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Design and fabrication of novel discrete actuators for microrobotic tasks
Hussein Hussein
,
Ismaïl Bouhadda
,
Abdenbi Mohand-Ousaid
,
Gilles Bourbon
,
Patrice Le Moal
,
et al.
Article dans une revue
lirmm-02006920v1
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Mechanical Stop Mechanism For Overcoming MEMS Fabrication Tolerances
Hussein Hussein
,
Gilles Bourbon
,
Patrice Le Moal
,
Yassine Haddab
,
Philippe Lutz
Article dans une revue
lirmm-02006512v1
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Mass sensor using mode localization in two weakly coupled MEMS cantilevers with different lengths: Design and experimental model validation
Toky Harrison Rabenimanana
,
Vincent Walter
,
Najib Kacem
,
Patrice Le Moal
,
Gilles Bourbon
,
et al.
Sensors and Actuators A: Physical , 2019, 295, pp.643 - 652
Article dans une revue
hal-02300032v1
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Procédé et dispositif pour déplacer un élément à entraîner utilisant un élément actionneur formé par gravure dans un matériau semi - conducteur (interfaçage avec une précontrainte axiale)
Patrice Minotti
,
Gilles Bourbon
,
Patrice Le Moal
,
Eric Joseph
France, N° de brevet: 0502700. 2006
Brevet
hal-00594056v1
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Functionalization of electrostatic nonlinearities to overcome mode aliasing limitations in the sensitivity of mass microsensors based on energy localization
Toky Harrison Rabenimanana
,
Vincent Walter
,
Najib Kacem
,
Patrice Le Moal
,
Gilles Bourbon
,
et al.
Applied Physics Letters, 2020, 117 (3), pp.033502 (6)
Article dans une revue
hal-02993933v1
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Generalized MEMS Lot Monitoring Using Fully Integrated Material and Structure Mechanical Analysis
Patrice Minotti
,
Gilles Bourbon
,
Eric Joseph
,
Patrice Le Moal
Sensors and Actuators, 2002, pp 1-11
Article dans une revue
hal-00591115v1
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On-Chip Investigation of Torque/Speed Characteristics on New High-Torque Micrometer Size Silicon-Based Electrostatic Actuators
Patrice Le Moal
,
Patrice Minotti
,
Gilles Bourbon
,
Eric Joseph
Jpn. J. of Appl. Phys, 2001, 40 (6B), pp L596-L599
Article dans une revue
hal-00591118v1
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Toward Standard Method for MEMS Material Measurement through On-Chip Electrostatic Probing of Micrometer Size Polysilicon Tensile Specimens
Patrice Minotti
,
Patrice Le Moal
,
Eric Joseph
,
Gilles Bourbon
Japanese Journal of Applied Physics, part 2 : Letters, 2001, pp. 120-122
Article dans une revue
hal-00591108v1
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Direct-Drive Electrostatic Micromotors Using Flexible Polysilicon Rotors
Patrice Minotti
,
Philippe Langlet
,
Gilles Bourbon
,
T. Masuzawa
,
Patrice Le Moal
Journal of Intelligent Material Systems and Structures, 1998, 9 (10), pp 829-836
Article dans une revue
hal-00591112v1
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CMUT sensors based on circular membranes array for SHM applications
Pauline Butaud
,
Gilles Bourbon
,
Patrice Le Moal
,
Eric Joseph
,
Benoît Verdin
,
et al.
Smart Structures + Nondestructive Evaluation, Mar 2019, Denver, United States
Communication dans un congrès
hal-02370490v1
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Investigation of Output Mechanical Power Limits on High-Torque Electrostatic Actuators Using High Frequency Complementary Metal Oxide Semiconductor (CMOS) Camera Combined with Image Processing Software
Vincent Walter
,
Patrice Le Moal
,
Patrice Minotti
,
Eric Joseph
,
Gilles Bourbon
Japanese Journal of Applied Physics, part 2 : Letters, 2002, 41 (6B), pp L678-L681
Article dans une revue
hal-00591117v1
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Anodic bonding using SOI wafer for fabrication of capacitive micromachined ultrasoonic transducers
Mohamed Bellaredj
,
Gilles Bourbon
,
Vincent Walter
,
Patrice Le Moal
,
Marc Berthillier
Article dans une revue
hal-01073836v1
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A non-linear electromechanical model for ferroelectric materials. Application to soft-PZT thick films screen-printed on alumina substrate
Vincent Walter
,
Patrick Delobelle
,
Patrice Le Moal
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2003, 50(5), pp. 471-480
Article dans une revue
hal-00014089v1
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Analysis of pressure fields generated by large CMUTs arrays
Marc Berthillier
,
Patrice Le Moal
,
Joseph Lardies
International Workshop on Micromachined Ultrasonic Transducers, Jun 2012, Tours, France
Communication dans un congrès
hal-02300586v1
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Procédé et dispositif pour déplacer un élément à entraîner utilisant un élément actionneur formé par gravure dans un matériau semi - conducteur (actionneur monomodule)
Patrice Minotti
,
Gilles Bourbon
,
Patrice Le Moal
,
Eric Joseph
France, N° de brevet: 0502699. 2006
Brevet
hal-00594059v1
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Towards a better understanding of the CMUTs potential for SHMapplications
Pauline Butaud
,
Patrice Le Moal
,
Gilles Bourbon
,
Vincent Placet
,
Emmanuel Ramasso
,
et al.
