United States. pp.1287-1290, ⟨10.1109/SENSOR.2003.1217008⟩
Communication dans un congrès hal-00146438v1