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Bernard Legrand

183
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Influence of ordering phenomena on carbon segregation in tungsten screw dislocation

Fabienne Berthier , Bernard Legrand
Acta Materialia, 2023, 245, pp.118610. ⟨10.1016/j.actamat.2022.118610⟩
Article dans une revue hal-03765006v2
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Effect of size on the surface energy of noble metal nanoparticles from analytical and numerical approaches

Hakim Amara , Jaysen Nelayah , Jérôme Creuze , Adrian Chmielewski , Damien Alloyeau
Physical Review B, 2022, 105 (16), pp.165403. ⟨10.1103/PhysRevB.105.165403⟩
Article dans une revue hal-03863659v1
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Very high frequency probes for atomic force microscopy with silicon optomechanics

L Schwab , P E Allain , Nicolas Mauran , Xavier Dollat , Laurent Mazenq
Microsystems & Nanoengineering, 2022, 8, pp.32. ⟨10.1038/s41378-022-00364-4⟩
Article dans une revue hal-03326075v2
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Low Latency Demodulation for High-Frequency Atomic Force Microscopy Probes

Denis Lagrange , Nicolas Mauran , Lucien Schwab , Bernard Legrand
IEEE Transactions on Control Systems Technology, 2021, 29 (5), pp.2264 - 2270. ⟨10.1109/TCST.2020.3028737⟩
Article dans une revue hal-02974151v1
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Optomechanical resonating probe for very high frequency sensing of atomic forces

Pierre Etienne Allain , Lucien Schwab , Colin Mismer , Marc Gely , Estelle Mairiaux
Nanoscale, 2020, 12 (5), pp.2939-2945. ⟨10.1039/c9nr09690f⟩
Article dans une revue hal-02997481v1
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Optomechanical Resonating Probe for Very High Speed Sensing of Atomic Forces

Pierre Etienne Allain , Lucien Schwab , Colin Mismer , Marc Gély , Estelle Mairiaux
Nanoscale, 2020, 12 (5), pp.2939-2945. ⟨10.1039/C9NR09690F⟩
Article dans une revue hal-01908683v1
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Bidimensional phases in Co–Pt surface alloys: A theoretical study of ordering and surface segregation

Alexis Front , Bernard Legrand , Guy Tréglia , Christine Mottet
Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2019, 679, pp.128-138. ⟨10.1016/j.susc.2018.08.024⟩
Article dans une revue hal-03547785v1

Bidimensional phases in Co–Pt surface alloys: A theoretical study of ordering and surface segregation

Alexis Front , Bernard Legrand , G. Tréglia , Christine Mottet
Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2018, 679, pp.128 - 138. ⟨10.1016/j.susc.2018.08.024⟩
Article dans une revue hal-03891247v1
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Multi-MHz micro-electro-mechanical sensors for atomic force microscopy

Bernard Legrand , Jean-Paul Salvetat , Benjamin Walter , Marc Faucher , Didier Theron
Ultramicroscopy, 2017, 175, pp.46 - 57. ⟨10.1016/j.ultramic.2017.01.005⟩
Article dans une revue hal-01765180v1
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Magic compositions in Pd-Au nanoalloys

Christine Mottet , Beien Zhu , Alexis Front , Hazar Guesmi , Jérôme Creuze
Computational and Theoretical Chemistry, 2017, 1107, pp.49-56. ⟨10.1016/j.comptc.2016.12.023⟩
Article dans une revue hal-03547790v1

Magic compositions in Pd-Au nanoalloys

Zhu Beien , Front Alexis , Hazar Guesmi , Jérôme Creuze , Bernard Legrand
Computational and Theoretical Chemistry, 2017, 1107, pp.49-56. ⟨10.1016/j.comptc.2016.12.023⟩
Article dans une revue hal-01426928v1
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CO adsorption-induced surface segregation and formation of Pd chains on AuPd(100) alloy: density functional theory based ising model and Monte Carlo simulations

Beien Zhu , Jérôme Creuze , Christine Mottet , Bernard Legrand , Hazar Guesmi
Journal of Physical Chemistry C, 2016, 120, pp.350-359. ⟨10.1021/acs.jpcc.5b10158⟩
Article dans une revue hal-01267581v1

Environment dependence of magnetic moment and atomic level shifts within tight-binding approximation: An illustration in the case of cobalt

C. Goyhenex , G. Tréglia , Bernard Legrand
Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2016, 646 (SI), pp.261-268. ⟨10.1016/j.susc.2015.09.004⟩
Article dans une revue hal-01455014v1

A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes

Adhitya Bhaswara , Hohyun Keum , Fabrice Mathieu , Bernard Legrand , Seok Kim
Frontiers of Mechanical Engineering in China, 2016, 2 (1), ⟨10.3389/fmech.2016.00001⟩
Article dans une revue hal-01960876v1
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Environmental microbiology as a mosaic of explored ecosystems and issues

Denis Faure , Patricia Bonin , Robert Duran , Pierre Amato , Florence Arsene-Ploetze
Environmental Science and Pollution Research, 2015, 22 (18), pp.13577-13598. ⟨10.1007/s11356-015-5164-5⟩
Article dans une revue hal-01247096v1

Surface segregation in AuPd alloys: Ab initio analysis of the driving forces

Jérôme Creuze , Hazar Guesmi , Christine Mottet , Beien Zhu , Bernard Legrand
Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2015, 639, pp.48 - 53. ⟨10.1016/j.susc.2015.04.017⟩
Article dans une revue hal-01378430v1
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Crossover among structural motifs in Pd–Au nanoalloys

B. Zhu , H. Guesmi , J. Creuze , Bernard Legrand , C. Mottet
Physical Chemistry Chemical Physics, 2015, 17, pp.28129-28136. ⟨10.1039/C5CP00491H⟩
Article dans une revue hal-01222110v1

Design and measurement of AFM probe based on MEMS resonator

Zhuang Xiong , Bernard Legrand
High Power Laser and Particle Beams, 2015, 27 (2), pp.024119-1. ⟨10.11884/HPLPB201527.024119⟩
Article dans une revue hal-01961045v1

Two types of MEMS-based oscillating AFM probes

Zhuang Xiong , Estelle Mairiaux , Benjamin Walter , Marc Faucher , Lionel Buchaillot
Journal of Chinese Electron Microscopy Society , 2014, 2, pp.137-141
Article dans une revue hal-01960910v1
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A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection

Zhuang Xiong , Estelle Mairiaux , Benjamin Walter , Marc Faucher , Lionel Buchaillot
Sensors, 2014, 14 (11), pp.20667-20686. ⟨10.3390/s141120667⟩
Article dans une revue hal-01960848v1

