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	Anisotropic and low damage III-V/Ge heterostructure etching for multijunction solar cell fabrication with passivated sidewalls Mathieu de Lafontaine , Erwine Pargon , Camille Petit-Etienne , Sylvain David , Jean-Paul Barnes Micro and Nano Engineering, 2021, pp.100083. ⟨10.1016/j.mne.2021.100083⟩ Article dans une revue hal-03171055v1
	Influence of plasma process on III-V/Ge multijunction solar cell via etching Mathieu de Lafontaine , Erwine Pargon , Camille Petit-Etienne , Guillaume Gay , Abdelatif Jaouad Solar Energy Materials and Solar Cells, 2019, 195, pp.49-54. ⟨10.1016/j.solmat.2019.01.048⟩ Article dans une revue hal-02064455v1

	High Aspect Ratio and Low Damage III-V/Ge Heterostructure Via Etching M. De Lafontaine , G. Gay , E. Pargon , C. Petit-Etienne , N. Rochat Plasma Etch and Strip in Microelectronics (PESM), 11th International Workshop, May 2019, Grenoble, France Communication dans un congrès hal-02324782v1
	Plasma processes for High Efficiency Multi-Junction Solar Cells Fabrication M. Darnon , M. Volatier , P. Albert , M. De Lafontaine , P. St-Pierre 66th International AVS Symposium & Topical Conferences, Oct 2019, Columbus, Ohio, United States Communication dans un congrès hal-02336676v1
	III-V/Ge Heterostructure Etching for Through Cell Via Contact Multijunction Solar Cellc M. de Lafontaine , G. Gay , C. Petit-Etienne , E. Pargon , M. Darnon 65th International AVS Symposium & Topical Conferences, Oct 2018, Long Beach, California, USA, United States Communication dans un congrès hal-01959003v1
	III-V/Ge Heterostructure Etching for Through Cell Via Contact Multijunction Solar Cell M. De Lafontaine , G. Gay , C. Petit-Etienne , E. Pargon , M. Darnon 65th International AVS Symposium & Topical Conferences, Oct 2018, Long Beach, United States Communication dans un congrès hal-02324762v1

Maxime Darnon