Bernard Legrand

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"adrian-laborde"

"thierry-leichle"

	HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS Cécile Fuinel , Khadim Daffé , Adrian Laborde , Olivier Thomas , Laurent Mazenq The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421850⟩ Communication dans un congrès hal-01279717v1