Fabrication of nanoplate resonating structures via micro-masonry

Adhitya Bhaswara , Hohyun Keum , S Rhee , Bernard Legrand , Fabrice Mathieu
Journal of Micromechanics and Microengineering, 2014, 24 (11), pp.115012. ⟨10.1088/0960-1317/24/11/115012⟩
Article dans une revue hal-01687810v1

Quantitative impedance characterization of sub-10 nm scale capacitors and tunnel junctions with an interferometric scanning microwave microscope

Fei Wang , Nicolas Clément , Damien Ducatteau , David Troadec , Hassan Tanbakuchi
Nanotechnology, 2014, 25 (40), pp.405703. ⟨10.1088/0957-4484/25/40/405704⟩
Article dans une revue hal-01960609v1
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Detecting response of microelectromechanical resonators by microwave reflectometry

Bernard Legrand , D. Ducatteau , D. Theron , B. Walter , H. Tanbakuchi
Applied Physics Letters, 2013, 103, pp.053124-1-5. ⟨10.1063/1.4817411⟩
Article dans une revue hal-00871931v1

MEMS piezoresistive ring resonator for AFM imaging with pico-Newton force resolution

Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot
Journal of Micromechanics and Microengineering, 2013, 23, pp.035016-1-10. ⟨10.1088/0960-1317/23/3/035016⟩
Article dans une revue hal-00795965v1

Piezoresistive ring-shaped AFM sensors with pico-newton force resolution

Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot
International Journal of Intelligent Mechatronics and Robotics, 2013, 3, pp.38-52. ⟨10.4018/ijimr.2013010104⟩
Article dans une revue hal-00871948v1
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Evidence of Pd segregation and stabilization at edges of AuPd nano-clusters in the presence of CO: A combined DFT and DRIFTS study

Beien Zhu , Gode Thrimurthulu , Laurent Delannoy , Catherine Louis , Christine Mottet
Journal of Catalysis, 2013, 308, pp.272-281. ⟨10.1016/j.jcat.2013.08.022⟩
Article dans une revue hal-03184658v1
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An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements

Thomas Dargent , Kamel Haddadi , T. Lasri , N. Clément , D. Ducatteau
Review of Scientific Instruments, 2013, 84 (12), pp.123705. ⟨10.1063/1.4848995⟩
Article dans une revue hal-00922585v1

MEMS ring resonators for laserless AFM with sub-nanoNewton force resolution

Emmanuelle Algre , Zhuang Xiong , Marc Faucher , Benjamin Walter , Lionel Buchaillot
Journal of Microelectromechanical Systems, 2012, 21, pp.385-397. ⟨10.1109/JMEMS.2011.2179012⟩
Article dans une revue hal-00787407v1

Segregation in bimetallic nanowires: Size and thermodynamic ensemble effects

Emile Maras , Fabienne Berthier , Isabelle Braems , Bernard Legrand
Physical Review B: Condensed Matter and Materials Physics (1998-2015), 2012, 86 (5), ⟨10.1103/PhysRevB.86.054205⟩
Article dans une revue hal-02990483v1

Performances of the negative tone resist AZnLOF 2020 for nanotechnology applications

Etienne Herth , Emmanuelle Algre , Pascal Tilmant , Martin François , Christophe Boyaval
IEEE Transactions on Nanotechnology, 2012, 11 (4), pp.854-859. ⟨10.1109/TNANO.2012.2196802⟩
Article dans une revue hal-00787415v1

Optimization of ohmic contact and adhesion on polysilicon in MEMS–NEMS wet etching process

Etienne Herth , Emmanuelle Algré , Bernard Legrand , Lionel Buchaillot
Microelectronic Engineering, 2011, 88 (5), pp.724-728. ⟨10.1016/j.mee.2010.06.032⟩
Article dans une revue hal-02300269v1

Multiscale Modelling of the Ageing Kinetics of a 2D Deposit

Fabienne Berthier , Emile Maras , Isabelle Braems , Bernard Legrand
Solid State Phenomena, 2011, 172-174, pp.664-669. ⟨10.4028/www.scientific.net/SSP.172-174.664⟩
Article dans une revue hal-02990476v1

Fabrication of 24-MHz-disk resonators with silicon passive integration technology

M. Sworowski , F. Neuilly , Bernard Legrand , A. Summanwar , P. Philippe
IEEE Electron Device Letters, 2010, 31, pp.23-25. ⟨10.1109/LED.2009.2034542⟩
Article dans une revue hal-00548984v1

Materials selection procedure for RF-MEMS

G. Guisbiers , E. Herth , Bernard Legrand , N. Rolland , T. Lasri
Microelectronic Engineering, 2010, 87, pp.1792-1795. ⟨10.1016/j.mee.2009.10.016⟩
Article dans une revue hal-00549627v1

Electron beam nanolithography in AZnLOF 2020

E. Herth , P. Tilmant , M. Faucher , M. François , Christophe Boyaval
Microelectronic Engineering, 2010, 87, pp.2057-2060. ⟨10.1016/j.mee.2009.12.079⟩
Article dans une revue hal-00548989v1

Optimization of SiNX:H films deposited by PECVD for reliability of electronic, microsystems and optical applications

E. Herth , Bernard Legrand , L. Buchaillot , N. Rolland , T. Lasri
Microelectronics Reliability, 2010, 50, pp.1103-1106. ⟨10.1016/j.microrel.2010.04.011⟩
Article dans une revue hal-00549491v1

Development of a new generation of active AFM tools for applications in liquids

A.S. Rollier , D.F.L. Jenkins , El Hadj Dogheche , Bernard Legrand , M. Faucher
Journal of Micromechanics and Microengineering, 2010, 20, pp.085010-1-11. ⟨10.1088/0960-1317/20/8/085010⟩
Article dans une revue hal-00548990v1

Design and operation of a silicon ring resonator for force sensing applications above 1 MHz

Benjamin Walter , Marc Faucher , Emmanuelle Algre , Bernard Legrand , Rodolphe Boisgard
Journal of Micromechanics and Microengineering, 2009, 19 (11), pp.115009-1-7. ⟨10.1088/0960-1317/19/11/115009⟩
Article dans une revue hal-00472725v1

Design, fabrication, and operation of two-dimensional conveyance system with ciliary actuator arrays

M. Ataka , Bernard Legrand , L. Buchaillot , D. Collard , H. Fujita
IEEE/ASME Transactions on Mechatronics, 2009, 14, pp.119-125. ⟨10.1109/TMECH.2008.2004770⟩
Article dans une revue hal-00472723v1

Towards silicon-nanowire-structured materials by the intimate mixing of patterning the solid state and chemical reactions