Sensors and Actuators A: Physical , 2020, 313, pp.112212 (11)
Article dans une revue
hal-03007448v1
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Comparison of various models to compute the vibro-acoustic response of large CMUT arrays
Marc Berthillier
,
Patrice Le Moal
,
Joseph Lardies
Acoustics 2012, Apr 2012, Nantes, France
Communication dans un congrès
hal-00811270v1
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Dispositif d'horloge utilisant la technologie MEMS
Patrice Minotti
,
Gilles Bourbon
,
Patrice Le Moal
,
Eric Joseph
,
Cyrille Hibert
France, N° de brevet: 0302697. 2004
Brevet
hal-00591129v1
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Mode localization in two coupled nearly identical MEMS cantilevers for mass sensing
Toky Harrison Rabenimanana
,
Vincent Walter
,
Najib Kacem
,
Patrice Le Moal
,
Gilles Bourbon
,
et al.
International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, Aug 2019, Anaheim, United States
Communication dans un congrès
hal-02370591v1
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On the design of a preshaped curved beam bistable mechanism
Hussein Hussein
,
Patrice Le Moal
,
Rafic Younes
,
Gilles Bourbon
,
Yassine Haddab
,
et al.
Article dans une revue
lirmm-02006749v1
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Compact Digital Microrobot Based on Multistable Modules
Abdenbi Mohand Ousaid
,
Ismaïl Bouhadda
,
Gilles Bourbon
,
Patrice Le Moal
,
Yassine Haddab
,
et al.
Article dans une revue
hal-03427007v1
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Dynamic characterization of an electrothermal actuator devoted to discrete MEMS positioning
Ismail Bouhadda
,
Abdenbi Mohand Ousaid
,
Patrice Le Moal
,
Gilles Bourbon
,
Philippe Lutz
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, May 2017, Bordeaux, France
Communication dans un congrès
hal-02868204v1
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Repeatability and Reproducibility Analysis of a Multistable Module Devoted to Digital Microrobotics
Ismail Bouhadda
,
Abdenbi Mohand-Ousaid
,
Gilles Bourbon
,
Patrice Le Moal
,
Philippe Lutz
,
et al.
Communication dans un congrès
lirmm-02006666v1
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Acoustic emission sensing using MEMS for structural health monitoring : demonstration of a newly designed Capacitive Micro machined Ultrasonic Transducer
Redha Boubenia
,
Gilles Bourbon
,
Patrice Le Moal
,
Eric Joseph
,
Emmanuel Ramasso
,
et al.
12th International Workshop on Structural Health Monitoring, Sep 2019, Stanford, California, United States
Communication dans un congrès
hal-02370476v1
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Critical steps in the anodic bonding process for fabrication of CMUTs
Vincent Walter
,
Gilles Bourbon
,
Mohamed Bellaredj
,
Marc Berthillier
,
Patrice Le Moal
International Workshop on Micromachined Ultrasonic Transducers, Jun 2012, Tours, France
Communication dans un congrès
hal-02300588v1
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Method and tool for CMUT Network simulation
Marc Berthillier
,
Patrice Le Moal
,
Joseph Lardies
International Workshop on Micromachined Ultrasonic Transducers, Jun 2011, Salerno, Italy
Communication dans un congrès
hal-02300596v1
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Dispositif d'entraînement, notamment pour mécanisme horloger
Patrice Minotti
,
Patrice Le Moal
,
Gilles Bourbon
,
Eric Joseph
France, N° de brevet: 0409333. 2006
Brevet
hal-00594055v1
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TOWARDS INTEGRATED HEALTH MONITORING OF BIO-BASED COMPOSITE STRUCTURES: INFLUENCE OF ACOUSTIC EMISSION SENSOR EMBEDMENT ON MATERIAL INTEGRITY
Guillem Seychal
,
Xavier Gabrion
,
Emmanuel Ramasso
,
Gilles Bourbon
,
Patrice Le Moal
,
et al.
1, pp.839-847, 2022, 978-2-9701614-0-0
Proceedings/Recueil des communications
hal-03956072v1
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