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Audrey Soum-Glaude
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Mechanical Study of High Resistance Silicon Carbide Based Multi-Nano-Layers Grown by Multifrequency PACVDPlasma Processes and Polymers, 2009, Eleventh International Conference on Plasma Surface Engineering, 6 (S1), pp.S917-S922. ⟨10.1002/ppap.200932305⟩
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hal-01426684v1
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