D. Hourlier , Bernard Legrand , Christophe Boyaval , P. Perrot
Journal of Nano Research, 2009, 6, pp.215-224. ⟨10.4028/www.scientific.net/JNanoR.6.215⟩
Article dans une revue hal-00471951v1
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In-Plane Silicon-On-Nothing Nanometer-Scale Resonant Suspended Gate MOSFET for In-IC Integration Perspectives

Cédric Durand , Fabrice Casset , Philippe Renaux , Nicolas Abelé , Bernard Legrand
IEEE Electron Device Letters, 2008, 29 (5), pp.494-496. ⟨10.1109/LED.2008.919781⟩
Article dans une revue cea-00320837v1

Silicon nanotweezers with subnanometer resolution for the micromanipulation of biomolecules

C. Yamahata , D. Collard , Bernard Legrand , T. Takekawa , M. Kumemura
Journal of Microelectromechanical Systems, 2008, 17, pp.623-631. ⟨10.1109/JMEMS.2008.922080⟩
Article dans une revue hal-00357278v1

Towards mechanical characterization of biomolecules by MNEMS tools

D. Collard , C. Yamahata , Bernard Legrand , T. Takekawa , M. Kumemura
IEEJ Transactions on Electrical and Electronic Engineering, 2007, 2, pp.262-271. ⟨10.1002/tee.20154⟩
Article dans une revue hal-00283054v1

SOI-based nanoelectrospray emitter tips for mass spectrometry: a coupled MEMS and microfluidic design

Bernard Legrand , Alison Ashcroft , Lionel Buchaillot , S. Arscott
Journal of Micromechanics and Microengineering, 2007, 17 (3), pp.509-514. ⟨10.1088/0960-1317/17/3/013⟩
Article dans une revue hal-02347438v1

A silicon beam-based microcantilever nanoelectrosprayer

S. Arscott , Bernard Legrand , Lionel Buchaillot , Alison Ashcroft
Sensors and Actuators B: Chemical, 2007, 125 (1), pp.72-78. ⟨10.1016/j.snb.2007.01.040⟩
Article dans une revue hal-02347442v1

Complete system for wireless powering and remote control of electrostatic actuators by inductive coupling

Philippe Basset , A. Kaiser , Bernard Legrand , D. Collard , L. Buchaillot
IEEE/ASME Transactions on Mechatronics, 2007, 12, pp.23-31. ⟨10.1109/TMECH.2006.886245⟩
Article dans une revue hal-00255847v1

Coupled-resonator micromechanical filters with voltage tuneable bandpass characteristic in thick-film polysilicon technology

Dimitri Galayko , Andreas Kaiser , Bernard Legrand , Lionel Buchaillot , Dominique Collard
Sensors and Actuators A: Physical , 2006, 126 (1), pp.227-240. ⟨10.1016/j.sna.2005.10.033⟩
Article dans une revue hal-01195973v1

Site segregation in size-mismatched nanoalloys: Application to Cu–Ag

Virginie Moreno , Jérôme Creuze , Fabienne Berthier , Christine Mottet , Guy Tréglia
Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2006, 600 (22), pp.5011-5020. ⟨10.1016/j.susc.2006.08.030⟩
Article dans une revue cea-02355772v1

Silicon surface nano-oxidation using scanning probe microscopy

D. Stievenard , Bernard Legrand
Progress in Surface Science, 2006, 81, pp.112-140
Article dans une revue hal-00127846v1

Complete miscibility between different crystallographic structures : Monte Carlo simulations of Cu-Ag deposited on Cu(001)

Isabelle Braems , Fabienne Berthier , Robert Tétot , Bernard Legrand
Physical Review B: Condensed Matter and Materials Physics (1998-2015), 2006, 74 (11), pp.113406
Article dans une revue hal-00108260v1

Coupled-resonator micromechanical filters with voltage tunable bandpass characteristic in thickfilm polysilicon technology

D. Galayko , A. Kaiser , Bernard Legrand , L. Buchaillot , C. Combi
Sensors and Actuators A: Physical , 2006, 126, pp.227-240
Article dans une revue hal-00138651v1
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Stability and pull-in voltage of electrostatic parallel-plate actuators in liquid solutions

Anne-Sophie Rollier , Bernard Legrand , Dominique Collard , Lionel Buchaillot
Journal of Micromechanics and Microengineering, 2006, 16, pp.794-801. ⟨10.1088/0960-1317/16/4/016⟩
Article dans une revue hal-00128663v1
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Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids

Bernard Legrand , Anne-Sophie Rollier , Dominique Collard , Lionel Buchaillot
Applied Physics Letters, 2006, 88 (3), pp.034105-1-3. ⟨10.1063/1.2165282⟩
Article dans une revue hal-00128662v1

Tunable passband T-filter electrostatically driven polysilicon micromechanical resonators

D. Galayko , A. Kaiser , Bernard Legrand , L. Buchaillot , D. Collard
Sensors and Actuators A: Physical , 2005, 117, pp.115-120
Article dans une revue hal-00125630v1

Fabrication and characterization of 1.1 GHz blade nanoelectromechanical resonator

Vincent Agache , Bernard Legrand , Dominique Collard , Lionel Buchaillot , Hiroyuki Fujita
Applied Physics Letters, 2005, 86, pp.213104-1-3. ⟨10.1063/1.1929873⟩
Article dans une revue hal-00125633v1

Modeling and experimental validation of sharpening mechanism based on thermal oxidation for fabrication of ultra-sharp silicon nanotips

Vincent Agache , Roger Ringot , Patrice Bigotte , Vincent Senez , Bernard Legrand
IEEE Transactions on Nanotechnology, 2005, 4, pp.548-556. ⟨10.1109/TNANO.2005.851386⟩
Article dans une revue hal-00125632v1

Influence on the step covering on fatigue phenomenon for polycrystalline silicon MEMS

O. Millet , Bernard Legrand , D. Collard , L. Buchaillot
Japanese Journal of Applied Physics, 2003, 41, pp.L1339-L1341
Article dans une revue hal-00146435v1

Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode to resonator gap reduction

D. Galayko , A. Kaiser , L. Buchaillot , Bernard Legrand , D. Collard
Journal of Micromechanics and Microengineering, 2003, 13, pp.134-140
Article dans une revue hal-00146391v1

Silicon nanowires with sub 10 nm lateral dimensions : from AFM lithography based fabrication to electrical measurements

Bernard Legrand , D. Deresmes , D. Stievenard
Journal of Vacuum Science and Technology, 2002, 20, pp.862-870
Article dans une revue hal-00148765v1

Electrostatic micro actuators

D. Collard , H. Fujita , H. Toshiyoshi , Bernard Legrand , L. Buchaillot
Nano et micro technologies, 2002, 2, pp.83-124
Article dans une revue hal-00148761v1

