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Very high frequency probes for atomic force microscopy with silicon optomechanicsMicrosystems & Nanoengineering, 2022, 8, pp.32. ⟨10.1038/s41378-022-00364-4⟩
Article dans une revue
hal-03326075v2
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130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive MeasurementsIEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019), Jan 2019, Seoul, South Korea. pp.819-822, ⟨10.1109/MEMSYS.2019.8870718⟩
Communication dans un congrès
hal-02371188v1
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