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Highly microcrystalline phosphorous‐doped Si:H very thin films deposited by RF‐PECVDphysica status solidi (a), 2022, ⟨10.1002/pssa.202100876⟩
Article dans une revue
hal-03657259v1
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Potential of hydrogenated microcrystalline silicon-germanium for low thermal budget near infrared sensorsSPIE Optics + Optoelectronics 2023, Jan 2023, San Fransisco, United States. pp.1241507, ⟨10.1117/12.2647554⟩
Communication dans un congrès
hal-04035697v1
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Highly Microcrystalline Phosphorous-doped Si:H Very Thin Films Deposited by HF-PECVDEMRS 2021 Fall meeting, European Materials Research Society, Sep 2021, online, France
Communication dans un congrès
hal-03366641v1
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