Surface micro-machining : an overview

D. Collard , H. Fujita , H. Toshiyoshi , Bernard Legrand , L. Buchaillot
Nano et micro technologies, 2002, 2, pp.35-50
Article dans une revue hal-00148781v1

Adhesive forces investigation on a silicon tip by contact mode atomic force microscope

Vincent Agache , Bernard Legrand , Dominique Collard , Lionel Buchaillot
Applied Physics Letters, 2002, 81, pp.2623-2625. ⟨10.1063/1.1508806⟩
Article dans une revue hal-00148768v1

Influence of the step covering on fatigue phenomenon for polycrystalline silicon micro-electro-mechanical-systems (MEMS)

O. Millet , Bernard Legrand , D. Collard , L. Buchaillot
Japanese Journal of Applied Physics, part 2 : Letters, 2002, 41, pp.L1339-L1341
Article dans une revue hal-00250391v1

Vacuum and cryogenic station for Micro-Electro-Mechanical Systems probing and testing

Bernard Legrand , E. Quévy , B. Stefanelli , D. Collard , L. Buchaillot
Review of Scientific Instruments, 2002, 73, pp.4393-4395
Article dans une revue hal-00148782v1

Thermally assisted formation of silicon islands on a silicon-on-insulator substrate

Bernard Legrand , Vincent Agache , Jean-Philippe Nys , Thierry Melin , Vincent Senez
Journal of Applied Physics, 2002, 91, pp.106-111. ⟨10.1063/1.1420761⟩
Article dans une revue hal-00149668v1

Thermally assisted formation of silicon islands on a silicon on insulator substrate

Bernard Legrand , Vincent Agache , Thierry Melin , Jean-Philippe Nys , Vincent Senez
Journal of Applied Physics, 2001, 91, pp.106-111. ⟨10.1063/1.1420761⟩
Article dans une revue hal-00152464v1

Formation of silicon islands on a silicon on insulator substrate upon thermal annealing

Bernard Legrand , Vincent Agache , Jean-Philippe Nys , Vincent Senez , Didier Stiévenard
Applied Physics Letters, 2000, 76, pp.3271-3273. ⟨10.1063/1.126603⟩
Article dans une revue hal-00158537v1

Atomic force microscope tip-surface behaviour under continuous bias or pulsed voltages in non contact mode

Bernard Legrand , D. Stievenard
Applied Physics Letters, 2000, 76, pp.1018-1020
Article dans une revue hal-00158646v1

Imaging the wave function amplitudes in cleaved semiconductor quantum boxes

B. Grandidier , Y.M. Niquet , Bernard Legrand , J.P. Nys , C. Priester
Physical Review Letters, 2000, 85, pp.1068-1071
Article dans une revue hal-00158644v1
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Les différentes phases du développement des pivots et des premiers bois d'un cerf

Bernard Legrand
Revue forestière française, 1975, 27 (1), pp.71-73. ⟨10.4267/2042/20920⟩
Article dans une revue hal-03395620v1
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Le parc animalier des Yvelines

Bernard Legrand
Revue forestière française, 1972, 24 (6), pp.460-468. ⟨10.4267/2042/20650⟩
Article dans une revue hal-03395640v1
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Effarouchement passif des rapaces et corvidés

Bernard Legrand
Revue forestière française, 1971, 23 (4), pp.431-435. ⟨10.4267/2042/20510⟩
Article dans une revue hal-03395047v1
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Towards near-zero-power logic gates based on capacitive MEMS devices operating in adiabatic regime

Aleksandra Markovic , Gaël Pillonnet , Bernard Legrand
Workshop nano, meso, micro: Science and innovation for radio and photonics, International Union of Radio Science, URSI France JS22, URSI, Mar 2022, Paris, France
Communication dans un congrès hal-03649053v1
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Ultra-Low-Power Logic with Contactless Capacitive MEMS

Aleksandra Markovic , Laurent Mazenq , Adrian Laborde , Herve Fanet , Gael Pillonnet
21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), Dec 2022, Salt Lake City, United States. pp.233-227, ⟨10.1109/PowerMEMS56853.2022.10007572⟩
Communication dans un congrès hal-03946985v1

Optomechanics: a key towards next-generation experiments in atomic force microscopy?

Lucien Schwab , Pierre Allain , Didier Theron , Marc Faucher , Benjamin Walter
International Conference on Quantum Metrology and Sensing, Dec 2019, Paris, France
Communication dans un congrès hal-02407634v1
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130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive Measurements

Lucien Schwab , Pierre-Etienne Allain , Louise Banniard , Nicolas Mauran , Denis Lagrange
IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019), Jan 2019, Seoul, South Korea. pp.819-822, ⟨10.1109/MEMSYS.2019.8870718⟩
Communication dans un congrès hal-02371188v1
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Finite elements based reduced order models for nonlinear dynamics of piezoelectric and dielectric laminated micro/nanostructures

Olivier Thomas , Arthur Givois , Aurélien Grolet , Jean-François Deü , Cécile Fuinel
EUROMECH Colloquium 603, Dynamics of micro and nano systems, Sep 2018, Porto, Portugal
Communication dans un congrès hal-01962993v1

[Invited] MEMS-based atomic force microscopy probes: from electromechanical to optomechanical vibrating sensors

Bernard Legrand , Lucien Schwab , Pierre Allain , Ivan Favero , Marc Faucher
AVS 65th International Symposium & Exhibition, American Vacuum Society, Oct 2018, Long Beach, United States
Communication dans un congrès hal-01908666v1

The gateone-project: a digital innovation hub accelerating innovation through ecosystem design and product trajectory

Régis Hamelin , Géraldine Andrieux , Isabelle Chartier , Bahaa El Roustom , T. Healy
International Conference and Exhibition on Integrated Issues of Miniaturized Systems Smart Systems Integration SSI 2018, Apr 2018, Dresden, Germany
Communication dans un congrès hal-01962997v1

[Invited] SMM characterization of Au nanodots and FcC11SH molecules

Didier Theron , Fei Wang , Thomas Dargent , Damien Ducatteau , Charlene Brillard
XX Annual Linz Winter Workshop, Advances in Single-Molecule Research for Biology & Nanoscience, Feb 2018, Linz, Austria
Communication dans un congrès hal-01962187v1

Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors

Lucien Schwab , Pierre Etienne Allain , L Banniard , A Fafin , Marc Gely
64th International Electron Devices Meeting (IEDM 2018), IEEE, Dec 2018, San Francisco, United States
Communication dans un congrès hal-01963015v1

Driving and sensing M/NEMS flexural vibration using dielectric transduction

Cécile Fuinel , Fabrice Mathieu , Bernard Legrand
31st International Conference EUROSENSORS, EUROSENSORS 2017, Sep 2017, Paris, France
Communication dans un congrès hal-01962981v1

High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration

Cécile Fuinel , Fabrice Mathieu , Adrian Laborde , Laurent Mazenq , Christian Bergaud
19th International Conference on Solid-State Sensors, Actuators and Microsystems TRANSDUCERS 17, Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994155⟩
Communication dans un congrès hal-01962426v1

Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction

Adhitya Bhaswara , Hohyun Keum , Fabrice Mathieu , Bernard Legrand , Seok Kim
42nd International Conference on Micro and Nano Engineering, MNE 2016, Sep 2016, Vienne, Austria
Communication dans un congrès hal-01962410v1
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HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS

Cécile Fuinel , Khadim Daffé , Adrian Laborde , Olivier Thomas , Laurent Mazenq
The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421850⟩
Communication dans un congrès hal-01279717v1
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Optimization of length and thickness of smart transduction layers on beam structures for control and M/NEMS applications

Olivier Thomas , Bernard Legrand , Cécile Fuinel
ASME 2015 Conference on Smart Materials Adaptive Structures and Intelligent Systems (SMASIS 2015), Sep 2015, Colorado Springs, United States. 9p., ⟨10.1115/SMASIS2015-8857⟩
Communication dans un congrès hal-01203144v1

Sub-10 nm-scale capacitors and tunnel junctions measurements by SMM coupled to RF interferometry

F. Wang , Thomas Dargent , D. Ducatteau , Gilles Dambrine , Kamel Haddadi
45th European Microwave Conference EuMC 2015, Sep 2015, Paris, France. ⟨10.1109/EuMC.2015.7345849⟩
Communication dans un congrès hal-01962399v1

When capacitive transduction meets the thermomechanical limit: Towards femto-newton force sensors at very high frequency

S. Houmadi , Bernard Legrand , J.P. Salvetat , B. Walter , E. Mairiaux
28th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2015, Jan 2015, Estoril, Portugal. ⟨10.1109/MEMSYS.2015.7050908⟩
Communication dans un congrès hal-01962374v1

Determination of the effective mass and stiffness of a micro resonator from a single optical characterization

Adhitya Bhaswara , Denis Dezest , Liviu Nicu , Thierry Leichle , Bernard Legrand
TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2015, Anchorage, United States. pp.2200-2203, ⟨10.1109/TRANSDUCERS.2015.7181397⟩
Communication dans un congrès hal-01687809v1

A new optimal design method for electrostatically actuated silicon-based MEMS: Application to a micro-gripper with large stroke and high force resolution

A. Grira , C. Rotinat-Libersa , Bernard Legrand , L. Buchaillot
1st International Conference on Engineering and Applied Sciences Optimization, OPT-i 2014, Jun 2014, Kos Island, Greece. pp.2407-2417
Communication dans un congrès cea-01844451v1

Characterization of sub-10nm-scale capacitors and tunnel junctions by SMM coupled to RF interferometry

Fei Wang , Damien Ducatteau , David Troadec , Hassan Tanbakuchi , Bernard Legrand
European Conference on Electrical Measurements at the Nanoscale Using AFM, Jun 2014, Cambridge, United Kingdom
Communication dans un congrès hal-01962209v1

Caractérisation quantitative des capacités sous échelle de 10 nm avec un interférométrique scanning-microwave-microscopy

Fei Wang , Nicolas Clément , Damien Ducatteau , David Troadec , Bernard Legrand
17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, JNRDM 2014, 2014, Villeneuve d'Ascq, France. 3 p
Communication dans un congrès hal-01018379v1

Near-field microscopy: Is there an alternative to micro and nano resonating cantilevers?

Lionel Buchaillot , Estelle Mairiaux , Benjamin Walter , Zhuang Xiong , Marc Faucher
IEEE International Frequency Control Symposium, May 2014, Taipei, Taiwan. ⟨10.1109/FCS.2014.6859928⟩
Communication dans un congrès hal-01962163v1

Towards a new generation of MEMS-based AFM probes

Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot
International Scanning Probe Microscopy Conference, ISPM 2013, 2013, Dijon, France
Communication dans un congrès hal-00878807v1

Microwave reflectometry : a high-resolution technique for measuring vibration of capacitive microresonators

Bernard Legrand , D. Ducatteau , D. Theron , B. Walter , H. Tanbakuchi
17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, 2013, Barcelona, Spain. paper M3P.140, 566-569, Outstanding poster presentation award nomination, ⟨10.1109/Transducers.2013.6626829⟩
Communication dans un congrès hal-00877759v1

Nanoscale capacitors study with an interferometric scanning microwave microscope

Fei Wang , Nicolas Clément , David Troadec , Bernard Legrand , Gilles Dambrine
Materials Research Society Fall Meeting, MRS Fall 2013, Symposium LL : Advances in Scanning Probe Microscopy, 2013, Boston, MA, United States
Communication dans un congrès hal-00944017v1

5.4 MHz dog-bone oscillating AFM probe with thermal actuation and piezoresistive detection

Z. Xiong , E. Mairiaux , B. Walter , M. Faucher , L. Buchaillot
26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013, 2013, Taipei, Taiwan. pp.592-595, ⟨10.1109/MEMSYS.2013.6474311⟩
Communication dans un congrès hal-00809858v1

Interferometric scanning microwave microscope for nanotechnology application

N. Clement , Thomas Dargent , H. Tanbakuchi , K. Nishiguchi , R. Sivakumarasamy
American Physical Society March Meeting, APS March Meeting 2013, 2013, Baltimore, MD, United States
Communication dans un congrès hal-00811777v1

SOL-like calibrated RF measurements at the nanoscale on a modified scanning microwave microscope

Thomas Dargent , D. Ducatteau , Bernard Legrand , H. Tanbakuchi , D. Theron
2nd Nano Measure Scientific Symposium, Nano Measure 2012, 2012, Stanford, CA, United States
Communication dans un congrès hal-00797722v1

Micro-résonateurs haute fréquence pour la microscopie à force atomique

B. Walter , M. Faucher , E. Mairiaux , Z. Xiong , L. Buchaillot
15ème Forum des Microscopies à Sonde Locale, 2012, Saint-Jacut-de-la-Mer, France
Communication dans un congrès hal-00797718v1

Piezo-resistive ring-shaped AFM sensors with pico-newton force resolution

Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot
2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012, 2012, Xi'an, China. Paper ID 1200991, Best application paper award, 184-189
Communication dans un congrès hal-00801105v1

[Invité] Apport des microsystèmes pour la microscopie à force atomique

B. Walter , M. Faucher , E. Mairiaux , Z. Xiong , L. Buchaillot
Journée thématique trans-GDR '' Micromanipulation pour les Micro-Nano Systèmes '', 2012, Besançon, France
Communication dans un congrès hal-00797716v1

Conception and fabrication of piezo-resistive ring shaped AFM probe

Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot
25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, 2012, Paris, France. pp.547-550, ⟨10.1109/MEMSYS.2012.6170180⟩
Communication dans un congrès hal-00801106v1

DNA origami imaging with 10.9 MHz AFM MEMS probes

B. Walter , E. Mairiaux , Z. Xiong , M. Faucher , L. Buchaillot
25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, 2012, Paris, France. pp.555-558, ⟨10.1109/MEMSYS.2012.6170236⟩
Communication dans un congrès hal-00801107v1

Micro-résonateurs haute fréquence pour la microscopie à force atomique

B. Walter , M. Faucher , E. Mairiaux , Z. Xiong , L. Buchaillot
Journées Nationales du GDR Micro Nano Systèmes-Micro Nano Fluidique, 2012, Bordeaux, France
Communication dans un congrès hal-00797720v1

4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips

Benjamin Walter , Estelle Mairiaux , M. Faucher , Zhuang Xiong , L. Buchaillot
XXIème Congrès Général de la Société Française de Physique, SFP 2011, Jul 2011, Bordeaux, France
Communication dans un congrès hal-00807202v1

[Invité] Apport des micro et nano-systèmes pour la microscopie à force atomique

Benjamin Walter , Zhuang Xiong , Emmanuelle Algre , Estelle Mairiaux , Marc Faucher
Journées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France
Communication dans un congrès hal-00807204v1

IMPROVE-LM - Imaging probe for vacuum environment and liquid medium

Bernard Legrand , J.P. Aime , L. Buchaillot
Journées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France
Communication dans un congrès hal-00807209v1

Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applications

Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot
ASME 2011 International Mechanical Engineering Congress & Exposition, IMECE 2011, 2011, Denver, CO, United States. pp.IMECE2011-65083-1-5
Communication dans un congrès hal-00800036v1

Optimal design of non intuitive compliant microgripper with high resolution

A. Grira , Bernard Legrand , C. Rotinat-Libersa , E. Mairiaux , L. Buchaillot
IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2011, 2011, San Francisco, CA, United States. pp.45-50, ⟨10.1109/IROS.2011.6048665⟩
Communication dans un congrès hal-00800034v1

[Invité] Micro et nanorésonateurs électromécaniques radio-fréquences. Principes et applications

Marc Faucher , Bernard Legrand , Benjamin Walter , Emmanuelle Algre , A. Ben-Amar
TELECOM'2011 & 7èmes Journées Franco-Maghrébines des Micro-ondes et leurs Applications, 2011, Tanger, Maroc. CDROM, papier 554, 1-6
Communication dans un congrès hal-00806730v1

4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips

Benjamin Walter , M. Faucher , Estelle Mairiaux , Zhuang Xiong , L. Buchaillot
24th International Conference on Micro Electro Mechanical Systems, MEMS 2011, Jan 2011, Cancun, Mexico. pp.517-520, ⟨10.1109/MEMSYS.2011.5734475⟩
Communication dans un congrès hal-00579045v1

Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applications

Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot
5èmes Journées Nationales du GDR Micro et Nano Systèmes, 2010, Lyon, France
Communication dans un congrès hal-00808200v1

Surface microscopy with laserless MEMS based AFM probes

Emmanuelle Algre , Bernard Legrand , Marc Faucher , Benjamin Walter , Lionel Buchaillot
23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Jan 2010, Hong Kong, China. pp.292-295, ⟨10.1109/MEMSYS.2010.5442509⟩
Communication dans un congrès hal-00549972v1

Improve-LM imaging probe for vacuum environment and liquid medium

B. Walter , M. Faucher , Bernard Legrand , E. Mairiaux , R. Boisgard
Journées du Réseau National en Nanosciences et en Nanotechnologies, J3N 2010, 2010, Lille, France
Communication dans un congrès hal-00808210v1

Atomic force probe using silicon ring resonator conception

B. Walter , E. Mairiaux , M. Faucher , Z. Xiong , L. Buchaillot
5èmes Journées Nationales du GDR Micro et Nano Systèmes, 2010, Lyon, France
Communication dans un congrès hal-00808199v1

High-Q and low-RM 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology

M. Sworowski , F. Neuilly , Bernard Legrand , A. Summanwar , F. Lallemand
15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, 2009, USA, United States. pp.2114-2117, ⟨10.1109/SENSOR.2009.5285623⟩
Communication dans un congrès hal-00474452v1

Tip-matter interaction measurements using MEMS ring resonators

Emmanuelle Algre , Bernard Legrand , Marc Faucher , Benjamin Walter , Lionel Buchaillot
15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, Jun 2009, Denver, CO, United States. pp.1638-1641, ⟨10.1109/SENSOR.2009.5285774⟩
Communication dans un congrès hal-00474451v1

Tip-matter interaction measurements using MEMS ring resonators

Emmanuelle Algre , Bernard Legrand , Marc Faucher , Benjamin Walter , Lionel Buchaillot
Forum des Microscopies à Sonde Locale, 2009, Hardelot, France
Communication dans un congrès hal-00575264v1

Vers une nouvelle génération de sonde de microscopie à force atomique à base de micro et nano-systèmes électromécaniques

Bernard Legrand , Emmanuelle Algre , Lionel Buchaillot , Marc Faucher , Benjamin Walter
4èmes Journées Nationales en Nanosciences et Nanotechnologies, J3N 2009, 2009, Toulouse, France
Communication dans un congrès hal-00575271v1
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Characterization of IN-IC integrable in-plane nanometer scale resonators fabricated by a silicon on nothing advanced CMOS technology

Cédric Durand , Fabrice Casset , Bernard Legrand , Marc Faucher , Philippe Renaux
21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008, Jan 2008, Tucson - AZ, United States. pp.1016-1019, ⟨10.1109/MEMSYS.2008.4443831⟩
Communication dans un congrès cea-00320830v1

Proposition of atomic force probes based on silicon ring-resonators

M. Faucher , B. Walter , A.S. Rollier , K. Segueni , Bernard Legrand
14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, 2007, France. pp.1529-1532, ⟨10.1109/SENSOR.2007.4300436⟩
Communication dans un congrès hal-00284391v1

High yield grafting of carbon nanotube on ultra-sharp silicon nanotips : mechanical characterization and AFM imaging

A.S. Rollier , C. Bernard , S. Marsaudon , A.M. Bonnot , M. Faucher
20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, 2007, Japan. pp.851-854, ⟨10.1109/MEMSYS.2007.4433179⟩
Communication dans un congrès hal-00284388v1

Résonateurs électromécaniques : principe et applications

Bernard Legrand
Ecole Thématique CNRS : Microsystèmes acoustiques, 2007, Lille, France
Communication dans un congrès hal-00367378v1

High yield grafting of carbon nanotube on ultra-sharp silicon nanotips: Mechanical characterization and AFM imaging

A. S. Rollier , C. Bernard , S. Marsaudon , A. M. Bonnot , M. Faucher
20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), 2007, Unknown, Unknown Region. pp.878-+
Communication dans un congrès hal-01553035v1

Compact multilayer piezoresistive gauge for in-plane strain measurement in liquids

Jean-Baptiste Bureau , Bernard Legrand , Dominique Collard , Lionel Buchaillot
14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, Jun 2007, Lyon, France. pp.2267-2270, ⟨10.1109/SENSOR.2007.4300621⟩
Communication dans un congrès hal-00284392v1

Micro-machined actuators for the friction driven micro-motor

Bernard Legrand , L. Buchaillot , D. Collard
2006, pp.211-214
Communication dans un congrès hal-00128670v1

Micro et nanomécanique, MEMS et NEMS

Bernard Legrand , L. Buchaillot , D. Collard
Ecole CNRS : Nanosciences et Nanotechnologies, 2006, Autrans, France
Communication dans un congrès hal-00128667v1

Electrostatic actuators operating in liquid environment: suppression of pull-in instability and dynamic response

A.S. Rollier , M. Faucher , Bernard Legrand , D. Collard , L. Buchaillot
2006, pp.244-249
Communication dans un congrès hal-00128674v1

a total miscibility of two metallic elements with different crystallographic structures in the surface

Isabelle Braems , Fabienne Berthier , Robert Tétot , Bernard Legrand
European Conference on Surface Science ECOSS 24, Sep 2006, PARIS, France
Communication dans un congrès hal-00108262v1

Parallel-plate electrostatic actuators in liquids : displacement-voltage optimisation for microfluidic applications

Bernard Legrand , A.S. Rollier , L. Buchaillot , D. Collard
2006, pp.718-721
Communication dans un congrès hal-00128668v1

Ultra-low voltage MEMS resonator based on RSG-MOSFET

N. Abele , K. Segueni , K. Boucart , F. Casset , Bernard Legrand
2006, pp.882-885
Communication dans un congrès hal-00128669v1

Silicon nanotweezers with adjustable and controlable gap for the manipulation and characterization of DNA molecules

C. Yamahata , T. Takekawa , K. Ayano , M. Hosogi , M. Kumemura
2006, 4 pp
Communication dans un congrès hal-00147724v1
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ELECTROSTATIC ACTUATORS OPERATING IN LIQUID ENVIRONMENT : SUPPRESSION OF PULL-IN INSTABILITY AND DYNAMIC RESPONSE

A.-S. Rollier , Marc Faucher , Bernard Legrand , D. Collard , L. Buchaillot
DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 6 p
Communication dans un congrès hal-00189294v1

MEMS reliability : metrology set-up for investigation of fatigue causes

O. Millet , O. Blanrue , Bernard Legrand , D. Collard , L. Buchaillot
2005, pp.483-486
Communication dans un congrès hal-00125627v1

Reliability of non-released microstructures : failure analysis and innovative solution process

O. Millet , P. Muller , O. Blanrue , Bernard Legrand , D. Collard
2005, pp.840-842
Communication dans un congrès hal-00125662v1

Nanotechnologie, micro et nanosystèmes

Bernard Legrand
5ème Colloque International TELECOM'2005 & 4èmes Journées Franco-Magrhébines des Micro-ondes et leurs Applications, JFMMA, 2005, Rabat, Maroc
Communication dans un congrès hal-00126233v1

3D self-assembling of SU-8 microstructures on silicon by plasma induced compressive stress

Jean-Baptiste Bureau , Bernard Legrand , Dominique Collard , Lionel Buchaillot
13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Jun 2005, Seoul, South Korea. pp.19-22, ⟨10.1109/SENSOR.2005.1496348⟩
Communication dans un congrès hal-00128655v1
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Actionneurs électrostatiques complètement isolés : fabrication, fonctionnement et caractérisation en milieu liquide

Anne-Sophie Rollier , Bernard Legrand , Lionel Buchaillot , Dominique Collard
17e Congrès Français de Mécanique, 2005, Troyes, France
Communication dans un congrès hal-04203498v1

Tensile stress determination in silicon nitride membrane by AFM characterization

A.S. Rollier , Bernard Legrand , D. Deresmes , M. Lagouge , D. Collard
2005, pp.828-831
Communication dans un congrès hal-00125660v1

Microsystèmes, résonateurs électromécaniques : où cela nous mène-t-il ?

Vincent Agache , Emmanuel Quévy , Olivier Millet , Anne-Sophie Rollier , Roger Ringot
Ecole Nanosciences, 2005, Anglet, France
Communication dans un congrès hal-00126215v1
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Friction driven micromotors with both clockwise and counterclockwise rotations

Bernard Legrand , Lionel Buchaillot , Dominique Collard
17e Congrès Français de Mécanique, 2005, Troyes, France
Communication dans un congrès hal-04279573v1

The 2D feedback conveyance with ciliary actuator arrays

M. Ataka , Bernard Legrand , L. Buchaillot , D. Collard , H. Fujita
2005, pp.31-34
Communication dans un congrès hal-00125659v1

Characterization of vertical vibration of electrostatically actuated resonators using Atomic Force Microscope in noncontact mode

Vincent Agache , Bernard Legrand , K. Nakamura , H. Kawakatsu , Lionel Buchaillot
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005, Jun 2005, Seoul, South Korea. pp.2023-2026, ⟨10.1109/SENSOR.2005.1497499⟩
Communication dans un congrès hal-00125631v1

RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducers

Vincent Agache , Bernard Legrand , Dominique Collard , Hiroyuki Fujita , Lionel Buchaillot
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2005, 2005, Montreux, Switzerland. pp.26-31
Communication dans un congrès hal-00128656v1

Electrostatic actuators operating in liquid environment : position control without pull-in effect

A.S. Rollier , Bernard Legrand , D. Collard , L. Buchaillot
2005, pp.341-346
Communication dans un congrès hal-00128651v1

Stiction drive operation of micromotors : direct and reverse rotation control

Bernard Legrand , D. Collard , L. Buchaillot
2005, pp.57-60
Communication dans un congrès hal-00125661v1

1.1 GHz silicon blade nano-electromechanical resonator featuring 20 nm gap lateral transducers

Vincent Agache , Bernard Legrand , Dominique Collard , Hiroyuki Fujita , Lionel Buchaillot
18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005, Jan 2005, Miami Beach, United States. pp.121-124, ⟨10.1109/MEMSYS.2005.1453882⟩
Communication dans un congrès hal-00125628v1

Microsystèmes : principales applications et contexte national

L. Buchaillot , D. Collard , Bernard Legrand
Ecoles Nanosciences, 2005, Anglet, France
Communication dans un congrès hal-00126216v1

solubilité complète en surface entre deux métaux de structure cristllographique différente

Isabelle Braems , Fabienne Berthier , Jérome Creuse , Robert Tétot , Bernard Legrand
JSI 2005, 2005, LYON, France
Communication dans un congrès hal-00108263v1

Micromachined actuators for friction driven linear micro-motors

Bernard Legrand , L. Buchaillot , D. Collard
Proceedings of the Fifth International Symposium on Linear Drive for Industry Applications, LDIA 2005, 2005, Hyogo, Japan
Communication dans un congrès hal-00131348v1

Reliability of polycrystalline MEMS : prediction of the debugging-time

O. Millet , Pierre Bertrand , Bernard Legrand , D. Collard , L. Buchaillot
International Symposium for Testing and Failure Analysis, ISTFA 2004, 2004, Worcester, MA, United States
Communication dans un congrès hal-00141030v1

An original methodology to assess fatigue behavior in RF MEMS devices

O. Millet , Pierre Bertrand , Bernard Legrand , D. Collard , L. Buchaillot
European Microwave Week, 2004, Amsterdam, Netherlands
Communication dans un congrès hal-00141031v1

Predictive modelling of the fatigue phenomenon for polycristalline structural layers

O. Millet , Pierre Bertrand , Bernard Legrand , D. Collard , L. Buchaillot
2004, pp.145-148
Communication dans un congrès hal-00141028v1

TP de nanotechnologie : réalisation et observation de nanofils de silicium à l'aide de l'AFM

Bernard Legrand , H. Happy
8èmes Journées Pédagogiques du CNFM, 2004, Saint Malo, France
Communication dans un congrès hal-00133919v1

Characterization of individual bio-cells with thermally actuated probe arrays

Y.H. Cho , Dominique Collard , Lionel Buchaillot , Bernard Legrand , Beomjoon Kim
Nonimaging Optics and Efficient Illumination Systems, Aug 2004, Denver, CO, United States. pp.425-429
Communication dans un congrès hal-00141170v1

Thermally actuated probe arrays for manipulation and characterization of individual bio-cell

Beomjoon Kim , Dominique Collard , Matthieu Lagouge , F. Conseil , Bernard Legrand
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun 2003, Boston, MA, United States. pp.1255-1258, ⟨10.1109/SENSOR.2003.1217000⟩
Communication dans un congrès hal-00146460v1

Ultimate technology for micromachining of nanometric gap HF micromechanical resonators

E. Quevy , Bernard Legrand , D. Collard , L. Buchaillot
2003, pp.157-160
Communication dans un congrès hal-00146462v1

Modeling of failure mechanisms for optimized MEMS CAD : design, fabrication and characterization of in situ test benches

Olivier Millet , Vincent Agache , Bernard Legrand , Dominique Collard , Lionel Buchaillot
12th International Conference on Solid-State Sensors, Jun 2003, Boston, United States. pp.1578-1581, ⟨10.1109/SENSOR.2003.1217081⟩
Communication dans un congrès hal-00146440v1

Microelectromechanical coupled resonsator IF filters with variable bandwidth in thick-film epitaxial polysilicon technology

D. Galayko , A. Kaiser , Bernard Legrand , L. Buchaillot , D. Collard
2003, pp.F23-F26
Communication dans un congrès hal-00146406v1

Modeling and experimental validation of silicon nanotip oxidation : towards a nanoelectromechanical filter application

Vincent Agache , Patrice Bigotte , Bernard Legrand , Vincent Senez , Lionel Buchaillot
12th International Conference on Solid-State Sensors, Jun 2003, Boston, United States. pp.1287-1290, ⟨10.1109/SENSOR.2003.1217008⟩
Communication dans un congrès hal-00146438v1

Tapping-mode HF nanometric lateral gap resonators : experimental and theory

E. Quevy , Bernard Legrand , D. Collard , L. Buchaillot
2003, pp.879-882
Communication dans un congrès hal-00146456v1

Design of clamped-clamped beam resonator in thick-film epitaxial polysilicon technology

D. Galayko , A. Kaiser , Bernard Legrand , L. Buchaillot , C. Combi
2002, pp.447-450
Communication dans un congrès hal-00148736v1

High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustment

D. Galayko , A. Kaiser , Bernard Legrand , C. Combi , D. Collard
2002, pp.665-668
Communication dans un congrès hal-00148737v1
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Architecture level center frequency drift compensation method for micro-mechanical filters used in IF stages of wireless telecommunication receivers

Olivier Billoint , Dimitri Galayko , Bernard Legrand , Andreas Kaiser
Design, Test, Integration, and Packaging of MEMS/MOEMS, DTIP 2002, May 2002, Canne, France. pp.136-142
Communication dans un congrès hal-00148741v1

Study of adhesive forces on a silicon nanotip force microscope in contact mode

Vincent Agache , Bernard Legrand , Dominique Collard , Lionel Buchaillot
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, May 2002, Cannes, France. pp.601-612, ⟨10.1117/12.462861⟩
Communication dans un congrès hal-00148788v1

Conception de résonateurs micromécaniques pour les filtres IF dans la technologie de couches épaisses épitaxiées

D. Galayko , A. Kaiser , Bernard Legrand , L. Buchaillot , D. Collard
Colloque CAO des Circuits Intégrés et Systèmes, 2002, Paris, France
Communication dans un congrès hal-00148748v1

IF MEMS filters for mobile communication

E. Quevy , D. Galayko , Bernard Legrand , C. Renaux , C. Combi
2001, pp.733-736
Communication dans un congrès hal-00152458v1

Microsystem technology : trends and possible application for textile

D. Collard , L. Buchaillot , Bernard Legrand
Conference on Modern Textile Factory, HIGHTEX 2001, 2001, Lille, France
Communication dans un congrès hal-00152473v1

Microsysteme : un état des lieux, enjeux et perspectives

D. Collard , L. Buchaillot , Bernard Legrand
48èmes Journées Nationales de l'Union des Physiciens, 2000, Lille, France
Communication dans un congrès hal-00158538v1

Microsystème : enjeux et perspectives

D. Collard , L. Buchaillot , Bernard Legrand
Journée IMAPS : International Microelectronics and Packaging Society, 2000, Lille, France
Communication dans un congrès hal-00158539v1
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